JPH106511A - Inkjet head, inkjet cartridge, inkjet apparatus, and inkjet head manufacturing method - Google Patents

Abstract

(57) [Problem] To not reliably connect a substrate constituting an ink jet head and a tip portion of a nozzle wall of a grooved plate with sufficient bonding strength. SOLUTION: An electrothermal converter 11 for discharging droplets.
, And an electrothermal converter 11 of the substrate 13
In a method for manufacturing an ink jet head in which a grooved plate 16 on which a nozzle wall 15 surrounding an electrothermal transducer 11 is formed and which is superimposed on the surface on the side where is formed, a resin layer 31 is formed on a substrate 13. Forming; and forming a coating layer 32 covering the resin layer 31;
Removing a portion of the coating layer 32 in a shape corresponding to the tip surface of the nozzle wall 15 to expose the resin layer 31; and heating the resin layer 32 while pressing the tip of the nozzle wall 15 against the exposed resin layer 32. Melting the resin constituting the resin layer 32 between the tip of the nozzle wall 15 and the coating layer 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ink jet head, an ink jet cartridge, an ink jet apparatus having the ink jet head mounted thereon, and a method of manufacturing the ink jet head.

[0002]

2. Description of the Related Art In general, an ink jet head mounted on an ink jet apparatus is provided with a processing liquid droplet (hereinafter, collectively referred to as a discharge medium liquid droplet) for adjusting characteristics of ink droplets or ink droplets discharged onto a print medium. (Hereinafter referred to as “discharge port”), a nozzle passage communicating with the discharge port, and discharge energy generating means for generating energy for forming a discharge medium droplet facing a part of the nozzle-shaped passage. .

The discharge energy generating means uses an electromechanical transducer such as a piezo element, or irradiates an electromagnetic wave such as a laser to cause the discharge medium to generate heat. What discharges a discharge medium droplet from a discharge port, and a heating element such as an electrothermal converter are known.

[0004] Among them, an ink jet head that uses an electrothermal transducer as a discharge energy generating means and discharges a discharge medium droplet from a discharge port by thermal energy has the following advantages. That is, it is possible to easily arrange a convenient configuration for arranging ejection ports for ejecting ejection medium droplets at high density and obtaining a print with high resolution.
In addition, the structure is easy to make compact. Further, the semiconductor device can be manufactured by fully utilizing the advantages of an IC manufacturing technology and a micro-machining technology in which the technical progress and the reliability have been remarkably improved in the recent semiconductor field. By using these technologies, it is easier to increase the length, to increase the dimension, to increase the number of discharge ports, and to increase the density, to achieve mass production and to reduce the manufacturing cost.

An ink jet head using an electrothermal transducer as a discharge energy generating means and having a large number of discharge ports manufactured through a semiconductor manufacturing process usually has a nozzle-shaped passage corresponding to each discharge port. An electrothermal converter is provided for each nozzle-like passage, and a discharge medium is supplied from a common liquid chamber communicating with each nozzle-like passage. No. 250048, etc.

FIG. 20 shows an appearance of such a conventional ink jet head, and FIG. 21 shows a sectional structure thereof. FIG. 22 and FIG. 23 show sectional structures taken along arrows XXII-XXII and XXIII-XXIII. Shown respectively. That is, the inkjet head 10 is formed on the substrate 13 on which the electrothermal converter 11, the electrode 12, and the like are formed through a semiconductor manufacturing process such as an etching method, a vapor deposition method, or a sputtering method.
The main part is constituted by a grooved plate 16 in which a nozzle wall 15 for partitioning a nozzle-like passage 14 formed by bonding with the substrate 13 is formed.

The electrothermal transducer 11 and the electrode 12 provided on the insulating layer 18 for partially insulating the electric circuit portion 17 formed as the first layer of the substrate 13 are used for the discharge medium. To prevent corrosion due to direct contact, it is covered with an insulating protective layer 19 such as silicon dioxide or silicon nitride. Further, the electrothermal transducer 11 is provided with a cavitation-resistant layer 20 made of tantalum or the like in order to prevent breakage due to cavitation due to boiling of the discharge medium.

The grooved plate 16 is provided with the nozzle wall 1 described above.
5, a liquid chamber frame 22 communicating with each of the nozzle-shaped passages 14 partitioned by the nozzle walls 15 and serving as a common discharge medium liquid chamber 21, and a discharge medium (not shown) storing a discharge medium from a discharge medium tank (not shown) storing the discharge medium. A discharge medium supply port 23 for introducing a discharge medium into the common discharge medium liquid chamber 21 via a medium supply pipe, and a discharge port 24 that is integrally joined to the grooved plate 16 and communicates with the nozzle-like passage 14. And a discharge port plate 25 formed respectively. The grooved plate 16 is obtained by injection molding of polysulfone, but may be formed of a resin such as a liquid crystal polymer or polyethersulfone.

Therefore, the discharge medium is supplied to the discharge medium supply height 2 via a discharge medium tank and a discharge medium supply pipe (not shown).
3 is supplied into the common discharge medium liquid chamber 21 and is drawn into the nozzle-like passages 14 by capillary action, forming a meniscus due to surface tension at the discharge port 24 at the tip of each nozzle-like passage 14. 14 and is stably held. Here, by energizing the electrothermal converters 11 facing the respective nozzle-shaped passages 14, the electrothermal converters 11
The ejection medium interposed on the top is heated, instantaneously boiled, and ejection medium droplets are ejected from the ejection port 20.

By the way, it is important to make the joining surface between the substrate 13 and the grooved plate 16 in close contact from the viewpoint of the ejection performance and the reliability of the ink jet head 10. In order to reduce the loss of the bubbling energy at the time of discharging the discharge medium, it is particularly necessary to securely join the tip end surface of the nozzle wall 15 to the substrate 13. In order to bring the bonding surfaces of the substrate 13 and the grooved plate 16 into close contact with each other, a method of bonding these with an adhesive or a method of bonding the substrate 13 and the substrate 13 as disclosed in Japanese Patent Application Laid-Open No. Hei 4-247946. A method is known in which the grooved plate 16 is pressed against the holding plate spring.

