JPH09106771A - Image display device - Google Patents

Abstract

(57) [Summary] [Object] To provide an image display device in which the degree of vacuum inside is made uniform in the manufacturing process and variation in distribution is improved, and as a result, image uniformity and characteristics are improved. [Structure] Back plate 10, outer frame 12, exhaust pipe 1
The airtight container is composed of 9, the spacer 18 and the face plate 13. The face plate 13 has, on its inner surface, a phosphor 15 and a metal back 16 that is an acceleration electrode.
Are formed, and the phosphor 15 emits light due to the collision of electrons emitted from the electron-emitting device 17 to display an image. The spacer 18 is formed in a thin plate shape, and the plurality of spacers 1 arranged in a line in the length direction of the spacer 18
8 are arranged in a plurality of rows in the thickness direction. On the other hand, an exhaust pipe 19 is installed in the airtight container in a direction perpendicular to the length direction of the spacer 18, and a plurality of holes are formed on the side surface on the electron emission element 17 side so that the hole diameter is directed toward the end of the exhaust pipe. Are perforated so that they gradually become larger.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image display device for displaying an image by utilizing light emission generated by colliding an electron beam with a phosphor in an airtight container whose inside is kept vacuum.

[0002]

2. Description of the Related Art Conventionally, as a method of forming an image, a fluorescent display tube or an image display device which mainly uses a field emission type or surface conduction type electron-emitting device to excite a phosphor to emit light is flat and bright. It has the advantage of being easy to see, and is actively applied in industry, and is expected to grow in the future. Various thin image display devices have been proposed that use a surface conduction electron-emitting device as a source of an electron beam, accelerate the generated electron beam to irradiate a phosphor, and cause the phosphor to emit light to display an image. (For example, JP-A-3
-261024).

16 and 17 are a schematic perspective view and a schematic sectional view of an example of a conventional image display device. FIG.
In FIG. 17, 160 is a back plate made of soda-lime glass that constitutes an electron-emitting device, 162 is an outer frame,
163 is a face plate made of soda lime glass on which a phosphor 165 and a metal back 166 are formed, and 169 is an exhaust pipe for exhausting the inside of the fluorescent display tube (in the figure, the state after sealing is shown) is indicated by 173a. Reference numeral 173b is a device electrode provided at a constant interval, 172 is a conductive thin film including an electron emitting portion provided between the device electrodes 173a and 173b, and 176 is a getter material container. The getter material container 176 is fixed to a getter material container fixing jig 177, and accommodates a general purpose evaporation type getter material for maintaining a vacuum inside the panel. The evaporation type getter material is a face plate 163. Alternatively, it is deposited on the back plate 161.

Here, a method of manufacturing the image display device will be described with reference to FIGS. The inside of the airtight container is evacuated through an exhaust pipe 169, and after degassing by baking, a part of the exhaust pipe is heated to melt and seal (block, cut). Finally, the getter material container 176 installed at one end inside the airtight container is heated, and the evaporation type getter material stored inside the getter material container 176 is heated to the face plate 1
The image display device is completed by depositing 63 on the back plate 160.

In general, a getter material container is a metal tube whose part is open, in which an evaporative getter material containing Ba as a main component is housed, and the getter material container has a linear shape or a ring shape. Normally, the getter material for the purpose is flashed by induction heating or electric heating, and the flashed getter material adheres to the inside of the image display device, adsorbs gas, and maintains the vacuum in the panel.

Here, regarding the surface conduction electron-emitting device
explain. As a surface conduction electron-emitting device,
As a thin film that controls the thin film, a thin film made of Au [G. Ditt
mer: "Thin Solid Films", 9,
317 (1972)], In _TwoO_Three/ SnO_Two By thin film
Things [M. Hartwell and C.I. G. FIG. Fon
stad: "IEEE Trans.ED Con
f. "519 (1975)], depending on the carbon thin film
[Hiraki Araki et al .: Vacuum, Vol. 26, No. 1, p. 22 (19
83)] etc. have been reported.

As a typical device structure of these surface conduction electron-emitting devices, the above-mentioned M. FIG. 18 shows a device configuration of the Hartwell. In the figure, 181 is an electron source substrate (insulating substrate). Reference numeral 182 denotes a conductive thin film, which is made of a metal oxide thin film or the like formed by sputtering on an H-shaped pattern, and an electron emission portion 185 is formed by an energization process called forming described later.

Conventionally, in these surface conduction electron-emitting devices, it has been general to form an electron-emitting portion by subjecting a conductive thin film to an energization process called forming in advance before emitting electrons. That is, forming means that a voltage is applied to both ends of the conductive thin film to conduct electricity,
The conductive thin film is locally destroyed, deformed or altered,
That is, the electron emitting portion 185 that is in an electrically high resistance state is formed. In the electron emitting portion 185, a crack is generated in a part of the conductive thin film 182, and electrons are emitted from the vicinity of the crack. In the surface conduction electron-emitting device that has been subjected to the energization forming treatment, electrons are emitted from the electron-emitting device by applying a voltage to the conductive thin film on which the electron-emitting device is formed and applying a current to the device. To be done. However, although there were various problems in putting these conventional surface conduction electron-emitting devices into practical use, the present applicants have diligently studied various improvements as will be described later and found problems in practical use. It has been resolved.

The surface conduction electron-emitting device described above has an advantage that a large number of devices can be arrayed over a large area because it has a simple structure and is easy to manufacture. Therefore, various applications that make the best use of this feature are possible, and it is also suitable for the image display device as described above. In image display devices, flat panel display devices using liquid crystal have become popular in recent years in place of CRTs, but there is a problem in that a backlight or the like must be provided because they are not self-luminous.
Development of a self-luminous display device has been desired. An image forming apparatus, which is a display apparatus combining a large number of surface conduction electron-emitting devices and a phosphor that emits visible light by electrons emitted from the electron-emitting source, is a display device combined with a large-screen device. It is a self-luminous display device that can be manufactured easily and has excellent display quality (for example, USP 506).
6883).

An example of an airtight container for realizing a large screen display device based on the structure proposed in FIGS. 16 and 17 is shown in FIG.
(JP-A-6-342630). In FIG.
Reference numeral 190 is a back plate, 192 is an outer frame, and 198 is a spacer (atmospheric pressure resistant structural member) that supports the face plate and the back plate. The electron-emitting device 197 is arranged on the back plate 190.

In such a structure, even for a face plate and a back plate having a larger area, it is possible to provide sufficient airtightness and strength by optimizing the arrangement of the spacers, so that the surface conduction is improved. It is possible to realize a large-screen display device using the electron emission device.

[0012]

However, the conventional exhaust pipe installation method and exhaust method of the above-described conventional image display device have the following problems.

As shown in FIG. 19, since the screen has a large area, it is necessary to dispose a spacer for preventing the deformation of the face plate and the back plate during vacuum evacuation. In the conventional method of installing in the frame part, when the inside is vacuumed through this exhaust pipe, the conductance is bad because the space between the face plate and the back plate is narrow and the spacer obstructs the flow, so the exhaust pipe opening The degree of vacuum is improved in the vicinity, and the degree of vacuum gradually deteriorates as the distance from the exhaust pipe increases, and the distribution of the degree of vacuum varies. Further, due to the gas released from the members forming the panel such as the spacers, the distribution of the degree of vacuum inside the image display device is further varied. As described above, if the distribution of the degree of vacuum in the image display device varies, in the case of an image forming apparatus using an electron emission source composed of a large number of surface conduction electron-emitting devices, the distribution of element characteristics due to forming is In addition, the activation process is not performed uniformly due to the variation in the distribution of the degree of vacuum even in the activation process described in detail in the examples, and the superiority or inferiority of the element characteristics and the variation in the image distribution occur. It is possible.

Further, in the method of installing the opening of the exhaust pipe or the introduction pipe in the outer frame in the image display device having the spacer as shown in FIG. 19, in the image display device, the organic gas for activation treatment is introduced from the introduction pipe. When introduced, variations in gas distribution occur in the image display device. The gas concentration becomes thicker in the vicinity of the introduction pipe and becomes lighter in the portion far from the introduction pipe, which causes a large difference in the distribution of gas inside the display device. If the activation process is performed in this state, the characteristic distribution of the element varies due to the variation of the gas concentration distribution, which eventually causes the occurrence of defects and the variation in the distribution of image characteristics and brightness.
There is a possibility of becoming one.

The present invention has been made in order to solve the problems of the above-mentioned conventional techniques. In the manufacturing process, the degree of vacuum inside the image display device becomes uniform, and the variation in distribution is improved. As a result, an object is to provide an image display device having improved image uniformity and characteristics.

[0016]

In the image display device of the present invention, a back plate provided with an electron emission source for generating an electron beam and a phosphor that emits light when the electron beam generated by the electron source collides with each other are provided. In an image display device having a face plate provided, an outer frame that is integrated with a back plate and a face plate that are arranged to face each other to form an airtight container, an atmospheric pressure resistant structural member, and an exhaust pipe, The tube is arranged so that the exhaust pipe is arranged at a right angle to the atmospheric pressure resistant structural member along substantially the entire length of the end surface of the electron emission source arranged on the back plate at one end inside the airtight container. An opening is provided on the side surface of the.

The opening of the exhaust pipe may be formed of a plurality of holes, and the diameter of the exhaust pipe may be increased from the inlet on the suction pump side of the exhaust pipe to the end of the exhaust pipe. The opening may be formed of a tapered slit, and the opening width may be gradually increased from the introduction portion of the exhaust pipe on the suction pump side toward the end of the exhaust pipe.

Further, a small-diameter exhaust pipe similar to the exhaust pipe may be internally provided as a double pipe inside the exhaust pipe,
A plurality of exhaust pipes may be arranged in the airtight container, and the exhaust pipe may serve both as an exhaust pipe for sucking the inside of the image display device into a vacuum and as a gas introduction pipe required for the manufacturing process. Good.

