JPH08318232A - Washing method - Google Patents

Abstract

PURPOSE: To shorten a washing line of a member such as an optical part after processing. CONSTITUTION: An article to be washed after processing is immersed in a non- aqueous solvent to be washed ultrasonically and subsequently immersed in a hydrophilic solvent or a non-aqueous solvent high in volatility to be washed ultrasonically. Or, the article to be washed after processing is immersed in a non-aqueous solvent to be washed ultrasonically and subsequently immersed in the hydrophilic solvent to be washed ultrasonically and further immersed in the non-aqueous solvent high in volatility to be washed ultrasonically.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to metal parts such as mechanical members,
The present invention relates to a cleaning method for precisely cleaning optical components such as lenses and prisms, mounting boards for mounting electronic components, and electrical components such as lead frames.

[0002]

2. Description of the Related Art A conventional method for precision cleaning of various parts as described above is disclosed in Japanese Patent Laid-Open No. 5-68951. This method is a degreasing process with a chlorine-based solvent such as perchlorethylene, a water-based replacement process with a surfactant, a final cleaning process with city water and a surfactant,
It has a rinse process with city water, a dipping and pulling process in warm pure water, and a drying process by blowing warm air.
It is washed by the process.

[0003]

The above-mentioned conventional method requires a total of 6 steps, which is a long washing step. Further, since the chlorine-based solvent is used, there is a problem that it has a great influence on the environment such as groundwater pollution and the human body, and there is a possibility that the use of the chlorine-based solvent will be restricted in the near future. Further, since water is used in the rinsing step and the pulling step, there is a problem that stains are generated on the surface of the article to be cleaned after drying.

The present invention has been made in consideration of the above circumstances, and provides a cleaning method which can shorten the cleaning process, has no adverse effect on the environment and the human body, and has no stain on the surface of the object to be cleaned. The purpose is to provide.

[0005]

Means and Actions for Solving the Problems In the cleaning method of the present invention, a processed object is immersed in a non-aqueous solvent and ultrasonically cleaned, and then a hydrophilic solvent or a highly volatile non-aqueous solvent is used. It is immersed in and washed with ultrasonic waves.

The operation of this method will be described by taking an optical component as an example. Optical parts such as lenses are pitched by processing,
A protective film is attached to the surface, and when this optical component is immersed in a suitably heated non-aqueous solvent and ultrasonic waves are applied,
The pitch is peeled or dissolved by the physical force of ultrasonic waves and the dissolving power of the solvent. Next, this optical component is immersed in a hydrophilic solvent or a non-volatile solvent having high volatility to apply ultrasonic waves. In this step, the non-aqueous solvent in the previous step is replaced with a hydrophilic solvent or a highly volatile non-aqueous solvent due to the physical force of ultrasonic waves and the compatibility of the liquid. At this time, even if some pitch remains in the first step using the non-aqueous solvent, it is completely removed by the immersion in the hydrophilic solvent or the non-aqueous solvent in the second step. Further, in this case, the hydrophilic solvent and the non-volatile solvent having high volatility are selected such that the vapor pressure at room temperature is relatively high, whereby the drying can be carried out quickly.

In another cleaning method of the present invention, the processed object is immersed in a water-based solvent and ultrasonically cleaned, then immersed in a hydrophilic solvent and ultrasonically cleaned, and further volatile. It is immersed in a high non-aqueous solvent and ultrasonically cleaned.

In this method, ionic polarity stains are removed by immersing in a hydrophilic solvent after ultrasonic cleaning in a non-aqueous solvent. After that, the surface is finished with a non-aqueous solvent containing no water, so that the surface of the non-washed product has a high-level finish.

In the present invention, it is possible to provide a plurality of cleaning tanks for accommodating such a non-aqueous solvent, a hydrophilic solvent and a highly volatile non-aqueous solvent, whereby a good process without secondary adhesion can be achieved. Can be set. The number of cleaning tanks is adjusted depending on the number of objects to be cleaned and the required cleaning quality.
Generally, the number of tanks is 5 to 10 in the cleaning line, and the number of tanks is 2 to 5 when the cleaning tact is negligible, which reduces the number of steps and shortens the line.

