JPH08979Y2 - Reactor tube holding device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a reaction tube holding device used in a semiconductor manufacturing apparatus or the like.

2. Description of the Related Art A reaction tube of a semiconductor manufacturing apparatus is connected to a scavenger (manifold) through a packing, but since this reaction tube is made of a brittle material such as quartz glass,
If it is firmly fixed to the support, it will be damaged.

Therefore, in order to prevent the above accident, a reaction tube holding device as shown in FIG. 5 has been conventionally used.

That is, the O-ring 2 is fitted to the connecting portion 1a of the reaction tube 1 and
The ring 2 is covered with a cap nut 3, and the cap nut 3 is screwed onto the outer peripheral surface of the end 4a of the metal manifold 4 to form the O-ring 2
Is pressed, and the frictional force of the O-ring 2 prevents the reaction tube 1 from moving in the direction of arrow A1. In the figure,
6 is a support for the reaction tube 1, 7 is a support for the manifold 4, and 8 is a pressure sensor provided on the exhaust pipe 9.

Problems to be Solved by the Invention In the conventional reactor holding device, if the pressure in the reaction tube 1 exceeds a predetermined pressure due to clogging of the exhaust pipe 9 or failure of the pressure sensor, the reaction tube 1 will have an O-ring. It moves in the direction of the arrow A1 against the frictional force of A, and a gap is created between the reaction tube 1 and the manifold 4 to form a step.

Further, when the pressure in the reaction tube further increases, the reaction tube 1
Jumps out of the cap nut 3 and is damaged.

In view of the above circumstances, the present invention aims to prevent the reaction tube from moving in the axial direction.

Means for Solving the Problems The present invention is directed to a reaction tube formed of a brittle material such as a quartz tube, an end of a manifold into which a connection part of the reaction tube is inserted, and an outer circumference of the connection part of the reaction tube. O-ring inserted between the surface and the inner surface of the end of the manifold, and a cap nut that is fitted to the connecting portion of the reaction tube and is screwed to the outer peripheral surface of the end of the manifold while pressing the O-ring. And a packing provided between the end portion of the connection portion of the reaction tube and the manifold, and a protrusion provided on the outer peripheral surface of the connection portion of the reaction tube inserted into the manifold. And a collar arranged on both sides of the O-ring.

Action When the pressure inside the reaction tube becomes abnormally high, the reaction tube does not move in the axial direction, but the reaction tube does not move because the projection of the connection part of the reaction tube is fixed by the cap nut.

Embodiment An embodiment of the present invention will be described with reference to the accompanying drawings. In FIG. 1, reference numeral 10 denotes a quartz reaction tube placed on a support (not shown), and a flange-like shape is provided at an end of a connecting portion 11 of the reaction tube. The protrusion 12 is formed.

The quartz reaction tube 10 is connected in series to a manifold 14 via a packing 13.

The packing 13 is made of synthetic resin such as Teflon and has a function as a sealing material and a cushioning material.

The manifold 14 is made of metal such as stainless steel, and is firmly fixed to a support (not shown).

A screw portion 16 is formed on the outer peripheral surface of the end portion 15 of the manifold 14.

A first collar 17, an O-ring 18, and a second collar 19 are sequentially provided between the connecting portion 11 of the reaction tube and the outer peripheral surface of the end portion 15 of the manifold.

The cap nut 20 is loosely fitted to the connecting portion 11 of the reaction tube, the bottom portion 21 thereof presses the first collar 17, and the screw portion 22 thereof.
Engages with a threaded portion 16 on the end 15 of the manifold.

Next, the operation of this embodiment will be described. After the bag nut 20 is fitted into the connecting portion 11 of the quartz reaction tube 10 to bring it to the state of 20A, the nut 20 is rotated in a predetermined direction to move the first collar 17 to the first collar 17. Press the bottom part 21 and squeeze the O-ring 18 while holding the cap nut 20.
Set to 20B.

When the pressure inside the reaction tube becomes abnormally high, the reaction tube 10 does not move in the axial direction, that is, in the direction of the arrow A10, but the protrusion 12 passes through the first collar 17, the O-ring 18, and the second collar 19 to move the cap nut. Since it is fixed to the bottom portion 21, the reaction tube 10 is prevented from moving in the same direction.

The embodiment of the present invention is not limited to the above, and may be carried out as shown in FIGS. 2 to 4, for example.

Hereinafter, these embodiments will be described, but the same reference numerals as those in FIG. 1 have the same names and functions.

In the embodiment shown in FIG. 2, an O-ring 23 is also provided between the packing 13 and the third collar 24 to improve the sealing property, and the protrusion 12 is the connecting portion 11 of the reaction tube 10. It is different from the embodiment of FIG. 1 in that it is provided in the central portion.

The embodiment shown in FIG. 3 differs from the embodiment shown in FIG. 1 in that the protrusion 12 is provided at the center of the connecting portion 11 of the quartz reaction tube 10.

The embodiment shown in FIG. 4 differs from the embodiment shown in FIG. 1 in that an O-ring 41 is also fitted to the outer periphery of the packing 13 to improve the sealing performance.

Effect of the Invention In this invention, since the projection is formed on the outer peripheral surface of the connection portion of the reaction tube as described above, the projection is formed by the cap nut even if the reaction tube has an abnormally high pressure and the reaction tube does not move in the axial direction. Its movement is blocked because it is fixed.

Therefore, it is possible to prevent an accident in which a step is generated between the reaction tube and the manifold and the reaction tube pops out as in the conventional example.

In addition, packing is provided between the end surface of the connection portion of the reaction tube and the manifold, a protrusion is provided on the outer peripheral surface of the connection portion of the reaction tube inserted into the manifold, and collars are arranged on both sides of the O-ring. Since it is installed, even if axial displacement force is applied to the connection part due to internal pressure change in the reaction tube, that force is absorbed by the packing and the O-ring sandwiched by the collars on both sides. No large force is applied to the end face of the connecting portion. Therefore, it is possible to prevent the accidental damage of the connecting portion of the quartz tube made of quartz glass or the like.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIGS.
FIG. 4 is a vertical sectional view showing another embodiment, and FIG.
It is a partial cross section front view which shows a prior art example. 11 …… Quartz reaction tube connection 12 …… Projection 15 …… Manifold end 18 …… O-ring 20 …… Cap nut

Claims (4)

[Scope of utility model registration request] 1. A reaction tube formed of a brittle material such as a quartz tube, an end portion of a manifold into which a connecting portion of the reaction tube is inserted, an outer peripheral surface of the connecting portion of the reaction tube and an inner surface of the end portion of the manifold. And an O-ring inserted between the reaction tube and the reaction tube, and a cap nut fitted to the connection portion of the reaction tube and screwed to the outer peripheral surface of the end of the manifold while pressing the O-ring. A packing is provided between an end surface of the connection portion of the reaction tube and the manifold, and a protrusion is provided on an outer peripheral surface of the connection portion of the reaction tube inserted into the manifold, and both sides of the O-ring are provided. A holding device for a reaction tube, characterized in that a collar is provided in the. 2. The device for holding a reaction tube according to claim 1, wherein the projection has a brim shape. 3. The reaction tube holding device according to claim 1, wherein the projection is formed at an end of the connection part. 4. The reaction tube holding device according to claim 1, wherein the projecting portion is formed at the center of the connecting portion.