JPH08203784A - Solid electrolytic capacitor - Google Patents

Solid electrolytic capacitor

Info

Publication number
JPH08203784A
JPH08203784A JP885495A JP885495A JPH08203784A JP H08203784 A JPH08203784 A JP H08203784A JP 885495 A JP885495 A JP 885495A JP 885495 A JP885495 A JP 885495A JP H08203784 A JPH08203784 A JP H08203784A
Authority
JP
Japan
Prior art keywords
solid electrolytic
electrolytic capacitor
semiconductor layer
oxide film
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP885495A
Other languages
Japanese (ja)
Inventor
Kazumi Naito
一美 内藤
Katsuhiko Yamazaki
勝彦 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP885495A priority Critical patent/JPH08203784A/en
Publication of JPH08203784A publication Critical patent/JPH08203784A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To attain high capacity and good humidity resistance load characteristic by making impregnation rate of a semiconductor layer to an etching fine hole in a solid electrolytic capacitor at least a specified value. CONSTITUTION: In a solid electrolytic capacitor which is formed by forming a dielectric oxide film layer, a semiconductor layer comprised of lead dioxide and lead sulfate and a conductor layer one by one on a surface of an anode substrate comprised of a valve action metallic foil which is etched to,a depth of 30μm or more, impregnation rate of a semiconductor layer to an etching fine hole is at least 85% in conversion value of electric capacity. Thereby, a solid electrolytic capacitor which has large capacity per unit volume, can resist a humidity resistant load test and has good characteristic can be attained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、固体電解コンデンサに
関する。さらに詳しくは、高容量で、かつ耐湿負荷特性
が良好な固体電解コンデンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolytic capacitor. More specifically, the present invention relates to a solid electrolytic capacitor having high capacity and good moisture resistance load characteristics.

【0002】[0002]

【従来の技術】一般に固体電解コンデンサ素子は、エッ
チングを施した弁作用金属箔からなる陽極基体に酸化皮
膜層を形成し、この誘電体酸化皮膜層の外面に対向電極
として半導体層を形成し、さらに接触抵抗を減じるため
に導電ペースト等で導電体層を形成している。このよう
にして作製された固体電解コンデンサ素子は、エポキシ
樹脂等で封口し、固体電解コンデンサとして使用されて
いる。該半導体層として、二酸化鉛と硫酸鉛からなる半
導体層は、電導度が大きいために、作製した固体電解コ
ンデンサの高周波性能が良好になることが提案されてい
る(特開昭63−47917号公報)。
2. Description of the Related Art Generally, a solid electrolytic capacitor element has an oxide film layer formed on an anode substrate made of etched valve metal foil, and a semiconductor layer is formed on the outer surface of the dielectric oxide film layer as a counter electrode. Further, in order to reduce the contact resistance, a conductor layer is formed with a conductive paste or the like. The solid electrolytic capacitor element thus manufactured is sealed with an epoxy resin or the like and used as a solid electrolytic capacitor. As the semiconductor layer, a semiconductor layer made of lead dioxide and lead sulfate has been proposed to improve the high frequency performance of the produced solid electrolytic capacitor because of its high electric conductivity (JP-A-63-47917). ).

【0003】一般にコンデンサのような受動部品は、多
数の電子機器類に必ず搭載されるものであるため特に信
頼性が重要であると考えられている。このような信頼性
を測る尺度として、高温負荷テスト、耐湿負荷テスト、
温度サイクルテスト等多数のテスト項目があり、このよ
うなテスト項目に合格し得るコンデンサのみ、市場に提
供されるものとなる。
In general, passive components such as capacitors are always mounted on a large number of electronic devices, and therefore reliability is considered to be particularly important. As a measure to measure such reliability, high temperature load test, moisture resistance load test,
There are many test items such as a temperature cycle test, and only capacitors that can pass such test items will be offered to the market.

