JPH1081959A - Electron gun mounting structure for tape deposition equipment - Google Patents

Abstract

(57) [Problem] To provide an electron gun mounting structure in a tape vapor deposition apparatus in which maintenance and replacement of an electron gun can be easily performed and the vapor deposition efficiency is improved. SOLUTION: An apparatus main body 1 is provided with a cooling drum 2 and a vapor deposition container 4 in the vicinity of a lower portion thereof, and an electron gun 8 for heating and melting and evaporating the vapor deposition material 3 in the vapor deposition container 4;
A tape 22 to be vapor-deposited passes over the surface of the cooling drum, and a deposition-preventing mask 15 having a vapor-deposited portion of the tape opened is integrated with its supporting members 19, 23, and 24 to form a deposition-preventing plate unit 5. The electron gun 8 was attached to the deposition-preventing plate unit 5 in a tape deposition device in which the deposition-preventing plate unit 5 was configured to be detachable from the apparatus main body 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tape evaporation apparatus used for manufacturing a magnetic tape, and more particularly to a mounting structure of an electron gun used for evaporating a magnetic material.

[0002]

2. Description of the Related Art A tape evaporation apparatus for manufacturing a magnetic tape serving as an information recording carrier is provided with a cooling drum in a main body of which a vacuum atmosphere is provided, and a tape base such as PET is passed over the surface of the cooling drum. In addition, a vapor deposition material is heated and melted through a mask on a tape substrate passing through a cooling drum and vapor deposition is performed.

FIG. 5 is a basic configuration diagram of a conventional tape deposition apparatus. A cooling drum 35 is provided in the apparatus main body 31 in which a vacuum atmosphere is provided. An unwinding shaft 32 around which a tape (substrate) 54 made of, for example, PET is wound is provided above one end of the apparatus main body 31, and a winding shaft 33 which winds the tape is provided below the unwinding shaft 32. The tape 54 from the unwinding shaft 32 is guided through a plurality of guide rolls (only one is shown in the figure) 34 so as to pass over the surface of the cooling drum 35. The cooling drum 35 is for depositing the tape 54 while cooling the tape 54. A vapor deposition container (crucible) 38 containing a vapor deposition material 37 made of a magnetic material (mainly Co—Ni) is installed near the lower portion of the cooling drum 35. An electron gun 36 for heating and melting the vaporized material 37 to evaporate it is attached to the ceiling of the apparatus main body 1.

In the tape vapor deposition apparatus having such a configuration, when the tape 54 unwound from the unwinding shaft 32 is guided by the guide roll 34 and passes through the cooling drum 35, the tape 54 is first passed through the substrate processing unit 50. The surface is activated to prevent the magnetic material from peeling off, and then the vapor of the vapor deposition material 37 in the vapor deposition container 38, which has been evaporated by the electron beam from the electron gun 36, is condensed on the tape surface to form a magnetic film. At the time of this tape deposition, the tape 54 on the surface of the cooling drum 35 is provided
And a magnetic film is formed only in a necessary portion. At this time, oxygen is further blown from the oxygen supply pipe 53 to improve the characteristics. The tape 54 on which the magnetic film is formed after passing through the cooling drum 35 is made to have no wrinkles by the surface neutralization processing section 51 to make the surface slippery.
It is wound on 3.

FIG. 6 shows a vapor deposition container 38 containing an electron gun 36 and a vapor deposition material 37 made of a magnetic material in the vapor deposition apparatus shown in FIG. 5, and a deposition-preventing plate for masking unnecessary portions of the magnetic material particles so as not to vapor-deposit. FIG. 3 is a diagram for explaining a positional relationship of a unit 39 in detail. As shown in FIG.
Is mounted on the upper part of the apparatus main body 31 and irradiates an electron beam toward a vapor deposition material 37 in a vapor deposition container 38 located diagonally below. The vapor deposition container 38 is fixed to a base 55 of the apparatus main body 31 via a support 56. The electron beam is swung by a deflection coil (not shown) in the width direction (vertical direction in the drawing) of the vapor deposition container 38 and heats and melts and vaporizes the vapor deposition material 37 while being scanned. The irradiation of the electron beam causes the vapor of the magnetic material to adhere to the surface of the tape 54 passing through the cooling drum 35 to form a magnetic film. In this case, the surface of the cooling drum 35 is masked by the deposition mask 57.

The deposition mask 57 has an upper opening 58 through which an electron beam passes, and a vapor deposition opening 59 facing the surface of the cooling drum to form a vapor deposition region. A shutter 60 is provided in the vapor deposition opening 59 to further adjust the vapor deposition area. The deposition mask 57 is integrated with the supporting material to form the deposition plate unit 39. The attachment-preventing plate unit 39 is detachably moved from the left side of the apparatus main body 31 to the apparatus main body 31.

