JPH0868942A - Lighting system for optical microscope - Google Patents

Abstract

PURPOSE: To provide a lighting system constituted so that an object such as the impression of a probe hardly viewed by general lighting can be viewed with extremely clear contrast. CONSTITUTION: In the illumination device provided with a Koehler lighting system for emitting uniform illumination light from an objective lens 14 by projecting the image of a light source at the pupil position of the lens 14, it is constituted by being provided with plural light sources 22 which are arranged at plural places being within a vertical plane to an optical axis and corresponding to the vicinity of the peripheral part of the pupil of the lens 14 at a position M1 conjugate with a focal place on the back side of an objective lens 12 on the optical path of the Koehler illumination system or near it and which are smaller than the diameter of the pupil of the lens 14 and a light source switching means 26 controlling the plural light sources 22 so as to independently flicker.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for inspecting products such as semiconductors and liquid crystal panels. Regarding the device.

[0002]

2. Description of the Related Art In the technical field of manufacturing semiconductors, liquid crystal display panels and the like, optical microscopes are used for visual inspection of semiconductor wafers and liquid crystal substrates. The simplest inspection method using an optical microscope is a method in which an observer visually observes an image magnified by an optical system of the optical microscope through an eyepiece lens to find a defect or the like. Also, in an automated inspection system, an image enlarged by the optical system of the optical microscope is displayed on the TV.
An image is taken with a camera or the like, and the taken inspection image is subjected to image processing to detect defects and the like.

An electric operation test by a prober is one of semiconductor manufacturing processes. As shown in FIG. 7A, some bonding pads 2 corresponding to the input / output terminals are drawn out for each chip block 1 in the wafer. Therefore, the bonding pads 2a arbitrarily selected from the bonding pads 2a are selected.
As shown in FIG. 2B, the probe needle 3 is brought into contact with
The electrical characteristics of the chip are measured. The quality of the chip can be determined based on the measured electrical characteristics.

By the way, in the probe test, the probe needle 3 is brought into contact with the bonding pad 2a with an extremely weak pressure.
As shown in (c), the indentation 4 may remain on the bonding pad 2a.

Chips that have passed the probe test are diced and bonded to a lead frame, and wires are bonded between the bonding pads and the leads. However, depending on the depth and size of the indentation 4 remaining on the bonding pad, defective bonding may occur, which may result in defective bonding at the final packaging stage.

Therefore, after the probe test, the indentation 4 of the bonding pad 2a is observed with an optical microscope,
It is necessary to judge the quality of the indentation 4. FIG. 8 is a diagram showing an illumination optical system of a general optical microscope used for appearance inspection of semiconductor wafers and liquid crystal substrates. This illumination optical system is an epi-illumination type Koehler illumination system which is known to easily obtain uniform illumination light with little illumination unevenness.

The epi-illumination Koehler illumination system forms a primary image of the light source 11 (filament) at the primary image position M1 by the condenser lens 12, and the primary image is formed by the relay lens 13 at the pupil of the objective lens 14 (rear focal position M2). ) To transmit the light from each point of the light source 11 to the objective lens 14 as a set of parallel lights having different angles with respect to the sample surface of the sample S.
Eject from the tip of. Therefore, uniform brightness that is not affected by the shape of the light source 11 can be obtained on the sample surface, and an angle of illumination light that completely fills the numerical aperture (NA) of the objective lens 14 can be obtained. Further, in the epi-illumination type Koehler illumination system, the numerical aperture and brightness of the illumination light can be changed by putting a stop at the primary image position M1.

On the other hand, the light scattered by the sample S travels along the light flux indicated by the dotted line in the figure, passes through the half mirror 15, and is imaged on the observation image plane by the objective lens 14. An image of the sample S can be obtained by disposing the image pickup surface of the TV camera 16 on this observation image surface.

Although the illumination optical system shown in FIG. 8 is epi-illumination, there is also an illumination optical system in which the Koehler illumination principle is applied to transmitted illumination, and has the same advantages. If the bonding pad after the probe test is illuminated with the above-mentioned Koehler illumination and the appearance is inspected with an optical microscope, the indentation of the bonding pad can be observed under ideal illumination conditions.