【0004】[0004]

【発明が解決しようとする課題】一方、近年、電子機器
の軽薄短小化に伴い、小型で高容量なコンデンサが必要
であるが、このようなコンデンサを得るには一般に使用
する弁作用金属箔のエッチング細孔深さを30μm以上
に深くして弁作用金属箔自身の表面積を増す必要がある
といわれている。ところが、このような弁作用金属箔を
使用し、さらに半導体層として、電導度が大きい二酸化
鉛と硫酸鉛からなる半導体層を設けた場合、作製した固
体電解コンデンサの信頼性テストの一つである耐湿負荷
テストにおけるtanδ値が大きく上昇するという問題
があった。
On the other hand, in recent years, as electronic devices have become lighter, thinner, shorter, and smaller, a compact and high-capacity capacitor is required. To obtain such a capacitor, a valve action metal foil that is generally used is required. It is said that it is necessary to increase the etching pore depth to 30 μm or more to increase the surface area of the valve action metal foil itself. However, when such a valve-action metal foil is used and a semiconductor layer made of lead dioxide and lead sulfate having high conductivity is provided as a semiconductor layer, it is one of the reliability tests of the produced solid electrolytic capacitor. There is a problem that the tan δ value in the moisture resistance load test greatly increases.

【0005】[0005]

【課題を解決するための手段】本発明は、上述した問題
を解決するためになされたもので、その要旨は、深さ3
0μm以上にエッチング処理した弁作用金属箔からなる
陽極基体の表面に、誘電体酸化皮膜層、二酸化鉛と硫酸
鉛からなる半導体層、および導電体層を順次形成してな
る固体電解コンデンサにおいて、前記半導体層のエッチ
ング細孔への含浸率が、電気容量換算値で85%以上で
ある固体電解コンデンサにある。
The present invention has been made to solve the above-mentioned problems, and its gist is to provide a depth 3
In the solid electrolytic capacitor, a dielectric oxide film layer, a semiconductor layer made of lead dioxide and lead sulfate, and a conductor layer are sequentially formed on the surface of an anode substrate made of a valve action metal foil that is etched to a thickness of 0 μm or more, The solid electrolytic capacitor has a rate of impregnation into the etching pores of the semiconductor layer of 85% or more in terms of electric capacitance.

【0006】以下、本発明の固体電解コンデンサについ
て説明する。本発明の固体電解コンデンサの陽極として
用いられる弁作用金属としては、例えばアルミニウム、
タンタル、ニオブ、チタンおよびこれらを基質とする合
金等弁作用を有する金属箔がいずれも使用できる。
The solid electrolytic capacitor of the present invention will be described below. Examples of the valve action metal used as the anode of the solid electrolytic capacitor of the present invention include aluminum,
Any metal foil having a valve action such as tantalum, niobium, titanium and alloys having these as substrates can be used.

【0007】本発明に使用される弁作用金属箔は、その
表裏に通常0.1乃至0.5μmぐらいの平均径を有す
るエッチング細孔が存在する。該エッチング細孔には方
向性がないが、全体のエッチング細孔が存在する部分、
すなわちエッチング処理された部分は、弁作用金属箔の
厚さ方向に30μm以上である(本発明では、エッチン
グ深さをこのように弁作用金属箔の厚さ方向への距離で
定義する)。エッチング深さが30μm未満であると、
単位体積あたりの容量が小さくなり、目的とする軽薄短
小の固体電解コンデンサを得ることが困難になる。この
ようなエッチング細孔を設ける方法は、通常公知の交流
電解法等によって得られる。
The valve metal foil used in the present invention usually has etching pores having an average diameter of about 0.1 to 0.5 μm on its front and back surfaces. The etching pores have no orientation, but the entire etching pores are present,
That is, the etched portion has a thickness of 30 μm or more in the thickness direction of the valve action metal foil (in the present invention, the etching depth is defined by the distance in the thickness direction of the valve action metal foil). When the etching depth is less than 30 μm,
The capacity per unit volume becomes small, and it becomes difficult to obtain the intended light, thin, short and small solid electrolytic capacitor. The method of providing such etching pores is usually obtained by a known AC electrolysis method or the like.

【0008】本発明において、エッチング細孔全表面に
沿って誘電体酸化皮膜層が形成される。誘電体酸化皮膜
層は、陽極基体の表面に形成された陽極基体自身の酸化
物層であってもよく、或は、陽極基体の表面上に設けら
れた他の誘電体酸化物からなる層であってもよいが、特
に陽極基体自身の酸化物からなる層であることが好まし
い。上記いずれの場合においても、誘電体酸化皮膜層を
形成する方法としては、電解液を用いた陽極化成法等公
知の方法を用いることができる。
In the present invention, the dielectric oxide film layer is formed along the entire surface of the etching pores. The dielectric oxide film layer may be an oxide layer of the anode substrate itself formed on the surface of the anode substrate, or a layer made of another dielectric oxide provided on the surface of the anode substrate. Although it may be present, it is particularly preferably a layer made of an oxide of the anode substrate itself. In any of the above cases, as a method for forming the dielectric oxide film layer, a known method such as an anodization method using an electrolytic solution can be used.

