JPH10260098A5 - - Google Patents
Info
- Publication number
- JPH10260098A5 JPH10260098A5 JP1997083337A JP8333797A JPH10260098A5 JP H10260098 A5 JPH10260098 A5 JP H10260098A5 JP 1997083337 A JP1997083337 A JP 1997083337A JP 8333797 A JP8333797 A JP 8333797A JP H10260098 A5 JPH10260098 A5 JP H10260098A5
- Authority
- JP
- Japan
- Prior art keywords
- air pressure
- substrate
- pressure change
- detection module
- change detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8333797A JPH10260098A (ja) | 1997-03-17 | 1997-03-17 | 空気圧変化検出モジュール |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8333797A JPH10260098A (ja) | 1997-03-17 | 1997-03-17 | 空気圧変化検出モジュール |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10260098A JPH10260098A (ja) | 1998-09-29 |
| JPH10260098A5 true JPH10260098A5 (2) | 2005-02-17 |
Family
ID=13799632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8333797A Pending JPH10260098A (ja) | 1997-03-17 | 1997-03-17 | 空気圧変化検出モジュール |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10260098A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169512A (ja) * | 2009-01-22 | 2010-08-05 | Nippon Soken Inc | 圧力変化検出装置 |
| JP6267422B2 (ja) * | 2012-12-18 | 2018-01-24 | セイコーインスツル株式会社 | 電子機器 |
-
1997
- 1997-03-17 JP JP8333797A patent/JPH10260098A/ja active Pending
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