JPH104066A - Vertical reactor - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To provide a mechanism for preventing two quartz jigs placed one on top of the other from falling over. SOLUTION: In a vertical reaction apparatus provided with a second quartz jig 32 which is detachably integrated with and held on a first quartz jig 31 in a detachable manner, a first quartz jig 31 is provided. At one corner of the upper end 31c of the quartz jig 31, there is provided a notch 31a having a projecting portion projecting in the horizontal direction or a concave portion 31b recessed in the horizontal direction, and fitting the lower end 32c of the second quartz jig 32. A convex portion 32b or a concave portion which is fitted in a concave portion 31b or a convex portion of the first quartz jig 31 from a horizontal direction so as to be freely detachable from the lower end 32c of the second quartz jig 32, and A notch 32a is provided for fitting the upper end 31c of the first quartz jig 31. The second quartz jig 32 horizontally inserts the convex portion 32b into the concave portion 31b on the first quartz jig 31. Then, it is fitted from the horizontal direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical reactor using a replaceable quartz jig, and more particularly to a mechanism for preventing a quartz jig from tipping over.

In the manufacturing process of a semiconductor device, a vertical reactor, for example, a vertical reactor such as a chemical vapor deposition apparatus, a plasma reactor or a diffusion furnace, or a vertical heat treatment furnace is used to reduce the installation area of the apparatus. Is often used. In many of these apparatuses, a wafer supporting jig is made of quartz in order to prevent contamination of a semiconductor wafer. However, the quartz jig is fragile and may fall down due to the shaking of the earthquake, causing serious damage. Therefore, there is a need for a vertical reactor having a mechanism for preventing the quartz jig from tipping over.

[0003]

2. Description of the Related Art A conventional vertical reactor will be described with reference to an example of a vertical reactor. FIG. 4 is a sectional view of a conventional example, and shows a main structure inside a reaction tube of a vertical reactor.

Referring to FIG. 4, a vertical reactor has a vertical cylindrical reaction tube 1b which is kept airtight by abutting a lower end surface on an upper surface of a horizontal furnace bottom plate 1a, and inside the reaction tube 1b. A turntable 2, a heat retaining cylinder 3, and a quartz boat 4 having a basket part 5 on the upper part are provided. The turntable 2 is driven to rotate about a vertical axis from below the furnace bottom plate 1a. The heat retaining tube 3 is a cylindrical quartz jig having a disk-shaped heat retaining tube bottom plate 3b at the bottom, and prevents heat inside the reaction tube 1b from being transmitted to the furnace bottom plate 1a. The heat retaining cylinder 3 is fixed by fixing the heat retaining cylinder bottom plate 3b on the turntable 2 using a jig. Quartz boat 4
Is integrated with the basket portion 5 that supports the wafer 6 with the quartz column 5a, and is placed on the heat retaining cylinder 3.

In general, a quartz boat 4 used in a vertical reaction apparatus is stored separately from the heat retaining tube 3 for convenience of operation, and is placed on the heat retaining tube 3 at the time of use to be integrated with the heat retaining tube 3. used.

In a conventional apparatus, a quartz boat 4 and a heat insulating cylinder 3 are used.
Was integrated by fitting a projection 4a provided on the lower surface of the quartz boat 4 into a depression 3a provided on the upper surface of the heat retaining cylinder 3. However, the position of the center of gravity of the quartz boat 4 is high because the heavy basket portion 5 holding the wafer 6 is fixed above. There is a possibility that the basket portion 5 may easily fall off and fall, causing damage to the wafer and the quartz jig, and also to destruction of the reaction tube.

In order to prevent the quartz port from tipping over due to the rocking of the apparatus, a reverse T is set at the fitting portion between the quartz boat and the heat retaining cylinder.
A mechanism has been devised to prevent the fitting portion from being detached by using a character-shaped projection, and is disclosed in Japanese Patent Application Laid-Open No. Sho 64-42121.

