JPH087236B2 - Probe card with prism for confirming probe tip position - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention is mounted on a transparent substrate substantially vertically.
Attach the tip of the attached probe to the predetermined position of the measured object.
Probe probe with a simple structure that allows you to visually check whether or not
Regarding the mode.

[0002]

2. Description of the Related Art Measurement of electrical characteristics of semiconductor integrated circuit devices
The probe card used for
Some use pulling pins. This spring pie
Is a sheath that has a contactor and a spring inside.
Yes, the contact can be moved back and forth with respect to the sheath. Or
The spring pin is attached to the board of the probe card.
Often mounted almost vertically.

[0003]

[Problems that the Invention is to Solve such Purobuka
In the card, the spring pins mounted almost vertically on the board.
Whether the tip of the probe is in contact with the predetermined position of the DUT
The confirmation is performed as follows. That is, the DUT
Has two or more substantially L-shaped conductive films formed in advance, and
When the probe card is in place with respect to the measured object,
Two spring pins make contact with each conductive film.
It is used to conduct electricity. Such a spring
Use the pin continuity to see the tip of the spring pin.
It originates from the fact that it cannot be confirmed directly. This
Therefore, in this type of conventional probe card,
A conductive film that has nothing to do with the function
Not against the demand for miniaturization of semiconductor integrated circuit devices
It was a thing.

Further , a scribe line formed on a wafer
Contact three probes to the scribe line
Position confirmation is also performed by detecting the difference with an edge sensor
Has been. However, this method is used only for position confirmation.
Edge sensor is required.

The present invention was devised in view of the above circumstances.
To form a conductive film, etc., especially for alignment of the DUT
Need to use special edge sensor etc.
Direct visual confirmation of probe tip position
The probe tip position confirmation
For the purpose of providing a probe card with rhythm
I have.

[0006]

A probe tip according to the present invention
The probe card with a prism for edge position confirmation is a transparent substrate
The tip of the probe attached almost vertically to the
It is a probe card that can confirm whether it is in a predetermined position.
The transparent substrate corresponds to the arrangement of the probes.
There is an opening, and one edge of the opening is a prism.
Is formed integrally with the transparent substrate as
When viewed from above, professionals placed alongside the prism
Make sure that the tip of the tube is visible through the prism.
Is made.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG . 1 is a probe tip according to an embodiment of the present invention.
The transparency used in probe cards with prisms for position confirmation
FIG. 2 is a schematic plan view of the bright substrate, FIG. 2 is a sectional view taken along the line AA of FIG.
FIG. 3 is a sectional view of an opening portion of a transparent substrate showing another embodiment,
FIG. 4 is a schematic sectional view of the spring pin, and FIG.
Probe with a prism for probe tip position confirmation using a probe
It is a schematic sectional drawing which shows a wave card.

A probe for checking the position of the probe tip according to the present embodiment.
The probe card with rhythm is almost perpendicular to the transparent substrate 100.
Spring pin 20 as a probe attached to the
The tip of 0 is at a predetermined position of the IC chip 300 as the DUT.
It is a probe card that can confirm whether or not there is
On the transparent substrate 100, the spring pin 200 is arranged.
A corresponding opening 130 has been opened, and the opening 130
One edge of the transparent substrate 100 is formed as a prism 131.
Formed on the body.

First, the spring pin 200 is shown in FIG.
As described above, the cylindrical outer sheath portion 210 and the outer sheath portion 21
The inner sheath 220 that is detachably attached to the
A contactor 230 that is retractably housed in the sheath 220;
The contactor 230 is housed in the inner sheath 220, and the contactor 230 is moved upward and downward.
And a spring 240 for elastically urging in the opposite direction. Before
The inner sheath 220 can be attached to and detached from the outer sheath 210.
And the contact 230 was worn or bent.
In that case, the contactor 230 should be replaced together with the inner sheath 220.
Growling.