[0011]

The substrate 13 and the grooved plate 1
6 is bonded via an adhesive, excess adhesive protrudes into the nozzle-like passage 14 and the nozzle-like passage 14
May be narrowed, and the discharge of the discharge medium may not be performed smoothly, or the nozzle-shaped passage 14 may be completely closed.

In the method in which the substrate 13 and the grooved plate 16 are pressed against each other by the pressing leaf spring, since the above-mentioned adhesive is not used, the nozzle-like passage 14 is narrowed or the nozzle-like passage 14 In general, it is extremely difficult to uniformly press the front end surfaces of the large number of nozzle walls 15 formed on the grooved plate 16 against the bonding surface of the substrate 13, although such a problem that the nozzles are not closed does not occur. It is.

Therefore, in the ink jet head 10 having a large number of nozzle-shaped passages 14, a gap is formed between the tip end surface of the nozzle wall 15 and the bonding surface of the substrate 13, and the gap is formed by the existence of such a gap. Nozzle-like passage 14
Leakage of the discharge medium, that is, crosstalk occurs between
In some cases, a part of the boiling pressure generated in the discharge medium in the nozzle-like passage 14 by the heat energy from the electrothermal converter 11 escapes to the adjacent nozzle-like passage 14 to cause a pressure loss. Further, since a part of the boiling pressure propagates to the adjacent nozzle-like passage 14, the nozzle-like passage 14
The meniscus of the discharge medium at the discharge port 24 of
In some cases, it has been difficult to ensure an accurate discharge amount.

In view of the above, a method of mechanically engaging the substrate 13 with the tip of the nozzle wall 15 and autonomously joining them has been considered. FIG. 24 exemplifies a schematic structure of such a joint portion between the substrate 13 and the tip of the nozzle wall 15. That is, the structure shown in FIG. 24 is provided with a groove forming layer 27 having a groove-shaped locking groove 26 on the surface of the substrate 13, and a locking portion 28 locked in the locking groove 26 of the groove forming layer 27. Is formed at the tip of the nozzle wall 15.

However, the locking portion 28 is attached to the tip of the nozzle wall 15.
It is difficult to provide such a complicated shape as one.

[0016]

SUMMARY OF THE INVENTION It is a first object of the present invention to provide an ink jet head which can easily and surely join a substrate and a tip portion of a nozzle wall with a sufficient bonding strength without using an adhesive or the like. It is in.

A second object of the present invention is to provide an ink jet cartridge having such an ink jet head.

Further, a third object of the present invention is to mount an ink jet head which can easily and surely join the tip of the substrate and the nozzle wall with sufficient bonding strength without using an adhesive or the like. An object of the present invention is to provide an ink jet device.

Further, a fourth object of the present invention is to provide a method for manufacturing such an ink jet head.

[0020]

According to a first aspect of the present invention, there is provided a substrate having discharge energy generating means for discharging droplets, and a surface of the substrate on which the discharge energy generating means is formed. A grooved plate on which a nozzle wall surrounding the discharge energy generating means is superimposed and a tip end portion of the nozzle wall of the grooved plate and a side of the substrate on which the discharge energy generating means is formed. An ink jet head formed by joining surfaces to each other,
A weir portion protruding from a surface of the substrate on which the ejection energy generating means is formed in the vicinity of the tip of the nozzle wall, and being interposed between the weir and the tip of the nozzle wall; An ink jet head comprising a bonding resin.

According to a second mode of the present invention, a substrate having discharge energy generating means for discharging droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed, and A grooved plate having a nozzle wall surrounding the energy generating means, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the discharge energy generating means is formed are joined to each other. An ink jet head comprising: a first locking portion projecting from a tip portion of the nozzle wall along a surface of the substrate on which the ejection energy generating means is formed; and a first locking portion. A second locking portion projecting from the surface of the substrate on which the ejection energy generating means is formed so as to overlap with the portion, and a first locking portion and a second locking portion. Contact between In the ink-jet head characterized by having a resin.

According to a third mode of the present invention, a substrate having discharge energy generating means for discharging droplets of a discharge medium is superimposed on a surface of the substrate on which the discharge energy generating means is formed. An ink jet head formed by mutually joining a grooved plate formed with a nozzle wall surrounding the discharge energy generating means, and a discharge medium tank for storing the discharge medium to be supplied to the ink jet head. An ink jet cartridge, wherein the ink jet head is provided with a weir protruding from a surface of the substrate on which the ejection energy generating means is formed in proximity to a tip end of the nozzle wall; and An ink jet cartridge having a joining resin interposed between the nozzle wall and a tip end of the nozzle wall.

According to a fourth aspect of the present invention, a substrate having discharge energy generating means for discharging droplets of a discharge medium is superimposed on a surface of the substrate on which the discharge energy generating means is formed. And an ink jet head having a grooved plate formed with a nozzle wall surrounding the discharge energy generating means, and a discharge medium tank for storing the discharge medium to be supplied to the ink jet head. A cartridge, wherein the inkjet head includes a first locking portion that protrudes from a tip portion of the nozzle wall along a surface of the substrate on which the ejection energy generating unit is formed, and a first locking portion. A second locking portion protruding from a surface of the substrate on which the ejection energy generating means is formed so as to overlap with the stopping portion; In inkjet cartridge; and a bonding resin which is interposed between these first engaging portion and second engaging portion.

According to a fifth aspect of the present invention, a substrate having discharge energy generating means for discharging liquid droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed. An ink jet apparatus including an ink jet head mounting portion in which a grooved plate having a nozzle wall surrounding the ejection energy generating means is joined to each other, wherein the ink jet head is provided at a tip end of the nozzle wall. A weir portion protruding from the surface of the substrate on the side where the discharge energy generating means is formed, and a joining resin interposed between the weir portion and the tip of the nozzle wall. The feature is an ink jet device.