A back plate provided with an electron emission source for generating an electron beam, a face plate provided with a phosphor for emitting light when the electron beam generated by the electron source collides, and a back face arranged opposite to each other. In an image display device including an outer frame that is integrally formed with a plate and a face plate to form an airtight container, an atmospheric pressure resistant structural member, and an exhaust pipe, the exhaust pipe opens near a corner of the outer frame, The exhaust spacer is located on the side of the electron emission source from the opening of the exhaust pipe, the exhaust spacer is arranged at a right angle to the atmospheric pressure resistant structural member, and the exhaust spacer is opened on the side of the electron emission source in the direction of the electron emission source. Parts are provided.

The opening of the exhaust spacer may be formed of a plurality of holes, and the diameter of the hole may be increased so that the diameter of the exhaust spacer gradually increases as the distance from the vicinity of the suction port of the exhaust pipe increases. The opening width may be gradually increased with increasing distance from the vicinity of the suction port of the exhaust pipe, and a plurality of combinations of the exhaust spacer and the suction port of the exhaust pipe are arranged in the airtight container. Alternatively, the exhaust spacer may serve both as an exhaust port for sucking the inside of the image display device to a vacuum and as an inlet port for gas required in the manufacturing process.

Further, the exhaust spacer may have a structure which also functions as an atmospheric pressure resistant structural member.

[0022]

Next, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic perspective view of a first embodiment of the image display device of the present invention. In FIG. 1, a back plate 10 having a plurality of surface-conduction electron-emitting devices 17 formed as electron-emitting sources that generate electron beams, and a face plate that acts on the electrons emitted from the electron-emitting devices 17 to display an image. 13 and the outer frame 12
And the spacer 18 and the exhaust pipe 19 so as to face each other. Back plate 10 and outer frame 12, spacer 18, face plate 13 and outer frame 12, spacer 1
8 and the exhaust pipe 19 are airtightly adhered to each other by low melting point glass, and the back plate 10, the outer frame 12, the exhaust pipe 19, the spacer 18, and the face plate 13 form an airtight container.

A phosphor 15 and a metal back 16 which is an acceleration electrode are formed on the inner surface of the face plate 13, and the phosphor 15 emits light when the electrons emitted from the electron-emitting device 17 collide. Is displayed.

In the present embodiment, the spacer 18 is formed in a thin plate shape, and the plurality of spacers 18 arranged in a row in the length direction of the spacer 18 are arranged in a plurality of rows in the airtight container in the thickness direction. ing.

On the other hand, in the airtight container, an exhaust pipe 19 is arranged at one end inside the airtight container at a right angle to the spacer along substantially the entire length of the electron-emitting device 17 arranged on the back plate 10 on the end side. Has been done. In the present embodiment, a plurality of holes are formed as openings in the exhaust pipe 19 on the side surface on the side of the electron-emitting device 17 so as to face the electron-emitting device 17.

When the inside of the airtight container is sucked into a vacuum state through the exhaust pipe 19, the exhaust pipe 19 is arranged at right angles to the row of the atmospheric pressure resistant structural members (spacers 18). Since it is sucked directly into the opening of the exhaust pipe 19 without resistance through the rows of structural members, there is almost no variation in the degree of vacuum between the vicinity of the opening and the side opposite to the opening.

As for the method of setting the opening degree, as shown in FIG. 1, the opening of the exhaust pipe is composed of a plurality of holes and the diameter of the exhaust pipe 1
It may be perforated so that it gradually becomes larger from the suction pump side introduction portion of 9 toward the end of the exhaust pipe 19.
As described above, the opening portion of the exhaust pipe 129 may be formed of a tapered slit, and the opening width may be gradually increased from the suction pump side introduction portion of the exhaust pipe 129 toward the end of the exhaust pipe 129. In any of the methods, the degree of vacuum inside the airtight container is made uniform.

This exhaust pipe can also be used as an inlet for the gas necessary for the manufacturing process. As shown in FIG. 15, if a small-diameter exhaust pipe similar in shape to the exhaust pipe is internally provided as a double pipe inside the exhaust pipe 159, the inner pipe 159a and the outer pipe 159b are vacuumed in addition to the single purpose. It can also be used as an exhaust pipe for sucking into and a gas introduction pipe necessary for the manufacturing process. When a plurality of exhaust pipes are arranged in an airtight container as shown in FIGS. 11 and 13, similarly. Each can be used as a dedicated or combined use, and when it is used exclusively, the vacuum arrival time is shortened.

Next, a second embodiment of the present invention will be described. FIG. 14 is a schematic perspective view of the image display device according to the third embodiment of the present invention. In FIG. 14, a back plate 140 having a plurality of surface conduction electron-emitting devices 147 formed as electron sources for generating electron beams, and a face plate 143 for displaying an image by acting on the electrons emitted from the electron-emitting devices 147. And the outer frame 142 and the spacer 14
8a, an exhaust pipe 149, and an exhaust spacer 148b are arranged to face each other. Back plate 140, outer frame 142, spacer 148, and face plate 14
3, the outer frame 142, the spacer 148a, the exhaust pipe 149, and the exhaust spacer 148b are airtightly adhered by a low melting point glass, and the back plate 140 and the outer frame 14
2, the exhaust pipe 149, the spacer 148a, the exhaust spacer 148b, and the face plate 143 constitute an airtight container.

A phosphor 145 and a metal back 146 which is an acceleration electrode are formed on the inner surface of the face plate 143, and when the electrons emitted from the electron-emitting device 147 collide, the phosphor 145 emits an image. Is displayed.

On the other hand, in the airtight container, an exhaust pipe 149 is opened close to a corner of the outer frame, and an exhaust spacer 148b is opened from the opening of the exhaust pipe 149 to the electron-emitting device 14.
7, the exhaust spacer is arranged at a right angle with respect to the spacer 148a. In the present embodiment, the exhaust spacer 148b serving as an opening has a plurality of holes in parallel with the back plate 140. Perforated along the entire length.

When the inside of the airtight container is sucked into a vacuum state through the exhaust pipe 149, the gas in the airtight container is opened because the opening of the exhaust spacer 148b is arranged at right angles to the row of the atmospheric pressure resistant structural member (spacer 148a). Is sucked directly into the opening of the exhaust pipe 149 without resistance through the rows of the atmospheric pressure resistant structural members, so that there is almost no variation in the degree of vacuum between the vicinity of the opening and the side opposite to the opening.

As a method of setting the opening degree, the opening of the exhaust spacer 148b may be formed by a plurality of holes, and the holes may be perforated so that the hole diameter gradually increases from the suction port side to the opposite side. The opening portion of the spacer 148b may be formed of a tapered slit, and the opening width may be gradually increased from the suction port side to the opposite side.

The combination of the exhaust spacer and the inlet of the exhaust pipe can also be used as an inlet for gas required in the manufacturing process. If a plurality of combinations of exhaust spacers and suction ports of exhaust pipes are provided in the airtight container, each can be used as a dedicated or combined use, and the vacuum arrival time can be shortened when used exclusively. .

When the exhaust spacer has a structure that also functions as an atmospheric pressure resistant structural member, the atmospheric pressure resistant performance is improved or the original atmospheric pressure resistant structural member can be simplified.

The present invention is an image display device for displaying an image by utilizing the fluorescence generated by colliding an electron beam with a phosphor, and is characterized by a structure of an exhaust part for generating the vacuum. First, the entire image display device will be described.

An image display device using an electron beam has, for example, an electron emission source for generating an electron beam in a vacuum container sandwiched by a face plate and a back plate, and the electron emission source is a surface conduction electron. The applicant of the present application has filed a thin image display device that uses an emitting element to accelerate the electron beam of the emitting element to irradiate the phosphor and emit light to display an image (JP-A-3-261024).

Here, an example in which the present invention is applied to an image display device using the surface conduction electron-emitting device will be described.

FIG. 2 is a schematic view showing the structure of a planar surface conduction electron-emitting device to which the present invention can be applied.
FIG. 2A is a schematic plan view, and FIG. 2B is a schematic sectional view. In FIG. 2, 21 is an electron source substrate (insulating substrate), 23
Reference numerals 24 and 24 are device electrodes, 22 is a conductive thin film, and 25 is an electron emitting portion. As the electron source substrate 21, quartz glass, Na
Glass with a reduced content of impurities, such as soda lime glass, a soda lime glass substrate laminated with SiO ₂ formed by a sputtering method, ceramics such as alumina, and S
An i substrate or the like can be used.

As the material of the device electrodes 23 and 24 facing each other, a general conductor material can be used. This is, for example, Ni, Cr, Au, Mo, W, Pt, Ti, Al,
Metals or alloys such as Cu and Pd and Pd, Ag and A
A printed conductor composed of a metal such as u, RuO ₂ , Pd-Ag or a metal oxide and glass, In ₂ O ₃ -Sn
It can be appropriately selected from transparent conductors such as O ₂ and semiconductor conductor materials such as polysilicon.

The element electrode interval L, the element electrode length W, the shape of the conductive thin film 22 and the like are designed in consideration of the applied form and the like. The element electrode interval L can be preferably in the range of several thousand angstroms to several hundreds of micrometers, and more preferably in the range of several micrometers to several tens of micrometers in consideration of the voltage applied between the element electrodes. It is good to say

The device electrode length W can be set in the range of several micrometers to several hundreds of micrometers in consideration of the resistance value of the electrodes and electron emission characteristics. Device electrode 23,
The film thickness of 24 can range from a few hundred Angstroms to a few micrometers.

Not only the structure shown in FIG. 2, but also the conductive thin film 22 and the opposing element electrode 2 on the electron source substrate 21.
It is also possible to adopt a configuration in which 3, 24 are laminated in this order.

The conductive thin film 22 is particularly preferably a fine particle film composed of fine particles in order to obtain good electron emission characteristics. The film thickness is appropriately set in consideration of the step coverage to the device electrodes 23 and 24, the resistance value between the device electrodes 23 and 24, and the forming conditions described later, but normally, it is from several angstroms to several thousand angstroms. It is preferably in the range, and more preferably in the range of 10 Å to 500 Å. The resistance value is such that Rs is 10 ² to 10 ⁷ Ω / □. Rs is a value of Rs when the resistance R of a thin film having a thickness t, a width w and a length l is R = Rs (l / w). In the description of this embodiment, the forming process will be described by taking the energizing process as an example, but the forming process is not limited to this, and includes a process of causing a crack in the film to form a high resistance state. It is a thing.

