JPH10282411A5 - - Google Patents

Info

Publication number: JPH10282411A5
Authority: JP; Japan
Prior art keywords: lens group; optical system; lens; fluorite; projection optical
Prior art date: 1997-04-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1997102504A

Other languages

English (en)

Japanese (ja)

Other versions

JPH10282411A (ja

JP3823436B2 (ja

Filing date

1997-04-03

Publication date

2005-02-24

1997-04-03 Application filed filed Critical

1997-04-03 Priority to JP10250497A priority Critical patent/JP3823436B2/ja

1997-04-03 Priority claimed from JP10250497A external-priority patent/JP3823436B2/ja

1998-04-02 Priority to US09/054,082 priority patent/US6088171A/en

1998-04-02 Priority to EP98106068A priority patent/EP0869382B1/en

1998-04-02 Priority to DE69824658T priority patent/DE69824658T2/de

1998-10-23 Publication of JPH10282411A publication Critical patent/JPH10282411A/ja

2005-02-24 Publication of JPH10282411A5 publication Critical patent/JPH10282411A5/ja

2006-09-20 Application granted granted Critical

2006-09-20 Publication of JP3823436B2 publication Critical patent/JP3823436B2/ja

2017-04-03 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

JP10250497A 1997-04-03 1997-04-03 投影光学系 Expired - Fee Related JP3823436B2 (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP10250497A JP3823436B2 (ja)	1997-04-03	1997-04-03	投影光学系
US09/054,082 US6088171A (en)	1997-04-03	1998-04-02	Projection optical system
EP98106068A EP0869382B1 (en)	1997-04-03	1998-04-02	Projection optical system
DE69824658T DE69824658T2 (de)	1997-04-03	1998-04-02	Optisches System für Projektion

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10250497A JP3823436B2 (ja)	1997-04-03	1997-04-03	投影光学系

Publications (3)

Publication Number	Publication Date
JPH10282411A JPH10282411A (ja)	1998-10-23
JPH10282411A5 true JPH10282411A5 (2)	2005-02-24
JP3823436B2 JP3823436B2 (ja)	2006-09-20

Family

ID=14329243

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10250497A Expired - Fee Related JP3823436B2 (ja)	1997-04-03	1997-04-03	投影光学系

Country Status (4)

Country	Link
US (1)	US6088171A (2)
EP (1)	EP0869382B1 (2)
JP (1)	JP3823436B2 (2)
DE (1)	DE69824658T2 (2)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3925576B2 (ja)	1997-07-24	2007-06-06	株式会社ニコン	投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法
JPH1195095A (ja)	1997-09-22	1999-04-09	Nikon Corp	投影光学系
US6700645B1 (en)	1998-01-22	2004-03-02	Nikon Corporation	Projection optical system and exposure apparatus and method
JPH11214293A (ja)	1998-01-22	1999-08-06	Nikon Corp	投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
JP2000143278A (ja) *	1998-11-10	2000-05-23	Nikon Corp	耐久性の向上された投影露光装置及び結像光学系の製造方法
DE19942281A1 (de) *	1999-05-14	2000-11-16	Zeiss Carl Fa	Projektionsobjektiv
WO2001023935A1 (en) *	1999-09-29	2001-04-05	Nikon Corporation	Projection exposure method and apparatus and projection optical system
WO2001023933A1 (en)	1999-09-29	2001-04-05	Nikon Corporation	Projection optical system
EP1094350A3 (en)	1999-10-21	2001-08-16	Carl Zeiss	Optical projection lens system
WO2002052303A2 (de)	2000-12-22	2002-07-04	Carl Zeiss Smt Ag	Projektionsobjektiv
DE10064685A1 (de) *	2000-12-22	2002-07-04	Zeiss Carl	Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft
JP2002244034A (ja)	2001-02-21	2002-08-28	Nikon Corp	投影光学系および該投影光学系を備えた露光装置
JP2002323652A (ja)	2001-02-23	2002-11-08	Nikon Corp	投影光学系，該投影光学系を備えた投影露光装置および投影露光方法
JP2002323653A (ja) *	2001-02-23	2002-11-08	Nikon Corp	投影光学系，投影露光装置および投影露光方法
EP1403663A1 (en) *	2001-06-15	2004-03-31	Nikon Corporation	Optical member, process for producing the same, and projection aligner
US6994747B2 (en) *	2001-07-17	2006-02-07	Nikon Corporation	Method for producing optical member
US7154676B2 (en)	2002-03-01	2006-12-26	Carl Zeiss Smt A.G.	Very-high aperture projection objective
US8208198B2 (en)	2004-01-14	2012-06-26	Carl Zeiss Smt Gmbh	Catadioptric projection objective
US20080151364A1 (en)	2004-01-14	2008-06-26	Carl Zeiss Smt Ag	Catadioptric projection objective
KR20160085375A (ko)	2004-05-17	2016-07-15	칼 짜이스 에스엠티 게엠베하	중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP5522520B2 (ja) *	2006-05-05	2014-06-18	カール・ツァイス・エスエムティー・ゲーエムベーハー	光学レンズ系
US8345350B2 (en) *	2008-06-20	2013-01-01	Carl Zeiss Smt Gmbh	Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2153543B (en) *	1983-12-28	1988-09-01	Canon Kk	A projection exposure apparatus
US4811055A (en) *	1984-02-27	1989-03-07	Canon Kabushiki Kaisha	Projection exposure apparatus
JP3747951B2 (ja) *	1994-11-07	2006-02-22	株式会社ニコン	反射屈折光学系
JPH09311278A (ja) *	1996-05-20	1997-12-02	Nikon Corp	反射屈折光学系
US5568325A (en) *	1993-08-25	1996-10-22	Asahi Kogaku Kogyo Kabushiki Kaisha	Achromatic lens system
JPH07128590A (ja) *	1993-10-29	1995-05-19	Olympus Optical Co Ltd	縮小投影レンズ
JPH0817719A (ja) *	1994-06-30	1996-01-19	Nikon Corp	投影露光装置
JPH08179204A (ja) *	1994-11-10	1996-07-12	Nikon Corp	投影光学系及び投影露光装置
JPH08203812A (ja) *	1995-01-30	1996-08-09	Nikon Corp	反射屈折縮小投影光学系及び露光装置
JPH103040A (ja) *	1996-06-14	1998-01-06	Nikon Corp	反射屈折光学系
JPH103041A (ja) *	1996-06-14	1998-01-06	Nikon Corp	反射屈折縮小光学系
JPH1020195A (ja) *	1996-06-28	1998-01-23	Nikon Corp	反射屈折光学系

1997
- 1997-04-03 JP JP10250497A patent/JP3823436B2/ja not_active Expired - Fee Related
1998
- 1998-04-02 DE DE69824658T patent/DE69824658T2/de not_active Expired - Lifetime
- 1998-04-02 EP EP98106068A patent/EP0869382B1/en not_active Expired - Lifetime
- 1998-04-02 US US09/054,082 patent/US6088171A/en not_active Expired - Lifetime

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