JPH0894895A - Carrier clamping mechanism - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a clamp structure capable of effectively exerting a tightening torque of a fixing screw on a contact surface between a rail and a carrier to obtain an extremely strong holding force. [Structure] The rail 1 is arranged in a groove-shaped recess 4 formed in the carrier 2, and the rail 1 is screwed into a screw hole 6 formed through one side of the carrier 2 to be inserted in the recess 4. The torsion torque of the protruding fixing screw 3 is applied to one side of the rail 1, and the carrier 2 is pressed against the other side of the rail 1 by this torsion torque to fix the carrier 2 to the rail 1. An abutment piece 7 is arranged between the screw 3 and the rail 1, and the torsion torque of the fixing screw 3 is applied to one side of the rail 1 via the abutment piece 7, and at the final screwing position, it is applied to the outer surface of the carrier 2. A floating prevention member 7b, which is closely arranged and suppresses the lifting of the carrier 2 with respect to the rail 1, is provided integrally with the contact piece 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a master exposure apparatus for producing a master of an optical disc, for example, by moving and adjusting a carrier on which an optical functional element is mounted on an optical bench, and adjusting the position. The present invention relates to a carrier clamp mechanism for fixing with.

[0002]

2. Description of the Related Art In a master exposure apparatus for making a master of an optical disk, a carrier on which optical functional elements are attached is moved and adjusted on a rail of an optical bench, and the carrier is railed at a position after the adjustment. The structure is fixed and clamped to.

FIG. 3 is a schematic vertical sectional side view showing an example of a conventional clamp mechanism. In FIG. 3, reference numeral 1 is an optical bench (hereinafter referred to as “rail 1”) fixed to a device body (not shown), 2 is a carrier slidably mounted on the rail 1, and 3 is a carrier 2 on the rail 1. A fixing screw for fixing the carrier 2 (not shown)
An optical functional element or the like is attached on the top so as to be integrally movable.

More specifically, the rail 1 integrally includes a base portion 1a fixed to the main body of the apparatus and a main body portion 1b protruding from one surface of the base portion 1a. Also,
On both upper and lower side surfaces of the main body portion 1b, locking wing portions 1c and 1d each having a substantially wedge-shaped cross section and having inclined surfaces 2a and 2b that gradually outward toward the tip side are integrally formed. Further, the tip end surface of the main body 1b is formed as a flat surface.

On the other hand, on one side of the carrier 2, the rail 1
A recess 4 is formed that is large enough to receive the side of the main body 1a on which the wings 1c and 1d are provided. The recess 4 is formed in a groove shape with both ends open, and the recess 4 has a V-shaped cross-section into which the blade 1c is press-fitted and engaged at a position corresponding to the blade 1c. The engaging groove 5 is formed. In addition, a screw hole 6 is formed on the other side surface of the carrier 2 corresponding to the wing portion 1d of the main body portion 1a, and the screw portion 3a of the fixing screw 3 is screwed into this screw hole 6 The tip of the portion 3a is the inclined surface 2 of the rail 1.
It can come into contact with a.

In this structure, when the carrier 2 is mounted on the rail 1, the screw 3a of the fixing screw 3 is retracted to a position where it does not interfere with the mounting, and then the main body 1b is inserted into the recess 4. , And the wing portion 1c is engaged with the engagement groove 5. Then, the fixing screw 3
When is screwed in, the tip of the screw portion 3a is brought into contact with the inclined surface 2a of the rail 1. Further, when the fixing screw 3 is further screwed in, the carrier 2 receives a force in the direction of arrow F in FIG. 3 with respect to the rail 1, and the wing portion 1c and the engagement groove 5 are strongly meshed with each other, so that the rail 1 is fixed to the rail 1. The carrier 2 can be clamped. FIG. 3 shows this clamped state.

However, in this structure, when the fixing screw 3 is strongly screwed in to obtain a strong holding force and a large torsional torque is applied, the tip of the screw portion 3a bites into the slope 2a of the rail 1 to cause damage, There is also a problem that the tip of the screw portion 3a slides on the inclined surface 2a and a moment load is applied to the portion of the screw hole 6, and the portion of the screw hole 6 is deformed or damaged as shown in FIG. Therefore, this structure has a problem that the holding force is weak because only a torsion torque within a range that does not damage each member is allowed, and the tightening torque is small, so that the member easily loosens.