[0010]

However, since the indentation of the bonding pad is like a scratch caused by the probe needle sliding slightly on the bonding pad at a low pressure, the Koehler of the epi-illumination system described above is used. Even with lighting, it was extremely difficult to observe. In particular, when image processing of the image captured by the TV camera 16 is performed to automatically measure the area or position of the indentation, the contrast is extremely low, and thus it is not possible to sufficiently bring about the effect.

The present invention has been made in view of the above-mentioned circumstances, and provides a very clear contrast to an object that is difficult to see under general illumination, such as an indentation of a probe needle attached to a bonding pad by a probe test. It is an object of the present invention to provide an illuminating device for an optical microscope which can be seen and whose inspection ability can be improved.

[0012]

The present invention has taken the following means in order to achieve the above object. The present invention corresponding to claim 1 is an illumination device for an optical microscope, comprising: a Koehler illumination system for emitting a uniform illumination light from the objective lens by projecting a light source image on a pupil position of the objective lens. At a position conjugate with the rear focal plane of the objective lens on the optical path of the system or a position in the vicinity thereof, it is arranged at a plurality of positions in the plane perpendicular to the optical axis and near the peripheral portion of the pupil of the objective lens. A plurality of light sources smaller than the pupil diameter of the objective lens and a light source switching means for independently performing point reduction control of the plurality of light sources are provided.

The present invention corresponding to claim 2 is an illuminating device for an optical microscope, comprising a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens. A plurality of positions on the optical path of the Koehler illumination system, which are in a plane conjugate to the rear focal plane of the objective lens or in the vicinity thereof, in a plane perpendicular to the optical axis and near the periphery of the pupil of the objective lens. A plurality of optical fibers each having an output end face arranged therein, a plurality of light emitting portions which are respectively provided corresponding to the respective optical fibers, and are capable of independent point reduction control, and an input end face of the optical fiber and a corresponding optical fiber. A plurality of condensing units that are arranged between the light emitting units provided and condense the light emitted from the light emitting units on the incident end face of the corresponding optical fiber; It has a configuration comprising a light source switching means for controlling the points down parts independently.

The present invention corresponding to claim 3 is an illuminating device for an optical microscope, comprising a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens. At the light source position of the Koehler illumination system, a plurality of concentric circles having different diameters centered on the optical axis are arranged in a plane perpendicular to the optical axis, each of which is smaller than the pupil diameter of the objective lens. And a diameter corresponding to the diameters of the plurality of concentric circles, respectively, and can be freely inserted into and removed from a position conjugate with the rear focal plane of the objective lens on the optical path of the Koehler illumination system or a position in the vicinity thereof. A plurality of light-shielding masks provided is provided.

The present invention corresponding to claim 4 is an illuminating device for an optical microscope, comprising a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens. At the position conjugate with the rear focal plane of the objective lens on the optical path of the Koehler illumination system or in the vicinity thereof, three light sources that generate light of spectral components respectively corresponding to the spectral characteristics of the color filters of the three primary colors are It is characterized in that they are respectively arranged at three different positions corresponding to the vicinity of the peripheral portion of the pupil of the objective lens in a plane perpendicular to the axis.

The present invention corresponding to claim 5 is an illuminating device for an optical microscope, comprising a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens. At least at a position corresponding to the vicinity of the peripheral part of the pupil of the objective lens in a plane perpendicular to the optical axis, at a position conjugate with the rear focal plane of the objective lens on the optical path of the Koehler illumination system or at a position in the vicinity thereof. At least three optical fibers having their respective output end faces arranged at three locations, a light emitting part provided on the side of the optical fiber's input end face, and light emitted from said light emitting part are made incident on the respective input end faces of said optical fibers. It is configured to include a condensing unit and color filters of three primary colors provided on either the incident end face or the output end face of each optical fiber.

The present invention corresponding to claim 6 is an illuminating device for an optical microscope, comprising a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens. At a position conjugate with the rear focal plane of the objective lens on the optical path of the Koehler illumination system or in the vicinity thereof, at a position corresponding to the vicinity of the peripheral part of the pupil of the objective lens in a plane perpendicular to the optical axis. A rotary body having a through hole smaller than the pupil diameter of the objective lens and rotatably provided about the optical axis, and a light emitting unit for irradiating the entire back surface of the rotary body with light are employed.

