JPH1163361A5 - - Google Patents

Info

Publication number
JPH1163361A5
JPH1163361A5 JP1997238850A JP23885097A JPH1163361A5 JP H1163361 A5 JPH1163361 A5 JP H1163361A5 JP 1997238850 A JP1997238850 A JP 1997238850A JP 23885097 A JP23885097 A JP 23885097A JP H1163361 A5 JPH1163361 A5 JP H1163361A5
Authority
JP
Japan
Prior art keywords
heater
semiconductor manufacturing
branch pipes
exhaust pipe
branch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997238850A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1163361A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9238850A priority Critical patent/JPH1163361A/ja
Priority claimed from JP9238850A external-priority patent/JPH1163361A/ja
Publication of JPH1163361A publication Critical patent/JPH1163361A/ja
Publication of JPH1163361A5 publication Critical patent/JPH1163361A5/ja
Pending legal-status Critical Current

Links

JP9238850A 1997-08-20 1997-08-20 排気配管装置 Pending JPH1163361A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9238850A JPH1163361A (ja) 1997-08-20 1997-08-20 排気配管装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9238850A JPH1163361A (ja) 1997-08-20 1997-08-20 排気配管装置

Publications (2)

Publication Number Publication Date
JPH1163361A JPH1163361A (ja) 1999-03-05
JPH1163361A5 true JPH1163361A5 (de) 2005-06-02

Family

ID=17036199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9238850A Pending JPH1163361A (ja) 1997-08-20 1997-08-20 排気配管装置

Country Status (1)

Country Link
JP (1) JPH1163361A (de)

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