According to a sixth aspect of the present invention, a substrate having discharge energy generating means for discharging droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed, and the discharge is performed. An ink jet apparatus including an ink jet head mounting portion in which a grooved plate having a nozzle wall surrounding energy generating means is joined to each other, wherein the ink jet head comprises:
A first locking portion protruding from a tip end portion of the nozzle wall along a surface of the substrate on which the ejection energy generating means is formed, and the substrate being overlapped with the first locking portion. A second locking portion projecting from the surface on which the discharge energy generating means is formed, and a joining resin interposed between the first locking portion and the second locking portion. An inkjet device characterized by having:

In a seventh aspect of the present invention, a substrate having discharge energy generating means for discharging droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed. A grooved plate formed with a nozzle wall surrounding the discharge energy generating means,
In a method for manufacturing an ink jet head for joining a tip portion of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed, the ejection energy generating means of the substrate is formed. Forming a resin layer on a portion of the surface on the side where the tip of the nozzle wall overlaps, and applying a coating layer covering the resin layer on the surface of the substrate on which the discharge energy generating means is formed. Forming, exposing the resin layer by removing a part of the coating layer in a shape corresponding to the tip end surface of the nozzle wall, and pressing a tip end of the nozzle wall against the exposed resin layer. And heating and melting the resin layer to interpose a resin constituting the resin layer between the tip of the nozzle wall and the coating layer. A method of manufacturing a click jet head.

According to an eighth aspect of the present invention, a substrate having discharge energy generating means for discharging liquid droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed, and the discharge is performed. A grooved plate having a nozzle wall surrounding the energy generating means, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the discharge energy generating means is formed are joined to each other. In the method for manufacturing an ink jet head, a joining resin layer having an area larger than the tip end surface of the nozzle wall is provided on a portion of the substrate on which the ejection energy generating means is formed, where the tip end portion of the nozzle wall is overlapped. Forming a coating layer covering the bonding resin layer on a surface of the substrate on which the discharge energy generating means is formed, and Removing a part of the coating layer to a shape corresponding to the tip end surface of the joining wall to expose a part of the joining resin layer, and exposing the exposed portion of the joining resin layer and the tip end of the nozzle wall. Heating these in a contact state and joining the joining resin layer and the tip of the nozzle wall.

According to a ninth embodiment of the present invention, a substrate having discharge energy generating means for discharging liquid droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed, and the discharge is performed. A grooved plate having a nozzle wall surrounding the energy generating means, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the discharge energy generating means is formed are joined to each other. In the method for manufacturing an ink jet head, a build-up layer having an area larger than the front end surface of the nozzle wall is provided at a portion where the front end portion of the nozzle wall is overlapped on the surface of the substrate on which the ejection energy generating means is formed. Forming a coating layer covering the build-up layer on the surface of the substrate on which the ejection energy generating means is formed, and Forming a locking window that exposes a portion of the build-up layer by removing a portion of the coating layer in a shape corresponding to the tip end surface; and forming the locking window in the coating layer from the locking window. Removing the build-up layer and pushing the tip of the nozzle wall from the locking window into the coating layer, and expanding the tip of the nozzle wall in the coating layer with its plastic deformation. And a method for manufacturing an ink jet head.

According to a tenth aspect of the present invention, a substrate having discharge energy generating means for discharging liquid droplets is superimposed on a surface of the substrate on which the discharge energy generating means is formed, and the discharge is performed. A grooved plate having a nozzle wall surrounding the energy generating means, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the discharge energy generating means is formed are joined to each other. In the method for manufacturing an ink jet head, a resin layer having an area larger than the front end surface of the nozzle wall is formed on a portion of the substrate on the side where the ejection energy generating means is formed, where the front end portion of the nozzle wall is overlapped. Forming; forming a coating layer covering the resin layer on a surface of the substrate on which the ejection energy generating means is formed; Forming a locking window for exposing a portion of the resin layer by removing a portion of the coating layer in a shape corresponding to the tip surface, and removing the tip of the nozzle wall from the locking window. The resin layer is heated and melted while being pressed into the resin layer, and the tip of the nozzle wall is pushed and expanded in the coating layer with its plastic deformation while the tip of the nozzle wall is between the coating layer and the tip. And a step of wrapping around the resin constituting the resin layer.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the ink jet head according to the first and second embodiments of the present invention, the tip of the nozzle wall and the joining resin may be made of a thermoplastic resin. It is also effective to form the resin with the same resin. Further, the substrate may further have a thermal energy generating means for heating and melting the bonding resin.

In the ink jet cartridge according to the third and fourth embodiments of the present invention, the discharge medium may be ink or a processing liquid for adjusting the characteristics of the ink discharged to the print medium, or the ink and the processing liquid. It may be.

In the ink-jet apparatus according to the fifth and sixth aspects of the present invention, the mounting portion of the ink-jet head is scan-movable in a direction intersecting with the transport direction of the print medium from which droplets are discharged from the ink-jet head. Is also good.

The method for manufacturing an ink jet head according to the seventh aspect of the present invention may further comprise a step of irreversibly altering the coating layer after the resin layer is heated and melted. Irreversible alteration of the coating layer in this case refers to the growth of crystal grains of the material constituting the coating layer, the bulging deformation such as hillocks seen in the aluminum thin film, or the swelling of the material due to solvent immersion. It may be caused by heating and holding the layer. Further, at least one of the tip of the nozzle wall and the resin constituting the resin layer may be made of a thermoplastic resin, and it is also effective to constitute the tip of the nozzle wall and the resin layer with the same resin. It is. Further, the substrate may have a thermal energy generating means for heating the resin layer.

In the method for manufacturing an ink jet head according to the eighth aspect of the present invention, at least one of the tip of the nozzle wall and the joining resin forming the joining resin layer may be made of a thermoplastic resin. It is also effective to form the resin layer and the tip of the nozzle wall with the same resin. Further, the substrate may have a thermal energy generating means for heating a bonding portion between the bonding resin layer and the tip of the nozzle wall.

In the method of manufacturing an ink jet head according to the ninth embodiment of the present invention, the tip of the nozzle wall may be made of a thermoplastic resin.