[0018]

The present invention has the following effects by taking the above measures. According to the present invention corresponding to claim 1, since the light source images are incident from a plurality of different positions in the vicinity of the peripheral portion of the pupil of the objective lens, the sample is illuminated with the illumination light flux in which different directions are emphasized according to the pupil incident positions. Is illuminated. Therefore, in observing the indentation after the probe test, if a plurality of light sources are sequentially turned off, one of the illumination luminous fluxes becomes the illumination that obtains the highest contrast in the direction of the indentation, and the indentation image with high contrast is surely obtained. Can be obtained.

According to the present invention corresponding to claim 2, the light emitted from the light emitting portion is condensed on the incident end face of the corresponding optical fiber by the corresponding condenser portion. Since the exit end face of the optical fiber is arranged at a position corresponding to the vicinity of the peripheral part of the pupil of the objective lens, the exit end face of the optical fiber serves as a light source, and the light source images are incident from different positions near the peripheral part of the objective lens pupil. It will be. By switching the light emitting section to be driven by the light source switching means, any one of the illumination luminous fluxes becomes the illumination that obtains the highest contrast with respect to the indentation forming direction.

According to the present invention corresponding to claim 3, by inserting a light-shielding mask smaller than the pupil diameter of the objective lens at a position conjugate with the rear focal plane of the objective lens or a position in the vicinity thereof, the light-shielding mask is provided. Only the light from a plurality of light sources arranged on the circumference having a diameter larger by one step is incident from the peripheral portion of the pupil of the objective lens. It should be noted that the light source arranged on the circumference having a diameter larger than the light-shielding mask by two steps or more will not be vignetting and enter the pupil of the objective lens. Therefore, replacement of the objective lenses having different pupil diameters can be dealt with by replacement of the light shielding mask.

According to the present invention corresponding to claim 4, the three light sources provided at the position conjugate with the rear focal plane of the objective lens or in the vicinity thereof respectively correspond to the spectral characteristics of the three primary color filters. Light of a spectral component is incident from a position corresponding to the vicinity of the peripheral portion of the pupil of the objective lens. Therefore,
By capturing the light from the sample illuminated by such an illumination light flux with a color TV camera, it is possible to separately capture images by the illumination light flux in which three different directions are emphasized in one illumination operation.

According to the present invention corresponding to claim 5, the light transmitted through the color filters of the three primary colors attached to the incident end surface or the output end surface of at least three optical fibers is emitted from the output end surface of the optical fiber and the objective. The light is incident from different positions near the periphery of the lens pupil.

According to the present invention corresponding to claim 6, the through hole of the rotating body provided at a position conjugate with the rear focal plane of the objective lens or in the vicinity thereof is provided near the peripheral portion of the pupil of the objective lens. Since it is arranged at a corresponding position, the light that has passed through the through hole of the rotating body enters from one point near the periphery of the pupil.
On the other hand, since the through-hole moves in the vicinity of the peripheral part of the pupil in accordance with the motion of the rotating body, the rotating body is intermittently stopped and the back surface of the rotating body is irradiated with light. Light can be incident from a plurality of positions.

[0024]

Embodiments of the present invention will be described below. FIG. 1 is a diagram showing an embodiment in which an illumination device according to the present invention is applied to an epi-illumination optical system of an optical microscope. Note that FIG.
Components having the same functions as those of the illumination optical system shown in FIG.

In this embodiment, the pupil position M2 of the objective lens 14 is
One side surface of the fiber fixture 21 is arranged at a position M1 which is conjugate with. Although the condenser lens shown in FIG. 8 is not provided in this embodiment, it can be said that M1 on the optical path is optically the same as the primary image position M1 in FIG. 8 in that a light source image is formed.

The fiber fixing member 21 has a disk shape and has four fixing holes 22-1 to 22-concentrically arranged at equal intervals.
4 is penetratingly formed in parallel with the optical axis, and is inserted in the optical path in a state where the center of the circle coincides with the optical axis and is perpendicular to the optical axis. Each of the fixing holes 22-1 to 22-4 has an optical fiber 23-1 to 23 having a diameter substantially the same as the diameter of the hole.
-4 is inserted and fixed.