[0007]

However, since the electron gun in the above-described conventional vapor deposition apparatus is mounted particularly on the upper part of the apparatus main body, the distance from the electron gun to the vapor deposition container for containing the magnetic material is long, and the electron gun is also difficult. Since the beam passes through the vapor deposition cloud of the magnetic material vapor formed above the vapor deposition container, the energy loss of the electron beam becomes large and the vapor deposition efficiency on the tape is poor. Further, since the conventional electron gun is fixed to the main body of the apparatus, maintenance such as cleaning for removing a deposit adhering around the electron gun and replacement of the electron gun are very troublesome. Furthermore, since the conventional electron gun is fixed, it is not possible to adjust the irradiation angle of the electron beam once it has been attached, and it is not possible to obtain a deposition position with an optimum irradiation angle for each process.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks of the prior art, and has as its object to provide an electron gun mounting structure in a tape evaporation apparatus in which maintenance and replacement of an electron gun are easy and the evaporation efficiency is improved. And

[0009]

In order to achieve the above object, according to the present invention, a cooling drum and a vapor deposition container are provided in the vicinity of a lower portion of the apparatus main body, and the vapor deposition material in the vapor deposition container is heated and melted. With an electron gun for evaporating, a tape to be vapor-deposited on the surface of the cooling drum passes, and a deposition-prevention mask in which a deposition portion of the tape is opened is integrated with its supporting member to form a deposition-prevention plate unit, An electron gun mounting structure for a tape vapor deposition device, wherein the electron gun is mounted on the deposition plate unit in a tape deposition device in which the deposition plate unit is configured to be detachable from the apparatus main body.

According to the above structure, the distance from the electron gun to the vapor deposition container containing the magnetic material can be shortened, and the magnetic material is irradiated from the side of the magnetic material with little influence of the vapor deposition cloud by the magnetic material. And the efficiency of vapor deposition on the tape can be improved. Further, the electron gun can be moved separately from the apparatus main body together with the detachable attachment-preventing plate unit, so that maintenance such as cleaning for removing deposited matter adhering around the electron gun and replacement of the electron gun can be easily performed.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In a preferred embodiment,
The apparatus is characterized in that it is provided with a mounting angle adjusting means for the electron gun.

In a further preferred embodiment, the mounting angle adjusting means comprises a worm wheel provided on the electron gun side and a worm provided on the attachment-preventing plate unit side meshing with the worm wheel. .

[0013]

Next, an embodiment of the mounting structure of the electron gun in the tape evaporation apparatus according to the present invention will be described. The basic configuration of the tape deposition apparatus is not particularly different from that of the basic configuration diagram of FIG. 5 described above except for the mounting position of the electron gun, and the tape unwound from the unwinding shaft passes through the cooling drum. At this time, a magnetic material evaporated by a beam from an electron gun is condensed on the surface of the tape, and the tape on which the magnetic film is formed is wound around a winding shaft. In such a basic configuration, the present invention is characterized by the mounting structure of the electron gun.

FIG. 1 is a diagram for explaining in detail the positional relationship between an electron gun and a vapor deposition container accommodating a magnetic material of a tape vapor deposition apparatus according to an embodiment of the present invention, and a masking deposition plate unit during vapor deposition of a magnetic material. It is. As shown in the figure, this device has a tape 22 inside a device main body 1 in which a vacuum atmosphere is provided.
While cooling (for example, made of PET) this tape 2
A cooling drum 2 for vapor deposition on the drum 2 is installed, and a magnetic material (mainly C
An evaporation container (crucible) 4 containing an evaporation material 3 made of o-Ni) is provided. This vapor deposition container 4 is fixed to a base 21 of the apparatus main body 1 via a support 20.

On the outside of the apparatus main body 1, a movable adhesion-preventing plate unit 5 which is detachably movable from the left side to the apparatus main body 1 is installed. As shown in the perspective view of FIG. 2, the deposition-preventing plate unit 5 has a deposition-preventing mask 15 installed on two support bases 19 protruding from the partition wall 13 and fixed. The partition 13 closes the opening 14 (FIG. 1) of the apparatus main body 1 when the anti-adhesion plate unit 5 is mounted on the apparatus main body 1. The partition 13 is provided with a viewing window 12. The partition wall 13 that fixedly supports the deposition mask 15 is fixed on a carriage 24 via a support frame 23. The deposition-resistant plate unit 5 is formed by such a deposition-preventing mask 15 and supporting members such as the support base 19, the support frame 23, and the carriage 24 that support the mask.

The deposition-preventing mask 15 has an opening 18 (FIG. 1) for passing an electron beam on its rear surface, and a vapor-deposition opening 16 for forming a vapor-deposition area at a position facing the cooling drum 2 on the front side. Have. A shutter 17 is further provided at the vapor deposition opening 16 so that the vapor deposition area can be adjusted.