In the method for manufacturing an ink jet head according to the tenth aspect of the present invention, at least one of the tip of the nozzle wall and the resin forming the resin layer may be formed of a thermoplastic resin. It is also effective to form the tip of the wall with the same resin. Also,
The substrate may have a thermal energy generating means for heating the resin layer.

In order to maintain a more reliable bonding state, depending on the form of the ink jet head, a conventional pressing spring may be further combined with the bonding between the grooved plate and the substrate. Further, the present invention can be applied not only to the joint between the tip of the nozzle wall and the substrate, but also to another joint between the grooved plate and the substrate. Further, the present invention can be applied to a joint portion between a discharge port plate and a substrate in an ink jet head having a configuration described in Japanese Patent Application No. 5-324983.

[0038]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the ink jet head according to the present invention will be described in detail below with reference to FIG. 1, which shows a schematic sectional structure of a main part of the ink jet head. 23 is substantially the same as the conventional one described with reference to FIG. 23, except for the structure of the joining portion.

That is, a pair of locking plate portions 29 projecting from both sides in the width direction are integrally formed at the tip of the nozzle wall 15 of the grooved plate 16. A pair of pressing members 30 capable of holding the locking plate portion 29 with the surface of the substrate 13 are integrally formed on the surface of the substrate 13 so as to sandwich the nozzle wall 15. The substrate 13 on which the electrothermal transducers 11 and the electrodes 12 are patterned at predetermined intervals is prevented from being corroded by the contact of the electrothermal transducers 11 and the electrodes 12 with the ejection medium. Covered with. Further, the electrothermal transducer 11 is provided with a cavitation-resistant layer 20 made of tantalum or the like in order to prevent breakage due to cavitation due to boiling of the discharge medium. It is formed on top of 20.

Therefore, the locking plate portion 29 of the nozzle wall 15 is
The substrate 13 is locked by the pressing member 30 integrated with the substrate 13, and the substrate 13 and the grooved plate 16 are integrally joined. In addition, the adjacent nozzle-like passage 14 is
Is completely separated by the labyrinth structure of the connecting portion between the locking plate portion 29 at the tip of the substrate and the pressing member 30 of the substrate 13, so that the occurrence of crosstalk or the like does not occur.

In this embodiment, the grooved plate 16 described above is used.
Is formed of polysulfone, and the nozzle wall 15 of the grooved plate 16 is joined to the substrate 13. However, only the nozzle wall 15 of the grooved plate 16 or only the tip of the nozzle wall 15 is formed of polysulfone. However, other portions of the grooved plate 16 can be made of resin, glass, metal, or the like other than polysulfone.

FIGS. 2 to 6 show the working procedure of one embodiment of the method of manufacturing such an ink jet head.
First, as shown in FIG. 2, first, as shown in FIG. 2, the surface of the substrate 13 on which the electrothermal transducers 11 and the electrodes 12 that are patterned on the substrate 13 are patterned at predetermined intervals is insulated. Cover with a protective layer 19.

Next, as shown in FIG. 3, the insulating protective layer 19 at a position where the nozzle wall 15 of the grooved plate 16 is joined.
A bonding resin layer 31 containing polysulfone as a main component and serving as the above-mentioned locking plate portion 29 is formed thereon.

The bonding resin layer 31 is obtained by melting fine-grained polysulfone with an organic solvent such as cyclohexanone, forming a thin film on the substrate 13 by spin coating, and irradiating an excimer laser beam in a masked state. The pattern may be formed so that these do not remain above each of the electrothermal transducers 11 facing the nozzle-shaped passages 14. The width W ₁ of the joining resin layer 31 needs to be larger than the width W ₂ (see FIG. 6) of the tip end surface of the nozzle wall 15.
It is desirable to keep it to such an extent that it is not located above.

After forming the bonding resin layer 31 on the insulating protective layer 19, as shown in FIG.
The covering layer 3 which becomes the above-mentioned pressing member 30 so as to cover
Form 2 In the present embodiment, since the pressing member 30 is formed in the same process as the anti-cavitation layer 20, the substrate 1
Although tantalum was formed as a coating layer 32 on 3, there is no problem if a different material from the cavitation-resistant layer 20, for example, a silicon-based thin film or a photosensitive resin is used as the coating layer 32.

After the coating layer 32 is formed, as shown in FIG. 5, a locking window 33 into which the tip of the nozzle wall 15 is inserted.
Is formed, and an extra portion of the coating layer 32 other than covering the bonding resin layer 31 is removed. In this patterning process, the cavitation-resistant layer 20 may be formed directly above the electrothermal converter 11. Width W ₃ of locking window 33
, It is necessary to be smaller than the width W ₁ of the bonding resin layer 31, slightly larger than the width W ₂ of the distal end surface of the nozzle wall 15, it is desirable to set, for example, about 1μm greater. However, it is necessary to larger 2, least about 3μm the width dimension W ₂ of the distal end surface of the nozzle wall 15 in the case of considering practical tolerances.

After the pressing member 30 surrounding the joining resin layer 31 is formed in this way, the tip of the nozzle wall 15 comes into contact with the joining resin layer 31 via the locking window 33 as shown in FIG. As described above, the grooved plate 16 and the substrate 13 are overlapped, and the bonding resin layer 31 and the nozzle wall 15 are kept in this state.
The substrate 13 is heated by a heater (not shown) so that the tip of the substrate can be at least softened and integrated.

As a heating method, a YAG laser having an appropriate energy density is applied to these joints,
A heating element similar to the electrothermal transducer 11 is provided on the substrate 13 in advance so as to be located below the bonding resin layer 31,
Electric current may be applied to generate heat. The preferable heating state of the joining resin layer 31 and the tip of the nozzle wall 15 is such that only the tip surface of the nozzle wall 15 and the joining resin layer 31 are melted, and the portion of the nozzle wall 15 located above the holding member 30 is melted. It is not deformed.

Thereafter, the heating of the bonding portion is stopped and cooling or natural heat radiation is performed to obtain the ink jet head having the structure shown in FIG.

