JPH0737699A - Particle accelerator - Google Patents

Abstract

(57) [Summary] [Objective] To provide a particle accelerator capable of preventing interference between a beam line and an incident path and installing a large number of beam lines even if it is small. [Arrangement] An incident path 4 for injecting charged particles into a storage ring 6 and a beam line 10 for extracting radiated light from the storage ring are installed in the same plane, and they are crossed to be in communication with each other. Link. Shut-off valves 21, 22, 22, 22 for shutting off the incident path and the beam line in a vacuum-maintainable manner are provided around the connecting portions.
Are provided and the shut-off valves are selectively opened and closed to selectively use the connecting portion as a part of the incident path or a part of the beam line.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a particle accelerator for SOR light utilization.

[0002]

2. Description of the Related Art In recent years, SOR light (synchrotron radiation light) emitted from a particle accelerator such as a synchrotron is taken out and used as a light source, for example, in the manufacture of VLSI, diagnosis in the medical field, molecular analysis, structural analysis, etc. There is momentum to use it in various fields, and facilities for it are being developed.

FIG. 3 shows an outline of a small synchrotron for utilizing SOR light. In this synchrotron, electrons generated by an electron generator 1 such as an electron gun are accelerated by a linear accelerator (linac) 2 to near the speed of light, deflected by a deflection electromagnet 3, and accumulated by an incident path 4 through an inflector 5. It is incident on the ring 6. The electrons that have entered the storage ring 6 are converged by the converging electromagnet 8 while being given energy by the high-frequency acceleration cavity 7, are deflected by the deflection electromagnet 9, and continue to orbit the storage ring 6. Then, when deflected by the deflecting electromagnet 9, SOR light is emitted in the tangential direction thereof, and the SOR light is emitted to, for example, the exposure device 11 via the beam line 10 which is a light extraction line for use.

[0004]

By the way, since the SOR light is emitted in the tangential direction of the orbit of the electron, the SOR light shown in FIG.
By connecting a large number of beam lines 10 to the positions of the respective deflection magnets 9 as shown by the chain line, a large amount of SOR light can be simultaneously extracted through these beam lines 10, and as many beam lines 10 as possible are installed. Is being considered. However, in the case of the small synchrotron as shown in FIG. 3, it is difficult to secure a space for installing a large number of beam lines 10 because other devices such as the linear accelerator 2 and the incident path 4 interfere with each other. In particular, the beam line cannot be installed in the deflector on the upstream side of the inflector 5 because it interferes with the incident path 4. Therefore, in the conventional compact synchrotron, the number of beam lines that can be installed is naturally limited, and it is impossible to install so many beam lines 10.

Conventionally, all of the storage ring 6, the linear accelerator 2, the incident path 4, the beam line 10, etc. are usually installed in the same horizontal plane. For example, the incident path 4 is inclined with respect to the horizontal plane. It is also considered that the incident path 4 and the beam line 10 are spaced apart from each other in the up-and-down direction by disposing them so as to avoid their interference, but in such a three-dimensional manner (three-dimensional). The configuration is not preferable because the required space in the vertical direction is enlarged and the configuration of each part is complicated.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a particle accelerator capable of avoiding interference between an incident path and a beam line and installing a large number of beam lines even if it is small. And

[0007]

SUMMARY OF THE INVENTION According to the present invention, charged particles that have entered a storage ring through an incident path are circulated in the storage ring, and radiant light emitted in a tangential direction at a deflection portion of the circular orbit is beamlined. A particle accelerator adapted to be taken out through, wherein the incident path and the beam line are installed in the same plane and they are crossed to be connected to each other in a communicating state, and around the connecting portion, A shutoff valve for shutting off the incident path and the beam line so that a vacuum can be maintained is provided respectively.

[0008]

In the present invention, noting that the incident path and the beam line in the particle accelerator are not used at the same time,
The incident path and the beam line are crossed to be connected to each other in a communicating state, and by selectively opening and closing the shut-off valve provided around the connecting section, the connecting section is formed as part of the incident path or part of the beam line It is designed to be used selectively. That is, when the charged particles are incident on the storage ring, the shutoff valve installed in the beamline is opened by opening the shutoff valve installed in the incident path so as to open the incident path and close the beamline. close. Further, when the emitted light is taken out from the storage ring, the shutoff valve installed in the beamline is opened and the shutoff valve installed in the incident path is closed so that the beamline is opened and the incident path is closed. As a result, both the injection of charged particles and the extraction of emitted light can be performed without any problem, and both the incident path and the beam line can be set to the desired degree of vacuum by closing the shutoff valve when not in use. Can be maintained.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing the outline of a small synchrotron according to an embodiment of the present invention. Since this synchrotron is based on the conventional one shown in FIG. The same reference numerals are attached.

In the synchrotron of the present embodiment, electrons are made incident on the storage ring 6 through the incident path 4 in the same manner as the conventional one, and when the electrons circulating around the storage ring 6 are deflected by the deflection electromagnet 9, they are tangential to each other. The emitted SOR light is extracted through the beam line 10. Further, in this embodiment, a plurality of beam lines 10 are installed at the positions of the deflecting portions, that is, the deflecting electromagnets 9 in order to extract a large number of SOR lights at the same time. In this case, as described above, the beam line 10 could not be installed in the conventional deflector on the upstream side of the inflector 5 because it interferes with the incident path 4, but this embodiment does not. In the example, the incident path 4 and the beam line 10 are crossed and connected to each other so that the beam line 10 can be installed at that position.