Here, as shown in FIG. 2, four fixing holes 2 are provided.
The diameter r of the largest circle Q tangent to 2-1 to 22-4 is
It is matched with the radius of the pupil of the objective lens 14. Specifically, the pupil radius of the objective lens 14 is f · NA, where f is the focal length and NA is the brightness. Therefore, the pupil conjugate plane M
The pupil radius r at 1 is r = f · NA / β when the imaging magnification of the relay lens 13 is β, so the diameter r of the circle Q is f.
・ Set to NA / β.

On the other hand, the light source section of the present lighting device has four filaments 24-1 to 24-4 provided corresponding to the optical fibers 23-1 to 23-4, and each filament 24.
Optical fiber 23 corresponding to the light emitted from -1 to 24-4
Four condensing lenses 2 for condensing on the incident ends of -1 to 23-4
5-1 to 25-4 and a light source switching circuit 26 that switches the filament to be emitted from the outside according to a switching command. The switching command to the light source switching circuit 26 is configured such that the switching operation is automatically instructed by an observer operating a switch (not shown) or in synchronization with the image capturing timing of the automatic image capturing device. I shall.

In the present embodiment configured as described above, when a switch (not shown) is operated to reduce the four filaments 24-1 to 24-4 from the light source switching circuit 26 in an arbitrary order, each optical fiber is At the conjugate pupil position M1 of the objective lens 14 in which the exit end faces 23-1 to 23-4 are arranged, the light source images sequentially enter four locations near the periphery of the pupil. The light source image incident near the periphery of the pupil at the conjugate pupil position M1 is transmitted to the pupil position M2 of the objective lens 14 by the relay lens 13. Then, an illumination light flux whose direction corresponding to the pupil entrance position is emphasized is emitted from the emission end surface of the objective lens 14 toward the sample S. Each optical fiber 23-1 to 23
Since the pupil entrance position is different for each −4, the illumination light flux in which different directions are emphasized is applied to the sample S from the exit end surface of the objective lens 14.

Here, according to the experiments conducted by the inventor of the present invention on various samples, the indentation remaining on the bonding pad has a different indentation forming direction depending on the direction in which the probe needle is brought into contact. It was revealed that there is an optimal emphasis direction according to the formation direction.

Therefore, in the present embodiment, the illumination light fluxes in which the respective directions are emphasized are sequentially irradiated from the four different directions to the sample S, and the light scattered by the sample S is transmitted through the half mirrors 15 to the TV camera. An image is formed and imaged on the 16 imaging planes. From the four images obtained in this way, select the image with the highest indentation contrast,
Used to measure the area and size of the indentation. For example, the image signal output from the TV camera 16 is stored in an image memory (not shown) for each light source, an arbitrary image is taken out after the measurement, and image processing is provided with software for determining the quality of the indentation. Try to hand over to the device.

As described above, according to this embodiment, the light source images are made incident from a plurality of different positions in the vicinity of the peripheral portion of the pupil of the objective lens 14, and the sample S is sequentially illuminated by the illumination light fluxes in which different directions are emphasized. Therefore, an image of a high-contrast indentation is formed by illumination with any one of the illumination light beams, and a high-contrast indentation image can be reliably obtained.

A modification of the above-described embodiment will be described below with reference to FIGS. The modification shown in FIG.
The conjugate pupil plane M1 of the objective lens 14 is provided with a rotary plate 31 which is rotatable in a plane perpendicular to the optical axis. The rotating plate 31 is rotatable about the optical axis as a rotating shaft, and a through hole 32 is formed at a position at a distance r from the center of rotation. The distance r is calculated in the same manner as in the above embodiment. Therefore, the through hole 32 is arranged near the periphery of the pupil of the objective lens 14. Further, behind the rotary plate 31 (on the light source side), a lens 34 that illuminates the light emitted from the lamp 33 to the entire back surface of the rotary plate 31 is arranged.