FIG. 5 is an explanatory view of a conventional example of a fall prevention mechanism.
This figure shows a mechanism for preventing the fitting portion between the quartz boat and the quartz heat retaining tube from being detached by using an inverted T-shaped projection to prevent the quartz boat from overturning. FIG. 5A is a cross-sectional view of a main part of the overturn prevention mechanism, and FIG. 5B is a perspective view of the heat insulating cylinder ceiling plate. In the device using the inverted T-shaped protrusion, FIG.
Referring to (a), a T-shaped portion 42a projecting in a T-shape is provided on the lower surface of the quartz boat bottom plate 42, and as shown in FIG. Circular hole 41a opened in the center of the heat insulation cylinder ceiling plate 41
Insert into. The fitting is performed by the T-shaped part 4 inserted into the circular hole 41a.
2a, the device does not easily come off even if it swings.

However, since the inverted T-shaped projection is provided on the bottom of the quartz boat, the quartz boat cannot be placed directly on the floor, and a jig is required to be placed on the floor. Also, the inverse T
The production of the letter-shaped projection is difficult and costly. In particular, the fitting accuracy is determined by the alignment accuracy of the vertical axis of the T-shaped portion 42a and the center axis of the circular hole 41a, and thus depends on the manufacturing accuracy of this portion. It is difficult to precisely match the central axis with the heat retaining cylinder.

[0010]

As described above, in a conventional vertical reactor in which another quartz jig is placed on one quartz jig so that the quartz jig can be exchanged, an earthquake There is a possibility that the mounted quartz jig separates and falls down due to the rocking of the apparatus due to the above, and the wafer, the quartz jig or the apparatus is damaged. In addition, in a vertical reactor in which two quartz jigs are fitted by using an inverted T-shaped projection, the quartz jig cannot be placed on the floor surface, and it is difficult to manufacture and a precise shape cannot be made. There is a problem that it is difficult to match the center axes of the two jigs.

According to the present invention, by connecting two quartz jigs which are placed one on top of the other by using a notch which is fitted by unevenness which is fitted in a horizontal direction, the quartz by the oscillation of the apparatus is connected. An object of the present invention is to provide a vertical reaction apparatus capable of preventing a jig from falling over and fitting a quartz jig at a precise position.

[0012]

FIG. 1 is an exploded perspective view of a first embodiment of the present invention, showing a fitting portion of two quartz jigs. FIG. 2 is a divided perspective view of a second embodiment of the present invention,
FIG. 3 is a sectional view of the second embodiment of the present invention, showing a fitting portion between a cylindrical quartz heat insulating tube and a cylindrical quartz boat.

Referring to FIG. 1, a first configuration of the present invention for solving the above-mentioned problem is to place a first quartz jig 31 on a first quartz jig 31 held in a reaction tube. In the vertical reaction apparatus provided with the second quartz jig 32 detachably and integrally held with the first quartz jig 31, the first quartz jig 31 is provided at one corner of the upper end 31c of the first quartz jig 31. And a notch 31a into which the lower end 32c of the second quartz jig 32 is fitted. The second quartz jig 32 has a notch 31a. A recess 31 of the first quartz jig 31 is provided at one corner of a lower end 32 c of the second quartz jig 32.
b or the convex portion 32 fitted from the horizontal direction so as to be able to be fitted to and removed from the convex portion.
b or recess, and a notch 32a into which the upper end 31c of the first quartz jig 31 is fitted.
Is characterized in that the convex portion 32b is horizontally fitted on the first quartz jig 31 by fitting the convex portion 32b into the concave portion 31b, and the second configuration is characterized in that: Referring to FIGS. 2 and 3, a cylindrical quartz heat retaining tube 3 having a cylindrical axis held vertically in a reaction tube, and is detachably fitted on the heat retaining tube 3, and is integrated with the heat retaining tube 3. In a vertical reaction apparatus provided with a cylindrical quartz boat 4 having a single cylindrical shape, a shape of a notched cylindrical side surface of the heat insulating tube 3 is provided at one corner of an upper end 10 of the heat insulating tube 3. A first notch 11 having irregularities 7 perpendicular to the bottom surface of the quartz boat 4 and a notched cylindrical side surface of the quartz boat 4 having irregularities 8 perpendicular to the cylindrical axis. And the quartz boat 4 is provided with the concave portions of the first and second notches 11 and 12. The lower end 9 of the quartz boat 4 and the upper end 10 of the heat retaining tube 3 are fitted into the first and second notches 11 and 12 from the horizontal direction so that 7, 8 are inserted into each other. , And is fitted on the heat retaining cylinder 3.