Therefore, as a means for solving this problem,
A structure as shown in FIG. 5 has been conventionally proposed. Figure 5
3, the same reference numerals as those in FIG. 3 indicate the same parts as those in FIG. Further, the structure shown in FIG. 5 is a structure in which the contact piece 7 is added to the conventional structure shown in FIG.

More specifically, the abutting piece 7 is a plate-shaped first member 7a disposed in the recess 4 and abutting against the inclined surface 2a of the rail 1, and the first member 7a. A plate-shaped second member 7b provided facing each other and arranged on the outer surface side of the carrier 2, and a plate-shaped third member connecting between the first member 7a and the second member 7b. It is integrally formed with the member 7c and is formed in a substantially U-shaped cross section. Further, the second member 7b is provided with a hole 8 for preventing the fixing screw 3 from loosely penetrating toward the first member 7a, and is opposed to the second member 7 of the first member 7a. A hole 9 for receiving and positioning the tip of the fixing screw 3 is formed on the surface corresponding to the hole 8. In addition, an inclined surface 10 that can come into close contact with the inclined surface 2a is formed on the surface of the first member 7a that faces the inclined surface 2a of the rail 1.

The contact piece 7 has a first groove in the recess 4.
Member 7a is inserted and the second member 7b is arranged outside the carrier 2, and the screw hole 6 of the carrier 2 is made to correspond to the hole 8 for preventing the second member 7b from falling off. By screwing the fixing screw 3 inserted from the outside of the second member 7 through the hole 8 into the screw hole 6,
It is attached to the carrier 2 via a fixing screw 3.

Further, in the structure using the contact piece 7, when the carrier 2 is attached to the rail 1, the wing portion 1
The fixing screw 3 is returned to a state where the contact piece 7 can be retracted to a position that does not interfere with inserting the rail 1 into the recess 4 of the carrier 2 by engaging c with the engagement groove 5. . Then, when the wing portion 1c is engaged with the engaging groove 5 and the carrier 2 is attached in a state where the rail 1 is placed in the recess 4 of the carrier 2, the fixing screw 3 is screwed in.
Then, as the fixing screw 3 is screwed in, the abutting piece 7 is also pushed by the fixing screw 3 and moved to the rail 1 side, so that the inclined surface 10 of the first member 7a becomes the inclined surface 2a of the rail 1. Abutted against. Further, when the fixing screw 3 is further screwed in, the carrier 2 receives a force in the direction of arrow F in FIG. 5 against the rail 1 and the contact piece 7, and the wing portion 1c and the engagement groove 5 are strongly meshed with each other. At the same time, the inclined surface 10 of the first member 7a can be strongly pressed against the inclined surface 2a of the rail 1 to clamp the carrier 2 on the rail 1. Figure 5
This clamped state is shown.

In this structure, when the carrier 2 is fixed by the fixing screw 3, the tip of the fixing screw 3 is directly moved by the abutment piece 7 arranged between the rail 1 and the fixing screw 3.
The hit piece 7 has a larger area so that it does not hit
The thrust can be transmitted by the contact surface (the inclined surface 10), and the contact stress on the rail surface can be relieved to prevent scratches and the like, and a larger torsion torque can be applied.

[0013]

However, in the conventional structure shown in FIG. 5, the first member 7a and the second member 7a of the pad 7 are provided.
The large gap x is formed between the second member 7b and the carrier 2 when they are fastened via the contact piece 7. Therefore, when a larger torsional torque is applied, the abutment piece 7 is thrust by the fixing screw 3 to cause the inclined surface 2a of the rail 1 to move, as shown in FIG.
There is a problem in that the screw hole 6 is deformed by sliding on a moment. When a larger torsional torque is applied, the contact piece 7 contacts the back surface of the base portion 1a, deforms the peripheral portion of the screw hole 6 in the carrier 2 to the outside, and lifts the entire carrier 2 to the outside. .
Therefore, there is a problem in that the positional accuracy of the optical functional elements such as lenses and mirrors mounted on the carrier 2 may be incorrect.