In the present invention, as the non-aqueous solvent, one of trade name "EE-4110", "EE-4210" (manufactured by Olympus Optical Co., Ltd.), isoparaffin hydrocarbon, naphthene hydrocarbon, etc. Or a plurality can be selected. As the hydrophilic solvent, one or more of alcohols such as isopropyl alcohol (IPA) and ethanol can be selected. As the highly volatile non-aqueous solvent, one or more selected from trade names “EE-3110” (manufactured by Olympus Optical Co., Ltd.), isoparaffin hydrocarbons, naphthene hydrocarbons and the like can be selected. . In this case, the highly volatile non-aqueous solvent preferably has a boiling point in the range of 30 to 200 ° C. This is because such a low boiling point solvent has a relatively high vapor pressure at room temperature and is easily dried.

[0011]

【Example】

(Embodiment 1) FIG. 1 shows Embodiment 1 of the present invention. First tank 1
-The 4th tank 4 is used for the 1st process, and these tanks 1-4 are filled with the washing | cleaning liquid of brand name "EE-4110" which is a non-aqueous solvent. This cleaning agent "EE-4110" is a cleaning liquid for hydrocarbon pitch and wax manufactured by Olympus Optical Co., Ltd.

The fifth tank to the seventh tank 7 are used in the second step and are filled with IPA, and "EE-4110" used in the first step is replaced with IPA. The eighth layer 8 is used in the third step and is drained by air blow. The ninth tank 9 is used in the fourth step and performs warm air drying.

With respect to such a structure, as a cleaning sample, one row of pitched lenses after polishing was arranged in three rows in a three-point supporting cleaning basket containing 20 pieces. That is, in this example, 60 lenses in one basket were used as a sample for cleaning. An ultrasonic transducer with an output of 28 KHz / 600 W is attached to the bottoms of the first tank 1 to the seventh tank.

The cleaning conditions are as follows: the liquid temperature in the first to fourth tanks is 60 ° C., the liquid temperature in the fifth to seventh tanks is 25 to 30 ° C., the air temperature in the eighth tank is room temperature, and the hot air in the ninth tank is 80 ° C. Set to. The first tank 1 and the fourth tank 4 are connected by a distillation regenerator 21,
The waste liquid in the first tank is regenerated by the distillation regenerator 21 and supplied to the fourth tank. The solvent overflowing from the fourth tank 4 flows into the third tank 3, and thereafter sequentially flows into the previous tank and is guided to the first tank. The fifth tank 5 to the seventh tank 7 have a structure in which each tank is filtered and circulated. The circulation flow rate in each tank was 5 liters / min. The cleaning tact was 90 seconds, and the net cleaning time excluding the transportation time was 60 seconds.

Table 1 shows the results of cleaning according to this example. The evaluation in the table was judged by the number of spots visually observed under a fluorescent lamp after coating the antireflection film.
The result is a good result which is almost the same as that of the conventional pitch cleaning line (Comparative Example 1).
It was possible to reduce the number of washing tanks by three compared with the reference).

[0016]

[Table 1]

(Embodiment 2) FIG. 2 shows the structure of Embodiment 2 of the present invention, and the same elements as those of Embodiment 1 are designated by the same reference numerals. In this embodiment, the first tank 1 to the fourth tank 4 are the first
This is a step, and pitch removal using "EE-4110" is performed. The fifth tank 5 to the seventh tank 7 are the second step, in which IPE is used to replace the EE-4110. 8th tank 8 and 9th
The tank 9 is the third step, and the "EE-3110" is used to
Replace PA. The tenth tank 10 is the fourth step, and performs drying with warm air. "EE-3110" is an exclusive liquid for drying silicone, which replaces CFC manufactured by Olympus Optical Co., Ltd. As the cleaning sample, the same sample as in Experimental Example 1 was used, and the cleaning was performed under the same conditions as in Example 1 such as the cleaning tact time. However, the liquid temperature of “EE-3110” in the eighth tank 8 and the ninth tank 9 is room temperature (25 ° C.), and the pulling rate of the ninth tank 9 is 1.5 to 3
It was performed at a low speed of mm / sec.

Table 2 shows the cleaning results of this example. The evaluation was judged by the number of spots generated by the breath test under a fluorescent lamp after washing. The increase / decrease in the number of tanks in Table 2 is the number of tanks in comparison with Example 1, and only one tank is added compared to Example 1, but the number of tanks is 2 compared to Comparative Example 1 shown in FIG. The tank is running low.