The transparent substrate 100 is a transparent substrate having an insulating property.
It is made of clear synthetic resin, and is IC
It has a shape and size corresponding to the cup 300. Or
The transparent substrate 100 is provided at the four corners of the transparent substrate 100.
Screw hole 1 for attaching to a motherboard (not shown)
10 have been opened.

The transparent substrate 100 also has an IC chip.
A plurality of through holes 12 corresponding to the electrode portion 310 of the probe 300
0 is opened vertically. This through hole 120 is
The ring pin 200 is fitted into the
To the diameter corresponding to the outer diameter of the outer sheath 210 of the gang pin 200.
It is set. In addition, it was attached to the through hole 120.
The spring pin 200 is inserted into the opening at the rear end of the outer sheath 210.
Insert a lead pin (not shown) and connect to this lead pin
The inspection device outside the drawing by pulling around the lead wire
Etc. are electrically connected.

Further, the transparent substrate 100 has
A rectangular opening 130 is provided along the through hole 120.
ing. One edge of the opening 130, that is, the through hole 1
Edge along spring pin 200 fitted in 20
Has an angle of the edge 132 of 60 ° and has a taper
The surface 131A is formed as a prism 131 facing upward.
Has been. The angle of the edge portion 132 is 60 °
This is just an example, and the resin forming the transparent substrate 100 is
Optimum value should be set according to the unique properties such as refractive index
Of course, you can choose.

In such a transparent substrate 100, the opening 13
Not only 0 but also prism 131 is simultaneously injection molded, for example.
It is possible to form them all at once. Therefore,
It is very easy to set the transparent substrate 100 having the prism 131.
It becomes possible to form a large amount.

In this way, the edge of the opening 130 is trimmed at the edge.
When formed as a frame 131, as shown in FIG.
Sprink along the prism 131 of the ling pin 200
The tip of the contact 230 of the pin 200 is attached to the transparent substrate 100.
Directly from the surface side, that is, above the spring pin 200
You can see. If only the tip of the contact 230 is
The contacting portion of the contact 230, that is, I
You can also see the electrode part 310 of the C-chip 300.
Then, the contact 230 actually contacts the predetermined electrode portion 310.
It is possible to easily visually confirm whether or not there is.

The contact 230 is in contact with the electrode portion 310.
Whether or not all spring pins 200 are
There is no need to approve, one or more sp
Check the ring pin 200. Each spring
The mutual relationship of the Gupin 200 is set accurately.
So check some spring pins 200
For example, I checked all spring pins 200
Because it will be the same as. Therefore, the opening 130 is transparent.
One or two or more may be provided on the substrate 100.

Therefore, the splice which the user side arbitrarily selects
Ng pin 200 (mounted along prism 131)
Of the contact 230 of the spring pin 200)
The tip contacts the predetermined electrode part 310 of the IC chip 300.
Check all the sp
Easily confirm the position of the ring pin 200
Can be.

In the embodiment described above, one edge of the opening 130
In the prism 131 of the part, the tapered surface 131A faces upward.
However, the present invention is not limited to this.
Not . For example, as shown in FIG.
The same effect can be obtained even with the prism 131 facing downward.
You can

The opening 1 formed in the transparent substrate 100
Although 30 has been described as having a rectangular shape, the present invention is not limited to this.
The present invention is not limited to this, but an IC chip as an object to be measured.
The sp that is arranged corresponding to the arrangement of the electrode part 310 of the 300
What is formed along the ring pin 200 is
Needless to say.

As another embodiment, as shown in FIG.
Probe card with a prism for checking the probe tip position
There is also. A prism-equipped probe for checking the probe tip position
Robe card is not spring pin 200
Probe 400 with a curved portion 410 formed on the bottom and two pieces
Substrate, that is, a prism 531 similar to that described above,
A transparent lower substrate 500 having and on this lower substrate 500
Having an upper substrate 600 installed at a predetermined interval
I have.

The probe 400 has a curved portion 410 in the middle abdomen.
Acts as a spring. That is, Plow
The bending force 410 is flexed by the external force applied to the protrusion 400.
Is absorbed by. In addition, the lower substrate 500
A plurality of through holes 520 are opened in the
An opening 530 is opened along 520. This opening
One end edge of 530 is formed as a prism 531
I have. This prism 531 is the transparent substrate 100 described above.
Is the same as the prism 131 in FIG.