In the first configuration of the present invention, referring to FIG. 1, a notch 31d is cut at the upper end 31c of the first quartz jig 31 from the upper end surface, leaving a part of the upper end surface. Is provided. On the other hand, at the lower end 32c of the second quartz jig 32,
A notch 32a is provided which is cut out upward from the lower end surface while leaving a part of the lower end surface. The first and second quartz jigs 3
The two notches 31a and 32a provided in
The first and second quartz jigs 31, 3 are fitted with the tips (upper end 31c and lower end 32c) of the quartz jigs 31, 32, respectively.
2 has an integral shape, for example, one cylindrical shape.

One of the notches 31a and 32a is provided with a concave portion formed in the horizontal direction, and the other is provided with a convex portion inserted into the concave portion. Therefore, the first and second quartz jigs 31 and 32 are inserted into the notches 31a and 32a in the respective notches so that the tips of the other quartz jigs are horizontally inserted so that the concave portions 31b and the convex portions 32b are fitted. By fitting, they are fitted and integrated.

In the first configuration, the first and second quartz jigs can be freely inserted and removed in the horizontal direction in which the concave and convex portions can be pulled out. On the other hand, since the concave portion and the convex portion cannot be pulled out in the vertical direction, the first and second quartz jigs fitted and fitted by inserting the convex portion into the concave portion have a vertical movement with vertical movement. Since the rotation and movement in the plane are sealed, the second quartz jig fitted on the first quartz jig does not fall.

The concave portion and the convex portion provided in the notch may be formed on either side of the quartz jig.
You can have more than one set. In addition, as long as the shape of the concave portion and the convex portion restricts vertical movement, for example, a horizontal groove and a horizontal rail that fits into the horizontal groove may be used. Further, the upper and lower ends of the quartz jig and the notch bottom 31
By making d and 32d horizontal, the fitting from the horizontal direction becomes easy.

According to a second configuration of the present invention, a cylindrical quartz boat having the same diameter is fitted onto a vertically held cylindrical quartz heat-insulating cylinder with their cylindrical axes aligned, and is held in an integral cylindrical shape. Related to quartz jigs.

Referring to FIG. 2, the heat retaining cylinder 3 has a shape in which a side surface is formed of a quartz cylinder, a part of the upper end surface is left as an upper end 10 at the upper end portion, and the remaining upper end surface is cut downward. A notch 11 is provided. Further, from the side of the notch 11, the side surface of the heat insulating cylinder 3 is cut horizontally at a predetermined depth from the upper end 10, and the concave portion 7 provided horizontally on the side surface of the heat insulating cylinder 3 is formed.
b and a convex portion 7a formed by cutting in the upper portion thereof.

The quartz boat 4 is formed of a quartz cylinder having the same diameter as the heat retaining cylinder 3, and a notch 12 is formed at the lower end 9, like the heat retaining cylinder 3, in which the side surface of the quartz cylinder has irregularities 8. The heat retaining tube 3 and the quartz boat 4 are fitted horizontally by engaging the concave portions 7b, 8b and the convex portions 7a, 7b with each other, and have an integral cylindrical shape with reference to FIG.

In this configuration, the quartz boat 4 fitted on the heat retaining cylinder 3 is provided with the concave portions 7b, 8b and the convex portions 7a, 7b of each other.
Occlusally restrains the vertical movement and prevents the quartz boat 4 from overturning.

