JPH08233861A - Pico-probe - Google Patents

Pico-probe

Info

Publication number
JPH08233861A
JPH08233861A JP3824895A JP3824895A JPH08233861A JP H08233861 A JPH08233861 A JP H08233861A JP 3824895 A JP3824895 A JP 3824895A JP 3824895 A JP3824895 A JP 3824895A JP H08233861 A JPH08233861 A JP H08233861A
Authority
JP
Japan
Prior art keywords
inspected
pico
needle
probe
metal plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3824895A
Other languages
Japanese (ja)
Inventor
Masahiko Nikaido
正彦 二階堂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3824895A priority Critical patent/JPH08233861A/en
Publication of JPH08233861A publication Critical patent/JPH08233861A/en
Pending legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE: To ensure that tapered metal plates of both sides are in contact with an object to be tested in a pico-probe in which a signal needle at an end and the plates at the both sides are aligned. CONSTITUTION: A pico-probe exposes the inner conductor of the end of a coaxially fixed cable 5. A signal needle 1 formed at its end on a needle is connected to the signal pad of a board 4 to be inspected, and in order to ground, tapered metal plates 2, 3 mounted at the right and left ends of an outer conductor are so connected to the ground pattern of the board 4 to be inspected as to be simultaneously connected to the signal needle.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はピコプローブに関する。This invention relates to picoprobes.

【0002】[0002]

【従来の技術】従来、この種のピコプローブは、たとえ
ばGGB社ピコプローブMODEL40Aに示されるよ
うに、高周波帯の被検査対象をプロービングして高周波
信号特性検査するものである。
2. Description of the Related Art Conventionally, this type of pico probe is one for probing an object to be inspected in a high frequency band to inspect a high frequency signal characteristic, as shown in, for example, a pico probe MODEL 40A manufactured by GGB.

【0003】図3は、従来の一例を示すピコプローブに
よる基板プローピングの正面図である。図3において、
ピコプローブは、同軸固定ケーブル5先端部分の内導体
を露出し先端を円錐上に下降したシグナル針1を、被検
査対象基板4の信号パッドに、またグランドをとるた
め、シグナル針と同時に接続できるよう外導体先端部分
左右に取り付けられたテーパー状金属板2,3を、被検
査対象基板4のグランドパターンに接続し、高周波信号
特性検査を行っている。
FIG. 3 is a front view of substrate proping by a pico probe showing a conventional example. In FIG.
In the pico probe, the signal needle 1 whose inner conductor is exposed at the tip of the coaxial fixed cable 5 and whose tip is lowered into a cone is connected to the signal pad of the substrate 4 to be inspected and also to the ground, so that it can be connected simultaneously with the signal needle. The tapered metal plates 2 and 3 attached to the left and right ends of the outer conductor are connected to the ground pattern of the inspected substrate 4, and the high frequency signal characteristic inspection is performed.

【0004】[0004]

【発明が解決しようとする課題】上述した従来のピコプ
ローブは、両側のテーパー状金属板が被検査対象にに接
触していることを、目視できないので、不安定なグラン
ドに起因する測定確度が低下するという欠点があった。
In the above-mentioned conventional pico-probe, since it is not possible to visually confirm that the tapered metal plates on both sides are in contact with the object to be inspected, the measurement accuracy due to the unstable ground can be reduced. It had the drawback of falling.

【0005】[0005]

【課題を解決するための手段】本発明のピコプローブ
は、同軸固定ケーブル先端部の中心導体を露出し先端を
円錐上に加工したシグナル針とグランドをとるために同
軸固定ケーブル先端部先の中心導体の両側に一定間隔を
おいて外導体に接続した二つのテーパー状金属板の先端
部下面が、被検査対象基板を、同時にプローピングする
ことにより、信号の入出力を行うピコプローピングにお
いて、同軸固定ケーブルの外導体に接続した接触モニタ
基板の実装面に2つのテーパー上金属板が被検査基板に
接触したことを確認するエッヂセンサ針を取り付けるこ
とを含んで構成される。
The pico probe of the present invention has a center of a tip end of a coaxial fixed cable for taking a ground with a signal needle whose tip is processed into a conical shape by exposing a central conductor of the tip end of the coaxial fixed cable. The lower surface of the tip of two tapered metal plates connected to the outer conductor at regular intervals on both sides of the conductor is the same as the coaxial connector in the pico-proping that inputs and outputs signals by simultaneously propping the substrate under test. It is configured to include an edge sensor needle for confirming that the two tapered upper metal plates contact the inspected substrate on the mounting surface of the contact monitor substrate connected to the outer conductor of the fixed cable.