The material forming the conductive thin film 22 is Pd,
Pt, Ru, Ag, Au, Ti, In, Cu, Cr, F
e, Zn, Sn, Ta, W, Pd and other metals, PdO, S
nO _Two , In_Two O_Three , PbO, Sb_Two O_Three Oxides such as
HfB_Two , ZrB_Two , LaB ₆ , CeB₆ , YB_Four , G
dB_Four Boride such as TiC, ZrC, HfC, TaC,
Carbides such as SiC, WC, TiN, ZrN, HfN, etc.
Suitable from nitrides, semiconductors such as Si and Ge, carbon, etc.
Selected.

The fine particle film described here is a film in which a plurality of fine particles are aggregated, and its fine structure has a state in which the fine particles are individually dispersed and arranged, or a state in which the fine particles are adjacent to each other or overlap each other (some fine particles are aggregated). However, it also includes the case where an island-shaped structure is formed as a whole). The particle size of the fine particles is in the range of several angstroms to several thousand angstroms, preferably in the range of 10 angstroms to 200 angstroms.

In this specification, the term "fine particles" is frequently used, and its meaning will be described.

Small particles are called "fine particles", and particles smaller than this are called "ultrafine particles". It is widely practiced to call a “cluster” smaller than “ultrafine particles” and having a few hundred atoms or less.

However, each boundary is not strict, and changes depending on what kind of property is focused on for classification. In addition, "fine particles" and "ultrafine particles" may be collectively referred to as "fine particles", and the description in this specification is in accordance with this.

"Experimental physics course 14 surface / fine particles"
(Koroshita Kinoshita, Kyoritsu Shuppan, published on September 1, 1986) describes the following.

"In this specification, the term" fine particles "refers to particles having a diameter of about 2 to 3 µm to about 10 nm, and the term" ultrafine particles "refers to a particle size of about 10 nm to 2 to 3 nm.
I mean to the extent. It is not a strict term because both are collectively referred to as just fine particles, and it is a rough guideline. A cluster having 2 to several tens to several hundreds of atoms constituting a particle is called a cluster. (195 pages
22-26) In addition, the definition of "ultrafine particles" in the "Forest and Fine Particles Project" of the New Technology Development Corporation had the following lower limit of particle size, and was as follows.

In the "Ultrafine particle project" (1981-1986) of the Creative Science and Technology Promotion System, particles having a size (diameter) in the range of about 1 to 100 nm are called "ultrafine particles". Then, one ultrafine particle is an aggregate of about 100 to 10 ⁸ atoms. From the atomic scale, the ultrafine particles are large to huge particles. "(" Ultrafine particles- Creative Science and Technology "Chief tax by Hayashi, Ryoji Ueda, Akira Tasaki; Mita Publishing 1988
(Page 2, line 1 to line 4 of the year) "A particle smaller than ultrafine particles, that is, one particle composed of several to several hundred atoms is generally called a cluster" (ibid., Page 2, 12).
Based on the above general term, "fine particles" in the present specification are aggregates of a large number of atoms and molecules, and the lower limit of the particle size is several angstroms to 10 angstroms and the upper limit. Indicates a material having a thickness of several μm.

The electron emitting portion 25 is constituted by a crack having a high resistance formed in a part of the conductive thin film 22, and the conductive thin film 2
2 depends on the film thickness, the film quality, the material, a method such as energization forming described later, and the like. In some cases, conductive particles having a particle size in the range of several angstroms to several hundred angstroms may be present inside the electron emitting portion 25. The conductive fine particles contain some or all of the elements of the material forming the conductive thin film 22. The electron emitting portion 25 and the conductive thin film 22 in the vicinity thereof may contain carbon and a carbon compound.

There are various methods for manufacturing the above-mentioned surface conduction electron-emitting device, and one example thereof is schematically shown in FIG.

An example of the manufacturing method will be described below with reference to FIGS. Also in FIG. 3, the same parts as those shown in FIG. 2 are designated by the same reference numerals as those shown in FIG.

1) The electron source substrate 21 is thoroughly washed with a detergent, pure water and an organic solvent, and after the element electrode material is deposited by a vacuum deposition method, a sputtering method or the like, the electron source substrate 21 is deposited on the electron source substrate 21 by using, for example, a photolithography technique. Device electrodes 23 and 24
Are formed (FIG. 3A).

2) An organic metal solution is applied to the electron source substrate 21 provided with the device electrodes 23 and 24 to form an organic metal thin film. As the organic metal solution, a solution of an organic metal compound containing a metal of the material of the conductive thin film 22 as a main element can be used. The organometallic thin film is heat-fired and patterned by lift-off, etching or the like to form the conductive thin film 22 (FIG. 3B). Although the coating method of the organic metal solution has been described here, the method of forming the conductive thin film 22 is not limited to this, and the vacuum deposition method, the sputtering method, the chemical vapor deposition method, the dispersion coating method, the dipping method is used. Law,
A spinner method or the like can also be used.

3) Subsequently, a forming process is performed. As an example of a method of the forming step, a method by an energization process will be described. When electricity is applied between the element electrodes 23 and 24 by using a power source (not shown),
An electron emitting portion 25 having a changed structure is formed (FIG. 3).
(C)). According to the energization forming, a site having a structural change such as destruction, deformation or alteration is locally formed in the conductive thin film 22. This portion constitutes the electron emitting portion 25.
An example of the voltage waveform of energization forming is shown in FIG.

The voltage waveform is preferably a pulse waveform. The method shown in FIG. 5A in which a pulse having a pulse peak value of a constant voltage is continuously applied and the method shown in FIG. 5B in which a voltage pulse is applied while increasing the pulse peak value are used. There is.

In FIG. 5A, T1 and T2 are the pulse width and pulse interval of the voltage waveform. Usually, T1 is set in the range of 1 microsecond to 10 milliseconds, and T2 is set in the range of 10 microseconds to 100 milliseconds. The peak value of the triangular wave (peak voltage at the time of energization forming) is appropriately selected according to the form of the surface conduction electron-emitting device. Under such conditions, for example, a voltage is applied for several seconds to several tens minutes. The pulse waveform is not limited to the triangular wave, and a desired waveform such as a rectangular wave can be adopted.

T1 and T2 in FIG. 5B are shown in FIG.
It can be similar to that shown in FIG. The peak value of the triangular wave (peak voltage during energization forming) can be increased by, for example, about 0.1 V step.

The end of the energization forming process can be detected by applying a voltage that does not locally break or deform the conductive thin film 22 during the pulse interval T2 and measure the current. For example, the device current flowing by applying a voltage of about 0.1 V is measured, the resistance value is obtained, and the energization forming is terminated when the resistance value is 1 MΩ or more.

4) It is preferable to perform a process called an activation process on the element which has finished forming. The activation step is a step in which the element current If and the emission current Ie are significantly changed by this step.

The activation step can be carried out by repeating the application of pulses in the same manner as the energization forming in an atmosphere containing a gas of an organic substance, for example. This atmosphere can be formed by using the organic gas remaining in the atmosphere when the inside of the vacuum container is evacuated by using, for example, an oil diffusion pump or a rotary pump, and is sufficiently evacuated once by an ion pump or the like. Obtained by introducing a gas of a suitable organic material into a vacuum. The preferable gas pressure of the organic substance at this time is different depending on the form of application, the shape of the vacuum container, the type of the organic substance, and the like, and is appropriately set depending on the case. Suitable organic substances include alkanes,
Alkenes, alkyne aliphatic hydrocarbons, aromatic hydrocarbons, alcohols, aldehydes, ketones, amines, phenols, carboxylic acids, organic acids such as sulfonic acid, and the like, specifically, methane, ethane, propane C _n H _{2n + 2} represented by saturated hydrocarbons, unsaturated hydrocarbons represented by the composition formula and propylene such as C _n H _2n, benzene, toluene, methanol, ethanol, formaldehyde , Acetaldehyde, acetone,
Methyl ethyl ketone, methyl amine, ethyl amine, phenol, formic acid, acetic acid, propionic acid, etc. can be used.
By this treatment, carbon or a carbon compound is deposited on the device from organic substances existing in the atmosphere, and the device current I
f, the emission current Ie changes remarkably.

The termination of the activation process is appropriately determined while measuring the device current Ie. The pulse width, pulse interval, pulse crest value, and the like are set as appropriate.

Carbon and carbon compounds are, for example, graphite [so-called HOPG (High Oriented Pyrolytic Grain
phite), PG (Pyrolitic Graphite pyrolysis carbon), GC (G
lassy Carbon (including amorphous carbon). HOPG has almost perfect crystal structure of graphite, and PG has 200 crystal grains.
Crystal structure slightly disordered at about angstrom, G
C indicates that the crystal grains became about 20 angstroms and the disorder of the crystal structure was further increased. ], Amorphous carbon (referring to amorphous carbon and a mixture of amorphous carbon and fine crystals of graphite), and its film thickness is preferably in the range of 500 angstroms or less, and in the range of 300 angstroms or less. Is more preferable.

5) It is preferable that the electron-emitting device obtained through these steps is subjected to a stabilizing step. This step is a step of exhausting the organic substance in the vacuum container. It is preferable to use a vacuum exhaust device that does not use oil so that the oil generated from the device does not affect the characteristics of the element. Specifically, a vacuum evacuation device such as a sorption pump or an ion pump can be used.

When an oil diffusion pump or a rotary pump is used as an exhaust device in the activation step and an organic gas derived from an oil component generated from this is used, the partial pressure of this component must be kept as low as possible. . The partial pressure of the organic component in the vacuum container is preferably 1 × 10 ⁻³ Torr or less, and more preferably 1 × 10 ⁻¹⁰ Torr or less, which is a partial pressure at which the carbon and the carbon compound are not newly deposited. Further, when exhausting the inside of the vacuum container, it is preferable to heat the entire vacuum container to easily exhaust the organic substance molecules adsorbed on the inner wall of the vacuum container and the electron-emitting device. The heating condition at this time is preferably 80 to 200 ° C. for 5 hours or more, but is not particularly limited to this condition and may be appropriately selected depending on various conditions such as the size and shape of the vacuum container and the configuration of the electron-emitting device. To do. The pressure in the vacuum container is required to be as low as possible, preferably 1 to 3 × 10 ^-7 Torr or less, more preferably 1 × 10 ^-8 Torr or less.