[0019]

[Table 2]

(Embodiment 3) FIG. 3 shows the construction of Embodiment 3 of the present invention. The first tank 1 and the second tank 2 are the first step,
The pitch is removed by "EE-4110". Third tank 3
And the 4th tank 4 is a 2nd process and replaces "EE-4110" by "EE-3110". The fifth tank 5 is "EE
-3110 "is the third step of draining, and the sixth tank 6 is the fourth step of drying with warm air.

As a cleaning sample, a recess dish with the lens pitch remaining was used, and the cleaning time was 3 minutes in each tank.
The recess dish is for a micro lens having a diameter of about 50 mm. An ultrasonic transducer 20 is attached to the bottoms of the first tank 1 to the fourth tank 4. Further, the first tank 1 and the second tank 2 are connected by a distillation regenerator 21, and the waste liquid in the first tank 1 is distilled and regenerated and resupplied to the second tank 2. The "EE-3110" solution in the third tank 3 and the fourth tank 4 has a structure in which it circulates with a preliminary tank (not shown), and is filtered. Both the filtering flow rate and the regeneration flow rate were adjusted to about 3 liters / min. The liquid temperature of the first tank 1 and the second tank 2 is 40 ° C, and the liquid temperature of the third tank 3 and the fourth tank 4 is 25 °
C, the air temperature of the fifth tank 5 was room temperature, and the hot air temperature of the sixth tank 6 was 60 ° C.

Table 3 shows the cleaning results of this example. The evaluation was performed by visually observing under a fluorescent lamp to see if the pitch of the dish recesses was completely removed. The result of this example is at a level as good as that of the comparative example 2 shown in FIG.

[0023]

[Table 3]

Comparative Example 1 FIG. 4 shows the structure of Comparative Example 1. The first tank 1 to the fourth tank 4 are the first step for performing pitch removal using perchlorethylene, and the fifth tank 5 to the seventh tank 7 are the second step for emulsifying perchlorethylene using a surfactant. The eighth tank 8 and the ninth tank 9 are the third step of replacing the surfactant with city water, and the tenth tank to the eleventh tank 11 are the third step of replacing the city water with warm pure water. , Twelfth tank 12
Is the fourth step of drying with warm air. The washing sample and washing conditions in this comparative example are the same as those in Examples 1 and 2, and the results are shown in Table 1.

Comparative Example 2 FIG. 5 shows the structure of Comparative Example 2 corresponding to Example 3. The first tank 1 to the third tank 3 are pitch removing steps using trichlene, and ultrasonic cleaning is performed by the ultrasonic vibrator 20. The fourth tank 4 is a drying process and uses trichlene vapor. When the washing sample and the washing conditions were the same as in Example 3, there was no problem in the washing quality.

[0026]

Industrial Applicability According to the present invention, a processed object is immersed in a non-aqueous solvent and ultrasonically cleaned, and then immersed in a hydrophilic solvent or a highly volatile non-aqueous solvent and ultrasonically cleaned. Also, after the processed object is immersed in a water-based solvent and ultrasonically cleaned, immersed in a hydrophilic solvent and ultrasonically cleaned, further immersed in a highly volatile non-aqueous solvent The cleaning is performed by ultrasonic waves, which makes it possible to obtain a good cleaning finish and shorten the cleaning line.

[Brief description of drawings]

FIG. 1 is a side view showing a configuration of a first embodiment.

FIG. 2 is a side view showing the configuration of the second embodiment.

FIG. 3 is a side view showing the configuration of the third embodiment.

FIG. 4 is a side view showing the configuration of Comparative Example 1.

5 is a side view showing the configuration of Comparative Example 2. FIG.

Claims (2)

[Claims] 1. The object to be cleaned after processing is immersed in a non-aqueous solvent and ultrasonically cleaned, and then immersed in a hydrophilic solvent or a highly volatile non-aqueous solvent and ultrasonically cleaned. How to wash. 2. The processed object is immersed in a water-based solvent and ultrasonically cleaned, then immersed in a hydrophilic solvent and ultrasonically cleaned, and further immersed in a highly volatile non-aqueous solvent. Cleaning method characterized by ultrasonic cleaning.