JPH0827925B2 - 保護被膜を有する磁気ヘッドスライダ及びその製造方法 - Google Patents

保護被膜を有する磁気ヘッドスライダ及びその製造方法

Info

Publication number: JPH0827925B2
Authority: JP; Japan
Prior art keywords: magnetic head; head slider; protective coating; manufacturing; rail
Prior art date: 1990-12-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP3315280A

Other languages

English (en)

Japanese (ja)

Other versions

JPH04364217A (ja

Inventor

アルフレツド・グリル

チエン・ツオン・ホン

バーナード・スチール・メイヤーソン

ビシユヌバイ・ビツタルバイ・パテル

ミツチエル・アレン・ルサク

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-12-27

Filing date

1991-11-05

Publication date

1996-03-21

1991-11-05 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

1992-12-16 Publication of JPH04364217A publication Critical patent/JPH04364217A/ja

1996-03-21 Publication of JPH0827925B2 publication Critical patent/JPH0827925B2/ja

2011-03-21 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000011253 protective coating Substances 0.000 title claims description 32
238000004519 manufacturing process Methods 0.000 title claims description 26
239000010410 layer Substances 0.000 claims description 31
238000000034 method Methods 0.000 claims description 29
239000012790 adhesive layer Substances 0.000 claims description 16
150000001721 carbon Chemical class 0.000 claims description 11
238000005530 etching Methods 0.000 claims description 10
229910052710 silicon Inorganic materials 0.000 claims description 7
239000010703 silicon Substances 0.000 claims description 7
238000000151 deposition Methods 0.000 claims description 6
239000000126 substance Substances 0.000 claims description 3
238000001020 plasma etching Methods 0.000 claims description 2
239000010409 thin film Substances 0.000 description 32
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
239000000463 material Substances 0.000 description 11
229910052799 carbon Inorganic materials 0.000 description 10
239000011241 protective layer Substances 0.000 description 9
230000007797 corrosion Effects 0.000 description 7
238000005260 corrosion Methods 0.000 description 7
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
239000011248 coating agent Substances 0.000 description 5
238000000576 coating method Methods 0.000 description 5
238000010586 diagram Methods 0.000 description 5
239000000758 substrate Substances 0.000 description 5
230000008021 deposition Effects 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
239000000470 constituent Substances 0.000 description 2
239000010408 film Substances 0.000 description 2
239000007789 gas Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
238000000992 sputter etching Methods 0.000 description 2
238000003860 storage Methods 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
230000015556 catabolic process Effects 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
239000004020 conductor Substances 0.000 description 1
238000006731 degradation reaction Methods 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
239000012777 electrically insulating material Substances 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
238000010884 ion-beam technique Methods 0.000 description 1
238000010329 laser etching Methods 0.000 description 1
239000000314 lubricant Substances 0.000 description 1
230000001050 lubricating effect Effects 0.000 description 1
239000000696 magnetic material Substances 0.000 description 1
230000000873 masking effect Effects 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
230000002035 prolonged effect Effects 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
239000002356 single layer Substances 0.000 description 1
239000002904 solvent Substances 0.000 description 1
239000000725 suspension Substances 0.000 description 1

Classifications

- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
- G11B5/6082—Design of the air bearing surface
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Magnetic Heads (AREA)

JP3315280A 1990-12-27 1991-11-05 保護被膜を有する磁気ヘッドスライダ及びその製造方法 Expired - Lifetime JPH0827925B2 (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US634671		1990-12-27
US07/634,671 US5159508A (en)	1990-12-27	1990-12-27	Magnetic head slider having a protective coating thereon

Publications (2)

Publication Number	Publication Date
JPH04364217A JPH04364217A (ja)	1992-12-16
JPH0827925B2 true JPH0827925B2 (ja)	1996-03-21

Family

ID=24544755

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3315280A Expired - Lifetime JPH0827925B2 (ja)	1990-12-27	1991-11-05	保護被膜を有する磁気ヘッドスライダ及びその製造方法

Country Status (6)

Country	Link
US (1)	US5159508A (2)
JP (1)	JPH0827925B2 (2)
KR (1)	KR960001288B1 (2)
CA (1)	CA2055801C (2)
MY (1)	MY121891A (2)
TW (1)	TW197521B (2)

Families Citing this family (85)