Further, in this configuration, the positioning of the cylindrical shaft between the heat retaining cylinder 3 and the quartz boat 4 is performed by the concave portion 7 in the inserting direction.
This is done by abutting the tips of the protrusions 7a, 7b against the bottom surfaces of the b, 8b. Generally, the notch processing in the horizontal direction can be performed precisely, and thus such positioning is performed precisely.
On the other hand, in the horizontal direction orthogonal to the insertion direction, precise positioning can be easily performed by matching the cylindrical outer diameters of the heat retaining cylinder 3 and the quartz boat 4. For example, FIG.
With reference to the above, the quartz boat 4 is guided by two pins 13 provided in parallel with the cylindrical axis in close contact with the outer diameter of the heat retaining cylinder 3 at the diameter position of the heat retaining cylinder 3, thereby achieving high-precision positioning. Can be realized.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The first embodiment of the present invention relates to a reactor having a quartz jig whose connection portion is manufactured by cutting quartz. First quartz jig 3 of this embodiment
1, a notch 31a having a notch bottom surface 31d parallel to the upper end 31c is provided by notching an upper end 31c of a vertically held quartz cylinder in an L-shape. Further, a horizontal recess 31b, for example, a hole dug horizontally is provided in the vertical plane of the notch 31a. The first quartz jig 31 has a disc-shaped bottom plate 31e at the bottom thereof, is placed on a turntable in the reactor, and is held by pressing the periphery of the bottom plate 31e against the turntable. .

The second quartz jig 32 has a notch at the lower end of the quartz cylinder in a Γ shape, and a convex portion 32b, which fits into the concave portion 31b of the first quartz jig 31, in a vertical plane of the notch 32a. For example, a horizontally protruding rod is provided which is press-fitted into a hole formed in the notch 32a. First and second quartz jigs 3
The notches 1 and 32 have the notches 31a and 32a respectively fitted with the tips (upper end 31c and lower end 32c) of the other quartz jig,
Become one columnar shape.

In this embodiment, the positioning of the fitting of the two quartz jigs is performed by abutment of the notched vertical surface and fitting of the concave and convex portions. Since these processing precisions are easily and precisely made by ordinary cutting, they can be fitted at precise positions. Further, since the fitting is performed by inserting the convex portion into the concave portion, the second quartz jig 32 is prevented from falling down.

The second embodiment of the present invention relates to an improvement of a vertical reaction apparatus involving heating of a wafer, for example, a vertical reaction furnace shown in FIG. 4. Referring to FIG. That is, except for the quartz boat 4 and the quartz heat retaining tube 3, the other parts are the same as the conventional vertical reactor.

The cylindrical quartz forming the main part of the heat retaining cylinder 3 has a notch 11 on the upper part, and a disc-shaped heat retaining cylinder bottom plate 3b whose periphery protrudes like a flange is provided at the bottom. The notch 11 is formed by cutting the upper end 10 of the heat insulating cylinder 3 downward in parallel with the cylindrical axis and in parallel with the diameter AB of the heat insulating cylinder 3 and further cutting the side surface of the heat insulating cylinder 3 at a predetermined distance from the upper end. This is achieved by forming a concave portion formed by cutting in parallel from the cut side and horizontally cutting into the side surface of the heat retaining cylinder 3 and a convex portion protruding horizontally to the notch side above the concave portion. Note that another manufacturing method may be used as long as the shape of the notch is the same.

The quartz boat 4 is made of cylindrical quartz having the same diameter as the heat retaining cylinder 3. The notch of the above described heat retaining cylinder 3 is formed at the lower end 9 thereof so that the heat retaining cylinder 3 and the cylindrical central axis are fitted and fitted. A notch 12 having a fitting shape is provided. That is, a projecting portion 8a projecting horizontally is formed at the lower end 9 of the quartz boat 4,
A horizontally cut recess 8b is formed thereon. Referring to FIG. 3, a basket 5 on which a wafer 6 is mounted is fixed to a top surface of the quartz boat 4 by a support 5a.

Referring to FIG. 3, the heat retaining cylinder 3 is placed with its cylindrical axis vertical on a turntable 2 that is driven to rotate from below the furnace bottom plate 1a of the reaction furnace, and the heat retaining cylinder bottom plate 3b is stopped. It is fixed on the turntable by being pressed by 2a. Quartz boat 4
The concave portions 7a, 8a and the convex portions 7
b and 8b are engaged with each other. Positioning is performed by abutting the tips of the concave portions 7a, 8a and the convex portions 7b, 8b. The positions of the tips of the concave portions 7a and 8a and the convex portions 7b and 8b are determined from the viewpoint of strength and from the viewpoint of the use of the pin 13 described below, from the position sandwiching the diameter AB.
That is, it is preferable to be on both sides of the diameter AB.