The present invention has been made in view of the above problems, and an object thereof is to effectively exert a tightening torque of a fixing screw on a contact surface between a rail and a carrier to obtain an extremely strong holding force. The object is to provide a carrier clamping mechanism having a structure capable of Furthermore, other purposes will be clarified one after another in the content described below.

[0015]

According to the present invention, a rail is arranged in a groove-shaped recess formed in a carrier and a screw hole formed on one side of the carrier is provided. The torsion torque of a fixing screw that is screwed and protrudes into the recess is applied to one side of the rail, and the carrier is pressed against the other side of the rail by this torsion torque to fix the carrier to the rail. In the carrier clamping mechanism, a contact piece is arranged between the fixing screw and the rail, and the torsion torque of the fixing screw is applied to one side of the rail via the contact piece,
This is achieved by providing the lifting piece with a lifting prevention member that is disposed near the outer surface of the carrier at the final screwing position and that suppresses lifting of the carrier with respect to the rail.

[0016]

According to this structure, the rotation fulcrum of the contact piece is a portion where the carrier and the floating prevention member are arranged adjacent to each other, but in this portion, the carrier and the floating prevention member are close to each other. Therefore, when the contact piece tries to rotate in the direction away from the rail, the floating prevention member is brought into contact with the outer surface of the carrier, and the rotation is suppressed. Therefore, the torsional torque of the fixing screw is generally applied only in the axial direction of the fixing screw, so the holding force due to the tightening torque of the fixing screw is effectively transmitted to all the contact surfaces of the rail and the carrier, resulting in an extremely strong holding force. Is possible.
Further, since the periphery of the screw portion is not harmfully deformed or damaged up to the original strength limit of the screw mechanism, the maximum tightening torque can be applied, and more firm holding can be achieved.

[0017]

Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic vertical sectional side view of a clamp mechanism shown as an embodiment of the present invention. This embodiment is shown in FIG.
As in the case of the conventional structure shown in FIGS. 6A to 6C, in the master exposure apparatus for manufacturing the master of the optical disc, the case where the carrier to which the optical functional element and the like are mounted is attached to the rail is taken as an example. In addition, in FIG.
6 to 6 are the same as those in FIGS. 3 to 6.

In this structure, an optical bench 1 (hereinafter referred to as "rail 1") fixed to a device body (not shown) and a carrier 2 slidably mounted on the rail 1 are provided. It is composed of a fixing screw 3 for fixing the carrier 2 to the rail 1 and an abutment piece 7 interposed between the fixing screw 3 and the rail 1. Although not shown, the carrier 2 has an optical member on the carrier 2. A functional element or the like is attached so as to be integrally movable.

More specifically, the rail 1 integrally has a base portion 1a fixed to the main body of the apparatus and a main body portion 1b protruding from one surface of the base portion 1a. Also,
On both upper and lower side surfaces of the main body portion 1b, locking wing portions 1c and 1d each having a substantially wedge-shaped cross section and having inclined surfaces 2a and 2b that gradually outward toward the tip side are integrally formed. Further, the tip end surface of the main body 1b is formed as a flat surface.

On the other hand, on one side of the carrier 2, the rail 1
A recess 4 is formed that is large enough to receive the side of the main body 1a on which the wings 1c and 1d are provided. The recess 4 is formed in a groove shape with both ends open, and the recess 4 has a V-shaped cross-section into which the blade 1c is press-fitted and engaged at a position corresponding to the blade 1c. The engaging groove 5 is formed. In addition, a screw hole 6 is formed on the other side surface of the carrier 2 corresponding to the wing portion 1d of the main body portion 1a, and the screw portion 3a of the fixing screw 3 is screwed into the screw hole 6, The tip of the portion 3a is the inclined surface 2 of the rail 1.
It can come into contact with a.

