JPH0863791A - Optical information recording medium and manufacturing method thereof - Google Patents

Optical information recording medium and manufacturing method thereof

Info

Publication number
JPH0863791A
JPH0863791A JP6225691A JP22569194A JPH0863791A JP H0863791 A JPH0863791 A JP H0863791A JP 6225691 A JP6225691 A JP 6225691A JP 22569194 A JP22569194 A JP 22569194A JP H0863791 A JPH0863791 A JP H0863791A
Authority
JP
Japan
Prior art keywords
optical information
recording medium
information recording
layer
alloy film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6225691A
Other languages
Japanese (ja)
Other versions
JP3336422B2 (en
Inventor
Kenichi Aihara
謙一 相原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP22569194A priority Critical patent/JP3336422B2/en
Publication of JPH0863791A publication Critical patent/JPH0863791A/en
Application granted granted Critical
Publication of JP3336422B2 publication Critical patent/JP3336422B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

(57)【要約】 【目的】 色素の特性を変えずに、かつディスクとして
の特性を落とすことなく、容易に記録感度を上げること
ができる追記型光ディスク、及びその製造方法を提供す
る。 【構成】 透光性を有する基板1と、基板1上に色素材
料からなる記録層2と、記録層2上に反射層3と、反射
層3上に保護層4とを有する光情報記録媒体であって、
反射層3をAu−Ti合金膜とする。この合金膜はCo
−スパッタリング法により形成する。この場合、Auタ
ーゲットに入力するスパッタリングパワーは一定にし、
Tiターゲットに入力するスパッタリングパワーを次第
に減少させることにより、Au−Ti合金膜のTi組成
比が、記録層2から保護層4へ向かって減少する光情報
記録媒体を容易に製造することができる。
(57) [Summary] [PROBLEMS] To provide a write-once optical disc capable of easily increasing the recording sensitivity without changing the characteristic of the dye and without deteriorating the characteristic of the disc, and a method for producing the same. An optical information recording medium having a translucent substrate 1, a recording layer 2 made of a dye material on the substrate 1, a reflective layer 3 on the recording layer 2, and a protective layer 4 on the reflective layer 3. And
The reflective layer 3 is an Au-Ti alloy film. This alloy film is Co
-It is formed by a sputtering method. In this case, keep the sputtering power input to the Au target constant,
By gradually reducing the sputtering power input to the Ti target, it is possible to easily manufacture an optical information recording medium in which the Ti composition ratio of the Au—Ti alloy film decreases from the recording layer 2 toward the protective layer 4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、レーザー光による情報
の記録・再生を行う光ディスクに関し、さらに詳しく
は、コンパクトディスク(CD)あるいはコンパクトデ
ィスク−ROM(CD−ROM)対応の追記型光ディス
クに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical disk for recording / reproducing information by laser light, and more particularly to a write-once optical disk compatible with a compact disk (CD) or a compact disk-ROM (CD-ROM).

【0002】[0002]

【従来の技術】集光レーザー光による情報記録媒体の中
で、オーディオ等の音楽再生用としてCDが、またコン
ピュータ−ROMとしてCD−ROMが、それぞれ広く
普及している。このようなCD、CD−ROMは通常ポ
リカーボネート等の透明基板表面にCDフォーマット信
号またはCD−ROMフォーマット信号を有するピット
列を射出成形時に形成し、その上からアルミニウム、金
等を蒸着あるいはスパッタリングにより反射膜として設
け、さらに保護膜をコートして作製する。
2. Description of the Related Art Among information recording media using a condensed laser beam, a CD for reproducing music such as audio and a CD-ROM for computer-ROM have been widely spread. Such CDs and CD-ROMs are usually formed by forming a pit string having a CD format signal or a CD-ROM format signal on the surface of a transparent substrate such as polycarbonate at the time of injection molding, and reflecting aluminum, gold or the like by vapor deposition or sputtering. It is provided as a film and further coated with a protective film to manufacture.

【0003】一方、編集機能を有する追記型光ディスク
としてはシアニン、フタロシアニン等の有機化合物(色
素)を記録膜とし、その上に金等の反射膜を設けて反射
率を確保する方法が実用化されている。
On the other hand, as a write-once type optical disk having an editing function, a method of making an organic compound (dye) such as cyanine or phthalocyanine a recording film and providing a reflective film of gold or the like on the recording film to secure the reflectance has been put into practical use. ing.