【0006】[0006]

【実施例】次に、本発明について、図面を参照して詳細
に説明する。
Next, the present invention will be described in detail with reference to the drawings.

【0007】図1は本発明の一実施例を示す正面図であ
る。ピコプローブは、同軸固定ケーブル5先端部分の内
導体を露出し先端を円錐上に加工したシグナル針1を、
被検査対象基板4の信号パッドに、また、グランドをと
るため、シグナル針と同時に接続できるよう外導体先端
部分左右に取り付けられたテーパー状金属板2,3を被
検査対象基板4のグランドパターンに接続している。
FIG. 1 is a front view showing an embodiment of the present invention. The pico probe is a signal needle 1 in which the inner conductor of the tip end of the coaxial fixed cable 5 is exposed and the tip is processed into a cone,
In order to establish a ground on the signal pad of the substrate 4 to be inspected, the tapered metal plates 2 and 3 attached to the left and right ends of the outer conductor so as to be connected simultaneously with the signal needle are used as the ground pattern of the substrate 4 to be inspected. Connected.

【0008】また、ピコプローブが被検査対象基板4に
接触していない状態では、固定同軸ケーブル5の外導体
に固定されている接触モニタ基板6実装面から、左およ
び右テーパー状金属板2,3先端状面に突き出した左お
よび右エッヂセンサ針7,8は、左および右テーパー状
金属板2,3に、接触しないよう高さ調整がされてい
る。
Further, when the pico probe is not in contact with the substrate 4 to be inspected, the left and right tapered metal plates 2, 2 from the mounting surface of the contact monitor substrate 6 fixed to the outer conductor of the fixed coaxial cable 5. The heights of the left and right edge sensor needles 7 and 8 protruding from the tip 3 are adjusted so as not to contact the left and right tapered metal plates 2 and 3.

【0009】図2(a),(b)は本発明の一使用例を
示す側面図であるピコプローブが、被測定対象基板4に
確実に接触していれば、図2(a)に示すように、左お
よび右テーパー状金属板2,3先端が上部に押圧され、
左および右えっヂせんサ針7,8に接続される。従っ
て、接触モニタ基板6から、右および左エッヂセンサ針
7,8の信号をモニタする左および右エッヂセンサ針リ
ード線9,10の、グランドに対する導通検査をするこ
とにより、左および右テーパー状金属板2,3の被検査
対象基板に対するグランド接続が確認できる。
FIGS. 2A and 2B are side views showing an example of use of the present invention. If the picoprobe surely contacts the substrate 4 to be measured, it is shown in FIG. 2A. So that the tips of the left and right tapered metal plates 2 and 3 are pressed upwards,
Connected to the left and right edge needles 7,8. Therefore, the left and right tapered metal plates 2 are obtained by conducting a continuity test to the ground of the left and right edge sensor needle lead wires 9 and 10 which monitor the signals of the right and left edge sensor needles 7 and 8 from the contact monitor substrate 6. , 3 can be confirmed to be connected to the inspected substrate.

【0010】また、ピコプローブが、被検査対象基板4
に左下に傾いて接触すれば、図2(b)に示すように、
左テーパ状金属板2のみ先端が上部に押圧され、左エッ
ヂセンサ針7のみ接続され、左エッヂセンサ針8は左テ
ーパ状金属板2に対し開放のままである。この場合、左
エッヂセンサ針リード線9がグランドに対し導通し、右
エッヂセンサ針リード線10がグランドに対して開放し
ていることから、左および右テーパ状金属板2,3の被
検査対象基板に対するグランド接続が不十分であること
が確認できる。
Further, the pico-probe is a substrate 4 to be inspected.
If you touch it by tilting to the lower left, as shown in Fig. 2 (b),
Only the left tapered metal plate 2 has its tip pressed upward, only the left edge sensor needle 7 is connected, and the left edge sensor needle 8 remains open to the left tapered metal plate 2. In this case, since the left edge sensor needle lead wire 9 is electrically connected to the ground and the right edge sensor needle lead wire 10 is open to the ground, the left and right tapered metal plates 2 and 3 with respect to the substrate to be inspected. It can be confirmed that the ground connection is insufficient.