An electron gun 8 is mounted on the back surface of the partition 13 of the attachment-preventing plate unit 5 via a unit flange 7 and a flexible joint 6. As shown in FIG. 3, the electron gun 8 is fixed to a unit flange 7, and a worm wheel 11 is mounted on the unit flange 7. The worm wheel 11 meshes with the worm 10. The worm 10 is installed on an underframe 25 provided on a trolley 24 of the deposition preventing plate unit 5. When the worm 10 is rotated by the torque motor 9 or manually, the worm wheel 11 is rotated, the mounting angle of the electron gun 8 via the flexible joint 6 is changed, and the irradiation direction of the electron beam can be adjusted.

The path of the electron beam from the electron gun 8 is bent into a curved shape by a deflection coil (not shown). The electron beam irradiates the vapor deposition material 3 in the vapor deposition container 4 through the opening 18 of the deposition mask 15 and heats and melts it. Further evaporate.

As shown in FIG. 4, the proof plate unit 5 to which the electron gun 8 is attached is moved by moving the cart 24,
The deposition mask 15 is caused to enter the inside of the apparatus main body through the opening 14 of the apparatus main body 1, and the opening 14 is hermetically sealed by the partition 13 and mounted.

According to the mounting structure of the electron gun having the above-described structure, the electron gun 8 is mounted on the movable deposition-preventing plate unit 5 which can be attached to and detached from the side surface of the apparatus main body 1. In addition, since the electron beam irradiates the magnetic material in the evaporation container 4 from the side, the influence of the evaporation cloud formed above the container is reduced, the heating energy loss is reduced, and the evaporation efficiency is reduced. Can be improved. Also, when the device is not used, the movable deposition-preventing plate unit 5 can be detached from the device main body 1, and accordingly, the electron gun 8 can be moved to a place where it is easy to work.
Maintenance such as cleaning for removing deposits adhered around the electron gun 8 and replacement of the electron gun can be easily performed. Further, since the electron beam irradiation angle of the electron gun 8 can be adjusted in the vertical direction by driving the torque motor 9, etc., it is possible to obtain a deposition position having an optimum irradiation angle for each deposition process. The deposition efficiency can be improved. The state of the magnetic film formed on the surface of the tape can be observed through the viewing window 12 in FIG.

[0021]

As described above, according to the present invention, since the electron gun is mounted on the movable deposition-preventing plate unit on the side of the apparatus main body, the present invention is compared with the conventional case where the electron gun is mounted on the upper surface of the apparatus main body. Thus, the irradiation distance of the electron beam can be shortened, and the electron beam can be irradiated from the side direction where the influence of the vapor deposition cloud is small, and the energy efficiency can be suppressed and the vapor deposition efficiency on the tape can be improved. . Further, the electron gun can be moved together with the movable deposition-preventing plate unit, so that maintenance such as cleaning for removing deposited matter adhering around the electron gun and replacement of the electron gun can be easily performed.

Furthermore, if the electron gun is mounted on a movable deposition-preventing plate unit whose irradiation angle can be adjusted, a vapor deposition position with an optimum irradiation angle can be obtained for each vapor deposition process, and the vapor deposition efficiency is further improved. be able to.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an example of an embodiment of an electron gun mounting structure in a tape evaporation apparatus according to the present invention.

FIG. 2 is a perspective view of the deposition mask of FIG.

FIG. 3 is a perspective view of a mounting portion of the electron gun in FIG. 1;

FIG. 4 is an explanatory view of a state in which the attachment-preventing plate unit according to the present invention is mounted on the apparatus main body.

FIG. 5 is a basic configuration diagram of a tape evaporation apparatus.

FIG. 6 is a configuration diagram of an electron gun mounting structure in a conventional tape evaporation apparatus.

[Explanation of symbols]

1: apparatus main body, 2: cooling drum, 3: vapor deposition material, 4: vapor deposition container, 5: deposition prevention plate unit, 6: flexible joint, 7: unit flange, 8: electron gun, 9: torque motor, 10: worm , 11: worm wheel, 1
2: Viewing window, 13: Partition wall, 14: Opening of device main body, 1
5: deposition mask, 16: vapor deposition opening, 17: shutter,
18: electron beam passage opening, 19: support base, 20: support, 21: base of the apparatus body, 22: tape, 23: support frame, 24: trolley, 25: gantry

Claims (3)

[Claims] 1. A cooling drum and a vapor deposition container provided in the vicinity of a lower portion thereof are provided in an apparatus main body, and an electron gun for heating and melting and vaporizing a vapor deposition material in the vapor deposition container is provided. A tape to be passed through, an adhesion mask having an opening where the vapor deposition portion of the tape is opened is integrated with a supporting member to form an adhesion plate unit, and the adhesion plate unit is configured to be detachable from the apparatus main body. An electron gun mounting structure for a tape vapor deposition device, wherein the electron gun is mounted on the deposition preventing plate unit. 2. The mounting structure of an electron gun according to claim 1, further comprising means for adjusting the mounting angle of said electron gun. 3. The apparatus according to claim 2, wherein said mounting angle adjusting means comprises a worm wheel provided on an electron gun side and a worm provided on a deposition-proof plate unit side meshing with said worm wheel. An electron gun mounting structure for the tape evaporation device.