In the above-described embodiment, the joining portion is heated with the tip end surface of the nozzle wall 15 and the joining resin layer 31 abutting on each other. However, the joining resin layer 31 is heated or softened or melted in advance. In this state, the tip surface of the nozzle wall 15 may be abutted against the bonding resin layer 31 in this state. It is also effective to form a step at the tip of the nozzle wall 15 so that the portion of the nozzle wall 15 located above the holding member 30 is less likely to melt and deform.

FIGS. 7 and 8 show the manufacturing procedure of another embodiment of the method for manufacturing an ink jet head according to the present invention. The same reference numerals are given to the parts having the same functions as those of the previous embodiment. Therefore, duplicate description will be omitted.

That is, as shown in FIG.
A stepped projection 34 is formed at the tip of the nozzle wall 15 of FIG.
And the front end surface thereof is pressed against the bonding resin layer 31 held by the pressing member 30.
Then, the tip of the stepped projection 34 and the joining resin layer 31 are heated in a state where they abut against each other, and as shown in FIG.
And are integrally joined via a stepped projection 34.

As described above, the stepped projection 3 having a small width is provided.
Since the nozzle wall 15 and the joining resin layer 31 are joined through the step 4, the softening and melting of the stepped projections 34 is promoted during heating of the nozzle wall 15 and the joining can be completed in a short time. Melt deformation of the portion of the nozzle wall 15 located above the holding member 30 can be prevented.

In the above-described embodiment, the joining resin layer 31 is joined to the tip of the nozzle wall 15, but the tip of the nozzle wall 15 is melted and diffused so that the locking plate 29 shown in FIG.
May be formed.

FIGS. 9 to 12 show the manufacturing procedure of another embodiment of the method for manufacturing an ink jet head according to the present invention.
However, parts having the same functions as those of the previous embodiment are denoted by the same reference numerals, and duplicate description will be omitted.

That is, as shown in FIG.
3 is formed, and the pressing member 3
The inside of 0 is filled with a build-up layer 35 similar to the previous bonding resin layer 31. As the resin constituting the build-up layer 35, besides polysulfone, which is the same as the grooved plate 16, ketones such as acetone, and photosensitive resins that can be melted or decomposed with an alcohol or alkali solution can be used.

Next, as shown in FIG.
5 is washed away using a solvent or the like. In the present embodiment, a new cleaning step is required for the previous two embodiments, but the bonding resin layer 31 held by the pressing member 30 is damaged by ink during use, or when it is heated and melted. Since there is no risk of overflowing beyond the pressing member 30, the selection range of the resin forming the build-up layer 35 can be expanded.

On the other hand, as shown in FIG.
Locking plate portions 2 on both sides in the width direction of the tip of the nozzle wall 15
9, a pair of corners 36 is formed at a distance from each other, and this is inserted into the holding member 30 from the locking window 33 to insert the substrate 1
3 is pressed against the insulating protective layer 19.

In this state, the corners 36 are pressed against the insulating protective layer 19 of the substrate 13 while being softened by heating, so that the corners 36 are respectively spread out within the holding member 30 as shown in FIG. An engaging plate portion 29 for engaging the member 30 is formed.

In the embodiment shown in FIGS. 2 to 8, the joining resin layer 31 serving as the locking plate 29 and the tip of the nozzle wall 15 of the grooved plate 16 are made of different materials. In such a case, even if these are heated, they may not be chemically integrated, and a sufficient bonding strength may not be obtained. In such a case, the method of manufacturing the ink jet head according to another embodiment of the present invention shown in FIGS. 13 and 14 is also effective. The same reference numerals will be used to denote the same parts, and duplicate descriptions will be omitted.

That is, as shown in FIG. 13, the pressing member 30 is formed on the insulating protective layer 19 of the substrate 13 so that the joining resin layer 31 is exposed from the locking window 33, while the grooved plate 16 is A pair of corners 36 serving as the preceding locking plate 29 are formed on both sides in the width direction of the tip end of the nozzle wall 15 with a space therebetween.
This is inserted into the holding member 30 from the locking window 33 and pressed against the insulating protective layer 19 of the substrate 13.

In this state, the corners 36 and the joining resin layer 31 are pressed against the insulating protective layer 19 of the substrate 13 while being softened by heating, so that the corners 36 are respectively held in the holding members 30 as shown in FIG. Press and spread with pressing member 30
Is formed, and the joining resin layer 31 is wrapped therebetween to fill the gap with the joining resin.

As a result, in the solidified state, the inside of the holding member 30 is filled with the locking plate portion 29 and the joining resin without any gap, and extremely large joining strength can be generated. In this case, the joining resin also functions as an adhesive.

In order to prevent unnecessary deformation of the nozzle wall 15 of the grooved plate 16 due to heating, the bonding resin layer 3
1 is preferably equal to or lower than the transition point of the grooved plate 16, particularly
Below the softening point temperature.

In each of the above-described embodiments, the locking plate 29 is formed at the tip of the nozzle wall 15, and the pressing member 30 mechanically engaged with the locking plate 29 is used to form the nozzle wall 15. And the substrate 13 were joined to each other.
A similar effect can be obtained with a simpler structure.

FIGS. 15 and 16 show the manufacturing procedure of another embodiment of the method of manufacturing an ink jet head according to the present invention. Parts having the same functions as those in the previous embodiment are denoted by the same reference numerals. Therefore, duplicate description will be omitted.

That is, the coating layer 32 is formed on the substrate 13 in the same manner as in FIGS. 2 to 4 of the previous embodiment, but the width of the joining resin layer 31 is larger than the width of the tip of the nozzle wall 15. It is set slightly larger of the W ₃ also. Then, as shown in FIG. 15, the coating layer 32 is etched so that the entire joining resin layer 31 is exposed.
Are formed on both sides in the width direction by the covering layer 32.

Then, as shown in FIG. 16, the tip of the nozzle wall 15 is pressed against the joining resin layer 31 sandwiched between the dams 37, and the joining resin layer 31 is heated and melted in this state, and The joining resin of the joining resin layer 31 is wrapped around the tip side wall portion of the nozzle wall 15, and these are integrally joined. At this time, the weir portion 37 functions to prevent the molten bonding resin of the bonding resin layer 31 from overflowing to the nozzle-shaped passage 14 and to increase the contact area between the nozzle wall 15 and the bonding resin.

