JPH075526Y2 - 露光用マスク - Google Patents

露光用マスク

Info

Publication number
JPH075526Y2
JPH075526Y2 JP1989092485U JP9248589U JPH075526Y2 JP H075526 Y2 JPH075526 Y2 JP H075526Y2 JP 1989092485 U JP1989092485 U JP 1989092485U JP 9248589 U JP9248589 U JP 9248589U JP H075526 Y2 JPH075526 Y2 JP H075526Y2
Authority
JP
Japan
Prior art keywords
exposure
mask
pattern
groove
exposure mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989092485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331736U (de
Inventor
和廣 石神
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP1989092485U priority Critical patent/JPH075526Y2/ja
Publication of JPH0331736U publication Critical patent/JPH0331736U/ja
Application granted granted Critical
Publication of JPH075526Y2 publication Critical patent/JPH075526Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
JP1989092485U 1989-08-08 1989-08-08 露光用マスク Expired - Lifetime JPH075526Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989092485U JPH075526Y2 (ja) 1989-08-08 1989-08-08 露光用マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989092485U JPH075526Y2 (ja) 1989-08-08 1989-08-08 露光用マスク

Publications (2)

Publication Number Publication Date
JPH0331736U JPH0331736U (de) 1991-03-27
JPH075526Y2 true JPH075526Y2 (ja) 1995-02-08

Family

ID=31641908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989092485U Expired - Lifetime JPH075526Y2 (ja) 1989-08-08 1989-08-08 露光用マスク

Country Status (1)

Country Link
JP (1) JPH075526Y2 (de)

Also Published As

Publication number Publication date
JPH0331736U (de) 1991-03-27

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