The atmosphere after driving after the stabilization process is preferably maintained at the time when the above-mentioned stabilization process is completed. However, the atmosphere is not limited to this, and if the organic substance is sufficiently removed. Even if the degree of vacuum itself is lowered to some extent, it is possible to maintain sufficiently stable characteristics.

By adopting such a vacuum atmosphere, the deposition of new carbon or carbon compound can be suppressed,
As a result, the device current If and the emission current Ie are stabilized.

The basic characteristics of the electron-emitting device to which the present invention is applicable obtained through the above steps will be described with reference to FIGS. 6 and 7.

FIG. 6 is a schematic diagram showing an example of a vacuum processing apparatus, and this vacuum processing apparatus also has a function as a measurement / evaluation apparatus. Also in FIG. 6, the parts shown in FIG. 2 are denoted by the same reference numerals as those given in FIG. In FIG. 6, 65 is a vacuum container, and 66 is an exhaust pump. An electron-emitting device is provided in the vacuum vessel 65. That is, 21 is an electron source substrate that constitutes an electron-emitting device, 23 and 24 are device electrodes, 22 is a conductive thin film, and 25 is an electron-emitting portion. 61 is a power source for applying the device voltage Vf to the electron-emitting device, and 60 is the device electrode 2
A first ammeter for measuring a device current If flowing through the conductive thin film 22 between the electrodes 3 and 24, and an anode electrode 64 for capturing the emission current Ie emitted from the electron emission portion of the device. 63 is a high voltage power supply for applying a voltage to the anode electrode 64, and 62 is a second ammeter for measuring the emission current Ie emitted from the electron emission portion 25 of the device. As an example, the voltage of the anode electrode is set to 1 kV to 10 kV.
V and the distance H between the anode electrode and the electron-emitting device.
Can be measured in the range of 2 mm to 8 mm.

In the vacuum container 65, equipment necessary for measurement in a vacuum atmosphere such as a vacuum gauge (not shown) is provided.
The measurement and evaluation can be performed in a desired vacuum atmosphere. The exhaust pump 66 is composed of a normal high vacuum device system including a turbo pump and a rotary pump, and an ultra-high vacuum device system including an ion pump.
The entire vacuum processing apparatus provided with the electron source substrate shown here can be heated up to 200 degrees by a heater (not shown).
Therefore, when this vacuum processing apparatus is used, the steps after the above-described energization forming can be performed.

FIG. 7 shows the emission current Ie, the device current If, and the device voltage V measured using the vacuum processing apparatus shown in FIG.
It is the graph which showed the relationship with f typically. In FIG. 7, since the emission current Ie is significantly smaller than the element current If, it is shown in arbitrary units. The vertical and horizontal axes are linear scales.

As is clear from FIG. 7, the surface conduction electron-emitting device to which the present invention can be applied has the following three characteristic properties regarding the emission current Ie. That is, (1) In this device, the emission current Ie rapidly increases when a device voltage higher than a certain voltage (called a threshold voltage, Vth in FIG. 7) is applied. On the other hand, when the device voltage is lower than the threshold voltage Vth, the emission current Ie decreases. Almost no Ie is detected. That is, the emission current Ie
Is a non-linear element having a clear threshold voltage Vth with respect to.

(2) Since the emission current Ie monotonically increases with the element voltage Vf, the emission current Ie can be controlled by the element voltage Vf.

(3) The emitted charges captured by the anode electrode 64 depend on the time for which the device voltage Vf is applied. That is, the amount of charge captured by the anode electrode 64 can be controlled by the time during which the device voltage Vf is applied.

As can be understood from the above description, the surface-conduction type electron-emitting device to which the present invention can be applied can easily control the electron-emitting characteristics according to the input signal. By utilizing this property, it is possible to apply to various fields such as an electron source and an image forming apparatus having a plurality of electron-emitting devices.

In FIG. 7, an example in which the element current If monotonically increases with respect to the element voltage Vf (hereinafter referred to as “MI characteristic”) is shown by a solid line. The element current If is equal to the element voltage Vf.
May exhibit a voltage control type negative resistance characteristic (hereinafter, referred to as “VCNR characteristic”) in some cases (not shown). These characteristics can be controlled by controlling the above process.

An application example of the electron-emitting device to which the present invention can be applied will be described below. By arranging a plurality of surface conduction electron-emitting devices to which the present invention is applicable on a substrate, for example, an electron source or an image forming apparatus can be configured.

Various arrangements of the electron-emitting devices can be adopted. As an example, each of a large number of electron-emitting devices arranged in parallel is connected at both ends, a large number of rows of electron-emitting devices are arranged (referred to as a row direction), and a direction perpendicular to the wiring (referred to as a column direction). There is a ladder-like arrangement in which electrons from the electron-emitting devices are controlled and driven by control electrodes (also referred to as grids) disposed above the electron-emitting devices. Separately, a plurality of electron-emitting devices are arranged in a matrix in the X and Y directions, and one of electrodes of the plurality of electron-emitting devices arranged in the same row is commonly connected to a wiring in the X direction. For example, the other electrode of the plurality of electron-emitting devices arranged in the same column is commonly connected to the wiring in the Y direction. This is a so-called simple matrix arrangement. First, the simple matrix arrangement will be described in detail below.

The surface conduction electron-emitting device to which the present invention can be applied has the characteristics (1) to (3) as described above. That is, the emitted electrons from the surface conduction electron-emitting device can be controlled by the peak value and width of the pulse voltage applied between the opposing device electrodes at the threshold voltage or higher. On the other hand, below the threshold voltage, it is hardly emitted. According to this characteristic, even when a large number of electron-emitting devices are arranged, if a pulsed voltage is appropriately applied to each device, a surface conduction electron-emitting device is selected according to an input signal to emit electrons. You can control the quantity.

Based on this principle, an electron source substrate obtained by arranging a plurality of electron-emitting devices to which the present invention can be applied will be described below with reference to FIG. In FIG. 4, 41 is an electron source substrate, 42 is an X-direction wiring, and 43 is a Y-direction wiring. Reference numeral 44 is a surface conduction electron-emitting device, and 45 is a wire connection.

The m X-direction wirings 42 are Dx1 and Dx.
2, ... Dxm, and can be made of a conductive metal or the like formed by a vacuum deposition method, a printing method, a sputtering method, or the like. The wiring material, film thickness, and width are appropriately designed. The Y-direction wiring 43 includes Dy1, Dy2, ... Dyn.
And formed in the same manner as the X-direction wiring 72. An interlayer insulating layer (not shown) is provided between the m X-direction wirings 42 and the n Y-direction wirings 43 to electrically separate the two (m and n are both Positive integer).

The interlayer insulating layer (not shown) is made of SiO ₂ or the like formed by the vacuum deposition method, the printing method, the sputtering method or the like. For example, the electron source substrate 4 on which the X-direction wiring 42 is formed
1 is formed in a desired shape on the whole surface or a part thereof, and particularly X
The film thickness, material, and manufacturing method are appropriately set so as to withstand the potential difference at the intersection of the directional wiring 42 and the Y-directional wiring 43. X
The direction wiring 42 and the Y direction wiring 43 are drawn out as external terminals.

A pair of electrodes (not shown) constituting the surface conduction electron-emitting device 44 are electrically connected to the m X-direction wirings 42 and the n Y-direction wirings 43 by connecting wires 45 made of a conductive metal or the like. It is connected to the.

The material forming the wiring 42 and the wiring 43, the material forming the wire connection 45, and the material forming the pair of device electrodes may be the same or different in some or all of the constituent elements. Good. These materials are appropriately selected, for example, from the above-described materials for the device electrodes. When the material of the element electrode and the wiring material are the same, the wiring connected to the element electrode can also be referred to as an element electrode.

A scanning signal applying means (not shown) for applying a scanning signal for selecting a row of the surface conduction electron-emitting devices 44 arranged in the X direction is connected to the X-direction wiring 42. On the other hand, the Y-direction wiring 43 is connected to a modulation signal generating means (not shown) for modulating each column of the surface conduction electron-emitting devices 44 arranged in the Y direction according to an input signal.
The driving voltage applied to each electron-emitting device is supplied as a difference voltage between the scanning signal and the modulation signal applied to the device.

In the above structure, individual elements can be selected and driven independently by using simple matrix wiring. An image forming apparatus configured by using an electron source having such a simple matrix arrangement will be described with reference to FIGS. 8, 9 and 10. FIG. 8 is a schematic perspective view showing an example of the display panel of the image forming apparatus.
FIG. 9 is a schematic view of a fluorescent film used in the image forming apparatus of FIG. FIG. 10 is a block diagram showing an example of a drive circuit for displaying according to an NTSC television signal.

In FIG. 8, 81 is an electron source substrate on which a plurality of electron emitting devices are arranged, 80 is a back plate to which the electron source substrate 81 is fixed, and 83 is a fluorescent film 8 on the inner surface of a glass substrate 84.
5 and a metal back 86 are formed on the face plate. Reference numeral 82 denotes an outer frame, and a back plate 80 and a face plate 83 are connected to the outer frame 82 by using frit glass or the like. Reference numeral 90 composed of the back plate 80, the face plate 83, and the outer frame 82 is an envelope, and is, for example, 400 to 50 in the atmosphere or nitrogen.
It is formed by sealing by baking at a temperature range of 0 degree for 10 minutes or more. 87 corresponds to the electron-emitting device 17 in FIG. Reference numerals 88 and 89 denote an X-direction wiring and a Y-direction wiring connected to the pair of device electrodes of the surface conduction electron-emitting device.

The envelope 90 is composed of the face plate 83, the outer frame 82 and the back plate 80 as described above. Since the back plate 80 is provided mainly for the purpose of reinforcing the strength of the electron source substrate 81, when the electron source substrate 81 itself has sufficient strength, the separate back plate 80 can be omitted. That is, the outer frame 82 is directly sealed to the electron source substrate 81, and the face plate 83 and the outer frame 82 are
Also, the envelope 90 may be configured by the electron source substrate 81. On the other hand, between the face plate 83 and the back plate 80,
By installing a support body (not shown) called a spacer, the envelope 90 having sufficient strength against the atmospheric pressure can be configured.