【0004】[0004]

【発明が解決しようとする課題】しかしながら前記色素
では、その光安定性等の特性と、ディスクにしたときの
記録感度との間に密接な関係があり、光安定性等の特性
を落とさずに記録感度を上げるのは難しいという問題が
あった。
However, in the above-mentioned dye, there is a close relationship between the characteristics such as the light stability and the recording sensitivity when formed into a disc, and the characteristics such as the light stability are not deteriorated. There is a problem that it is difficult to increase the recording sensitivity.

【0005】本発明は、この点に鑑みなされたもので、
その目的は、色素の特性を変えずに、かつディスクとし
ての特性を落とすことなく、容易に記録感度を上げるこ
とができる追記型光ディスク、及びその製造方法を提供
することににある。
The present invention has been made in view of this point,
An object of the present invention is to provide a write-once type optical disc which can easily increase the recording sensitivity without changing the characteristic of the dye and without deteriorating the characteristic of the disc, and a method for manufacturing the same.

【0006】[0006]

【課題を解決するための手段】この問題を解決するた
め、請求項1の光情報記録媒体は、図1に示すように、
透光性を有する基板1と、この基板1上に色素材料から
構成した記録層2と、この記録層2上に反射層3と、こ
の反射層3上に保護層4とを有する光情報記録媒体であ
って、前記反射層3がAu−Ti合金膜であることを特
徴とする。
In order to solve this problem, an optical information recording medium according to a first aspect of the present invention, as shown in FIG.
Optical information recording having a transparent substrate 1, a recording layer 2 made of a dye material on the substrate 1, a reflective layer 3 on the recording layer 2, and a protective layer 4 on the reflective layer 3. In the medium, the reflective layer 3 is an Au-Ti alloy film.

【0007】請求項2に記載の光情報記録媒体は、請求
項1において、前記Au−Ti合金膜のTi組成比が
0.1〜10wt%であることを特徴とする。
According to a second aspect of the present invention, there is provided the optical information recording medium according to the first aspect, wherein the Ti composition ratio of the Au—Ti alloy film is 0.1 to 10 wt%.

【0008】請求項3に記載の光情報記録媒体は、請求
項1において、前記Au−Ti合金膜の膜厚が500Å
以上であることを特徴とする。
An optical information recording medium according to a third aspect of the present invention is the optical information recording medium according to the first aspect, wherein the film thickness of the Au--Ti alloy film is 500Å.
It is characterized by the above.

【0009】請求項4に記載の光情報記録媒体は、請求
項1または2において、前記Au−Ti合金膜のTi組
成比が、該合金膜の厚さ方向に変化していることを特徴
とする。
An optical information recording medium according to a fourth aspect is the optical information recording medium according to the first or second aspect, wherein the Ti composition ratio of the Au—Ti alloy film changes in the thickness direction of the alloy film. To do.

【0010】請求項5に記載の光情報記録媒体は、請求
項4において、前記Au−Ti合金膜のTi組成比が、
前記記録層から前記保護層へ向かって減少していること
を特徴とする。
An optical information recording medium according to a fifth aspect is the optical information recording medium according to the fourth aspect, wherein the Ti composition ratio of the Au--Ti alloy film is:
It is characterized by decreasing from the recording layer toward the protective layer.

【0011】請求項6に記載の光情報記録媒体の製造方
法は、透光性を有する基板と、この基板上に色素材料か
ら構成した記録層と、この記録層上に反射層と、この反
射層上に保護層とを有する光情報記録媒体であって、前
記反射層がAu−Ti合金膜であるものを製造するに際
し、このAu−Ti合金膜をスパッタリング法で作製す
ることを特徴とする。
According to a sixth aspect of the present invention, there is provided a method of manufacturing an optical information recording medium, wherein a transparent substrate, a recording layer made of a dye material on the substrate, a reflective layer on the recording layer, and the reflective layer. In producing an optical information recording medium having a protective layer on the layer, wherein the reflective layer is an Au-Ti alloy film, the Au-Ti alloy film is produced by a sputtering method. .

【0012】[0012]

【作用】請求項1の光情報記録媒体においては、反射層
を従来のAu膜からAu−Ti合金膜に変えたことによ
り、その熱伝導率が下がる。このため記録層の熱が逃げ
にくくなり、記録感度が上昇する。
In the optical information recording medium according to the first aspect of the present invention, the thermal conductivity is lowered by changing the conventional Au film from the conventional Au film to the Au-Ti alloy film. Therefore, the heat of the recording layer is hard to escape, and the recording sensitivity is increased.

