JPH11195563A - 試料の分離装置及びその方法並びに基板の製造方法 - Google Patents

試料の分離装置及びその方法並びに基板の製造方法

Info

Publication number
JPH11195563A
JPH11195563A JP36101697A JP36101697A JPH11195563A JP H11195563 A JPH11195563 A JP H11195563A JP 36101697 A JP36101697 A JP 36101697A JP 36101697 A JP36101697 A JP 36101697A JP H11195563 A JPH11195563 A JP H11195563A
Authority
JP
Japan
Prior art keywords
sample
substrate
pair
separation
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP36101697A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11195563A5 (2
Inventor
Kazutaka Yanagida
一隆 柳田
Kazuaki Omi
和明 近江
Kiyobumi Sakaguchi
清文 坂口
Takao Yonehara
隆夫 米原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP36101697A priority Critical patent/JPH11195563A/ja
Priority to SG1998005839A priority patent/SG70141A1/en
Priority to US09/211,757 priority patent/US6418999B1/en
Priority to SG200100215A priority patent/SG87916A1/en
Priority to TW87120972A priority patent/TW429464B/zh
Priority to DE1998627459 priority patent/DE69827459T2/de
Priority to AT98310462T priority patent/ATE281909T1/de
Priority to EP19980310462 priority patent/EP0925888B1/en
Priority to AU98190/98A priority patent/AU717785B2/en
Priority to KR10-1998-0058984A priority patent/KR100366722B1/ko
Publication of JPH11195563A publication Critical patent/JPH11195563A/ja
Priority to US10/151,527 priority patent/US6521078B2/en
Priority to US10/318,231 priority patent/US6860963B2/en
Publication of JPH11195563A5 publication Critical patent/JPH11195563A5/ja
Withdrawn legal-status Critical Current

Links

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  • Weting (AREA)
JP36101697A 1997-12-26 1997-12-26 試料の分離装置及びその方法並びに基板の製造方法 Withdrawn JPH11195563A (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP36101697A JPH11195563A (ja) 1997-12-26 1997-12-26 試料の分離装置及びその方法並びに基板の製造方法
SG1998005839A SG70141A1 (en) 1997-12-26 1998-12-15 Sample separating apparatus and method and substrate manufacturing method
US09/211,757 US6418999B1 (en) 1997-12-26 1998-12-15 Sample separating apparatus and method, and substrate manufacturing method
SG200100215A SG87916A1 (en) 1997-12-26 1998-12-15 Sample separating apparatus and method, and substrate manufacturing method
TW87120972A TW429464B (en) 1997-12-26 1998-12-16 Sample separating apparatus and method, and substrate manufacturing method
EP19980310462 EP0925888B1 (en) 1997-12-26 1998-12-18 Sample separating apparatus and method, and substrate manufacture method
AT98310462T ATE281909T1 (de) 1997-12-26 1998-12-18 Vorrichtung und verfahren zum spalten
DE1998627459 DE69827459T2 (de) 1997-12-26 1998-12-18 Vorrichtung und Verfahren zum Spalten
AU98190/98A AU717785B2 (en) 1997-12-26 1998-12-24 Sample separating apparatus and method, and substrate manufacturing method
KR10-1998-0058984A KR100366722B1 (ko) 1997-12-26 1998-12-26 샘플분리장치와방법및기판제조방법
US10/151,527 US6521078B2 (en) 1997-12-26 2002-05-20 Sample separating apparatus and method, and substrate manufacturing method
US10/318,231 US6860963B2 (en) 1997-12-26 2002-12-12 Sample separating apparatus and method, and substrate manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36101697A JPH11195563A (ja) 1997-12-26 1997-12-26 試料の分離装置及びその方法並びに基板の製造方法

Publications (2)

Publication Number Publication Date
JPH11195563A true JPH11195563A (ja) 1999-07-21
JPH11195563A5 JPH11195563A5 (2) 2005-08-04

Family

ID=18471840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36101697A Withdrawn JPH11195563A (ja) 1997-12-26 1997-12-26 試料の分離装置及びその方法並びに基板の製造方法

Country Status (1)

Country Link
JP (1) JPH11195563A (2)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100483909B1 (ko) * 2001-06-29 2005-04-18 캐논 가부시끼가이샤 부재의 분리방법 및 분리장치
WO2012026261A1 (ja) * 2010-08-23 2012-03-01 東京エレクトロン株式会社 剥離装置、剥離システム、剥離方法及びコンピュータ記憶媒体
WO2013058129A1 (ja) * 2011-10-21 2013-04-25 東京エレクトロン株式会社 剥離装置、剥離システム及び剥離方法
KR102191204B1 (ko) * 2019-07-31 2020-12-15 삼영공업 주식회사 접합판 분리 장치 및 접합판 분리 방법
EP4014248A4 (en) * 2019-08-15 2023-08-30 Canon Kabushiki Kaisha PLANARIZATION METHOD, APPARATUS AND METHOD FOR MAKING AN ARTICLE

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100483909B1 (ko) * 2001-06-29 2005-04-18 캐논 가부시끼가이샤 부재의 분리방법 및 분리장치
WO2012026261A1 (ja) * 2010-08-23 2012-03-01 東京エレクトロン株式会社 剥離装置、剥離システム、剥離方法及びコンピュータ記憶媒体
JP2012069914A (ja) * 2010-08-23 2012-04-05 Tokyo Electron Ltd 剥離装置、剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
WO2013058129A1 (ja) * 2011-10-21 2013-04-25 東京エレクトロン株式会社 剥離装置、剥離システム及び剥離方法
KR102191204B1 (ko) * 2019-07-31 2020-12-15 삼영공업 주식회사 접합판 분리 장치 및 접합판 분리 방법
EP4014248A4 (en) * 2019-08-15 2023-08-30 Canon Kabushiki Kaisha PLANARIZATION METHOD, APPARATUS AND METHOD FOR MAKING AN ARTICLE

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