FIG. 9 is a schematic diagram showing a fluorescent film. In the case of monochrome, the fluorescent films 91 and 96 can be composed of only the fluorescent material. In the case of a color fluorescent film, black conductive materials 93 and 98 called a black stripe or a black matrix and a fluorescent substance 9 depending on the arrangement of the fluorescent substances.
2, 97. The purpose of providing the black stripes and the black matrix is to display each of the phosphors 92, 9 of the three primary color phosphors necessary for color display.
The purpose of the present invention is to make the color-separated portions between 7 black so as to make the color mixture inconspicuous and to suppress the deterioration of the contrast due to the reflection of external light on the fluorescent films 91 and 96. As the material of the black stripe, in addition to a commonly used material containing graphite as a main component, a material having conductivity and having little light transmission and reflection can be used.

As a method of applying the phosphor to the glass substrate 84, a precipitation method, a printing method or the like can be adopted regardless of monochrome or color. A metal back 86 is usually provided on the inner surface side of the fluorescent film 85. The purpose of providing the metal back 86 is to improve the brightness by specularly reflecting the light toward the inner surface side of the light emission of the phosphor toward the face plate 83 side, and to act as an electrode for applying an electron beam acceleration voltage. , Protecting the phosphor from damage caused by collision of negative ions generated in the envelope. The metal back 86 can be manufactured by performing a smoothing process (usually called “filming”) on the inner surface of the fluorescent film 85 after manufacturing the fluorescent film, and then depositing Al using vacuum deposition or the like. .

On the face plate 83, a transparent electrode (not shown) may be provided on the outer surface side of the fluorescent film 85 in order to further enhance the conductivity of the fluorescent film 85.

When the above-mentioned sealing is performed, in the case of color, it is necessary to associate each color phosphor with the electron-emitting device.
Sufficient alignment is essential.

The image forming apparatus shown in FIG. 8 is manufactured, for example, as follows.

[0097] The envelope 90, while appropriately heated similarly to the foregoing stabilizing process, an ion pump to evacuate through the exhaust pipe (not shown) by an exhaust device not using oil, such as a sorption pump, 10 ^-7 Torr After an atmosphere having a sufficiently small degree of vacuum of an organic substance is obtained, sealing is performed. A getter process can be performed to maintain the degree of vacuum after the envelope 90 is sealed. This is to heat the getter placed at a predetermined position (not shown) in the envelope 90 by heating using resistance heating or high frequency heating immediately before or after sealing the envelope 90. Then, it is a process of forming a vapor deposition film. The getter is usually composed mainly of Ba or the like,
Due to the adsorption action of the deposited film, for example, 1 × 10 ⁻⁵ or 1
The degree of vacuum is maintained at × 10 ^-7 Torr. Here, steps after the forming process of the surface conduction electron-emitting device can be appropriately set.

Next, a configuration example of a drive circuit for performing television display based on an NTSC television signal on a display panel constructed by using an electron emission source having a simple matrix arrangement will be described with reference to FIG. To do. In FIG. 10, 101 is an image display panel, 102 is a scanning circuit, and 1
Reference numeral 03 is a control circuit, and 104 is a shift register. 10
5 is a line memory, 106 is a sync signal separation circuit, 107
Is a modulation signal generator and Vx and Va are DC voltage sources.

The display panel 101 has terminals Dox1 to Dox1.
oxm, terminals Doy1 to Doyn, and a high voltage terminal Hv are connected to an external electric circuit. The terminals Dox1 to Doxm sequentially drive an electron emission source provided in the display panel, that is, a group of surface conduction electron-emitting devices arranged in a matrix of M rows and N columns matrix by row (N elements). A scanning signal for

A modulation signal for controlling the output electron beam of each element of the surface conduction electron-emitting devices of one row selected by the scanning signal is applied to the terminals Dyl to Dyn. The high voltage terminal Hv is supplied with a DC voltage of, for example, 10 K [V] from a DC voltage source Va, which is sufficient to excite the phosphor into an electron beam emitted from the surface conduction electron-emitting device. It is an accelerating voltage for applying energy.

The scanning circuit 102 will be described. This circuit includes M switching elements inside (in the drawing, S1 to Sm are schematically shown). Each switching element is connected to the output voltage of the DC voltage source Vx or 0
One of [V] (ground level) is selected and electrically connected to the terminals Dx1 to Dxm of the display panel 101. Each of the switching elements S1 to Sm operates based on the control signal Tscan output from the control circuit 103, and can be configured by combining switching elements such as FETs.

In the case of the present example, the DC voltage source Vx is a driving voltage applied to an unscanned device based on the characteristics (electron emission threshold voltage) of the surface conduction electron-emitting device, and the electron emission threshold voltage is applied. It is set to output a constant voltage that is less than or equal to the voltage.

The control circuit 103 has a function of matching the operation of each unit so that an appropriate display is performed based on an image signal input from the outside. The control circuit 103, based on the synchronization signal Tsync sent from the synchronization signal separation circuit 106, outputs Tscan, Tsft, and Tm to each unit.
ry control signals are generated.

The sync signal separation circuit 106 is a circuit for separating the sync signal component and the luminance signal component from the NTSC system television signal input from the outside, and uses a general frequency separation (filter) circuit or the like. Can be configured. The sync signal separated by the sync signal separation circuit 106 is composed of a vertical sync signal and a horizontal sync signal, but is shown here as a Tsync signal for convenience of explanation. The luminance signal component of the image separated from the television signal is represented as a DATA signal for convenience. The DATA signal is input to the shift register 104.

The shift register 104 is for serial / parallel conversion of the DATA signals serially input in time series for each line of the image, and is based on the control signal Tsft sent from the control circuit 103. The control signal Tsft can be said to be the shift clock of the shift register 104. The serial / parallel converted image data for one line (corresponding to drive data for N electron emission elements) is output from the shift register 104 as N parallel signals Id1 to Idn.

The line memory 105 is a storage device for storing data for one line of an image for a required time, and stores the contents of Id1 to Idn as appropriate in accordance with the control signal Tmry sent from the control circuit 103. The stored contents are output as I'd1 to I'dn,
The signal is input to modulation signal generator 107.

The modulation signal generator 107 outputs the image data I ′.
It is a signal source for appropriately driving and modulating each of the surface conduction electron-emitting devices according to each of d1 to I'dn, and the output signal is a surface conduction electron in the display panel 101 through terminals Doy1 to Doyn. Applied to the emitting element.

As described above, the electron-emitting device to which the present invention can be applied has the following basic characteristics with respect to the emission current Ie. That is, the electron emission has a voltage Vth at a clear threshold value, and the electron emission occurs only when a voltage higher than Vth is applied. For a voltage equal to or higher than the electron emission threshold value, the emission current also changes according to the change in the voltage applied to the device. From this, when applying a pulsed voltage of this device, for example, when a voltage below the electron emission threshold is applied, no electron emission occurs, but when applying a voltage above the electron emission threshold. Emits an electron beam. that time,
It is possible to control the intensity of the output electron beam by changing the peak value Vm of the pulse. In addition, it is possible to control the total amount of charges of the output electron beam by changing the pulse width Pw.

Therefore, as a method of modulating the electron-emitting device according to the input signal, a voltage modulation method, a pulse width modulation method or the like can be adopted. When implementing the voltage modulation method, a circuit of a voltage modulation method that generates a voltage pulse of a fixed length and modulates the peak value of the pulse appropriately according to input data is used as the modulation signal generator 107. be able to.

When implementing the pulse width modulation method,
As the modulation signal generator 107, it is possible to use a circuit of a pulse width modulation system that generates a voltage pulse having a constant crest value and appropriately modulates the width of the voltage pulse according to input data.

The shift register 104 and the line memory 10
5 can be a digital signal type or an analog signal type. This is because the serial / parallel conversion and storage of the image signal may be performed at a predetermined speed.

When the digital signal type is used, it is necessary to convert the output signal DATA of the sync signal separation circuit 106 into a digital signal, which can be provided with an A / D converter at the output section of 106. In connection with this, the line memory 10
Depending on whether the output signal of 5 is a digital signal or an analog signal,
The circuit used for modulation signal generator 107 is slightly different. That is, in the case of the voltage modulation method using a digital signal, the modulation signal generator 107 is provided with, for example, a D / A
A conversion circuit is used, and an amplification circuit or the like is added if necessary.
In the case of the pulse width modulation method, the modulation method generator 107 includes
For example, a circuit that combines a high-speed oscillator, a counter that counts the number of waves output from the oscillator, and a comparator that compares the output value of the counter with the output value of the memory is used. If necessary, an amplifier for amplifying the voltage of the pulse width modulated signal output from the comparator to the drive voltage of the surface conduction electron-emitting device can be added.

In the case of the voltage modulation method using an analog signal, the modulation signal generator 107 may be an amplifier circuit using an operational amplifier or the like, and a level shift circuit or the like may be added if necessary. In the case of the pulse width modulation method, for example, a voltage controlled oscillation circuit (VCO) can be adopted, and an amplifier for voltage amplification up to the drive voltage of the surface conduction electron-emitting device can be added if necessary.

In the image display device to which the present invention having such a structure can be applied, electron emission is performed by applying a voltage to each electron-emitting device via the external terminals Dox1 to Doxm and Doy1 to Doyn. Occurs.
A high voltage is applied to the metal back 86 or a transparent electrode (not shown) via the high voltage terminal Hv to accelerate the electron beam. The accelerated electrons collide with the fluorescent film 85 to generate light emission and form an image.

The configuration of the image forming apparatus described here is an example of the image forming apparatus to which the present invention can be applied, and various modifications can be made based on the technical idea of the present invention. As for the input signal, the NTSC system is mentioned, but the input signal is not limited to this, and other than the PAL, SECAM system, etc.
A TV signal composed of a large number of scanning lines (for example,
High-definition TV) systems such as the MUSE system can also be adopted.

[0116]

Embodiments of the present invention will be described below with reference to the drawings.

Example 1 As described above, FIG. 1 is a schematic perspective view of Example 1 of the image display device of the present invention. FIG.
The description of the reference numerals, functions, and configurations have been described in detail in the above-described embodiments of the invention, and thus will be omitted.