The abutment piece 7 is arranged in the recess 4 and comes into contact with the inclined surface 2a of the rail 1 and has a plate-like first member 7a.
And the carrier 2 provided to face the first member 7a.
Second member 7b as a plate-shaped floating prevention member arranged on the outer surface side of the plate, and a plate-shaped third member connecting between the first member 7a and the second member 7b 7c and 7c are integrally formed and are formed in a substantially U-shaped cross section. Further, the second member 7b is provided with a hole 8 for preventing the fixing screw 3 from loosely penetrating toward the first member 7a, and is opposed to the second member 7 of the first member 7a. A hole 9 for receiving and positioning the tip of the fixing screw 3 is formed on the surface corresponding to the hole 8. In addition, an inclined surface 10 that can come into close contact with the inclined surface 2a is formed on the surface of the first member 7a that faces the inclined surface 2a of the rail 1.

The contact piece 7 has a first recess in the recess 4.
Member 7a is inserted and the second member 7b is arranged outside the carrier 2, and the screw hole 6 of the carrier 2 is made to correspond to the hole 8 for preventing the second member 7b from falling off. By screwing the fixing screw 3 inserted from the outside of the second member 7 through the hole 8 into the screw hole 6,
It is attached to the carrier 2 via a fixing screw 3.

Further, in this structure, when the carrier 2 is attached to the rail 1, the wing portion 1c is engaged with the engaging groove 5 so that the rail 1 is not inserted in the recess 4 of the carrier 2. The fixing screw 3 is returned so that the contact piece 7 can be retracted to the position. Then, when the wing portion 1c is engaged with the engaging groove 5 and the carrier 2 is attached in a state where the rail 1 is placed in the recess 4 of the carrier 2, the fixing screw 3 is screwed in. Then, as the fixing screw 3 is screwed in, the abutting piece 7 is also pushed by the fixing screw 3 and moved to the rail 1 side, so that the inclined surface 10 of the first member 7a becomes the inclined surface 2a of the rail 1. Abutted against. Further, when the fixing screw 3 is further screwed in, the carrier 2 is moved to the rail 1 and the contact piece 7 by the arrow F in FIG.
The wing portion 1c and the engagement groove 5 are strongly meshed with each other by receiving a force in the direction, and the inclined surface 10 of the first member 7a is fixed to the rail 1
It is strongly pressed against the inclined surface 2a of the carrier 2 and the carrier 2 is attached to the rail 1.
Can be clamped, and in this state, the second member 7b serving as an emptying prevention member and the carrier 2 are extremely close to each other. FIG. 1 shows this clamped state. The gap s between the second member 7b and the carrier 2 is provided in consideration of the dimensional tolerance of each member at the time of assembly, and is ideally set to a state very close to zero. Here, if the value is completely zero, the fastening force will be reduced, so a certain amount of clearance s is required.

When a larger torsional torque is applied to the fixing screw 3 in order to obtain a stronger holding force, the abutting piece 7 is thrust by the fixing screw 3 to cause the inclined surface 2a of the rail 1 to move, as shown in FIG. Since a moment load is applied due to sliding, the fixing screw 3 moves forward while slightly tilting within the play of the screw hole 6 or within the range of elastic deformation.
The second member 7b having the hole 8 for preventing the falling off of the carriage 2 comes into contact with the outer surface of the carriage 2 so that the gap s disappears, the rotation of the contact piece 7 is suppressed, and the contact piece 7 is inclined by the inclined surface 2a of the rail 1.
Regulates sliding. Therefore, the screw thrust of the fixing screw 3 is the same as the force in the direction of sliding on the inclined surface 2 a of the rail 1 and the rail 1.
Rail contact surface between the inclined surface 2a and the contact piece 7 (inclined surface 10)
Is distributed to the rotational force acting as a vertical contact force of the contacted surface and is substantially balanced, and the force is applied only in the axial direction to the screw hole 6 portion, which is unnecessary for the carriage 2 and the like. It does not cause significant deformation.

