JPH10513611A - Z軸電導フィルムを含むマイクロ電子組立体 - Google Patents

Z軸電導フィルムを含むマイクロ電子組立体

Info

Publication number
JPH10513611A
JPH10513611A JP9513771A JP51377197A JPH10513611A JP H10513611 A JPH10513611 A JP H10513611A JP 9513771 A JP9513771 A JP 9513771A JP 51377197 A JP51377197 A JP 51377197A JP H10513611 A JPH10513611 A JP H10513611A
Authority
JP
Japan
Prior art keywords
film
metal
holes
hole
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP9513771A
Other languages
English (en)
Japanese (ja)
Inventor
ケイ. ピーターソン,ロバート
エル. パールントン,ドナルド
ディー. マーリット,ゴードン
ディー. エイブルズ,ビリー
Original Assignee
テキサス インスツルメンツ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by テキサス インスツルメンツ インコーポレイテッド filed Critical テキサス インスツルメンツ インコーポレイテッド
Publication of JPH10513611A publication Critical patent/JPH10513611A/ja
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
    • H05K3/462Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination characterized by laminating only or mainly similar double-sided circuit boards
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/20Conductive package substrates serving as an interconnection, e.g. metal plates
    • H10W70/22Conductive package substrates serving as an interconnection, e.g. metal plates having an heterogeneous or anisotropic structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/401Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0116Porous, e.g. foam
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09536Buried plated through-holes, i.e. plated through-holes formed in a core before lamination
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09609Via grid, i.e. two-dimensional array of vias or holes in a single plane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227Other objects, e.g. metallic pieces
    • H05K2201/10378Interposers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4623Manufacturing multilayer circuits by laminating two or more circuit boards the circuit boards having internal via connections between two or more circuit layers before lamination, e.g. double-sided circuit boards
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65Shapes or dispositions of interconnections
    • H10W70/654Top-view layouts
    • H10W70/655Fan-out layouts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Insulated Conductors (AREA)
  • Wire Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP9513771A 1995-09-27 1996-09-27 Z軸電導フィルムを含むマイクロ電子組立体 Ceased JPH10513611A (ja)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US440295P 1995-09-27 1995-09-27
US441595P 1995-09-27 1995-09-27
US439495P 1995-09-27 1995-09-27
US439695P 1995-09-27 1995-09-27
US439195P 1995-09-27 1995-09-27
US60/004,415 1995-09-27
US60/004,396 1995-09-27
US60/004,402 1995-09-27
US60/004,391 1995-09-27
US60/004,394 1995-09-27
PCT/US1996/016023 WO1997012397A1 (en) 1995-09-27 1996-09-27 Microelectronic assemblies including z-axis conductive films

Publications (1)

Publication Number Publication Date
JPH10513611A true JPH10513611A (ja) 1998-12-22

Family

ID=27533065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9513771A Ceased JPH10513611A (ja) 1995-09-27 1996-09-27 Z軸電導フィルムを含むマイクロ電子組立体

Country Status (8)

Country Link
EP (1) EP0811245A4 (de)
JP (1) JPH10513611A (de)
CN (1) CN1165584A (de)
AU (1) AU703591B2 (de)
BR (1) BR9606658A (de)
CA (1) CA2205810A1 (de)
TW (1) TW321789B (de)
WO (1) WO1997012397A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011525052A (ja) * 2008-06-20 2011-09-08 アルカテル−ルーセント ユーエスエー インコーポレーテッド 伝熱構造体
JPWO2016098865A1 (ja) * 2014-12-19 2017-09-21 富士フイルム株式会社 多層配線基板
US11032942B2 (en) 2013-09-27 2021-06-08 Alcatel Lucent Structure for a heat transfer interface and method of manufacturing the same
JP2021515385A (ja) * 2018-03-02 2021-06-17 ノースロップ グラマン システムズ コーポレーション 高い横方向熱伝導率を有する熱ガスケット
JPWO2023148848A1 (de) * 2022-02-02 2023-08-10

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512300B2 (en) 2001-01-10 2003-01-28 Raytheon Company Water level interconnection
DE102005020453B4 (de) 2005-04-29 2009-07-02 Infineon Technologies Ag Halbleiterbauteil mit einer Flachleiterstruktur und Verfahren zur Herstellung einer Flachleiterstruktur und Verfahren zur Herstellung eines Halbleiterbauteils
DE102007055017B4 (de) * 2007-11-14 2010-11-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Verbinden zweier Fügeflächen und Bauteil mit zwei verbundenen Fügeflächen
KR101944898B1 (ko) 2012-06-11 2019-02-01 에스케이케미칼 주식회사 폴리아릴렌 설파이드 수지 조성물 및 이의 제조 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283464A (en) * 1979-05-08 1981-08-11 Norman Hascoe Prefabricated composite metallic heat-transmitting plate unit
JPS6148952A (ja) * 1984-08-16 1986-03-10 Toshiba Corp 半導体装置
EP0854506A3 (de) * 1987-03-04 1999-03-31 Canon Kabushiki Kaisha Elektrisches Verbindungsteil und elektrisches Schaltungsteil
JPS6412406A (en) * 1987-07-07 1989-01-17 Nitto Denko Corp Directional conductor and manufacture thereof
JP3047986B2 (ja) * 1990-07-25 2000-06-05 株式会社日立製作所 半導体装置
DE69216658T2 (de) * 1991-02-25 1997-08-07 Canon Kk Vorrichtung und Verfahren zur Verbindung elektrischer Bauelemente
JPH0547219A (ja) * 1991-08-13 1993-02-26 Ricoh Co Ltd 異方性導電膜およびそれを用いた電子部品の接続方法
US5213868A (en) * 1991-08-13 1993-05-25 Chomerics, Inc. Thermally conductive interface materials and methods of using the same
DE69217810T2 (de) * 1991-10-12 1997-10-09 Sumitomo Spec Metals Verfahren zur Herstellung eines warmleitenden Materials

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011525052A (ja) * 2008-06-20 2011-09-08 アルカテル−ルーセント ユーエスエー インコーポレーテッド 伝熱構造体
US8963323B2 (en) 2008-06-20 2015-02-24 Alcatel Lucent Heat-transfer structure
US9308571B2 (en) 2008-06-20 2016-04-12 Alcatel Lucent Heat-transfer structure
US11032942B2 (en) 2013-09-27 2021-06-08 Alcatel Lucent Structure for a heat transfer interface and method of manufacturing the same
JPWO2016098865A1 (ja) * 2014-12-19 2017-09-21 富士フイルム株式会社 多層配線基板
JP2021515385A (ja) * 2018-03-02 2021-06-17 ノースロップ グラマン システムズ コーポレーション 高い横方向熱伝導率を有する熱ガスケット
JPWO2023148848A1 (de) * 2022-02-02 2023-08-10

Also Published As

Publication number Publication date
AU703591B2 (en) 1999-03-25
BR9606658A (pt) 1997-11-04
EP0811245A1 (de) 1997-12-10
MX9703780A (es) 1998-05-31
EP0811245A4 (de) 1998-11-18
TW321789B (de) 1997-12-01
WO1997012397A1 (en) 1997-04-03
CA2205810A1 (en) 1997-04-03
AU7393296A (en) 1997-04-17
CN1165584A (zh) 1997-11-19

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