JPH11200015A - 真空内ガス供給装置 - Google Patents

真空内ガス供給装置

Info

Publication number: JPH11200015A
Authority: JP; Japan
Prior art keywords: gas; filter; diffusion; diffusion chamber; chambers
Prior art date: 1998-01-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP1790198A

Other languages

English (en)

Japanese (ja)

Other versions

JPH11200015A5 (2

Inventor

充 ▲高▼井

Mitsuru Takai

Kunihiro Ueda

国博上田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

TDK Corp

Original Assignee

TDK Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-01-13

Filing date

1998-01-13

Publication date

1999-07-27

1998-01-13 Application filed by TDK Corp filed Critical TDK Corp

1998-01-13 Priority to JP1790198A priority Critical patent/JPH11200015A/ja

1999-07-27 Publication of JPH11200015A publication Critical patent/JPH11200015A/ja

2005-08-18 Publication of JPH11200015A5 publication Critical patent/JPH11200015A5/ja

Status Pending legal-status Critical Current

Links

238000009792 diffusion process Methods 0.000 claims abstract description 30
238000009826 distribution Methods 0.000 abstract description 11
230000008021 deposition Effects 0.000 abstract description 7
230000000694 effects Effects 0.000 abstract description 3
239000000835 fiber Substances 0.000 abstract description 3
239000011148 porous material Substances 0.000 abstract 2
229920000914 Metallic fiber Polymers 0.000 abstract 1
230000001105 regulatory effect Effects 0.000 abstract 1
239000007789 gas Substances 0.000 description 58
229910052751 metal Inorganic materials 0.000 description 18
239000002184 metal Substances 0.000 description 18
239000010408 film Substances 0.000 description 12
238000007740 vapor deposition Methods 0.000 description 9
238000000151 deposition Methods 0.000 description 8
230000005291 magnetic effect Effects 0.000 description 7
230000005294 ferromagnetic effect Effects 0.000 description 5
239000000758 substrate Substances 0.000 description 5
239000010409 thin film Substances 0.000 description 5
230000000052 comparative effect Effects 0.000 description 4
239000000463 material Substances 0.000 description 3
238000005259 measurement Methods 0.000 description 3
238000000034 method Methods 0.000 description 3
238000001816 cooling Methods 0.000 description 2
238000010894 electron beam technology Methods 0.000 description 2
239000011491 glass wool Substances 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
229920000139 polyethylene terephthalate Polymers 0.000 description 2
239000005020 polyethylene terephthalate Substances 0.000 description 2
238000004804 winding Methods 0.000 description 2
210000002268 wool Anatomy 0.000 description 2
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
230000001678 irradiating effect Effects 0.000 description 1
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
239000000395 magnesium oxide Substances 0.000 description 1
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
239000002245 particle Substances 0.000 description 1
-1 polyethylene terephthalate Polymers 0.000 description 1
238000006116 polymerization reaction Methods 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)
Manufacturing Of Magnetic Record Carriers (AREA)

JP1790198A 1998-01-13 1998-01-13 真空内ガス供給装置 Pending JPH11200015A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1790198A JPH11200015A (ja)	1998-01-13	1998-01-13	真空内ガス供給装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1790198A JPH11200015A (ja)	1998-01-13	1998-01-13	真空内ガス供給装置

Publications (2)

Publication Number	Publication Date
JPH11200015A true JPH11200015A (ja)	1999-07-27
JPH11200015A5 JPH11200015A5 (2)	2005-08-18

Family

ID=11956655

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1790198A Pending JPH11200015A (ja)	1998-01-13	1998-01-13	真空内ガス供給装置

Country Status (1)

Country	Link
JP (1)	JPH11200015A (2)

1998
- 1998-01-13 JP JP1790198A patent/JPH11200015A/ja active Pending

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