On the side surface of the exhaust pipe 19 on the side of the electron-emitting device 17, a plurality of holes are formed on the entire surface facing the electron-emitting device 17. The diameter of the exhaust pipe 19 is 5 mm, the hole diameter is small in the vicinity of the inlet on the exhaust pump side and is 0.1 to 1 mm, and the hole is 1 to 10 mm along the end face of the electron-emitting device 17 arranged. Increase the hole diameter gradually at intervals,
The end of the exhaust pipe is perforated to have a diameter of 2 to 5 mm. That is, as the distance from the suction side increases, the hole diameter is increased to uniformize the suction resistance, and there is almost no variation in the distribution of the degree of vacuum in the airtight container when performing vacuum suction in the airtight container. In the present invention, the exhaust pipe diameter is 5 mm.
However, the diameter is not limited to this, and may be any diameter suitable for the image display device. Further, the hole diameter and the hole interval are not limited to the hole diameter and the hole interval of the present invention, and there is almost no variation in the distribution of the degree of vacuum in the vacuum container due to the relationship between the exhaust pipe diameter and the length where the electron-emitting device is arranged. It should be arranged so that it does not exist. Also. The exhaust pipe 19 is not only used for sucking a vacuum in the closed container, but can also be used for introducing a gas of an organic substance into the closed container for each additional treatment in the manufacturing process. It is possible to use one exhaust pipe as both the exhaust pipe and the introduction pipe. Even when introducing a gas or the like, it is possible to quickly create an atmosphere in the airtight container without variation in distribution.

Next, this embodiment will be described below in which an image display device having an element structure with a simple matrix arrangement is manufactured by using PdO as a main material of the conductive thin film of the electron-emitting device 17 (FIGS. 2 and 3). (See FIG. 4).

First, an interval width of 2 μm and an interval length of 400 are formed on the electron source substrate 21 (glass substrate) by the lift-off method.
Au element electrode 2 having a thickness of 1000 μm and a thickness of 1000 Å
3 and 24 were produced (FIG. 3 (a)). Next, an organic Pds solution (CCP4230 Okuno Pharmaceutical Co., Ltd.) was applied, and 3
It was baked at 00 ° C. for 15 minutes. Next, the resist pattern was patterned and etching was performed to cover the gap between the electrodes across the electrodes 23 and 24, and the conductive thin film 22 having a pattern of 280 μm in length and 30 μm in width in the gap direction was produced (FIG. 3).
(B)). Through these steps, 600 × 400 surface conduction electron-emitting devices were manufactured on the same glass substrate.

Next, after the surface conduction electron-emitting device 17 is manufactured, a 1 μm thick Au wiring (42, 43, 45 in FIG. 4) is formed by a photolithography process for electrical connection to the outside.
Was formed.

Through the above steps, a back plate having a simple matrix arrangement shown in FIG. 4 was obtained. In FIG. 4, 41
Is an electron source substrate, 42 is an X-direction wiring, 43 is a Y-direction wiring,
Reference numeral 44 is a surface conduction electron-emitting device, and 45 is a wire connection.

The face plate 1 of the image display device
The phosphor 15 is applied to the inner surface of 3 (FIG. 1) in advance, and the surface of the phosphor 15 is provided with a metal back 16 having conductivity.

Then, a low melting point glass (LS-3081 manufactured by Nippon Electric Glass Co., Ltd.) is applied to a portion of the face plate 13 and the back plate 10, the spacer 18, and a part of the outer frame 12 to which the exhaust pipe 19 is attached. To do.

Next, the outer frame 12, the spacer 18, and the exhaust pipe 1
The back plate 10 and the face plate 13 are opposed to each other with the sheet 9 sandwiched therebetween, and the plates are put into an electric furnace (not shown) equipped with a container capable of heating the entire device while bonding and fixing with a jig or the like, and heating and sealing. After that, it is cooled slowly and returned to room temperature, and the completed image display device is taken out of the electric furnace.

As described above, the face plate 13
Since the back plate 10, the outer frame 12, the spacer 18, and the exhaust pipe 19 are fixed to each other by the low melting point glass,
It was possible to obtain a strong bond without vacuum leakage.

Here, the spacer 18 will be described.
The spacers 18 are arranged on the upper and lower sides of the face plate 1 respectively.
3. It is fixed to the back plate 10 and functions as an atmospheric pressure resistant support member capable of withstanding a pressure difference from the outside when a vacuum is applied between the face plate 13 and the back plate 10.

By the way, the back plate 10 and the outer frame 1
2, spacer 18, face plate 13 and outer frame 1
2. The sealing material for sealing the spacer 18 is made of any material as long as the back plate 10 and the face plate 13 can be hermetically sealed via the outer frame 12 and the spacer 18. It does not matter, in particular, there are amorphous low-melting glass, crystalline low-melting glass and the like, and if they are mixed with an organic solvent, a binder such as nitrocellulose and the binder are used. It may be prepared in a paste form by mixing with an organic solvent to be dissolved. It is desirable to use a sticky material at least at the coating operation temperature of the sealing material. The application method of the sealing material is a spray method, an injection method by a dispenser method, or the like.
Any method may be used as long as a desired sealing material can be applied and formed at the sealing position.

Next, the inside of the airtight container is ^closed to 10 ⁻⁶ Ton by the vacuum pump from the exhaust pipe 19 attached to the image display device.
Evacuate to a vacuum below rr.

After that, a voltage was applied between the device electrodes through the wiring, and the energization process called forming was performed to form the electron emitting portion. The forming process uses the voltage waveform as shown in FIG.
Forming was performed by setting T1 in (b) to 1 msec and T2 to 10 msec, and gradually increasing the peak value of the triangular wave in 0.1 V steps. Further, during the forming treatment, a resistance measuring pulse of 0.1 V was simultaneously inserted between T2 to measure the resistance. The forming was ended when the measured value by the resistance measuring pulse became about 1 MΩ or more, and at the same time, the voltage application to the element was ended.

Then, the degree of vacuum in the airtight container is set to 1 × 10 ^−7.
After evacuation to Torr, acetone was introduced into the airtight container as an organic substance by using the exhaust pipe 19 as an introduction pipe. The partial pressure of acetone at this time was 1 × 10 ⁻⁵ Torr. Subsequently, a voltage pulse was applied to each of the surface conduction electron-emitting devices formed on the substrate to perform activation treatment. The voltage pulse applied to the element at this time is shown in FIG.
In (a), T1 was set to 1 msec, T2 was set to 10 msec, and the peak value was set to 15V.

Next, in order to exhaust the acetone introduced for the activation treatment, the inside of the airtight container was evacuated to 1 × 10 ^−6.5 Torr from the exhaust pipe 19 by the vacuum pump. Further, degassing was performed while heating the image display device to about 130 ° C. with a hot plate. And
The airtight container was sealed by heating the exhaust pipe 19 of the image display device with a gas burner and welding.

When an image was displayed by the image forming apparatus of the present embodiment formed as described above, a pixel defect, uneven brightness, etc. were not detected, and a bright and good image display was obtained.

As described above, by installing the exhaust pipe 19 along the electron-emitting device arranged on the back plate, the exhaust pipe 19 having a plurality of holes whose diameters increase toward the tip is formed on the electron-emitting device side. Also, the degree of vacuum in the airtight container can be made uniform, and the forming process and the activation process can be made uniform, so that the characteristics of the device, the brightness of the image display device, etc. can be made uniform. It became so. In addition, the number of defects can be reduced and the yield can be improved. In addition, this exhaust pipe
Not only used when drawing a vacuum, it can also be used as an introduction pipe for introducing the gas of the organic substance used in the above-mentioned activation step into the image display device, and with one exhaust pipe, It could also serve as an exhaust pipe and an introduction pipe.

In the present embodiment, the explanation has been made by assuming that the number of the exhaust pipe is one, but as shown in FIG. 11, two or more exhaust pipes may be used. The pipe may be separate, or a plurality of exhaust pipes may also be used as the introduction pipe, and the exhaust pipe and the introduction pipe may be combined. The combined use also shortens each time, and further improves the characteristics and uniformity of image quality.

(Embodiment 2) Next, a second embodiment of the present invention will be described. FIG. 12 is a schematic perspective view of the image display device according to the second embodiment of the present invention. In FIG. 5, a back plate 120 on which a plurality of surface conduction electron-emitting devices 127 are formed as an electron source for generating an electron beam,
A face plate 123, which acts on electrons emitted from the electron-emitting device 127 to display an image, is arranged to face each other via an outer frame 122, a spacer 128, and an exhaust pipe 129. The back plate 120 and the outer frame 122, the spacer 128, and the face plate 123 and the outer frame 122, the spacer 128, and the exhaust pipe 129 are adhered to each other in an airtight state by a low-melting glass.
0, the outer frame 122, the exhaust pipe 129, the spacer 128, and the face plate 123 constitute an airtight container.

A phosphor 125 and a metal back 126 which is an acceleration electrode are formed on the inner surface of the face plate 123, and an image is formed by the phosphor 125 emitting light due to the collision of electrons emitted from the electron-emitting device. indicate.

On the other hand, in the airtight container, an exhaust pipe 129 is installed in a direction perpendicular to the spacer 128, and the exhaust pipe 129 extends along the end side of the electron-emitting device 127 arranged on the back plate 120 and has a tip. Are arranged up to a position where the electron-emitting device 127 is not formed. The diameter of the exhaust pipe 129 is φ4 mm, and a tapered slit is opened over the entire length of the side surface facing the arranged electron-emitting device 127. The tapered slit has a small slit width in the vicinity of the introduction port of the exhaust pipe 129 on the vacuum pump side, and
The slit width is 0.5 mm, and the slit width gradually increases as the distance increases, and the final slit width at the tip of the exhaust pipe 129 is 4 m.
It is manufactured to be m. This exhaust pipe 129 is
The design is such that there is almost no variation in the distribution of the degree of vacuum in the airtight container when vacuuming the airtight container. In this embodiment, the exhaust pipe having a diameter of 4 mm is used, but the present invention is not limited to this, and any diameter suitable for the image display device may be used. Further, the minimum width and the maximum width of the slit are not limited to the widths of the present embodiment, and due to the relationship between the exhaust pipe diameter and the length at which the electron-emitting device is arranged, there is almost no variation in the distribution of the degree of vacuum in the vacuum container. Any structure will do. Further, the exhaust pipe 129 is not only used when sucking into a vacuum, but can also be used for introducing gas into the image display device. Can double as a tube. In this case, even when introducing the gas or the like, the gas can be introduced into the airtight container quickly so as to create an atmosphere in which the distribution does not vary.

