JPH09201818A - Multi-wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To cut precisely a material to be worked into many pieces by a method wherein a multiple grooved pulley is composed of ceramics and both end resin materials sandwiching the ceramics between them, and many grooves are formed on the ceramics and both end resin materials sandwiching the ceramics between them. SOLUTION: A wire being a cutting tool is at first guided with a V-groove provided to one side resin material by being guided, and is wound on V-grooves which are provided on the ceramics material by multiple lines at specific pitches. Further, the wire is wound on the other side resin material. Highly precise cutting is achieved by using only the wire wound on the V-groove formed in a part of ceramics in pulley material (for example, silicon nitride, and alumina). Since pulley grooves of the V-groove on a supply side and a discharge side are formed by resin materials of excellent abrasion resistance, a life of the pulley is improved thereby.

Description

Detailed Description of the Invention

[0001]

The present invention relates to silicon, quartz,
The present invention relates to a multi-wire saw for performing fine-pitch precision cutting of a brittle material such as a magnetic head or precision-pitch processing of a fine pitch.

[0002]

2. Description of the Related Art A multi-wire saw for grooving a work piece or cutting a work piece in large numbers (see FIG. 2) uses a wire 1 as a cutting tool supplied from a new wire bobbin 13. The multi-groove pulleys 3a and 3b are guided by the grooves and arranged in multiple rows at a predetermined pitch (not shown) and discharged to the recovery bobbin 15. The multi-row wire 1 is reciprocated at high speed in parallel to the workpiece 5 to press the workpiece 5 against the wire 1, and the free abrasive grains are applied to the sliding portion where the wire comes into contact with the workpiece. And a large number of grooving processes are performed. As a material of the multi-groove pulleys 3a and 3b around which the wire is wound, a resin material (e.g., ultra-high molecular weight polyethylene) which is generally easy to manufacture is used.

[0003]

FIG. 3 shows an example of processing accuracy by a conventional multi-groove pulley made of a resin material. FIG. 3 shows an example of cumulative pitch error when a large number of grooving processes are performed on an Al-Ti-C substrate which is a base of a magnetic head with a multi-wire saw. In the example shown in FIG. 3, a large number of shallow grooves are inserted and the cumulative pitch error is measured. In the multi-groove pulley made of a resin material, the multi-groove pulley made of a resin material, which is wound around a wire, is stretched by thermal deformation, and the groove is deformed (elastically deformed), so that the cutting accuracy is poor and the cutting accuracy is close to 10 μm. Furthermore, if the cutting amount is increased and the cutting process is performed,
Swelling of m occurs. For this reason, the polishing allowance in the post-process is increased, the yield is reduced, and the productivity is low. An object of the present invention is to provide a multi-wire saw that cuts a work piece into a large number of pieces with high accuracy.

[0004]

In order to achieve the above object, the present invention uses a pulley material of a wire winding portion, which is involved in cutting and grooving of a workpiece, as a material such as ceramics having low thermal expansion and less elastic deformation. A multi-groove pulley is formed on the supply side and the discharge side of the wire pre-winding portion that are not involved in cutting as a resin material with less wear of the pulley groove.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION A multi-wire saw for grooving a workpiece or cutting a workpiece into many pieces is a wire which is a cutting tool supplied from a new wire bobbin 13 as shown in FIG. 1 is guided in the grooves of the multi-groove pulleys 3a and 3b and arranged in a multi-row at a predetermined pitch (not shown),
It is discharged to the recovery bobbin 15. This multi-arranged wire 1 is reciprocated at a high speed in parallel to the workpiece 5,
The workpiece 5 is pressed against the wire 1, and a large number of cutting or grooving processes are performed while supplying free abrasive grains to the sliding portion where the wire and the workpiece are in contact with each other.