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US6224952B1 (en) *	1988-03-07	2001-05-01	Semiconductor Energy Laboratory Co., Ltd.	Electrostatic-erasing abrasion-proof coating and method for forming the same
JP2568011B2 (ja) *	1991-07-23	1996-12-25	株式会社日立製作所	磁気ヘツド
US5707717A (en) *	1991-10-29	1998-01-13	Tdk Corporation	Articles having diamond-like protective film
US5541003A (en) *	1991-10-31	1996-07-30	Tdk Corporation	Articles having diamond-like protective thin film
US5305165A (en) *	1991-12-24	1994-04-19	International Business Machines Corporation	Tribo-attractive contact data storage system
JP3099928B2 (ja) *	1992-07-07	2000-10-16	ティーディーケイ株式会社	磁気ディスク装置
US5609948A (en) *	1992-08-21	1997-03-11	Minnesota Mining And Manufacturing Company	Laminate containing diamond-like carbon and thin-film magnetic head assembly formed thereon
US5827613A (en) *	1992-09-04	1998-10-27	Tdk Corporation	Articles having diamond-like protective film and method of manufacturing the same
US5388017A (en) *	1993-01-29	1995-02-07	International Business Machines Corporation	Disk file with air-bearing slider having skids
US5455730A (en) *	1993-02-18	1995-10-03	International Business Machines Corporation	Contact magnetic recording disk file with a magnetoresistive read sensor
US5734519A (en) *	1993-03-25	1998-03-31	International Business Machines Corporation	Contact magnetic recording disk file with improved head assembly
US5654850A (en) *	1993-05-18	1997-08-05	Applied Magnetics Corp.	Carbon overcoat with electrically conductive adhesive layer for magnetic head sliders
US5336550A (en) *	1993-05-18	1994-08-09	Applied Magnetics Corporation	Carbon overcoat for magnetic head sliders
JP2531438B2 (ja) *	1993-06-17	1996-09-04	日本電気株式会社	磁気ヘッドおよびその製造方法
JP3312146B2 (ja)	1993-06-25	2002-08-05	株式会社日立製作所	磁気ヘッドおよびその製造方法
JP2785650B2 (ja) *	1993-08-31	1998-08-13	日本電気株式会社	磁気ヘッドスライダ用保護層
US6330131B1 (en) *	1993-09-17	2001-12-11	Read-Rite Corporation	Reduced stiction air bearing slider
US5569506A (en) *	1993-10-06	1996-10-29	International Business Machines Corporation	Magnetic recording disk and disk drive with improved head-disk interface
EP0804630A4 (en) *	1994-03-03	1998-06-10	Monsanto Co	CARBON-COATED TRANSDUCERS NEAR DIAMOND, FOR MAGNETIC RECORDING MEDIA
JP2743824B2 (ja) *	1994-03-24	1998-04-22	ヤマハ株式会社	磁気ヘッドのレール面加工方法
EP0689198A3 (en)	1994-06-20	1997-01-29	Quantum Corp	Sliding body for converters of a hard disk drive with contacting sliding surfaces with controlled pitch and roll movement
CN1125439C (zh) *	1994-07-13	2003-10-22	三星电子株式会社	制造磁头的方法
US5864452A (en) *	1994-08-03	1999-01-26	Sanyo Electric Co., Ltd.	Thin-film magnetic head and method of forming carbon film
US5754377A (en) *	1994-08-26	1998-05-19	Aiwa Research And Development, Inc.	Thin film magnetic head including an elevated gap structure
US6091581A (en) *	1994-08-26	2000-07-18	Aiwa Co., Ltd.	Thin film magnetic head including a separately deposited diamond-like carbon gap structure and magnetic control wells
US5841608A (en) *	1994-08-30	1998-11-24	Fujitsu Limited	Head slider with projections arranged on rails thereof
JP3219947B2 (ja)	1994-09-29	2001-10-15	アルプス電気株式会社	浮上式磁気ヘッド
JPH08153379A (ja) *	1994-09-30	1996-06-11	Sony Corp	浮上型磁気ヘッド装置及びその製造方法
US5462784A (en) *	1994-11-02	1995-10-31	International Business Machines Corporation	Fluorinated diamond-like carbon protective coating for magnetic recording media devices
JP3081893B2 (ja) *	1994-12-19	2000-08-28	シーゲイトテクノロジーインコーポレーテッド	ディスクドライブ用のスライダ、ディスクドライブ、ならびにディスクドライブ用のヘッドを作る方法
JP2786119B2 (ja) *	1994-12-20	1998-08-13	茨城日本電気株式会社	磁気ヘッド
JP3740186B2 (ja) *	1995-05-17	2006-02-01	株式会社日立グローバルストレージテクノロジーズ	磁気ヘッドスライダの製造方法
US5675463A (en) *	1995-12-07	1997-10-07	Samsung Electronics, Inc.	Slider with a transparent coating on a rail and a reflective material within a recess of the rail
JP2814975B2 (ja) *	1996-01-16	1998-10-27	日本電気株式会社	磁気ヘッド及び磁気ディスク装置
US5640292A (en) *	1996-01-17	1997-06-17	Seagate Technology, Inc.	Diamond-like carbon encapsulation of magnetic heads