As described above, this embodiment is different from the first embodiment in that the exhaust pipe has a tapered slit, and the other structure and manufacturing method are the same as those in the first embodiment. The description is omitted.

As described above, the exhaust pipe 129 having a tapered slit on the electron-emitting device side is installed along the arranged electron-emitting devices to make the degree of vacuum in the airtight container uniform. Therefore, the forming process and the activation process can be made uniform, and the image quality can be easily made uniform. In addition, the number of defects can be reduced and the yield can be improved.

In the first embodiment, a method of making the degree of vacuum in the image display device or the concentration of the organic gas required for the activation treatment uniform in the image display device by sequentially changing the size of the holes is provided. However, in the second embodiment, since the exhaust pipe 129 having the tapered slit with no hole break is used, the degree of vacuum in the image display device can be made uniform as in the first embodiment. It became so. Further, this exhaust pipe is not only used for suctioning into a vacuum, but can also be used for introducing gas into the image display device, and one exhaust pipe can be used as the exhaust pipe and the introduction pipe. It can also be combined.

In the present embodiment, the explanation has been made on the assumption that the number of exhaust pipes is one, but as shown in FIG. 13, two or more exhaust pipes may be used. The pipe may be separate, or a plurality of exhaust pipes may also be used as the introduction pipe, and the exhaust pipe and the introduction pipe may be combined. The combined use also shortens each time, and further improves the characteristics and uniformity of image quality.

(Embodiment 3) Next, a third embodiment of the present invention will be described. FIG. 14 is a schematic perspective view of the image display device according to the third embodiment of the present invention. Description of reference numerals in FIG. 14,
The functions and configurations have been described in detail in the above-described embodiments of the invention, and will not be repeated.

A plurality of holes are formed in the exhaust spacer 148b in parallel with the back plate 140 over the entire length.
The hole diameter is small on the opening side of the exhaust pipe 149 and is 0.1 to 0.1 mm.
The hole diameter is 1 mm, and the hole diameter is gradually increased along the end face of the arranged electron-emitting device 17 with a hole interval of 1 to 10 mm, and the end portion of the exhaust pipe is perforated to be 2 to 5 mm. That is, as the distance from the suction side increases, the hole diameter is increased to make the suction resistance uniform, and there is little variation in the distribution of the degree of vacuum in the airtight container when vacuuming the airtight container. Further, the exhaust spacer 148b is not only used for sucking the inside of the closed container to a vacuum, but also for introducing the gas of the organic substance into the closed container for each additional treatment in the manufacturing process. It can be used, and one exhaust spacer can also serve as an exhaust hole and an introduction hole. With this exhaust spacer, it is possible to quickly create an atmosphere in the airtight container without variation in distribution even when introducing gas or the like.

As described above, the present embodiment is different from the first embodiment in that it has the exhaust spacer, and the other structure and manufacturing method are the same as those of the first embodiment, and therefore detailed description thereof is omitted. .

As described above, by providing the exhaust spacer 148b having a plurality of holes on the electron-emitting device side along the arranged electron-emitting devices, the vacuum degree in the hermetic container is made uniform. Therefore, the forming process and the activation process can be made uniform, and the characteristics and brightness of the device can be easily made uniform. In addition, the number of defects can be reduced and the yield can be improved. Also, this exhaust spacer is
It is not only used when sucking into a vacuum, but it can also be used to introduce gas into the image display device, and one exhaust spacer can also serve as exhaust and introduction.

In the first embodiment, the exhaust pipe is provided with a hole,
By changing the size of the holes in sequence, the degree of vacuum in the image display device or activation is made uniform.
In the third embodiment, since the exhaust spacer is used, the member can be manufactured more easily than in the first embodiment. Further, in the structure of this embodiment, the exhaust spacer has a function as an atmospheric pressure resistant structural member, and the atmospheric pressure resistant structure is further strengthened. If the atmospheric pressure resistance is the same as in the first embodiment, the number of ordinary spacers can be reduced.

In the present invention, the exhaust spacer having holes is used, but an exhaust spacer having a tapered slit may be used.

In the present embodiment, the combination of the exhaust spacer and the suction port of the exhaust pipe is explained as one set, but two or more sets may be used. In that case, It is also possible to separate the exhaust and the introduction, or it is also possible to use a combination of a plurality of exhaust spacers and the suction port of the exhaust pipe as the introduction, and to serve both as the exhaust and the introduction. . The combined use also shortens each time, and further improves the characteristics and uniformity of image quality.

(Embodiment 4) Next, a fourth embodiment of the present invention will be described. FIG. 15 is a schematic top view of the image display device according to the fourth embodiment of the present invention. In FIG. 15, a back plate 150 on which a plurality of surface conduction electron-emitting devices 157 are formed as an electron source for generating an electron beam,
An outer frame 152 includes a face plate (not shown) that displays an image by acting on the electrons emitted from the electron-emitting device 157.
The spacer 158 and the exhaust pipe 159 are arranged to face each other. The back plate 150 and the outer frame 152, the spacer 158, and the face plate and the outer frame 152, the spacer 158, and the exhaust pipe 159 are airtightly adhered by the low melting point glass.
52, the exhaust pipe 159, the spacer 158, and the face plate constitute an airtight container.

Similar to the first and second embodiments, the face plate is provided with a phosphor and a metal back as an accelerating electrode on its inner surface, and the electrons emitted from the electron-emitting devices collide with each other. The fluorescent substance emits light to display an image.

On the other hand, in the airtight container, an exhaust pipe 159 is installed at a right angle to the spacer 158, and the exhaust pipe 159 is formed with the electron emitting element 157 along the electron emitting element 157 arranged. It is placed up to a non-existing position. The exhaust pipe 159 is a double pipe formed by coaxially combining two kinds of exhaust pipes having different diameters, each of which has a plurality of holes on the side surface on the side of the electron-emitting device facing the electron-emitting device 157. Each of the holes is formed such that the hole diameter gradually increases toward the end of the exhaust pipe. The outer thick exhaust pipe diameter is φ5 mm, the hole diameter near the introduction port on the vacuum pump side is 0.1 to 1 mm, and the electron emission element 157 is used.
The final hole diameter is 2 to 5 mm with a hole interval of 1 to 10 mm along the end face. The inner diameter of the thin exhaust pipe is φ3 mm, and the hole diameter near the inlet is 0.1 to 1 mm.
Then, along the end face of the electron-emitting device 157, 1 to 10
With hole spacing of mm, the final hole diameter is 1.5-3 mm. That is, as the distance from the suction side increases, the hole diameter is increased to make the suction resistance uniform, and there is little variation in the distribution of the degree of vacuum in the airtight container when vacuuming the airtight container. In the present invention, the exhaust pipe diameter is 5 mm.
Although the diameter of 3 mm was used, the diameter is not limited to this and any diameter suitable for the image display device may be used. Further, the hole diameter and the hole interval are not limited to the hole diameter and the hole interval of the present invention, and there is almost no variation in the distribution of the degree of vacuum in the vacuum container due to the relationship between the exhaust pipe diameter and the length where the electron-emitting device is arranged. It should be arranged so that it does not exist.

The exhaust pipe 159 can be used such that the outer pipe is used for vacuum suction and the inner thin pipe is used for gas introduction, or conversely, the inner pipe is used as an exhaust pipe and the outer pipe is used as an introduction pipe. It is also possible to perform vacuum suction and gas introduction in the processing apparatus at the same time. With this structure, it is possible to quickly create an atmosphere in the airtight container without variation in distribution even when introducing gas or the like.

As described above, in the present embodiment, two exhaust pipes having a plurality of holes on the electron-emitting device side and having different diameters are coaxially arranged to form a double pipe. Is different,
The rest of the configuration and manufacturing method are the same as in the first embodiment, so a detailed description thereof will be omitted.

As described above, by installing the double exhaust pipes 159 having different diameters on the same axis and having a plurality of holes of which the hole diameters are sequentially changed on the electron-emitting device side along the electron-emitting device, Since the degree of vacuum in the airtight container can be made uniform, the forming process and the activation process can be made uniform, and the image quality can be easily made uniform.

Furthermore, in the present embodiment, since the introduction pipe and the exhaust pipe are formed coaxially and doubly, it is not necessary to arrange them independently, so that the area that does not contribute to the image display is reduced. be able to.

In this embodiment, one exhaust pipe is shown, but two or more exhaust pipes may be used, which makes the image display more uniform,
It also saves time. Further, although the present invention has a structure in which a plurality of holes are provided on the side surface of the exhaust pipe, the exhaust pipe is not limited to the holes and may be a tapered slit, thereby further improving the image quality characteristics and uniformity. .

[0158]

As described above, in the image display device of the present invention, the fluorescence emitted by the collision of the electron beam generated by the electron source with the back plate provided with the electron emission source generating the electron beam. In an image display device having a face plate provided with a body, an outer frame that forms an airtight container integrally with the back plate and the face plate that are arranged to face each other, an atmospheric pressure resistant structural member, and an exhaust pipe The exhaust pipe is arranged at one end inside the airtight container at a right angle with respect to the atmospheric pressure resistant structural member along substantially the entire length of the end face of the electron emission source arranged on the back plate. An opening is provided on the side surface facing the emission source.

When the inside of the airtight container is sucked into a vacuum state through the exhaust pipe, the exhaust pipe is arranged at right angles to the row of atmospheric pressure resistant structural members. Since it is sucked directly into the opening of the exhaust pipe through the passage without resistance, there is almost no variation in the degree of vacuum between the vicinity of the opening and the side opposite to the opening.

Therefore, it is possible to make the atmosphere conditions of the forming process and the activation process uniform, and thereby it is possible to uniform the characteristics of the device, the brightness of the image display device, and the like. It also reduces the number of defects,
Yield has also improved.