On the other hand, the upper substrate 600 is the probe 400.
Leave a space for the curved portion 410 on the lower substrate 500.
is set up. The upper substrate 600 includes the lower substrate
An opening 630 corresponding to the opening 530 of 500 is opened.
At the same time, a through hole 620 corresponding to the through hole 520 is opened.
Have been. Therefore, it is better than the curved portion 410 of the probe 400.
The lower part is located in the through hole 520 of the lower substrate 500 and the upper part.
Are inserted into the through holes 620 of the upper substrate 600, respectively.
And the curved portion 410 is located between the substrates 500 and 600.
are doing.

Therefore, through the opening 630 of the upper substrate 600,
And the prism 53 formed in the opening 530 of the lower substrate 500.
When the tapered surface 531A of No. 1 is viewed from directly above, the probe 40
The tip 420 of 0 can be visually confirmed directly.

[0023]

EFFECT OF THE INVENTION A probe tip position confirmation probe according to the present invention.
The probe card with rhythm should be mounted on the transparent substrate almost vertically.
The tip of the attached probe is in a predetermined position on the measured object.
It is a probe card that can confirm whether or not it is transparent
The board has an opening corresponding to the placement of the probe.
The transparent substrate is used as a prism at one edge of the opening.
Is integrally formed on the probe and is viewed from directly above the probe.
And the tip of the probe placed alongside the prism.
It is designed to be visible through the rhythm.

Therefore, the position of the IC chip with respect to the electrode portion, etc.
It is not necessary to form a special conductive film for alignment.
Without using special parts such as edge sensors
The position of the probe tip can be visually checked directly.
Therefore, it is a suitable probe card with a very simple configuration.
It

The prism has a transparent base on one edge of the opening.
Since it is formed integrally with the plate, it is the same as when a transparent substrate is formed.
It can sometimes be formed. Therefore, the prism and the aperture
A through hole formed along the
The mutual positional relationship with the through hole is always the same.
Check the tip of the probe visually.
be able to.

In addition, not all probes, but the aperture
Probe tip positioned along the formed prism
The probe tip is
The structure of the prism for confirming is simplified. this
Means that the structure of the transparent substrate becomes simpler, and
Is a probe card with a prism for confirming the probe tip position
The whole structure becomes simple.

Further , this probe for checking the position of the tip of the probe is used.
The transparent substrate used for the probe card with
Open an opening along the groove and attach the prism to one edge of the opening.
Since it is only necessary to form a
Can be manufactured with the same manufacturing process and manufacturing cost
It Therefore, the probe can be visually confirmed.
Even though it has the great advantage of cost
In general, a probe card that is no different from the conventional one
Can be provided.

Further, the prism is formed simultaneously with the transparent substrate.
Therefore, just replace the board currently used.
You can visually check the tip of the probe with
A probe card with a prism for checking the lobe tip position
You can

[Brief description of drawings]

FIG. 1 is a view showing a probe tip position confirmation according to an embodiment of the present invention .
Of substrate used for probe card with prism
FIG.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is a sectional view of an opening portion of a substrate showing another embodiment.
It

FIG. 4 is a schematic sectional view of a spring pin.

[Fig. 5] For confirming the probe tip position using another probe
It is a schematic sectional drawing which shows the probe card with a prism.
It

[Explanation of symbols]

 100 transparent substrate 130 aperture 131 prism 200 spring pin (probe)

Claims (1)

[Claims] 1. A professional mounted on a transparent substrate substantially vertically.
Check that the tip of the probe is at the specified position on the DUT.
Probe card that can be attached to the transparent substrate.
There is an opening corresponding to the lobe arrangement.
One edge of the mouth is formed as a prism integrally with the transparent substrate.
When viewed from directly above the probe, the prism
Through the prism, the tip of the probe placed along
A probe card with a prism for confirming the position of the probe tip, which is visible .