JPH09306372A - 半導体イオン注入設備のイオン発生装置 - Google Patents

半導体イオン注入設備のイオン発生装置

Info

Publication number
JPH09306372A
JPH09306372A JP8239089A JP23908996A JPH09306372A JP H09306372 A JPH09306372 A JP H09306372A JP 8239089 A JP8239089 A JP 8239089A JP 23908996 A JP23908996 A JP 23908996A JP H09306372 A JPH09306372 A JP H09306372A
Authority
JP
Japan
Prior art keywords
filament
base plate
ion
ion generator
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8239089A
Other languages
English (en)
Japanese (ja)
Inventor
Genchu Kin
原 柱 金
Won-Yeong Kim
元 永 金
Toshoku Kin
東 植 金
Korai Cho
洪 來 趙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JPH09306372A publication Critical patent/JPH09306372A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/083—Beam forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP8239089A 1996-05-08 1996-09-10 半導体イオン注入設備のイオン発生装置 Pending JPH09306372A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960015150A KR970077182A (ko) 1996-05-08 1996-05-08 반도체 이온주입설비의 이온발생장치
KR1996-15150 1996-05-08

Publications (1)

Publication Number Publication Date
JPH09306372A true JPH09306372A (ja) 1997-11-28

Family

ID=19458134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239089A Pending JPH09306372A (ja) 1996-05-08 1996-09-10 半導体イオン注入設備のイオン発生装置

Country Status (2)

Country Link
JP (1) JPH09306372A (ko)
KR (1) KR970077182A (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6349749B2 (ko) * 1982-05-07 1988-10-05 Insuchi* Mashinobedenia Imeni Ee Ee Buragonraboba An Sssr
JPH08111198A (ja) * 1994-10-11 1996-04-30 Ulvac Japan Ltd イオン源

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6349749B2 (ko) * 1982-05-07 1988-10-05 Insuchi* Mashinobedenia Imeni Ee Ee Buragonraboba An Sssr
JPH08111198A (ja) * 1994-10-11 1996-04-30 Ulvac Japan Ltd イオン源

Also Published As

Publication number Publication date
KR970077182A (ko) 1997-12-12

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