JPH0748074B2 - Probe device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a mechanism for combining a loader section and a probing section, which are unitized into independent mechanisms (units), to form one probe device.

[Problems to be Solved by Conventional Techniques and Inventions] Currently, devices such as a prober and a handler, which are semiconductor chip inspection devices, include a device in which a transport unit, a measurement unit, an operation unit, and the like of a device under test are integrated. It is popular. However, the measuring unit of these devices requires a dedicated model according to the type of the device under test, but the transport unit, operating unit, etc. are often general-purpose for various devices under test. Separate and unitize, for example, install a plurality of measuring units only according to the DUT, provide one transport unit and one operating unit, and combine each unitized unit as needed to use as one device Therefore, it is desired to effectively use the general-purpose unit and reduce the space and cost, and the unitization of the device is being realized in response to such a request.

By the way, when combining such units, the problem is the alignment between the units, and particularly in the case of a prober loader and a probing stage, for example, it is necessary to perform accurate positioning in the XYZ directions. However, for example, the displacement in the Z direction requires a great deal of labor and time, because the supporting legs of either the loader or the probing portion must be adjusted with screws or the like.

Further, in a mechanism that positions and connects the loader unit and the probing unit by mechanical coupling, vibration of the transport mechanism in the loader unit may be transmitted to the probing unit and affect the measurement.

The present invention has been made in view of such conventional difficulties,
It is an object of the present invention to provide a probe device provided with a mechanism capable of easily positioning the units with respect to each other when two or more units are combined and used as one probe device.

[Means for Solving the Problems] In order to achieve such an object, the probe apparatus of the present invention is a probe apparatus including a probing section and a loader section each having an independent mechanism, and the probing section has a reference level. And a drive means for moving the loader portion in a vertical direction with respect to the reference level, and a detection means for detecting the means for holding the reference level. To do.

[Embodiment] An embodiment in which the mechanism of the present invention is applied to a wafer prober will be described below with reference to the drawings.

The prober 1 shown in FIG. 1 is an apparatus configured by combining a loader unit 2 and a probing unit 3 in which wafers are transferred from the loader unit 2, respectively, and the loader unit 2 is a device under test. A plurality of wafers 4
A wafer carrier 5 accommodating therein is set, and is provided with a transfer means for taking out the wafer 4 from the wafer carrier 5 and transferring it to a load position, for example, a handling arm 6 or a sub chuck (not shown).

On the other hand, the probing unit 3 includes a chuck 7 for mounting the wafer 4 and an XY stage 8 for driving the chuck 7 in the XY directions, and further alignment for aligning the wafer on the chuck 7 with the XY axis of the XY stage 8. A section 9 is provided.

Next, a positioning mechanism for the loader unit 2 and the probing unit 3, which are the units of the prober 1 configured as described above, will be described.

First, for positioning in the X and Y directions, the loader unit 2
After aligning the positioning marks 10 and 11 provided on each chassis of the probing unit 3 with each other, they are fixed by a fixing means (not shown). The marks 10 and 11 may be like reference lines, or may be recessed and projected to engage with each other for positioning and locking.

Next, as a vertical (Z) direction positioning mechanism, as shown as an embodiment in FIG. 2, the probing portion 3 has a stopper 12 as a means for holding the reference level facing the side surface 3a to which the loader portion 2 is connected. It is provided. On the other hand, the loader section 2 is provided with a micro switch 13 or a sensor as a detection means for detecting the reference level of the probing section 3 on the side surface 2a connected to the probing section 3 and a movable table on which main equipment of the loader section 2 is mounted. Drive means 15 for moving the 14 up and down is provided. As the driving means 15, for example, one using hydraulic pressure or pneumatic pressure, or one using electric control can be used. The detection means such as the micro switch 13 is installed at a predetermined position on the movable base 14, moves integrally with the movable base 14, and is operated by the stopper 12 of the probing unit 3.

In such a configuration, positioning in the Z direction is performed by the loader unit 2
After connecting the to the probing section 3, the drive source of the drive means 15
16 is turned on to move the movable table 14 upward or downward.
If the micro switch 13 comes into contact with the stopper 12 of the probing unit 3 during this movement, the micro switch 13 is turned on (or
OFF), the drive source 16 is turned off, and the movement of the movable base 14 is stopped. As a result, the movable base 14 is held at the reference level determined by the stopper 12 and positioned in the Z direction.

In the present embodiment, the stopper 12 as the means for holding the reference level and the microswitch 13 as the means for detecting the stopper 12 are shown, but these means are not limited to the stopper 12 and the microswitch 13, and may be, for example, a light source and a photoelectric switch. Various modes such as a sensor such as an element or a stopper and a lock that mechanically engages the stopper are applied. However, since the micro switch and the sensor also act as the switch of the driving means 15, the positioning can be automated, which is more preferable. Needless to say, the means for holding the reference level and the detecting means can be used not only in the Z direction alignment but also in the X direction or the Y direction.

Further, in the embodiments, the device composed of two units has been described, but the present invention can be applied to all devices used in combination with other units such as a handler,
Moreover, in the case of not only a device composed of two units but also a device composed of three or more units, at least one unit is provided with means for holding the reference level, and another unit is moved so as to match the reference level. Positioning between the units can be easily performed as in the embodiment.

[Effects of the Invention] As is clear from the above description, according to the present invention, when unitized devices are used in combination, each unit can be extremely easily positioned with required accuracy. .

[Brief description of drawings]

FIG. 1 is a diagram showing a probe device to which the present invention is applied, and FIG. 2 is a diagram showing an embodiment of a positioning mechanism according to the present invention. 1 ... Probe device (device) 2 ... Loader unit (unit) 3 ... Prober unit (unit) 12 ... Stopper (means for holding the reference level) 13 ... Micro switch (detection means) 14 ... Movable platform (Part of the unit) 15 …… Drive means

Claims (3)

[Claims] 1. A probe apparatus comprising a probing section and a loader section each having an independent mechanism, wherein the probing section has means for holding a reference level, and the loader section has the loader with respect to the reference level. A probe device comprising: a driving unit that vertically moves the unit and a detection unit that detects the unit that holds the reference level. 2. The probe device according to claim 1, wherein the drive means is a mechanism for vertically driving the loader section by hydraulic pressure or pneumatic pressure. 3. The probe device according to claim 1, wherein the drive means is switched by a detection signal from the detection means.