【0009】次に、上記誘電体酸化皮膜層の表面に、二
酸化鉛と硫酸鉛とからなる半導体層を形成する。二酸化
鉛と硫酸鉛からなる半導体層は、例えば過硫酸イオンと
鉛イオンを含んだ反応母液から形成される(例えば特開
昭63−47917号公報)が、本発明においては、該
半導体層のエッチング細孔への含浸率が、電気容量換算
値で85%以上であることが肝要である。この含浸率が
85%未満であると、作製した固体電解コンデンサの信
頼性テストの一つである耐湿負荷テストにおいて、ta
nδ値が大きくなり実用に耐えない。前述した含浸率
は、電解液をエッチング細孔に浸漬させて弁作用金属箔
の容量を周波数1kHz で測定し、該数値を100%とし
て、半導体を含浸させた時の容量値との比でもって表現
される。このような、半導体層の含浸率を85%以上に
する方法として、例えば、前述した反応母液に、誘電体
酸化皮膜を有する弁作用金属箔(以下、化成箔と称す)
を数10分浸漬しておき、しかる後60℃前後の温度に
昇温後30分放置して引き上げ水洗する工程と、1回目
の反応母液よりイオン濃度が低い反応母液に60℃前後
で30分放置して引き上げ水洗乾燥する工程を複数回く
り返す方法があげられる。又、半導体層の二酸化鉛と硫
酸鉛との組成は、別途同法で作製した半導体粉の赤外分
光分析により測定されるが、使用する鉛イオン種および
過硫酸イオン種、各濃度、反応時間によって変化し、通
常、二酸化鉛98重量%乃至40重量%の範囲で、残部
が硫酸鉛である。
Next, a semiconductor layer made of lead dioxide and lead sulfate is formed on the surface of the dielectric oxide film layer. The semiconductor layer composed of lead dioxide and lead sulfate is formed, for example, from a reaction mother liquor containing persulfate ions and lead ions (for example, JP-A-63-47917). In the present invention, the semiconductor layer is etched. It is important that the rate of impregnation in the pores is 85% or more in terms of electric capacity. If the impregnation rate is less than 85%, the solid electrolytic capacitor produced will have a ta in a moisture resistance load test, which is one of the reliability tests.
The value of n δ becomes large and it cannot be put to practical use. The above-mentioned impregnation rate is determined by immersing the electrolytic solution in the etching pores and measuring the capacity of the valve action metal foil at a frequency of 1 kHz, and setting the value as 100%, it is a ratio with the capacity value when the semiconductor is impregnated. Expressed. As a method for increasing the impregnation rate of the semiconductor layer to 85% or more, for example, a valve action metal foil having a dielectric oxide film in the reaction mother liquor described above (hereinafter referred to as a chemical conversion foil).
Is immersed for several tens of minutes, then raised to a temperature of about 60 ° C., left for 30 minutes, then pulled up and washed with water, and a reaction mother liquor having an ion concentration lower than that of the first reaction mother liquor at about 60 ° C. for 30 minutes There is a method in which the process of leaving it up, washing with water and drying is repeated several times. The composition of lead dioxide and lead sulfate in the semiconductor layer is measured by infrared spectroscopic analysis of a semiconductor powder separately prepared by the same method. The lead ion species and persulfate ion species to be used, each concentration, reaction time The amount of lead dioxide is usually 98% to 40% by weight, and the balance is lead sulfate.

【0010】次に上述の半導体層上に導電体層を形成す
るが、形成される導電体層は、カーボンペースト、銀ペ
ースト等、従来公知の導電ペーストを一種以上用いて形
成される。そして上述したように導電体層まで形成され
た固体電解素子は、例えばトランスファー成型によりエ
ポキシ樹脂等の封止剤で封口され実用に供される。
Next, a conductor layer is formed on the above-mentioned semiconductor layer. The conductor layer is formed by using one or more conventionally known conductive pastes such as carbon paste and silver paste. The solid electrolytic element having the conductor layer formed as described above is sealed by a sealing agent such as an epoxy resin by transfer molding and is put to practical use.