【0011】また、ピコプローブが、被検査対象基板4
に対し右下傾きの場合も、右エッヂセンサ針リード線1
0がグランドに対して導通し、左エッヂセンサ針リード
線9がグランドに対して開放していることから、被検査
対象基板に対するグランド接続が不十分であることが確
認できる。
Further, the pico probe is a substrate 4 to be inspected.
On the other hand, even when tilted to the lower right, the right edge sensor needle lead wire 1
Since 0 is electrically connected to the ground and the left edge sensor needle lead wire 9 is open to the ground, it can be confirmed that the ground connection to the inspected substrate is insufficient.

【0012】[0012]

【発明の効果】本発明のピコプローブは、両側のテーパ
ー状金属板が、被検査対象に接触する際の押圧を検出す
るエッヂセンサ針の対グランド対抗値を測定することに
より、テーパ状金属板が被試験対象物に接触しているこ
とを確認できるので。グランドに起因する測定角度の低
下を防げるという効果がある。
EFFECT OF THE INVENTION In the pico probe of the present invention, the tapered metal plates on both sides are measured by measuring the resistance value against the ground of the edge sensor needle which detects the pressure when contacting the object to be inspected. You can confirm that you are in contact with the test object. This has the effect of preventing a decrease in the measurement angle due to the ground.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す正面図である。FIG. 1 is a front view showing an embodiment of the present invention.

【図2】(a),(b)は本発明の一使用例を示す側面
図である。
2A and 2B are side views showing a usage example of the present invention.

【図3】従来の一例を示す正面図である。FIG. 3 is a front view showing a conventional example.

【符号の説明】[Explanation of symbols]

1 シグナル針 2 右テーパー状金属板 3 左テーパー状金属板 4 被検査対象基板 5 同軸固定ケーブル 6 接触モニタ基板 7 右エッヂセンサ針 8 左エッヂセンサ針 9 右エッヂセンサ針リード線 10 左エッヂセンサ針リード線 1 signal needle 2 right tapered metal plate 3 left tapered metal plate 4 substrate to be inspected 5 coaxial fixed cable 6 contact monitor substrate 7 right edge sensor needle 8 left edge sensor needle 9 right edge sensor needle lead wire 10 left edge sensor needle lead wire

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 同軸固定ケーブル先端部の中心導体を露
出した先端を円錐上に下降したシグナル針とグランドを
とるために同軸固定ケーブル先端部先の中心導体の両側
に一定間隔をおいて外導体に接合した二つのテーパー状
金属板の先端部下面が、被検査対象基板を同時にプロー
ピングすることにより信号の入出力を行うピコプローブ
において、同軸固定ケーブルの外導体に接続した接触モ
ニタ基板の実装面に2つのテーパー状金属板が被検査基
板に接触したことを確認するエッヂセンサ針を取り付け
ることを特徴とするピコプローブ。
1. An outer conductor having a fixed interval on both sides of the center conductor at the tip of the coaxial fixed cable in order to obtain a ground with a signal needle descending a cone on the tip exposing the center conductor of the end of the coaxial fixed cable. The lower surface of the tip of the two tapered metal plates joined to is the mounting surface of the contact monitor board connected to the outer conductor of the coaxial fixed cable in the pico probe that inputs and outputs signals by simultaneously propping the board to be inspected. A pico probe having an edge sensor needle for confirming that the two tapered metal plates are in contact with the substrate to be inspected.
JP3824895A 1995-02-27 1995-02-27 Pico-probe Pending JPH08233861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3824895A JPH08233861A (en) 1995-02-27 1995-02-27 Pico-probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3824895A JPH08233861A (en) 1995-02-27 1995-02-27 Pico-probe

Publications (1)

Publication Number Publication Date
JPH08233861A true JPH08233861A (en) 1996-09-13

Family

ID=12520013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3824895A Pending JPH08233861A (en) 1995-02-27 1995-02-27 Pico-probe

Country Status (1)

Country Link
JP (1) JPH08233861A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242930B1 (en) 1997-11-21 2001-06-05 Nec Corporation High-frequency probe capable of adjusting characteristic impedance in end part and having the end part detachable
US6281691B1 (en) 1998-06-09 2001-08-28 Nec Corporation Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242930B1 (en) 1997-11-21 2001-06-05 Nec Corporation High-frequency probe capable of adjusting characteristic impedance in end part and having the end part detachable
US6281691B1 (en) 1998-06-09 2001-08-28 Nec Corporation Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable
US6400168B2 (en) 1998-06-09 2002-06-04 Nec Corporation Method for fabricating probe tip portion composed by coaxial cable

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Effective date: 19970916