In the modified example having such a configuration, when the lamp 33 is turned on, the entire back surface of the rotary plate 31 is illuminated and only the light passing through the through hole 32 of the rotary plate 31 passes through the relay lens 13 and the objective lens. The light enters from the peripheral portion of the pupil plane M2 of 14. When the rotary plate 31 is rotated, the position of the through hole 32 moves on the periphery of the conjugate pupil plane M1. Therefore,
By rotating the rotary plate 31 and sequentially moving the through holes 32, the sample S can be sequentially illuminated with illumination light beams in which respective directions are emphasized from a plurality of mutually different directions, as in the above-described embodiment. Sample S illuminated with an illumination beam
Can be captured from the TV camera 16, respectively.

Although the example in which the light source image is made incident from the peripheral portion of the pupil on the conjugate pupil plane M1 has been described, the same effect can be obtained by performing the same operation at the position of the filament 11 in FIG.

In the modification shown in FIG. 4, the four-group fiber bundle 3 is used.
5-1 to 35-4 are arranged at the position of the filament 11 in FIG. 8, and the disk-shaped masks 36-1 to 36-3 are configured to be freely inserted into and removed from the conjugate pupil plane M1 of the objective lens 14.

Each of the fiber bundles 35-1 to 35-4 is formed by aligning the emission end faces of four optical fibers and arranging them in a straight line in the direction perpendicular to the optical axis of the fiber end faces. The emission end faces of these four groups of fiber bundles 35-1 to 35-4 are radially arranged in four directions around the optical axis. On the other hand, the first disk-shaped mask 36-1 includes the fiber bundles 35-1 and 35-3 (or 35-) facing each other with the optical axis interposed therebetween.
2, 35-4) has the same diameter as the distance r1 between the second optical fibers from the inside. Similarly, the second disk-shaped mask 36-2 has the same diameter as the distance r2 between the third optical fibers, and the third disk-shaped mask 36-3 has the same distance r3 between the fourth optical fibers. Have the same diameter. 5 is 4
Figure 5 shows a plan view of a group of fiber bundles 35-1 to 35-4. It is assumed that the incident end faces of the four groups of fiber bundles 35-1 to 35-4 are provided with a light source unit configured in the same manner as in the above-described embodiment.

In the modified example thus constructed, when an objective lens having a pupil diameter of r1 is used, observation is performed without inserting any disc-shaped mask into the conjugate pupil plane M1. When the pupil diameter of the objective lens 14 is r1, the light source images by the second and outer optical fibers in each fiber bundle do not enter the pupil of the objective lens 14 and are arranged near the periphery of the pupil diameter r1. Only the light source images from the four optical fibers are incident on the pupil of the objective lens 14.

When the pupil diameter of the objective lens 14 becomes r2 due to the replacement of the objective lens, the second pupil is formed on the conjugate pupil plane M1.
The disc-shaped mask 36-2 is inserted and observed. The light source image by the first optical fiber in each fiber bundle is shielded by the second disk-shaped mask 36-2. Further, the light source images formed by the third and fourth optical fibers in each fiber bundle are outside the pupil and therefore do not enter the pupil of the objective lens 14. Therefore, only the light source image by each second optical fiber arranged near the periphery of the pupil diameter r2 is the objective lens 14
Will be incident on the pupil.

When the pupil diameter of the objective lens 14 becomes r3, the third disk-shaped mask 36-3 is formed on the conjugate pupil plane M1.
Insert and observe. The third disc-shaped mask 36-3 shields the light source images from the first and second optical fibers in each fiber bundle, and the light source image from the fourth optical fiber in each fiber bundle is outside the pupil, so that the objective lens 14 I can't get into your eyes. Therefore, only the light source image by the third optical fibers arranged near the periphery of the pupil diameter r3 is incident on the pupil of the objective lens 14.

As described above, according to this modified example, the four groups of fiber bundles 35-1 to 35-4 are arranged at the positions of the filaments 11 in FIG. 8 and the disk-shaped mask 36-having a predetermined diameter r1 to r3. 1 to 36-3 are configured to be freely inserted into and removed from the conjugate pupil plane M1 of the objective lens 14, it is only necessary to insert and remove the disk-shaped masks 36-1 to 36-3.
It is possible to sufficiently cope with the change in the pupil diameter according to the replacement of the.