【0011】[0011]

【作用】固体電解コンデンサ素子は、化成箔のエッチン
グ細孔を半導体が含浸する構造になっているが、含浸率
が100%でないために、誘電体酸化皮膜層上を半導体
層が覆っていない部分が存在する。一方、耐湿負荷テス
トにおいて、テスト環境の湿気が、半導体層で覆われて
いない酸化皮膜および、弁作用金属自身を攻撃し、化学
反応を起して材料構造変化を起すものと考えられる。従
って、この半導体層の含浸率を高くすることによってこ
の種の湿気の進入を緩和することができる。
The solid electrolytic capacitor element has a structure in which the etching pores of the chemical conversion foil are impregnated with the semiconductor. However, since the impregnation rate is not 100%, the portion where the semiconductor layer does not cover the dielectric oxide film layer. Exists. On the other hand, in the moisture resistance load test, it is considered that the moisture in the test environment attacks the oxide film not covered with the semiconductor layer and the valve metal itself to cause a chemical reaction to change the material structure. Therefore, by increasing the impregnation rate of this semiconductor layer, the invasion of this kind of moisture can be mitigated.

【0012】[0012]

【実施例】以下に実施例および比較例を示して本発明を
さらに詳しく説明する。
EXAMPLES The present invention will be described in more detail with reference to Examples and Comparative Examples below.

【0013】(実施例1〜6)表1に示したエッチング
細孔深さを有するアルミニウム弁作用金属箔を、アジピ
ン酸アンモニウム水溶液中で化成して誘電体酸化皮膜層
を形成した。このような誘電体酸化皮膜層を有する小片
2mm×2mmのアジピン酸アンモニウム電解液中の容量を
それぞれ表1に示した。
Examples 1 to 6 Aluminum valve metal foils having the etching pore depths shown in Table 1 were formed in an aqueous solution of ammonium adipate to form a dielectric oxide film layer. Table 1 shows the capacities of small pieces 2 mm × 2 mm having the dielectric oxide film layer in the ammonium adipate electrolyte.

【0014】次に、前述した誘電体酸化皮膜層が形成さ
れた弁作用金属箔各々2mm×3.5mmの小片を20枚用
意し、小片の下部2mm×2mmの部分を別に用意した酢酸
鉛三水和物2.4モル/リットル水溶液と過硫酸アンモ
ニウム4モル/リットル水溶液の混合液に30分浸漬し
ておき、しかる後60℃で30分放置した後引き上げ水
洗乾燥した後、再度酢酸鉛三水和物1.8モル/リット
ル水溶液と過硫酸アンモニウム2モル/リットル水溶液
との混合液に60℃で30分放置した後引き上げ水洗乾
燥した。さらに、このような操作を2回くり返し、二酸
化鉛54wt%と硫酸鉛46wt%からなる半導体層を形成
した。次いで半導体層上にカーボンペーストおよび銀ペ
ーストを順に積層し導電体層を設けた後、導電体層側に
銀ペーストで陰極リードを、又前記小片の上部2mm×
1.5mm部に熔接で陽極リードを、各々取り出した後、
エポキシ樹脂で封口して固体電解コンデンサを作製し
た。
Next, 20 pieces of 2 mm × 3.5 mm pieces of valve metal foil each having the above-mentioned dielectric oxide film layer were prepared, and the lower portion of the pieces, 2 mm × 2 mm, was separately prepared. It is immersed for 30 minutes in a mixed solution of a hydrate 2.4 mol / liter aqueous solution and an ammonium persulfate 4 mol / liter aqueous solution, and then left at 60 ° C. for 30 minutes, then pulled up, washed with water and dried, and then again lead acetate trihydrate. The mixture was allowed to stand for 30 minutes at 60 ° C. in a mixed solution of an aqueous solution of 1.8 mol / liter of a Japanese product and an aqueous solution of 2 mol / liter of ammonium persulfate, and then it was pulled up, washed with water and dried. Further, such an operation was repeated twice to form a semiconductor layer composed of 54 wt% lead dioxide and 46 wt% lead sulfate. Then, a carbon paste and a silver paste are sequentially laminated on the semiconductor layer to form a conductor layer, and then a cathode lead is formed on the conductor layer side with the silver paste, and the upper part of the piece is 2 mm ×
After taking out the anode lead by welding to the 1.5 mm part,
A solid electrolytic capacitor was produced by sealing with an epoxy resin.

