JPH0790554A - Film forming equipment - Google Patents

Abstract

(57) [Summary] [Objective] To provide a technique capable of efficiently obtaining a high-performance magnetic recording medium. A film forming apparatus for forming a metal film by evaporating a metal material in a container and depositing the metal material on a support,
A film forming apparatus comprising: a plate body floated on the molten metal material; and a supply means for supplying the metal material onto the plate body.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus, for example.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. It is well known that a metal thin film type that is not used has been proposed.

That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a wet plating means such as electroless plating, or a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording. In particular, means for forming a magnetic film by vapor deposition means is said to be preferable because the film formation rate is faster than that by sputtering.

A magnetic recording medium manufacturing apparatus using such a vapor deposition means is generally constructed as shown in FIG. In FIG. 5, 21 is a cooling can, 22 is a polyethylene terephthalate (PET) film supply side roll, 23 is a PET film winding side roll, 24 is a shielding plate, 25 is a crucible, 26 is a magnetic alloy, and 27 is Electron gun, 2
Reference numeral 8 is a vacuum container, and 29 is a supply device. That is, after the vacuum container 28 is evacuated to a predetermined vacuum degree, the electron gun 27 is operated to evaporate the magnetic alloy 26 in the crucible 25 and deposit (evaporate) the magnetic alloy 26 on the PET film. Thus, the magnetic recording medium is manufactured.

By the way, in order to continuously deposit a magnetic material on a long PET film in such a manufacturing apparatus, it is necessary to replenish the magnetic metal lost by evaporation. Therefore, the supply device 29 supplies the crucible 25 with the lump 30 of the magnetic alloy. However, in the past, since the lump 30 of the magnetic alloy momentarily drops into the crucible 25, the molten metal temperature is momentarily lowered, the vapor deposition rate is momentarily lowered, and bumping occurs. Was there. Furthermore, when the lump 30 of the magnetic alloy fell into the molten metal, liquid splash occurred and waves were generated in the molten metal. Therefore, there is a problem that a defect is caused in the magnetic film deposited on the PET film, and the production efficiency of the high-performance magnetic recording medium is significantly reduced.

[0006]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a technique capable of efficiently obtaining a high performance magnetic recording medium. An object of the present invention is a film forming apparatus that forms a metal film by evaporating a metal material in a container and depositing it on a support, and a plate body floated on a melt of the metal material and the plate. And a supply means for supplying a metallic material onto the body.

The plate body is preferably made of ceramics from the viewpoint of heat resistance, for example, 200
Ceramics having a melting point of 0 ° C. or higher and low specific gravity,
For example, Cr ₂ O ₃ , Al ₂ O ₃ , Si ₃ N ₄ , MgO,
Those composed of BeO, BN, B ₄ C ₃ , SiC or the like are preferable. Further, the metal material to be supplied is preferably formed in a plate shape, and particularly, has a thickness of 0.5.
It is preferably from mm to 5 mm.

Further, it is preferable to include a regulation means for regulating the plate body at a predetermined position (a position other than the evaporation portion, for example, a position apart from the evaporation portion). Further, according to the present invention, when the magnetic material is supplied, the magnetic material once rides on the plate body, is warmed on the plate body, and slowly enters the molten metal, so that there is no inconvenience that the molten metal temperature sharply decreases. Therefore, the vapor deposition rate does not decrease significantly.
Further, unlike the conventional case, the liquid splash does not occur and the molten metal does not wavy. Therefore, the liquid surface of the molten metal is stable, the evaporation of the magnetic material is stable, defects are unlikely to be caused in the magnetic film deposited on the support, and a high-performance magnetic recording medium can be obtained with high production efficiency. A magnetic recording medium can be obtained at low cost.

An example will be described below.

[0010]

1 to 4 are views showing an embodiment of a film forming apparatus according to the present invention, FIG. 1 is a schematic view of the whole manufacturing apparatus of a magnetic recording medium, and FIG. 2 is a perspective view of a main part. FIG. 3 is a plan view of the main part,
FIG. 4 is a schematic sectional view of a main part. In each figure, 1 is a cooling can, 2 is a non-magnetic support such as a PET film, 3a is a supply side roll of the support 2, 3b is a winding side roll of the support 2, 4 is a shielding plate, 5 is Co. -Ni magnetic alloy, 6 is an electron gun, 7 is a vacuum container, and 8 is a crucible. Note that the configurations of these portions are already known, and therefore detailed description thereof will be omitted.