In the modification shown in FIG. 6, a fiber fixing tool 41 is arranged on the conjugate pupil plane M1 of the objective lens 14, and three fixing holes 42-1 to 42-3 are formed concentrically in the fiber fixing tool 41. Then, the emission ends of the three optical fibers 43-1 to 43-3 are inserted and fixed in the respective fixing holes 42-1 to 42-3. It is the same as in the above-described embodiment that the three fixing holes 42-1 to 42-3, that is, the emitting ends of the optical fibers 43-1 to 43-3 are arranged near the periphery of the pupil of the objective lens 14. .

On the other hand, the incident end faces of the optical fibers 43-1 to 43-3 have R, G, B color filters 44- having wavelength characteristics almost equal to the three primary colors of the color TV camera.
1-44-3 are attached. The lens 46 is configured so that the light emitted from the lamp 45 is incident on each incident end face provided with the color filters 44-1 to 44-3. In addition, the color filters 44-1 to 4-4
4-3 may be attached to the emission end faces of the optical fibers 43-1 to 43-3.

In this modified example having such a configuration, the light emitted from one lamp 45 is applied to the entire incident end faces of the three optical fibers 43-1 to 43-3 by the lens 46. Each of the optical fibers 43-1 to 43-3 is attached with a color filter 44-1 to 44-4.
The light of the wavelength component transmitted through -3 is incident. Then, from the output ends of the optical fibers 43-1 to 43-3, R, G, B
The light of the corresponding wavelength component of is incident from the peripheral portion of the conjugate pupil plane M1 of the objective lens 14. As a result, the sample is simultaneously illuminated with three lights of R, G, and B wavelength components in which different directions are emphasized according to the incident position on the pupil through the relay lens 13 and the objective lens 14.

Thus, R, in which different directions are emphasized,
The light from the sample S illuminated with three lights of G and B wavelength components passes through the half mirror 15, is imaged by the TV camera 16, and is stored as a single color image in an image memory (not shown). It

As described above, according to this modification, the color filters 44-1 to 44-3 are provided on the incident end faces of the three optical fibers 43-1 to 43-3, and the three color components of the three primary colors are formed. Since the two light source images are made incident on each eclipse from different positions around the pupil of the objective lens 14, the three primary color screens of the color TV camera can be used as images of different illuminations. Images obtained by illumination from three directions can be acquired as one color image.

In the above embodiment, the light source image is incident from four locations around the pupil, but it may be incident from two locations, three locations, or five or more locations. Further, in the above-described embodiment, the end surface of the optical fiber is arranged on the conjugate pupil plane M1 to serve as a light source, but instead of the optical fiber, the other side surface of the fiber fixture 21 faces the fixing holes 22-1 to 22-4. It is also possible to directly arrange the four lamps.

Further, in the modification shown in FIG. 6, the color filters of the three primary colors are directly attached to the fixing holes 42-1 to 42-3 of the fiber fixing tool 41, and the fiber fixing tool 41 is attached.
The illumination light may be applied from the back side of the. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the gist of the present invention.

[0049]

As described above in detail, according to the present invention, it is possible to see an object with a very clear contrast that is difficult to see under general illumination, such as an indentation of a probe needle attached to a bonding pad by a probe test. Therefore, it is possible to provide an illuminating device for an optical microscope, which can improve the inspection ability.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an illumination device for an optical microscope according to an embodiment of the present invention.

FIG. 2 is a diagram showing a positional relationship between a pupil diameter of an objective lens and an emission end of an optical fiber.

FIG. 3 is a diagram showing a configuration of a main part of a first modified example.

FIG. 4 is a diagram showing a configuration of a main part of a second modified example.

5 is a plan view of an emission end face of an optical fiber bundle in the modification shown in FIG.

FIG. 6 is a diagram showing a configuration of a main part of a third modified example.

FIG. 7 is a diagram for explaining a probe test.

FIG. 8 is a configuration diagram of an epi-illumination Koehler illumination system.