As a method of setting the degree of opening, the opening of the exhaust pipe is composed of a plurality of holes, and the diameter of the exhaust pipe is gradually increased from the introduction portion of the exhaust pipe on the suction pump side toward the end of the exhaust pipe. Or even if the opening of the exhaust pipe is configured with a tapered slit and the opening width is gradually widened from the inlet on the suction pump side of the exhaust pipe to the end of the exhaust pipe, the inside of the airtight container The entire degree of vacuum is made uniform, and the same effect as described above is obtained.

If a small-diameter exhaust pipe similar in shape to the exhaust pipe is internally provided as a double pipe inside the exhaust pipe, the inner pipe and the outer pipe can be evacuated to vacuum in addition to the single purpose. It can also be used as an exhaust pipe for the purpose of introducing a gas necessary for the manufacturing process, and in addition to the above-mentioned effects, in the case of a large-area image forming apparatus, it is possible to reduce a region that does not contribute to image display. The effect is that you can do it.

If a plurality of exhaust pipes are arranged in the airtight container, they can be used individually or in a similar manner, and when used exclusively, the suction range per exhaust pipe is narrowed. Therefore, the degree of vacuum becomes more uniform,
Further, there is an effect that the vacuum arrival time is shortened.

Further, in the exhaust pipe having an opening at one end of the side wall surface of the airtight container as in the conventional example, the exhaust spacer serving as a partition wall for adjusting the suction pressure of the exhaust gas is connected to the opening of the exhaust pipe and the electronic part. In the image display device, the exhaust pipe is arranged in the direction perpendicular to the row of the atmospheric pressure resistant structural member, and the exhaust spacer is provided with an opening for adjusting the suction pressure, between the discharge source and the exhaust pipe. When the inside of the airtight container is sucked to a vacuum state through, the opening of the exhaust spacer is arranged at a right angle to the row of atmospheric pressure resistant structural members, so that the gas inside the airtight container will pass between the rows of atmospheric pressure resistant structural members. Since there is no resistance and is directly sucked into the opening of the exhaust pipe, there is almost no variation in the degree of vacuum between the vicinity of the opening and the side opposite to the opening.

Therefore, it is possible to make the atmosphere conditions of the forming process and the activation process uniform, and thereby it is possible to uniform the characteristics of the device, the brightness of the image display device, and the like. It also reduces the number of defects,
Yield has also improved.

When a plurality of combinations of the exhaust spacer and the suction port of the exhaust pipe are arranged in the airtight container, each can be used as the exhaust port and the gas introduction port, or can be used exclusively. In this case, the suction range per one exhaust spacer is narrowed, so that the degree of vacuum becomes more uniform, and the vacuum arrival time is further shortened.

Further, since the plate-shaped material is processed as compared with the processing of the exhaust pipe, the member can be easily manufactured. Further, since the exhaust spacer can have a function as an atmospheric pressure resistant structural member, the atmospheric pressure resistance performance is improved, or the original atmospheric pressure resistant structural member can be simplified and the cost can be reduced. was there.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a first embodiment of an image display device of the present invention.

FIG. 2 is a schematic diagram showing a configuration of a planar surface conduction electron-emitting device to which the present invention can be applied. (A) is a schematic plan view. (B) is a typical sectional view.

FIG. 3 is a schematic diagram showing a manufacturing process of a flat surface conduction electron-emitting device to which the present invention can be applied. (A) is a schematic diagram which shows the state which formed a pair of element electrodes on the electron source substrate. (B) is a schematic diagram showing a state in which a conductive thin film is formed across a pair of device electrodes. (C) is a schematic diagram showing a state in which an electron emitting portion is formed on a conductive thin film.

FIG. 4 is a configuration diagram of a matrix wiring of the present invention.

FIG. 5 is a graph showing a voltage waveform of energization forming according to the present invention. (A) is a graph showing a voltage waveform of energization forming with a constant crest value. (B) is a graph which shows the voltage waveform of the energization forming which increases a crest value.

FIG. 6 is a configuration diagram showing an example of a vacuum processing apparatus used in the present invention.

7 is a graph schematically showing the relationship between emission current, device current and device voltage measured using the vacuum processing apparatus shown in FIG.

FIG. 8 is a schematic perspective view of an image display device configured by using an electron emission source of simple matrix wiring according to the present invention.

9 is a schematic view of a fluorescent film used in the image display device of FIG. (A) is a schematic diagram of a fluorescent film of a stripe. (B) is a schematic diagram of a fluorescent film of a matrix.

FIG. 10 is a block diagram showing an example of a drive circuit for displaying according to an NTSC television signal.

FIG. 11 is a schematic top view showing two exhaust pipes of the first embodiment of the image display apparatus of the present invention.

FIG. 12 is a schematic perspective view of a second embodiment of the image display device of the present invention.

FIG. 13 is a schematic top view of the second embodiment of the image display device of the present invention with two exhaust pipes.

FIG. 14 is a schematic perspective view of a third embodiment of the image display device of the present invention.

FIG. 15 is a schematic top view of a fourth embodiment of the image display device of the present invention.

FIG. 16 is a schematic perspective view of an example of a conventional image display device.

FIG. 17 is a schematic cross-sectional view of an example of a conventional image display device.

FIG. 18 is a schematic view of a conventional surface conduction electron-emitting device.

FIG. 19 is a schematic top view of a conventional image display device.

[Explanation of symbols]

10, 80, 120, 140, 150, 160, 190
Back plate 12, 82, 112, 122, 132, 142, 15
2, 162, 192 Outer frame 13, 83, 123, 143, 163 Face plate 15, 125, 145, 165 Phosphor 16, 86, 126, 146, 166 Metal back 17, 87, 117, 127, 137, 147, 15
7, 197 electron-emitting device 18, 118, 128, 138, 148a, 158, 1
98 Spacers 19, 119, 129, 139, 149, 159, 16
9 Exhaust pipes 21, 41, 181 Electron source substrates 22, 172, 182 Conductive thin films 23, 24, element electrodes 25, 185 Electron emitting portions 42, 88 X-direction wiring 43, 89 Y-direction wiring 44 Electron-emitting device 45 Connection 60 First ammeter 61 Power supply 62 Second ammeter 63 High voltage power supply 64 Anode electrode 65 Vacuum container 66 Exhaust pump 81 Electron source substrate 84 Glass substrate 85, 91, 96 Phosphor film 90 Enclosure 92, 97 Phosphor 93, 94 black conductive material 101 image display panel 102 scanning circuit 103 control circuit 104 shift register 105 line memory 106 synchronization signal separation circuit 107 modulation signal generator 148b exhaust spacer 159a inner tube 159b outer tube 172, 182 conductive thin film 173a first Element electrode 173b Second element electrode 176 Getter material Container 177 getter material container fixture I _e emission current I _f the device current T ₁ pulse width T ₂ pulse interval V _f device voltage Vth a threshold voltage

Claims (12)

[Claims] 1. A back plate provided with an electron emission source that generates an electron beam, and a face plate provided with a phosphor that emits light when the electron beam generated by the electron source collides with each other. An image display device comprising: an outer frame that integrally forms the airtight container with the back plate and the face plate, an atmospheric pressure resistant structural member, and an exhaust pipe, wherein the exhaust pipe is inside the airtight container. An exhaust pipe is disposed at one end of the exhaust pipe at a right angle with respect to the atmospheric pressure resistant structural member along substantially the entire length of the end face of the electron emission source arranged on the back plate, and the exhaust pipe is directed toward the electron emission source. An image display device, wherein an opening is provided on a side surface of the image display device. 2. The image display device according to claim 1, wherein the opening portion of the exhaust pipe is composed of a plurality of holes, and the hole diameter is directed from an inlet portion of the exhaust pipe on the suction pump side toward the end of the exhaust pipe. An image display device, characterized in that the image display device is perforated so as to be successively larger. 3. The image display device according to claim 1, wherein the opening portion of the exhaust pipe is formed by a tapered slit, and the opening width is from an introduction portion of the exhaust pipe on the suction pump side to a terminal end of the exhaust pipe. An image display device, wherein the image display device has openings that gradually become wider toward each side. 4. The image display device according to claim 1, wherein an exhaust pipe having a shape similar to that of the exhaust pipe and having a small diameter is provided as a double pipe inside the exhaust pipe. An image display device characterized by being. 5. The image display device according to claim 1, wherein a plurality of the exhaust pipes are arranged in the airtight container. 6. The image display device according to claim 1, wherein the exhaust pipe is an exhaust pipe for sucking a vacuum in the image display device, and a gas required for a manufacturing process. An image display device which is also used as an introduction tube. 7. A back plate provided with an electron emission source that generates an electron beam, and a face plate provided with a phosphor that emits light when the electron beam generated by the electron source collides with each other. An image display device having an outer frame that integrally forms an airtight container integrally with the back plate and the face plate, an atmospheric pressure resistant structural member, and an exhaust pipe, wherein the exhaust pipe is The exhaust spacer is opened near the corner, the exhaust spacer is located on the side surface of the electron emission source from the opening of the exhaust pipe, and the atmospheric pressure resistant structural member is provided.
An image display device, wherein the exhaust spacers are arranged at right angles, and an opening is provided on a side surface of the exhaust spacers in the direction of the electron emission source. 8. The image display device according to claim 7, wherein the opening portion of the exhaust spacer is formed of a plurality of holes, and the hole diameter is gradually increased as the distance from the vicinity of the suction port of the exhaust pipe increases. An image display device characterized in that. 9. The image display device according to claim 7, wherein the opening portion of the exhaust spacer is formed by a tapered slit, and the opening width is gradually increased with increasing distance from the vicinity of the suction port of the exhaust pipe. An image display device characterized by being provided. 10. The image display device according to claim 7, wherein a plurality of combinations of the exhaust spacer and the suction port of the exhaust pipe are arranged in the airtight container. An image display device characterized by. 11. The image display device according to claim 7, wherein the exhaust spacer includes an exhaust port for sucking a vacuum in the image display device and a gas required for a manufacturing process. An image display device which is also used as an introduction port of. 12. The image display device according to claim 7, wherein the exhaust spacer has a structure that also functions as an atmospheric pressure resistant structural member. .