The structure of the multi-slot pulleys 3a and 3b around which the wire is wound, which is used in the multi-wire saw according to the present invention, will be described with reference to FIG. FIG. 1A is a schematic configuration diagram of a multi-groove pulley according to the present invention. As is clear from the figure, it is composed of resin material-ceramics-resin material.
FIG. 1B is a partially enlarged view of the multi-groove pulleys 3a and 3b. Multi-slot pulleys 3a and 3b around which the wire 1 is wound
Is provided with V-shaped grooves at a predetermined pitch P in the ceramic and the resin material at both ends sandwiching the ceramic. To make a pulley, a pulley is attached to a rotating device such as a lathe, grooves are formed on the resin material parts on both sides of the ceramic by cutting with a cutting tool such as a cutting tool, and the grooves of the ceramic part are ground with a grinding wheel. Is formed by.

Wire 1 supplied from new wire bobbin 13
(See FIGS. 2 and 1) are installed in parallel, facing each other.
First, the multi-slot pulleys 3a and 3b are wound while being guided by the V groove provided in the resin material on the one hand, and then wound around the V groove provided in the ceramic material with multiple pitches at a predetermined pitch. Further, the wire 1 is wound around the other resin material and collected in the collecting bobbin 15.

According to the present invention, highly accurate cutting is achieved as follows. Highly accurate cutting can be achieved by using only the wire wound in the V groove formed in the ceramic (for example, silicon nitride, alumina) portion of the pulley for cutting. Wire diameter is 0.16m
For the piano wire and polishing liquid of m, a mixture of GC # 1200 mixed with wrapping oil at a mixing ratio of 1.5: 1 was used, the wire traveling speed was 200 m / min, and the workpiece feed speed was 5
FIG. 4 shows the experimental results when the Al-Ti-C was grooved at mm / h. FIG. 4 shows an example of processing accuracy by a multi-wire saw having a multi-groove pulley according to the present invention. FIG.
Shows the cumulative pitch error when grooves are formed on the Al-Ti-C substrate with the wire saw according to the present invention. As a result (see FIG. 4), the cumulative pitch error is stable at 5 μm or less. Furthermore, the cut surface shape is as good as 1 μm or less.

Furthermore, the multi-wire saw according to the present invention contributes to the improvement of the pulley life. This is because, in the multi-wire saw according to the present invention, the wire 1 supplied from the new wire bobbin 13 is first guided by the V groove provided in the resin material portion to be pre-wound, and then actually involved in cutting. The wire winding of the portion to be wound is arranged in multiple lines at a predetermined pitch in the V groove formed in the ceramic with stable cutting accuracy. Further, the wire 1 is pre-wound around the resin portion arranged on the discharge side and is collected in the collecting bobbin 15. The life of the pulley depends on the amount of wear of the pulley groove on the supply side and the discharge side of the wire in which the wear of the pulley groove is particularly severe. Since the pulley groove is formed of a resin material having good wear resistance, the life of the pulley is improved.

[0010]

As described above, according to the present invention, cutting accuracy and pulley life are improved, and product yield and productivity are improved.

[Brief description of drawings]

FIG. 1 is a front view showing a schematic configuration of a multi-groove pulley used in the present invention.

FIG. 2 is a front view showing a schematic configuration of a multi-wire saw according to the present invention.

FIG. 3 shows an example of processing accuracy with a conventional multi-wire saw using a resin pulley.

FIG. 4 shows an example of processing accuracy with a multi-wire saw according to the present invention.

[Explanation of symbols]

 1 Wire 3a, 3b Multi-groove Pulley 5 Workpiece 11 Vertical mechanism 13 New wire bobbin 15 Recovery bobbin

Claims (1)

[Claims] 1. A pair of multi-groove sheaves arranged opposite to each other in parallel, and wires in which multiple multi-rows are arranged in parallel travel at high speeds in a large number of grooves of the multi-groove sheave, and are covered by the wire. A multi-wire saw that presses a work piece and supplies free abrasive grains to a sliding portion of a work piece and a wire while performing a cutting process, wherein the multi-groove pulley is a resin material on both ends of the ceramic and the ceramic. The multi-wire saw is characterized in that a large number of grooves are formed in the ceramic and the resin material at both ends sandwiching the ceramic.