[Explanation of symbols]

13 ... Relay lens, 14 ... Objective lens, 16 ... TV camera, 21 ... Fiber fixture, 22-1 to 22-4 ...
Fixing holes 23-1 to 23-4 ... Optical fiber, 24-1
-24-4 ... Filament, 25-1 to 25-4 ... Condensing lens, 26 ... Light source switching circuit, 31 ... Rotating plate, 36 ... Mask, 44-1 to 44-3 ... Color filter.

Claims (6)

[Claims] 1. An illumination device for an optical microscope including a Koehler illumination system that emits uniform illumination light from the objective lens by projecting a light source image on a pupil position of the objective lens, wherein the Koehler illumination system has an optical path on the optical path. At a position conjugate with the rear focal plane of the objective lens or in the vicinity thereof, it is arranged at a plurality of positions in the plane perpendicular to the optical axis and near the periphery of the pupil of the objective lens. An illuminating device for an optical microscope, comprising: a plurality of light sources each having a diameter smaller than that of the light source; and a light source switching unit for independently performing point reduction control of the plurality of light sources. 2. An illumination device for an optical microscope including a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens, wherein the Koehler illumination system has an optical path on the optical path. At a position conjugate with the back focal plane of the objective lens or in the vicinity thereof, each exit end face is arranged at a plurality of positions corresponding to the vicinity of the peripheral portion of the pupil of the objective lens in a plane perpendicular to the optical axis. A plurality of optical fibers, a plurality of light emitting portions which are provided corresponding to the respective optical fibers, and are capable of independent point reduction control, an incident end face of the optical fibers, and the light emitting portions which are provided corresponding to the optical fibers. A plurality of condensing units, which are disposed between the condensing units and condense the light emitted from the light emitting units on the incident end face of the corresponding optical fiber, and independently control the blinking of each of the light emitting units. Optical microscope illumination apparatus characterized by comprising a light source switching means. 3. An illumination device for an optical microscope including a Koehler illumination system that projects a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens, wherein the light source position of the Koehler illumination system is set. A plurality of light sources that are respectively arranged at a plurality of locations on a plurality of concentric circles having different diameters with respect to the center of the optical axis light source in a plane perpendicular to the optical axis, and each light source is smaller than the pupil diameter of the objective lens. A plurality of light shields each of which has a diameter corresponding to the diameter of a concentric circle, and which can be inserted into and removed from a position conjugate with the rear focal plane of the objective lens on the optical path of the Koehler illumination system or a position in the vicinity thereof. An illuminating device for an optical microscope, comprising a mask. 4. An optical microscope illumination device including a Koehler illumination system that projects a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens, wherein the Koehler illumination system has an optical path on the optical path. At a position conjugate with the rear focal plane of the objective lens or in the vicinity thereof, three light sources that generate light of spectral components respectively corresponding to the spectral characteristics of the color filters of the three primary colors are arranged in a plane perpendicular to the optical axis. 3 corresponding to the vicinity of the periphery of the pupil of the objective lens.
An illuminating device for an optical microscope, which is arranged at each location. 5. An illumination device for an optical microscope including a Koehler illumination system for projecting a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens, wherein the Koehler illumination system has an optical path on the optical path. At a position conjugate with the back focal plane of the objective lens or in the vicinity thereof, at least three different emission end faces in a plane perpendicular to the optical axis and corresponding to the vicinity of the peripheral portion of the pupil of the objective lens. At least three optical fibers arranged, a light emitting unit provided on the incident end face side of the optical fiber, a condensing unit that respectively injects the light emitted from the light emitting unit into the incident end face of each optical fiber, and each optical fiber Illumination device for an optical microscope, comprising: three primary color filters provided on either the incident end face or the outgoing end face of . 6. An illumination device for an optical microscope including a Koehler illumination system that projects a light source image onto a pupil position of an objective lens to emit uniform illumination light from the objective lens, wherein the Koehler illumination system has an optical path on the optical path. At a position conjugate with the back focal plane of the objective lens or in the vicinity thereof, a position smaller than the pupil diameter of the objective lens in a plane corresponding to the vicinity of the peripheral portion of the pupil of the objective lens in a plane perpendicular to the optical axis. An illuminating device for an optical microscope, comprising: a rotating body having a through hole and being rotatable about an optical axis; and a light emitting section for irradiating light onto the entire back surface of the rotating body.