Reference numeral 9 is a pellet of the Co--Ni magnetic alloy supplied to the crucible 8, and is formed in a disk shape.
Further, in order to easily warm up on the plate 10 described later, for example, 0.
It is formed to a thin thickness of 5 mm to 5 mm. 1
Reference numeral 0 denotes a plate member floated on the molten metal of the magnetic alloy 5, which is made of a ceramic material having a high melting point and a low specific gravity, and its shape is formed into a disc shape. Then, when the pellets 9 are supplied and placed on the plate 10 floated on the molten metal, the plate 1
No. 0 is unbalanced, and the pellet 9 sinks into the molten metal. That is, the pellet 9 is once placed on the plate 10 to warm the pellet 9, and then the pellet 9 is put into the molten metal. Even if the pellets 9 do not immediately sink into the molten metal, the weight of the pellets 9 causes the plate 10 to sink and thin pellets 9 are supplied into the molten metal. As described above, since the pellet 9 does not drop suddenly into the molten metal, the temperature of the molten metal does not drop sharply and bumping does not occur. Further, since the pellet 9 once rides on the plate 10 and then sinks, compared to the case where the pellet 9 directly falls into the molten metal, liquid splash does not occur and the molten metal does not have a wave and the liquid surface of the evaporation portion The condition is stable.

Reference numeral 11 is a regulating device for regulating the plate body 10 to a predetermined position in the crucible 8 and is made of a ceramic material having a high melting point. Then, as shown in FIGS. 2 and 3, the regulating device 11 is disposed on the pellet feeding device 12 side of the crucible 8 and holds the plate body 10 floating above the molten metal,
It does not move from the position where the pellets 9 are supplied (the position away from the evaporation position).

Reference numeral 12 is a supply device for supplying the pellets 9 and comprises a main body 12a for controlling the supply amount of the pellets 9 and a supply passage 12b for guiding the pellets 9 onto the plate body 10. The main body 12a is provided with a cross-shaped shutter 12c whose one side is substantially equal to the diameter of the pellet 9, and the shutter 12c is rotated by ¼ by a motor (not shown) to feed the pellet 9 to the supply path. It is designed to send out one by one to 12b.

Next, a process of manufacturing a magnetic recording medium using the apparatus configured as described above will be described. First, after evacuating the inside of the vacuum container 7 to a predetermined vacuum degree,
The electron gun 6 is operated to evaporate the magnetic alloy 5 in the crucible 8, and the particles of the magnetic alloy are obliquely deposited on the support 2. Then, when the magnetic alloy 5 decreases due to evaporation, the shutter 12c operates and the pellets 9 are sent out one by one to the supply path 12b. Then, the pellet 9 is supplied to the supply path 1
2B starts to move and is supplied onto the plate 10. The supplied pellets 9 are on the plate body 10 for a while,
The plate 10 loses its balance and slowly enters the molten metal. Even if the pellet 9 remains on the plate body 10, the plate body 10 gradually sinks due to the weight of the pellet 9, and the pellet 9 is slowly supplied. Further, during this work, the plate body 10 is regulated to a predetermined position by the regulation device 11, so that it does not move to the evaporation portion and does not disturb the vapor deposition work.

As described above, since the magnetic alloy is constantly supplied into the molten metal during the vapor deposition work, there is no need to interrupt the vapor deposition work on the way because the magnetic alloy is exhausted. Since the magnetic film can be formed well, and the molten metal surface is not changed by the supply of the material, the magnetic film can be formed neatly and a high quality magnetic recording medium can be manufactured with high yield.

In the above description, the case where the back coat film is formed of a magnetic film is used, but the case where the back coat film is formed of a metal thin film is also used.

[0017]

[Effect] According to the present invention, when the material is supplied into the molten metal, the temperature of the molten metal does not suddenly drop, and
No liquid splashes, no waviness in the molten metal, and the liquid surface condition at the evaporation portion is extremely stable. Therefore, stable evaporation can be continuously performed for a long time, a high-quality film can be efficiently obtained, and, for example, a high-performance magnetic recording medium can be obtained at low cost.

[Brief description of drawings]

FIG. 1 is a schematic view of an entire magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a perspective view of a main part of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 3 is a plan view of a main part of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 4 is a schematic cross-sectional view of a main part of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 5 is a schematic diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can 2 Support 3a Supply Side Roll 3b Winding Side Roll 5 Magnetic Alloy 6 Electron Gun 7 Vacuum Container 8 Crucible 9 Pellet 10 Plate 11 Regulation Device 12 Supply Device

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.

Claims (4)

[Claims] 1. A film forming apparatus for forming a metal film by evaporating a metal material in a container and depositing the metal material on a support, comprising: a plate body floated on the molten metal material; and a plate body on the plate body. And a supply means for supplying a metal material to the film forming apparatus. 2. The film forming apparatus according to claim 1, wherein the plate body is made of ceramics. 3. The film forming apparatus according to claim 1, wherein the supplied metal material is formed into a plate shape. 4. The film forming apparatus according to claim 1, further comprising a restricting unit that restricts the plate body to a predetermined position in the container.