JPH09212814A (ja) *	1996-01-31	1997-08-15	Nec Corp	保護被膜と保護被膜を有する磁気ヘッドスライダおよび磁気ディスク装置
US5781377A (en) *	1996-02-20	1998-07-14	Seagate Technology, Inc.	Slider with protective DLC or nonhygroscopic coating on the trailing edge face
US6532134B1 (en) *	1996-07-26	2003-03-11	International Business Machines Corporation	Silicon coating on air bearing surface for magnetic thin film heads
US5948532A (en) *	1996-12-10	1999-09-07	International Business Machines Corporation	Cermet adhesion layer with carbonaceous wear layer for head/disk interfaces
US5858182A (en)	1997-03-20	1999-01-12	Headway Technoloies, Inc.	Bilayer carbon overcoating for magnetic data storage disks and magnetic head/slider constructions
US6428894B1 (en) *	1997-06-04	2002-08-06	International Business Machines Corporation	Tunable and removable plasma deposited antireflective coatings
US5986851A (en) *	1997-08-15	1999-11-16	Seagate Technology, Inc.	Selective carbon overcoat of the trailing edge of MR sliders
US6130471A (en) *	1997-08-29	2000-10-10	The Whitaker Corporation	Ballasting of high power silicon-germanium heterojunction biploar transistors
US6040225A (en) *	1997-08-29	2000-03-21	The Whitaker Corporation	Method of fabricating polysilicon based resistors in Si-Ge heterojunction devices
JPH11110729A (ja)	1997-10-01	1999-04-23	Alps Electric Co Ltd	磁気ヘッドおよびその製造方法
US6624977B1 (en) *	1997-10-07	2003-09-23	Seagate Technology Llc	Data storage system with slider having variable hardness pad
JP3097663B2 (ja)	1998-06-09	2000-10-10	日本電気株式会社	磁気ディスク装置
US6359754B1 (en) *	1998-07-21	2002-03-19	Seagate Technology Llc	Increased mechanical spacing through localized continuous carbon overcoat
US6477011B1 (en)	1998-08-24	2002-11-05	International Business Machines Corporation	Magnetic recording device having an improved slider
US6704161B1 (en)	1998-11-06	2004-03-09	Samsung Electronics Co. Ltd.	Shock protection skin bumper for a hard disk drive
US6417986B1 (en)	1998-11-16	2002-07-09	Samsung Electronics Co., Ltd.	Impact guard for limiting hard disk movement
US6542334B2 (en)	1998-11-18	2003-04-01	Seagate Technology Llc	Edge structure for slider-disc interface and method of manufacture therefor
US6549372B1 (en)	1998-12-15	2003-04-15	Samsung Electronics Co., Ltd	Device for limiting head movement within a hard disk drive
US6483668B2 (en)	1999-01-22	2002-11-19	Seagate Technology Llc	Edge contact protection feature for a disc drive head
US6417994B1 (en)	1999-04-22	2002-07-09	Samsung Electronics, Co., Ltd.	Swage plate with protruded walls to increase retention torque in hard disk applications
US6589353B1 (en)	1999-05-26	2003-07-08	Seagate Technology Llc	Treatment of air-bearing surface of a disc drive slider with light and oxidizing gas
US6583953B1 (en)	1999-07-12	2003-06-24	Mark Lauer	Silicon carbide overcoats for information storage systems and method of making
US6501614B1 (en)	1999-08-19	2002-12-31	Samsung Electronics Co., Ltd.	Acoustic insulator for controlling noise generated in a mass storage device
US6744597B2 (en)	1999-10-29	2004-06-01	Samsung Electronics Co., Ltd.	Dynamic absorber for an actuator arm in a disk drive
US20030074784A1 (en) *	1999-10-29	2003-04-24	Yoshiyuki Konishi	Method of forming protective film on magnetic head
US6804878B1 (en) *	1999-12-21	2004-10-19	Hitachi Global Storage Technologies Netherlands B.V.	Method of improving the reliability of magnetic head sensors by ion milling smoothing
US6433965B1 (en)	2000-03-02	2002-08-13	Read-Rite Corporation	Laminated carbon-containing overcoats for information storage system transducers
US6466408B2 (en) *	2000-03-16	2002-10-15	International Business Machines Corporation	Storage system slider having trailing edge pad and method for making the same
US6947252B2 (en)	2000-05-10	2005-09-20	Samsung Electronics Co., Ltd.	Wave stringer for controlling acoustic noise and shock vibration in a storage device