Referring to FIG. 2, two pins 13 are provided in contact with the outer diameter of diameter AB of heat retaining cylinder 3. This pin 1
Numeral 3 is used as a guide when the quartz boat 4 is fitted to the heat retaining cylinder 3, and prevents the quartz boat 4 from shifting in the direction of the diameter AB after the fitting. The shape of the pin 13 may be, for example, a circular column or a polygonal column. The pin 13 can be fixed to the heat insulating cylinder 3 by being welded to the side surface of the cylinder or inserted into a hole vertically provided in the heat insulating cylinder bottom plate 3b.

In this embodiment, when the cylindrical quartz jig is fitted, the pins can be used as guides, so that the fitting becomes easy. Further, the cylindrical shaft can be precisely fitted and fitted using the notch and the guide. Furthermore, since the lower end of the quartz jig is flat, it can be placed on the floor without using a special jig, which is convenient for handling.

Further, since the quartz jigs of the first and second embodiments can be manufactured precisely by simple cutting, the manufacturing cost of the apparatus can be reduced.

[0033]

According to the vertical reactor of the present invention, the quartz jig provided with the notch having the unevenness in the horizontal direction is integrated by fitting the unevenness horizontally to each other and integrally fitting the quartz jig. Since the quartz jig can be prevented from tipping over due to rocking, it is possible to prevent damage to the equipment or wafer.
Significant contributions are made to reducing the manufacturing cost of electronic equipment and improving safety in the manufacturing process.

[Brief description of the drawings]

FIG. 1 is a divided perspective view of a first embodiment of the present invention.

FIG. 2 is an exploded perspective view of a second embodiment of the present invention.

FIG. 3 is a sectional view of a second embodiment of the present invention.

FIG. 4 is a sectional view of a conventional example.

FIG. 5 is an explanatory view of a conventional example of a fall prevention mechanism.

[Explanation of symbols]

 1a Furnace bottom plate 1b Reaction tube 2 Turntable 3 Heat retaining cylinder 3a Depression 3b Heat retaining cylinder bottom plate 4 Quartz boat 4a Projection 5 Basket part 5a Support 6 Wafer 7,8 Unevenness 7a, 8a Projection 7b, 8b Recess 9 Lower end 11, Top 11 Notch 13 pin 31 First quartz jig 31a, 32a Notch 31b Recess 31c Upper end 31d, 32d Notch bottom 32 Second quartz jig 32b Convex portion 32c Lower end 32e Bottom plate 41 Heat retaining cylinder ceiling plate 41a Circular hole 41b Slit 42 quartz boat bottom plate 42a T-shaped part

Claims (2)

[Claims] 1. A vertical reaction apparatus comprising: a first quartz jig held in a reaction tube; and a second quartz jig detachably and integrally held with the first quartz jig. In the first quartz jig, a projecting portion or a concave portion which projects horizontally in one corner of an upper end of the first quartz jig, and a lower end of the second quartz jig have The second quartz jig has a notch to be fitted therein, and the second quartz jig is horizontally fitted at one corner of a lower end of the second quartz jig so as to be able to be fitted into and removed from a concave portion or a convex portion of the first quartz jig. And a notch into which the upper end of the first quartz jig fits, and the second quartz jig is placed on the first quartz jig. A vertical reaction device wherein the convex portion is horizontally inserted into the concave portion so as to be fitted in a horizontal direction. 2. A cylindrical quartz heat retaining tube having a cylindrical axis held vertically in a reaction tube, and detachably fitted on the heat retaining tube.
In a vertical reactor having a cylindrical quartz boat integrally formed with the heat retaining cylinder and having a cylindrical shape, the shape of a cut-out cylindrical side surface of the heat retaining cylinder is provided at one corner of an upper end of the heat retaining cylinder. A first notch having irregularities perpendicular to the cylindrical axis, and a second notch provided at one corner of the lower end of the quartz boat and having a notched cylindrical side surface of the quartz boat having irregularities perpendicular to the cylindrical axis. The quartz boat is provided with a lower end of the quartz boat and an upper end of the heat retaining cylinder so that the concave and convex portions of the first and second notches are inserted into each other. And a vertical reaction device which is fitted on the heat retaining cylinder by being fitted into the two notches from a horizontal direction.