Therefore, according to the structure of this embodiment, since the torsional torque of the fixing screw 3 is generally applied only in the axial direction of the fixing screw 3, the holding force due to the tightening torque of the fixing screw 3 causes the holding force of the rail 1 and the carrier. 2 is effectively transmitted to all the contact surfaces of 2, and extremely strong holding is possible. In addition, since the periphery of the screw part is not harmfully deformed or damaged up to the original strength limit of the screw mechanism, the maximum tightening torque can be given, and firmer holding is possible, and external force or external vibration It does not easily loosen due to factors such as the above, and exhibits a long-term stable holding performance with a strong fastening force. This improves the positional accuracy of each optical element and stabilizes the quality of the optical system. Furthermore, this precision improvement is a simple and simple mechanical structure,
Since it can be realized only by easy processing and assembly, an extremely inexpensive and highly accurate clamp mechanism can be obtained. In addition, when fixing the carrier 2 with the fixing screw 3, the rail 1 and the fixing screw 3
With the contact piece 7 arranged between the contact piece 7 and the rail 1, the tip of the fixing screw 3 is prevented from directly hitting the rail 1, and the thrust is transmitted by the contact surface (slope 10) of the contact piece 7 having a wider area. Since the contact stress on the rail surface is relieved, scratches and the like are less likely to occur, and a larger torsion torque can be applied and held.

In the above embodiment, the case where the invention is applied to the master exposure apparatus for making a master of an optical disk is explained, but the present invention is not limited to this master exposure apparatus, and a spectroscope, an interferometer, a laser oscillator, and others. The same can be applied to the measuring apparatus, the exposure apparatus, and the experimental apparatus having the optical system of 1.

[0027]

As described above, according to the carrier clamping mechanism of the present invention, the rotation fulcrum of the abutment piece is the portion where the carrier and the lifting prevention member are arranged adjacent to each other. Since the carrier and the floating prevention member are in close proximity to each other, when the contact piece tries to rotate in a direction away from the rail, the floating prevention member is brought into contact with the outer surface of the carrier to suppress the rotation.
Therefore, the torsional torque of the fixing screw is generally applied only in the axial direction of the fixing screw, so the holding force due to the tightening torque of the fixing screw is effectively transmitted to all the contact surfaces of the rail and the carrier, resulting in an extremely strong holding force. Is possible. Also, since the surroundings of the screw part are not harmfully deformed or damaged up to the original strength limit of the screw mechanism, the maximum tightening torque can be given, and further effects such as firmer holding are expected. it can.

[Brief description of drawings]

FIG. 1 is a schematic vertical sectional side view of a clamp mechanism shown as an embodiment of the present invention.

FIG. 2 is a schematic vertical cross-sectional side view of a clamp mechanism shown as an embodiment of the present invention in which a clamping force is strongly applied.

FIG. 3 is a schematic vertical sectional side view showing an example of a conventional mechanism.

FIG. 4 is a schematic vertical sectional side view for explaining a problem of the conventional mechanism shown in FIG.

FIG. 5 is a schematic vertical sectional side view showing another example of the conventional mechanism.

FIG. 6 is a schematic vertical sectional side view for explaining a problem of the conventional mechanism shown in FIG.

[Explanation of symbols]

 1 rail 2 carrier 2a inclined surface 2b inclined surface 3 fixing screw 4 recess 5 engaging groove 6 screw hole 7 abutment piece 7a first member 7b second member (lifting prevention member) 7c third member 8 through hole (Dropout prevention hole) 9 Positioning hole 10 Sloping surface

Claims (4)

[Claims] 1. A rail is disposed in a groove-shaped recess formed in a carrier, and the rail is screwed into a screw hole formed through one side of the carrier to project into the recess. In a carrier clamping mechanism for applying a twisting torque of a fixing screw to one side of the rail, pressing the carrier to the other side of the rail with this twisting torque, and fixing the carrier to the rail, the fixing screw and the An abutment piece is arranged between the rail and, while applying a twisting torque of the fixing screw to one side of the rail through the abutment piece, it is arranged in proximity to the outer surface of the carrier at its final screwing position, A clamp mechanism for a carrier, wherein a lifting prevention member for suppressing lifting of the carrier with respect to the rail is provided on the contact piece. 2. The carrier clamp mechanism according to claim 1, wherein the fixing screw is attached in a state where the fixing screw penetrates a rising prevention member of the pad piece to prevent the pad piece from falling off. 3. A contact surface between the rail and the contact piece is
The carrier clamping mechanism according to claim 1 or 2, wherein when the rails are brought into contact with each other, the rail and the carrier are formed as inclined surfaces on which forces in a direction in which they are pressed against each other act. 4. The carrier clamping mechanism according to claim 1, wherein one side of the rail and one side of the carrier are engaged by a wing portion and an engaging groove.