US6503406B1 (en)	2000-08-07	2003-01-07	International Business Machines Corporation	Method for forming the air bearing surface of a slider using nonreactive plasma
US6416935B1 (en)	2000-08-07	2002-07-09	International Business Machines Corporation	Method for forming the air bearing surface of a slider
US6663747B2 (en)	2000-09-13	2003-12-16	International Business Machines Corporation	Apparatus and method for enhancing the uniform etching capability of an ion beam grid
US6446517B1 (en)	2000-11-20	2002-09-10	Samsung Electronics Company	Controlled particle deposition in drives and on media for thermal asperity studies
US6590738B2 (en)	2001-03-01	2003-07-08	Samsung Electronics Co., Ltd.	Particle removal device in a hard disk drive
JP4042347B2 (ja) *	2001-05-18	2008-02-06	新科實業有限公司	磁気ヘッドスライダの浮上面形状加工方法及び磁気ヘッドスライダの製造方法
US6762908B2 (en)	2001-06-18	2004-07-13	Samsung Electronics Co., Ltd.	Air razor and disk limiter for a hard disk drive
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US7097745B2 (en) *	2003-06-27	2006-08-29	Seagate Technology, Llc	Method of forming a tunneling magnetoresistive head
US7300556B2 (en) *	2003-08-29	2007-11-27	Hitachi Global Storage Technologies Netherlands B.V.	Method for depositing a thin film adhesion layer
JP2006107607A (ja) *	2004-10-05	2006-04-20	Hitachi Global Storage Technologies Netherlands Bv	磁気ヘッド及びその製造方法
JP2007149158A (ja)	2005-11-24	2007-06-14	Shinka Jitsugyo Kk	スライダおよびスライダの製造方法
US7929251B2 (en) *	2006-01-10	2011-04-19	Hitachi Global Storage Technologies, Netherlands B.V.	Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing
US7495865B2 (en) *	2006-04-10	2009-02-24	Seagate Technology Llc	Adhesion layer for protective overcoat
JP2009230799A (ja) *	2008-03-21	2009-10-08	Fujitsu Ltd	ヘッドスライダの製造方法
US8199436B2 (en) *	2009-05-28	2012-06-12	Sae Magnetics (H.K.) Ltd.	Magnetic head slider having ultra thin base layer with group 6B element and protective layer
EP3005367A4 (en) *	2013-06-07	2016-05-25	Purdue Research Foundation	CLAY CONVERTER FOR HEAT-SUPPORTED MAGNETIC RECORDING
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USRE32464E (en) *	1971-05-03	1987-07-28		Thin film recording and method of making
US4130847A (en) *	1977-03-31	1978-12-19	International Business Machines Corporation	Corrosion resistant thin film head assembly and method for making
JPS56169264A (en) *	1980-05-30	1981-12-25	Fujitsu Ltd	Magnetic head
JPS5815022A (ja) *	1981-07-13	1983-01-28	Asahi Denka Kogyo Kk	シリカゾルの製造方法
DE3714787A1 (de) *	1987-05-04	1988-11-24	Siemens Ag	Magnetische speichereinrichtung mit einem zu magnetisierenden aufzeichnungsmedium sowie einem entsprechenden magnetkopf
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1990
- 1990-12-27 US US07/634,671 patent/US5159508A/en not_active Expired - Lifetime
1991
- 1991-11-05 JP JP3315280A patent/JPH0827925B2/ja not_active Expired - Lifetime
- 1991-11-19 CA CA002055801A patent/CA2055801C/en not_active Expired - Fee Related
- 1991-11-27 MY MYPI91002197A patent/MY121891A/en unknown
- 1991-11-27 KR KR1019910021374A patent/KR960001288B1/ko not_active Expired - Fee Related
1992
- 1992-01-30 TW TW081100707A patent/TW197521B/zh active

Also Published As

Publication number	Publication date
TW197521B (2)	1993-01-01
CA2055801A1 (en)	1992-06-18
MY121891A (en)	2006-03-31
KR960001288B1 (ko)	1996-01-25
US5159508A (en)	1992-10-27
JPH04364217A (ja)	1992-12-16
CA2055801C (en)	1996-01-23

Publication	Publication Date	Title
JPH0827925B2 (ja)	1996-03-21	保護被膜を有する磁気ヘッドスライダ及びその製造方法
US5175658A (en)	1992-12-29	Thin film magnetic head having a protective coating and method for making same
US5271802A (en)	1993-12-21	Method for making a thin film magnetic head having a protective coating
US7488429B2 (en)	2009-02-10	Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium
US7174622B2 (en)	2007-02-13	Process of making a non-corrosive GMR slider for proximity recording
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