【0013】請求項1の光情報記録媒体においては、A
u−Ti合金膜を設けたことにより熱伝導率は下がる
が、同時に反射率も下がってしまう。そこで、請求項
2,3においてAu−Ti合金膜のTi組成比を0.1
〜10wt%とし、かつ膜厚を500Å以上にすること
により、この合金膜の熱伝導率を下げるとともに、その
反射率の低下を抑えることができる。
In the optical information recording medium of claim 1, A
By providing the u-Ti alloy film, the thermal conductivity decreases, but at the same time the reflectance also decreases. Therefore, in claims 2 and 3, the Ti composition ratio of the Au-Ti alloy film is set to 0.1.
By setting the content to 10 wt% and the film thickness to 500 Å or more, it is possible to reduce the thermal conductivity of this alloy film and suppress the reduction of its reflectance.

【0014】なお、Tiの組成比が0.1wt%未満で
は反射率は低下しないが、熱伝導率も下がらない。Ti
の組成比が10wt%を超えると、熱伝導率は下がる
が、反射率も下がってしまう。また、Au−Ti合金膜
の膜厚が500Å未満であると膜厚の減少とともに反射
率も低下するが、膜厚が500Å以上であれば反射率は
一定となる。
When the Ti composition ratio is less than 0.1 wt%, the reflectance does not decrease, but the thermal conductivity also does not decrease. Ti
When the composition ratio of the above exceeds 10 wt%, the thermal conductivity decreases, but the reflectance also decreases. Further, when the film thickness of the Au—Ti alloy film is less than 500 Å, the reflectance decreases as the film thickness decreases, but when the film thickness is 500 Å or more, the reflectance becomes constant.

【0015】請求項4においては、前記Au−Ti合金
膜のTi組成比を、この合金膜の膜厚方向に変化させる
ことで、熱伝導率の高い部分と、低い部分とを設けるこ
とができる。特に、請求項5のとおりにTi組成比を、
記録層から保護層へ向かって減少させることで、記録層
に接する付近では熱伝導率が低く、保護層に近づくに従
って熱伝導率が高くなり、同時に反射率も高くなる。す
なわち、Tiの組成比を合金膜の膜厚方向に変化させな
い場合に比べて、反射率を下げずに記録感度を上げるこ
とできる。
In the present invention, by changing the Ti composition ratio of the Au—Ti alloy film in the film thickness direction of the alloy film, a portion having high thermal conductivity and a portion having low thermal conductivity can be provided. . In particular, the Ti composition ratio according to claim 5 is
By decreasing from the recording layer to the protective layer, the thermal conductivity is low in the vicinity of the contact with the recording layer, the thermal conductivity becomes higher as it approaches the protective layer, and at the same time the reflectance becomes higher. That is, the recording sensitivity can be increased without lowering the reflectance as compared with the case where the composition ratio of Ti is not changed in the film thickness direction of the alloy film.

【0016】請求項6に記載の製造方法においては、A
u−Ti合金膜を作製する場合、スパッタリング法、特
にCo−スパッタリング法を用い、Auターゲットに入
力するスパッタリングパワーは一定にし、Tiターゲッ
トに入力するスパッタリングパワーを次第に減少させて
いくという方法を採れば、請求項4または5の光情報記
録媒体を容易に製造することができる。
In the manufacturing method according to claim 6, A
When a u-Ti alloy film is formed, a sputtering method, particularly a Co-sputtering method is used, and the sputtering power input to the Au target is kept constant, and the sputtering power input to the Ti target is gradually reduced. The optical information recording medium according to claim 4 or 5 can be easily manufactured.

【0017】[0017]