That is, in the synchrotron of the present embodiment, as shown in FIG. 1, a plurality of (three in the present embodiment) beam lines 10 are connected to the deflector on the upstream side of the inflector 5 and they are connected to each other. Each beam line 10 is made to intersect with the incident path 4 so that they are connected to each other (in FIG. 1, the connection state between one beam line 10 and the incident path 4 is illustrated. The connection state of the other two beam lines 10 and 10 is omitted). And beam line 1
As shown in FIG.
Two shut-off valves, that is, shut-off valves 21 and 21 for shutting off the incident path 4 so that the vacuum can be held, and shut-off valves 22 and 22 for shutting off the beam line 10 so that the vacuum can be held, are respectively installed. .

In the present embodiment, the vacuum chamber 23, which is a part of the incident path 4, and the vacuum chamber 24, which is a part of the beam line 10, are crossed and integrated, and the four shutoff valves 21, A vacuum chamber unit 25 in which 21, 22, 22 are incorporated in advance is used for the connecting portion. In this case, the intersection angle between the vacuum chamber 23 and the vacuum chamber 24 is set so as to correspond to the intersection angle between the incident path 4 and the beam line 10.

In the synchrotron having the above-mentioned structure, whether the connecting portion is used as a part of the incident path 4 by selectively opening / closing the shutoff valves 21, 21, 22, 22.
Alternatively, it can be used as a part of the beam line 10, whereby the incidence of electrons and the extraction of SOR light can be performed without any trouble.

That is, in this type of synchrotron, the injection of electrons into the storage ring 6 and the extraction of SOR light from the storage ring 6 are not performed at the same time, and normally, they are injected in a very short time of about 1 minute. It is usual that the operation pattern is such that the SOR light is stored for several hours after the incidence and the SOR light is taken out during the storage as needed.

Therefore, in the synchrotron described above, the shutoff valves 22 and 22 are opened to open the beam line 10 and the shutoff valves 21 and 21 are closed to close the incident path 4 for most of the operation time. The SOR light can be taken out through the beam line 10 without any trouble, and in this state, the high vacuum degree required for the beam line 10 can be maintained. Then, the shutoff valves 22 and 22 are closed and the beam line 10 only when the injection is performed.
By closing the valve and opening the shut-off valves 21 and 21 to open the incident path 4, it is possible to inject electrons through the incident path 4 without any hindrance, and to quickly return to the original state after the incident, the subsequent SOR Light can be taken out without any trouble.

The degree of vacuum of the incident path 4 depends on the beam line 1.
Since it is set to 0 or lower than the vacuum degree of the storage ring 6, the vacuum degree at the connecting portion is temporarily lowered by temporarily opening the shutoff valves 21 and 21 at the time of incidence. Since the internal volume of the connecting portion is not so large, the shut-off valve 2 is opened before the shut-off valves 21 and 21 are opened.
The vacuum degree of the entire beam line 10 is not significantly lowered by closing the lines 2 and 22, and after the incidence is completed, the vacuum is also pulled from the connecting portion through the beam line 10 so that the high vacuum degree is quickly restored. Can be done.

As described above, the beam line 10 and the incident path 4 are crossed and connected, and the shut-off valves 21, 21, 22, 22 provided around the connecting portion are selectively opened and closed to be connected. Since the portion is configured to be selectively used as a part of the incident path 4 or a part of the beam line 10, it is difficult to install the inflector 5 because it interferes with the incident path 4 in the related art. It is possible to install the beam line 10 also on the deflecting portion on the upstream side of the above, and therefore it is possible to install a large number of beam lines 10 even in a small synchrotron. Of course, as in the case of avoiding interference with the incident path 4 by inclining the incident path 4 with respect to the horizontal, the installation space in the vertical direction may be enlarged or the entire apparatus may be complicated. Absent.

[0018]

As described above, in the particle accelerator of the present invention, the beam line and the incident path are installed in the same plane and they are crossed to be connected to each other in a communicating state. Since the shutoff valve is provided to shut off the beam line and the incident path so that the vacuum can be maintained, the connecting part can be selectively opened or closed by selectively opening and closing the shutoff valve. When used for the above, not only the charged particles can be made incident and the emitted light can be taken out without any trouble, but also the high degree of vacuum required for the beam line can be maintained. Therefore, it is possible to install a beam line that was difficult to install because it interferes with the incident path in the past, and as a result, even if it is a small particle accelerator, it is possible to install many beam lines. Is possible.

[Brief description of drawings]

FIG. 1 is a plan view showing an outline of a particle accelerator that is an embodiment of the present invention.

FIG. 2 is a detailed view of a main part of the particle accelerator.

FIG. 3 is a plan view showing the outline of a small synchrotron.

[Explanation of symbols]

 4 incident path 6 storage ring 10 beam lines 21 and 22 shutoff valve 23 and 24 vacuum chamber 25 vacuum chamber unit.

Claims (1)

[Claims] 1. A particle accelerator in which charged particles that have entered a storage ring through an incident path are circulated within the storage ring, and radiated light tangentially emitted at a deflecting portion of the orbit is extracted through a beam line. There, the incident path and the beam line are installed in the same plane, and they are crossed to be connected to each other in communication with each other, and the incident path and the beam line are vacuumed around their connecting portions. A particle accelerator, characterized in that each of the particle accelerators is provided with a shutoff valve for shutting off in a holdable manner.