This embodiment is suitable for a case where the arrangement interval of the nozzle-like passages 14 is short and the width of the bonding resin layer 31 cannot be increased. It is possible to further increase the bonding force by physicochemically altering the weir portion 37 described above.

FIG. 17 shows a cross-sectional structure of such a joint portion of the ink jet head according to the present invention. The portions having the same functions as those of the previous embodiment are denoted by the same reference numerals, and duplicate explanations are omitted. And

That is, the weir 37 is further heated from the state shown in FIG. 16 to grow crystal grains of the material constituting the weir 37 to cause physical deformation. By changing to, a larger joining force is obtained.

In this embodiment, the dam 37 is obtained by patterning an aluminum thin film. However, the surface of the aluminum sputtered film is irreversibly deformed and grown by maintaining the temperature at about 300 ° C. Is known empirically. In this case, the grooved plate 16 is
In addition, the electrode 12 is preferably formed of a material whose glass transition point temperature is equal to or higher than the crystal growth temperature of the weir portion 37, for example, glass, and the electrode 12 is preferably made of a material other than aluminum, such as gold.

In the above-mentioned embodiment, the heating section 3
7 is performed, but depending on the material constituting the weir portion 37, it is also possible to use an immersion process using a solvent that swells this irreversibly. May be irreversibly altered.

FIG. 18 shows the appearance of an embodiment of the ink jet cartridge according to the present invention using the above-described ink jet head. That is, the ink jet cartridge 40 in this embodiment is of a serial type, and includes the ink jet head 10 and the ink supply pipe 4.
A main part is formed by an ink tank 42 that stores ink, and a lid member 43 that seals the inside of the ink tank 42.

A large number of discharge ports 24 for discharging ink
The ink-jet head 10 in which is formed the ink-jet head 10 corresponding to the embodiment partially shown in FIG. 1, and the ink is supplied from the ink tank 42 to the grooved plate 16 and the substrate 13 through the ink supply pipe 41. Are led to a common ink chamber (not shown) formed by the above.

The ink-jet cartridge 40 of this embodiment has the ink-jet head 10 and the ink tank 42 integrally formed. The ink-jet cartridge 10 has a structure in which the ink tank 42 is exchangeably connected to the ink-jet head 10. It may be adopted.

The above-described ink-jet cartridge 40
FIG. 19 shows the appearance of an embodiment of the ink-jet apparatus according to the present invention using the present invention. That is, a pair of guide rods 5 disposed in parallel with the platen roller 52 driven and rotated by the paper feed motor 51 of the ink jet apparatus 50 of the present embodiment.
A carriage 54 is slidably held at 3.
A scanning wire 57 is wound around a pair of pulleys 55 and 56 rotatably attached to both ends of the guide rod 53 in parallel with the guide rod 53, and both ends of the scanning wire 57 are connected to the carriage 5.
4. A carriage drive motor 58 is connected to one of the pulleys 55. The forward / reverse rotation of the carriage drive motor 58 causes the carriage 54 to move to the guide rod 53.
While scanning along the platen roller 52 in the longitudinal direction thereof.

On the carriage 54, the ink-jet cartridge 40 shown in FIG.
The ejection port 24 of the inkjet head 10 faces a print medium 70 such as paper wound around the platen roller 52 with a predetermined gap. Further, an ink ejection signal corresponding to data from an appropriate data supply source is supplied to the inkjet head 10 via a flexible cable 60 connected to the carriage 54. Then, desired data can be printed on a predetermined portion of the print medium 70 by the feeding operation of the print medium 70 by the paper feed motor 51 and the scanning movement of the carriage 54 by the carriage drive motor 58.

The ink jet cartridge 40
One or more (two in the illustrated example) can be mounted on the carriage 54 according to the color of the ink to be used. In addition, although a serial type is used as the above-described ink jet head 10, the present invention can be applied to an ink jet cartridge using a full line type ink jet head or an ink jet device thereof.

[0080]

According to the present invention, the substrate and the tip of the nozzle wall of the grooved plate can be mechanically joined to each other with high strength by a simple process.

In addition, an ink jet head in which the grooved plate and the substrate are mechanically joined to each other with high strength, an ink jet cartridge using the ink jet head, and an ink jet apparatus equipped with the ink jet head can be obtained.

Further, by ensuring the joining of the nozzle-shaped passage portion which greatly affects the ejection performance of the ink-jet head, it is possible to reduce the leakage of ejection energy to the adjacent nozzles during driving, and to achieve stable ejection of droplets. It becomes possible.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a structure of a main part of an embodiment of an inkjet head according to the present invention.

FIG. 2 is a conceptual working diagram showing a manufacturing procedure of the ink jet head shown in FIG. 1 together with FIGS.

FIG. 3 is a conceptual diagram showing a procedure for manufacturing the ink jet head shown in FIG. 1 together with FIGS. 2 and 4 to 6;

FIG. 4 is a conceptual working diagram showing a manufacturing procedure of the ink jet head shown in FIG. 1 together with FIG. 2, FIG. 3, FIG. 5, and FIG.

FIG. 5 is a conceptual working diagram showing a manufacturing procedure of the ink jet head shown in FIG. 1 together with FIGS. 2 to 4 and 6.

FIG. 6 is a conceptual working diagram showing a procedure for manufacturing the ink jet head shown in FIG. 1 together with FIGS.

FIG. 7 is a conceptual diagram illustrating a procedure for manufacturing another inkjet head according to the present invention, together with FIG.

FIG. 8 is a conceptual view showing a procedure for manufacturing another inkjet head according to the present invention together with FIG. 7;

FIG. 9 is a conceptual working diagram showing a manufacturing procedure of another ink jet head of the present invention together with FIGS.

FIG. 10, together with FIGS. 9, 11 and 12, is a conceptual work diagram showing another ink-jet head manufacturing procedure of the present invention.