【実施例】以下、実施例により本発明を具体的に説明す
る。 実施例1(図1参照) 深さ1400Å、幅0.45μm、ピッチ1.6μmの
案内溝を有する厚さ1.2mm、外径120mm、内径
15mmのポリカーボネート基板1上にフタロシアニン
系色素の記録層2を、スピンコーターによって膜厚16
00Åに成膜した。次に、この記録層2上に反射層3と
してAu−Ti合金膜を1200Åに成膜した。この場
合、AuとTiのCo−スパッタリング法を用い、Ti
組成比が8wt%となるようにAuとTiのそれぞれス
パッタリングパワーを調整した。更に、この合金膜の上
に紫外線硬化樹脂により膜厚5μmの保護層4を設けて
光ディスクを作製した。
EXAMPLES The present invention will be specifically described below with reference to examples. Example 1 (see FIG. 1) Recording layer of phthalocyanine dye on a polycarbonate substrate 1 having a depth of 1400Å, a width of 0.45 μm, a guide groove having a pitch of 1.6 μm, a thickness of 1.2 mm, an outer diameter of 120 mm, and an inner diameter of 15 mm. 2 with a spin coater to a film thickness of 16
A film was formed on 00Å. Next, an Au—Ti alloy film was formed as a reflective layer 3 on the recording layer 2 to a thickness of 1200 Å. In this case, the Co-sputtering method of Au and Ti is used, and Ti
The sputtering powers of Au and Ti were adjusted so that the composition ratio was 8 wt%. Further, a protective layer 4 having a film thickness of 5 μm was provided on the alloy film by using an ultraviolet curable resin to manufacture an optical disk.

【0018】実施例2 反射層以外は実施例1と同一で、反射層はAuとTiの
Co−スパッタリングによって以下のように成膜した。
すなわち、スパッタリング開始時のTi組成比が8wt
%となるようにAuとTiのそれぞれのスパッタリング
パワーを調整し、Tiのパワーのみを徐々に減少させ、
スパッタリング終了と同時にゼロとなるようにした。こ
れにより反射層として、Tiの組成比が記録層から保護
層に向かって減少する、膜厚1200ÅのAu−Ti合
金膜を成膜した光ディスクを作製した。
Example 2 The same as Example 1 except for the reflective layer, the reflective layer was formed by Co-sputtering of Au and Ti as follows.
That is, the Ti composition ratio at the start of sputtering is 8 wt.
%, Adjust the sputtering powers of Au and Ti respectively, and gradually reduce only the power of Ti,
It was set to zero at the same time as the end of sputtering. As a result, an optical disk having a film thickness of 1200 Å formed of an Au—Ti alloy film, in which the composition ratio of Ti decreases from the recording layer to the protective layer, was produced as a reflective layer.

【0019】比較例1 反射層以外は上記実施例1,2と同一で、反射層はAu
のターゲットをスパッタリングすることにより、膜厚1
200ÅのAu膜を成膜した光ディスクを作製した。
Comparative Example 1 The same as in Examples 1 and 2 except for the reflective layer, and the reflective layer was Au.
By sputtering the target of
An optical disk having a 200Å Au film formed thereon was produced.

【0020】このようにして作製した実施例1,2の光
ディスクの反射率はそれぞれ73%と80%で、比較例
1の光ディスクの反射率は82%であった。次に、波長
785nmの半導体レーザーを使用して線速度1.4m
/secでEFM−CDフォーマット信号を記録したと
ころ、最適レーザーパワーが実施例1,2の光ディスク
ではそれぞれ7.0mWと7.7mWで、比較例1の光
ディスクでは8.2mWでそれぞれ記録可能であった。
以上の結果をまとめると、下記[表1]のとおりであ
る。
The optical discs of Examples 1 and 2 produced in this manner had a reflectance of 73% and 80%, respectively, and the optical disc of Comparative Example 1 had a reflectance of 82%. Next, using a semiconductor laser with a wavelength of 785 nm, a linear velocity of 1.4 m
When the EFM-CD format signal was recorded at / sec, the optimum laser powers were 7.0 mW and 7.7 mW for the optical discs of Examples 1 and 2, respectively, and 8.2 mW for the optical disc of Comparative Example 1. It was
The above results are summarized in [Table 1] below.

【0021】[0021]

【表1】 [Table 1]

【0022】[0022]

【発明の効果】以上の説明で明らかなように、本発明の
光情報記録媒体では、反射層にAu−Ti合金膜を用い
(請求項1)、そのTi組成比と膜厚を規定する(請求
項2,3)ことにより、反射率の低下を抑えつつ、記録
感度を向上させることができる。また、Au−Ti合金
膜のTi組成比を記録層から保護層に向かって減少させ
る(請求項5)ことで、反射率を殆ど低下させることな
く記録感度を向上させることができる。さらに、Au−
Ti合金膜をスパッタリング法で作製する(請求項6)
ことにより、上記特性を有する光情報記録媒体を容易に
製造することができる。
As is apparent from the above description, in the optical information recording medium of the present invention, an Au-Ti alloy film is used for the reflective layer (claim 1), and the Ti composition ratio and the film thickness thereof are specified ( According to claims 2 and 3, the recording sensitivity can be improved while suppressing the decrease in reflectance. Further, by decreasing the Ti composition ratio of the Au—Ti alloy film from the recording layer toward the protective layer (claim 5), the recording sensitivity can be improved without substantially reducing the reflectance. Furthermore, Au-
A Ti alloy film is formed by a sputtering method (claim 6).
As a result, an optical information recording medium having the above characteristics can be easily manufactured.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る光情報記録媒体の構成を示す断面
図である。
FIG. 1 is a sectional view showing a configuration of an optical information recording medium according to the present invention.

