JPH09503049A - 高温熱電素子の較正 - Google Patents

高温熱電素子の較正

Info

Publication number
JPH09503049A
JPH09503049A JP6524923A JP52492394A JPH09503049A JP H09503049 A JPH09503049 A JP H09503049A JP 6524923 A JP6524923 A JP 6524923A JP 52492394 A JP52492394 A JP 52492394A JP H09503049 A JPH09503049 A JP H09503049A
Authority
JP
Japan
Prior art keywords
thermoelectric element
lens system
temperature
tip
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6524923A
Other languages
English (en)
Japanese (ja)
Inventor
ライナー ガウス
ミハエル ディーンツ
カイト，カー．，オー． ベール
Original Assignee
インダストリーアンラーゲン−ベトリープスゲゼルシャフト ミット ベシュレンクター ハフツンク
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インダストリーアンラーゲン−ベトリープスゲゼルシャフト ミット ベシュレンクター ハフツンク filed Critical インダストリーアンラーゲン−ベトリープスゲゼルシャフト ミット ベシュレンクター ハフツンク
Publication of JPH09503049A publication Critical patent/JPH09503049A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Golf Clubs (AREA)
  • Pens And Brushes (AREA)
  • Control Of Combustion (AREA)
JP6524923A 1993-05-08 1994-05-06 高温熱電素子の較正 Pending JPH09503049A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4315386.0 1993-05-08
DE4315386A DE4315386C2 (de) 1993-05-08 1993-05-08 Hochtemperatur-Thermoelement-Kalibrierung
PCT/EP1994/001463 WO1994027124A1 (de) 1993-05-08 1994-05-06 Hochtemperatur-thermoelement-kalibrierung

Publications (1)

Publication Number Publication Date
JPH09503049A true JPH09503049A (ja) 1997-03-25

Family

ID=6487592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6524923A Pending JPH09503049A (ja) 1993-05-08 1994-05-06 高温熱電素子の較正

Country Status (6)

Country Link
US (1) US5707146A (de)
EP (1) EP0697102B1 (de)
JP (1) JPH09503049A (de)
AT (1) ATE157163T1 (de)
DE (2) DE4315386C2 (de)
WO (1) WO1994027124A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190055997A (ko) * 2017-11-16 2019-05-24 주식회사 한화 포물면 반사를 이용한 적외선 탐색기 점검 장치 및 포물면 반사를 이용한 적외선 탐색기 점검 방법

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19621852A1 (de) * 1996-05-31 1997-12-04 Siemens Ag Verfahren und Vorrichtung zur Kalibrierung eines Hochtemperaturmeßfühlers
US6030114A (en) * 1997-09-30 2000-02-29 Siemens Energy & Automation, Inc. Method for thermally calibrating circuit breaker trip mechanism and associated trip mechanism
US6121061A (en) * 1997-11-03 2000-09-19 Asm America, Inc. Method of processing wafers with low mass support
KR100266328B1 (ko) * 1997-12-23 2000-10-02 김규현 티타늄실리사이드형성방법및이를이용한티타늄실리사이드의형성온도보정방법
US6139180A (en) * 1998-03-27 2000-10-31 Vesuvius Crucible Company Method and system for testing the accuracy of a thermocouple probe used to measure the temperature of molten steel
US6183127B1 (en) * 1999-03-29 2001-02-06 Eaton Corporation System and method for the real time determination of the in situ emissivity of a workpiece during processing
US6191399B1 (en) 2000-02-01 2001-02-20 Asm America, Inc. System of controlling the temperature of a processing chamber
US6384382B2 (en) * 2000-02-24 2002-05-07 Ivoclar Ag Oven, in particular for dental material
RU2196969C1 (ru) * 2002-01-22 2003-01-20 ООО "Производственная компания "ТЕСЕЙ" Способ поверки эталонных платинородий-платиновых термоэлектрических преобразователей
US6596973B1 (en) 2002-03-07 2003-07-22 Asm America, Inc. Pyrometer calibrated wafer temperature estimator
US6818864B2 (en) 2002-08-09 2004-11-16 Asm America, Inc. LED heat lamp arrays for CVD heating
DE10333774B4 (de) * 2003-07-24 2005-06-23 Atlas Material Testing Technology Gmbh Kalibrierung von Temperatursensoren von Bewitterungsgeräten durch kontaktlose Temperaturmessung
US9885123B2 (en) 2011-03-16 2018-02-06 Asm America, Inc. Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow
CN113433433A (zh) * 2021-06-22 2021-09-24 国网陕西省电力公司电力科学研究院 一种油浸纸套管局部过热缺陷模拟装置与方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3115030A (en) * 1961-12-04 1963-12-24 Barnes Eng Co Calibration system
US3698813A (en) * 1971-01-18 1972-10-17 Whittaker Corp Emissivity corrected optical pyrometer
US4659234A (en) * 1984-06-18 1987-04-21 Aluminum Company Of America Emissivity error correcting method for radiation thermometer
US4854727A (en) * 1987-10-26 1989-08-08 Ag Processing Technologies, Inc. Emissivity calibration apparatus and method
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190055997A (ko) * 2017-11-16 2019-05-24 주식회사 한화 포물면 반사를 이용한 적외선 탐색기 점검 장치 및 포물면 반사를 이용한 적외선 탐색기 점검 방법

Also Published As

Publication number Publication date
EP0697102B1 (de) 1997-08-20
WO1994027124A1 (de) 1994-11-24
DE4315386A1 (de) 1994-11-10
EP0697102A1 (de) 1996-02-21
US5707146A (en) 1998-01-13
DE4315386C2 (de) 1997-11-20
DE59403797D1 (de) 1997-09-25
ATE157163T1 (de) 1997-09-15

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