FIG. 11, together with FIG. 9, FIG. 10, and FIG. 12, is an operation conceptual diagram showing another ink jet head manufacturing procedure of the present invention.

FIG. 12 is a conceptual working diagram showing a manufacturing procedure of another inkjet head according to the present invention together with FIGS. 9 to 11;

FIG. 13 is a conceptual view showing a procedure for manufacturing still another inkjet head according to the present invention, together with FIG.

FIG. 14 is a conceptual view showing a procedure for manufacturing still another inkjet head according to the present invention, together with FIG.

FIG. 15 is a conceptual view showing a procedure for manufacturing still another inkjet head according to the present invention, together with FIG.

FIG. 16 is a conceptual view showing a procedure for manufacturing still another inkjet head according to the present invention, together with FIG.

FIG. 17 is a sectional view illustrating a schematic structure of a main part of another embodiment of the ink jet head of the present invention.

FIG. 18 is a perspective view illustrating an appearance of an embodiment of an inkjet cartridge according to the present invention.

FIG. 19 is a cutaway perspective view illustrating a schematic structure of an embodiment of an ink jet device according to the present invention.

FIG. 20 is a perspective view illustrating an external appearance of an example of an inkjet head to which the present invention is applied.

FIG. 21 is a cross-sectional view illustrating an internal structure of the inkjet head illustrated in FIG.

FIG. 22 is a sectional view taken along the line XXII-XXII in FIG. 21;

23 is a sectional view taken along the line XXIII-XXIII in FIG. 21.

FIG. 24 is a cross-sectional view illustrating an example of a bonding mode between a substrate constituting an inkjet head and a tip portion of a nozzle wall.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Ink-jet head 11 Electrothermal transducer 12 Electrode 13 Substrate 14 Nozzle passage 15 Nozzle wall 16 Plate with groove 17 Electric circuit part 18 Insulating layer 19 Insulating protective layer 20 Cavitation-resistant layer 21 Common ejection medium liquid chamber 22 Liquid chamber frame 23 Discharge medium supply port 24 Discharge port 25 Discharge port plate 26 Lock groove 27 Groove forming layer 28 Lock section 28 29 Lock plate section 30 Press member 31 Joining resin layer 32 Coating layer 33 Lock window 34 Stepped protrusion 35 Meat Embossed layer 36 Corner portion 37 Weir portion 38 Transformed portion 38 40 Ink jet cartridge 41 Ink supply tube 42 Ink tank 43 Cover member 50 Ink jet device 51 Paper feed motor 52 Platen roller 53 Guide rod 54 Carriage 55, 56 Pulley 57 Scanning wire 58 Carriage drive Motor 59 Removable lever 60 Lexical Bull cable 70 print media

Claims (27)