【符号の説明】[Explanation of symbols]

1 基板 2 記録層 3 反射層 4 保護層 1 substrate 2 recording layer 3 reflective layer 4 protective layer

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 透光性を有する基板と、この基板上に色
素材料から構成した記録層と、この記録層上に反射層
と、この反射層上に保護層とを有する光情報記録媒体で
あって、前記反射層がAu−Ti合金膜であることを特
徴とする光情報記録媒体。
1. An optical information recording medium comprising a transparent substrate, a recording layer made of a dye material on the substrate, a reflective layer on the recording layer, and a protective layer on the reflective layer. An optical information recording medium, wherein the reflective layer is an Au-Ti alloy film.
【請求項2】 前記Au−Ti合金膜のTi組成比が
0.1〜10wt%であることを特徴とする請求項1に
記載の光情報記録媒体。
2. The optical information recording medium according to claim 1, wherein the Ti composition ratio of the Au—Ti alloy film is 0.1 to 10 wt%.
【請求項3】 前記Au−Ti合金膜の膜厚が500Å
以上であることを特徴とする請求項1に記載の光情報記
録媒体。
3. The film thickness of the Au—Ti alloy film is 500Å
The optical information recording medium according to claim 1, which is the above.
【請求項4】 前記Au−Ti合金膜のTi組成比が、
該合金膜の厚さ方向に変化していることを特徴とする請
求項1または2に記載の光情報記録媒体。
4. The Ti composition ratio of the Au—Ti alloy film is
The optical information recording medium according to claim 1 or 2, wherein the thickness of the alloy film changes in the thickness direction.
【請求項5】 前記Au−Ti合金膜のTi組成比が、
前記記録層から前記保護層へ向かって減少していること
を特徴とする請求項4に記載の光情報記録媒体。
5. The Ti composition ratio of the Au—Ti alloy film is
The optical information recording medium according to claim 4, wherein the optical information recording medium has a decreasing amount from the recording layer toward the protective layer.
【請求項6】 透光性を有する基板と、この基板上に色
素材料から構成した記録層と、この記録層上に反射層
と、この反射層上に保護層とを有する光情報記録媒体で
あって、前記反射層がAu−Ti合金膜であるものを製
造するに際し、このAu−Ti合金膜をスパッタリング
法で作製することを特徴とする光情報記録媒体の製造方
法。
6. An optical information recording medium comprising a transparent substrate, a recording layer made of a dye material on the substrate, a reflective layer on the recording layer, and a protective layer on the reflective layer. A method for manufacturing an optical information recording medium, characterized in that, when the reflective layer is an Au-Ti alloy film, the Au-Ti alloy film is formed by a sputtering method.
JP22569194A 1994-08-26 1994-08-26 Optical information recording medium and method of manufacturing the same Expired - Fee Related JP3336422B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22569194A JP3336422B2 (en) 1994-08-26 1994-08-26 Optical information recording medium and method of manufacturing the same

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7018696B2 (en) 2003-04-18 2006-03-28 Target Technology Company Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7045188B2 (en) 1998-06-22 2006-05-16 Nee Han H Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7314657B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7314659B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or semi-reflective layer of an optical storage medium
US7314660B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7316837B2 (en) 2000-07-21 2008-01-08 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7374805B2 (en) 2000-07-21 2008-05-20 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7045188B2 (en) 1998-06-22 2006-05-16 Nee Han H Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7291374B2 (en) 1998-06-22 2007-11-06 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7384677B2 (en) 1998-06-22 2008-06-10 Target Technology Company, Llc Metal alloys for the reflective or semi-reflective layer of an optical storage medium
US7314657B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7314659B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or semi-reflective layer of an optical storage medium
US7314660B2 (en) 2000-07-21 2008-01-01 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7316837B2 (en) 2000-07-21 2008-01-08 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7374805B2 (en) 2000-07-21 2008-05-20 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US7018696B2 (en) 2003-04-18 2006-03-28 Target Technology Company Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium

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