【0015】(比較例1〜4)実施例1〜6で小片の2
mm×2mmの部分を、酢酸鉛三水和物2.4モル/リット
ル水溶液と過硫酸アンモニウム4モル/リットル水溶液
との混合液に浸漬し60℃で1時間反応させた後、引き
上げ水洗乾燥する工程を3回くり返した以外は実施例1
〜6と同様にして固体電解コンデンサを作製した。
(Comparative Examples 1 to 4) Small pieces 2 in Examples 1 to 6
mm × 2 mm portion is immersed in a mixed solution of a lead acetate trihydrate 2.4 mol / liter aqueous solution and ammonium persulfate 4 mol / liter aqueous solution, reacted at 60 ° C. for 1 hour, then pulled up, washed with water and dried. Example 1 except that was repeated 3 times
A solid electrolytic capacitor was produced in the same manner as in steps # 6 to # 6.

【0016】このようにして得られた固体電解コンデン
サ20点の平均の含浸率および電気性能値、そして耐湿
負荷特性として各例のコンデンサを85℃85%RHの
恒湿槽に6Vの電圧を印加して100時間放置した後の
tanδ値を表2に示した。このように耐湿負荷特性と
しての試験後のtanδ値は、含浸率が85%の実施例
が比較例と比べて小さく、各段に優れていることが判
る。
As an average impregnation rate and electric performance value of 20 points of the solid electrolytic capacitors thus obtained, and as a humidity resistance load characteristic, the capacitor of each example was applied with a voltage of 6 V in a constant humidity chamber of 85 ° C. and 85% RH. The tan δ value after standing for 100 hours is shown in Table 2. As described above, the tan δ value after the test as the moisture resistance load characteristic is smaller in the example in which the impregnation rate is 85% as compared with the comparative example, and it is understood that each step is excellent.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】[0019]

【発明の効果】深さ30μm以上にエッチング処理した
弁作用金属箔からなる陽極基体の表面に誘電体酸化皮膜
層、二酸化鉛と硫酸鉛とからなる半導体層が順に形成さ
れ、該半導体層が前記エッチング細孔に電気容量換算値
で85%以上含浸した固体電解コンデンサは、単位体積
あたりの容量が大きく、かつ耐湿負荷テストに耐え得る
ので、良好な固体電解コンデンサとすることができる。
Industrial Applicability The dielectric oxide film layer and the semiconductor layer composed of lead dioxide and lead sulfate are sequentially formed on the surface of the anode substrate composed of the valve metal foil which is etched to a depth of 30 μm or more, and the semiconductor layer is formed as described above. A solid electrolytic capacitor in which the etching pores are impregnated with 85% or more in terms of electric capacity has a large capacity per unit volume and can withstand a humidity resistance load test, and thus can be a good solid electrolytic capacitor.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 深さ30μm以上にエッチング処理した
弁作用金属箔からなる陽極基体の表面に、誘電体酸化皮
膜層、二酸化鉛と硫酸鉛からなる半導体層、および導電
体層を順次形成してなる固体電解コンデンサにおいて、
前記半導体層のエッチング細孔への含浸率が、電気容量
換算値で85%以上であることを特徴とする固体電解コ
ンデンサ。
1. A dielectric oxide film layer, a semiconductor layer made of lead dioxide and lead sulfate, and a conductor layer are sequentially formed on the surface of an anode substrate made of a valve metal foil which is etched to a depth of 30 μm or more. In the solid electrolytic capacitor
The solid electrolytic capacitor, wherein the impregnation rate of the etching pores of the semiconductor layer is 85% or more in terms of electric capacitance.
JP885495A 1995-01-24 1995-01-24 Solid electrolytic capacitor Pending JPH08203784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP885495A JPH08203784A (en) 1995-01-24 1995-01-24 Solid electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP885495A JPH08203784A (en) 1995-01-24 1995-01-24 Solid electrolytic capacitor

Publications (1)

Publication Number Publication Date
JPH08203784A true JPH08203784A (en) 1996-08-09

Family

ID=11704327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP885495A Pending JPH08203784A (en) 1995-01-24 1995-01-24 Solid electrolytic capacitor

Country Status (1)

Country Link
JP (1) JPH08203784A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109791843A (en) * 2016-09-30 2019-05-21 日本贵弥功株式会社 Electrode foil and electrolytic capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109791843A (en) * 2016-09-30 2019-05-21 日本贵弥功株式会社 Electrode foil and electrolytic capacitor
CN109791843B (en) * 2016-09-30 2022-03-22 日本贵弥功株式会社 Electrode foil and electrolytic capacitor

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