[Claims] 1. A substrate having discharge energy generating means for discharging liquid droplets, and a nozzle wall superimposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. An ink jet head comprising a grooved plate having a groove formed thereon, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed are mutually bonded. A dam portion protruding from a surface of the substrate on the side where the discharge energy generating means is formed in proximity to a tip portion of the nozzle wall; and between the dam portion and the tip portion of the nozzle wall. An ink jet head comprising an interposed joining resin. 2. A substrate having discharge energy generating means for discharging droplets, and a nozzle wall superposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. An ink jet head comprising a grooved plate having a groove formed thereon, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed are mutually bonded. A first locking portion protruding from a tip end portion of the nozzle wall along a surface of the substrate on which the discharge energy generating means is formed, and a first locking portion overlapping the first locking portion. A second locking portion protruding from a surface of the substrate on which the ejection energy generating means is formed; and a joining resin interposed between the first locking portion and the second locking portion. And having Inkjet head. 3. The ink jet head according to claim 1, wherein the tip of the nozzle wall and the joining resin are made of a thermoplastic resin. 4. The ink jet head according to claim 1, wherein the tip of the nozzle wall and the joining resin are made of the same resin. 5. The ink jet head according to claim 1, wherein the substrate further has a thermal energy generating unit for heating and melting the bonding resin. 6. A substrate having discharge energy generating means for discharging droplets of a discharge medium, and said substrate being superimposed on a surface of said substrate on which said discharge energy generating means is formed, and comprising: An ink jet cartridge comprising: an ink jet head formed by mutually joining a grooved plate having a surrounding nozzle wall formed thereon; and a discharge medium tank for storing the discharge medium to be supplied to the ink jet head. A head configured to protrude from a surface of the substrate on a side on which the ejection energy generating unit is formed in proximity to a distal end of the nozzle wall, and between the weir and the distal end of the nozzle wall; And an adhesive resin interposed therebetween. 7. A substrate having discharge energy generating means for discharging liquid droplets of a discharge medium, and the discharge energy generating means being superposed on a surface of the substrate on which the discharge energy generating means is formed. An ink jet cartridge comprising: an ink jet head formed by mutually joining a grooved plate having a surrounding nozzle wall formed thereon; and a discharge medium tank for storing the discharge medium to be supplied to the ink jet head. The head has a first locking portion protruding from a tip end portion of the nozzle wall along a surface of the substrate on which the ejection energy generating means is formed, and overlaps with the first locking portion. A second locking portion protruding from a surface of the substrate on which the ejection energy generating means is formed; and a first locking portion and a second locking portion. Inkjet cartridge; and a bonding resin which is interposed between the locking portion of the. 8. The printing medium according to claim 6, wherein the ejection medium is a processing liquid for adjusting characteristics of the ink and / or the ink ejected to the print medium.
3. The ink jet cartridge according to claim 1. 9. A substrate having discharge energy generating means for discharging liquid droplets, and a nozzle wall superimposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. An ink jet apparatus comprising an ink jet head mounting portion formed by mutually joining a grooved plate formed with an ink jet head, wherein the ink jet head is close to a tip end of the nozzle wall and the discharge energy of the substrate is An ink jet apparatus comprising: a weir portion protruding from a surface on which a generation unit is formed; and a joining resin interposed between the weir portion and a tip end of the nozzle wall. 10. A substrate having discharge energy generating means for discharging liquid droplets, and a nozzle wall superposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. An ink jet device comprising an ink jet head mounting portion formed by mutually joining a grooved plate formed with the ink jet head, wherein the ink jet head is configured such that the discharge energy generating means of the substrate is formed from a tip end of the nozzle wall. A first locking portion protruding along the formed surface, and a first locking portion projecting from the surface of the substrate on which the ejection energy generating means is formed so as to overlap with the first locking portion. An ink jet apparatus comprising: a second locking portion provided; and a bonding resin interposed between the first locking portion and the second locking portion. 11. The inkjet head according to claim 9, wherein the mounting portion of the inkjet head is scan-movable in a direction intersecting a transport direction of a print medium from which droplets are ejected from the inkjet head. An inkjet device according to item 1. 12. A substrate having discharge energy generating means for discharging droplets, and a nozzle wall superposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. A method of manufacturing an ink jet head, comprising: a grooved plate having a groove formed therein; and joining a tip end of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed to each other. Forming a resin layer on the surface of the substrate on the side where the discharge energy generating means is formed, where the tip of the nozzle wall is overlapped; and applying the coating layer covering the resin layer to the discharge of the substrate. Forming on the surface on the side where the energy generating means is formed; removing a part of the coating layer into a shape corresponding to the tip surface of the nozzle wall; Exposing a resin layer, and heating and melting the resin layer while pressing the tip of the nozzle wall against the exposed resin layer to form the resin layer between the tip of the nozzle wall and the coating layer. And a step of interposing a resin to be formed. 13. The method according to claim 12, further comprising the step of irreversibly changing the quality of the coating layer after the resin layer is heated and melted. 14. The method according to claim 13, wherein the deterioration of the coating layer is caused by heating and holding the coating layer. 15. The method according to claim 12, wherein at least one of a tip portion of the nozzle wall and a resin forming the resin layer is made of a thermoplastic resin. Of manufacturing an inkjet head. 16. The method according to claim 12, wherein a tip portion of the nozzle wall and the resin layer are made of the same resin. . 17. The method according to claim 12, wherein the substrate has a thermal energy generating unit for heating the resin layer. 18. A nozzle having discharge energy generating means for discharging droplets, and a nozzle wall which is superimposed on a surface of the substrate on which the discharge energy generating means is formed and surrounds the discharge energy generating means. A method of manufacturing an ink jet head, comprising: a grooved plate having a groove formed therein; and joining a tip end of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed to each other. Forming a bonding resin layer having a larger area than the tip surface of the nozzle wall on a portion of the surface of the substrate on which the ejection energy generating means is formed, where the tip portion of the nozzle wall overlaps; Forming a coating layer covering the bonding resin layer on the surface of the substrate on which the ejection energy generating means is formed; and forming a pair with the tip end surface of the nozzle wall. Removing a part of the coating layer in a corresponding shape to expose a part of the joining resin layer; and contacting the exposed part of the joining resin layer with the tip of the nozzle wall. And bonding the joining resin layer and the tip end of the nozzle wall. 19. The apparatus according to claim 18, wherein at least one of a tip portion of the nozzle wall and a joining resin forming the joining resin layer is made of a thermoplastic resin.
3. The method for manufacturing an ink jet head according to item 1. 20. The method according to claim 18, wherein the tip of the nozzle wall and the joining resin layer are made of the same resin. 21. The substrate according to claim 18, wherein the substrate has a thermal energy generating means for heating a joining portion between a tip end of the nozzle wall and the joining resin layer. 3. The method for manufacturing an ink jet head according to item 1. 22. A substrate having discharge energy generating means for discharging droplets, and a nozzle wall superposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. A method of manufacturing an ink jet head, comprising: a grooved plate having a groove formed therein; and joining a tip end of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating means is formed to each other. Forming a cladding layer having a larger area than the tip surface of the nozzle wall on a portion of the surface of the substrate on which the ejection energy generating means is formed, where the tip portion of the nozzle wall overlaps; Forming a coating layer covering the build-up layer on the surface of the substrate on which the ejection energy generating means is formed; and a shape corresponding to the tip end surface of the nozzle wall. Forming a locking window that exposes a portion of the build-up layer by removing a portion of the coating layer in a shape, and removing the build-up layer in the coating layer from the locking window. And a step of pushing the tip of the nozzle wall from the locking window into the coating layer, and expanding the tip of the nozzle wall in the coating layer with its plastic deformation. A method for manufacturing an ink jet head, which is characterized in that: 23. The method according to claim 22, wherein a tip portion of the nozzle wall is made of a thermoplastic resin. 24. A substrate having discharge energy generating means for discharging liquid droplets, and a nozzle wall superimposed on a surface of the substrate on which the discharge energy generating means is formed and surrounding the discharge energy generating means. A method of manufacturing an ink jet head, comprising: a grooved plate having a groove formed thereon, and a tip of the nozzle wall of the grooved plate and a surface of the substrate on which the ejection energy generating unit is formed are mutually bonded. Forming a resin layer having a larger area than the tip surface of the nozzle wall on a portion of the substrate on the side where the discharge energy generating means is formed, where the tip portion of the nozzle wall overlaps; Forming a coating layer covering the layer on the surface of the substrate on which the ejection energy generating means is formed; and a shape corresponding to the tip end surface of the nozzle wall. Forming a locking window that exposes a portion of the resin layer by removing a portion of the coating layer in a shape, and pressing a tip end of the nozzle wall from the locking window into the resin layer. This resin layer is heated and melted, and the resin constituting the resin layer between the tip portion of the nozzle wall and the coating layer while pushing and expanding the tip portion of the nozzle wall in the coating layer with its plastic deformation. A method of manufacturing an ink-jet head, the method comprising: 25. The method according to claim 24, wherein at least one of a tip portion of the nozzle wall and a resin forming the resin layer is made of a thermoplastic resin. 26. The method according to claim 24, wherein the tip of the nozzle wall and the resin layer are made of the same resin. 27. The method for manufacturing an ink jet head according to claim 24, wherein said substrate has a thermal energy generating means for heating said resin layer.