JPS5074857A - - Google Patents

Info

Publication number
JPS5074857A
JPS5074857A JP49113971A JP11397174A JPS5074857A JP S5074857 A JPS5074857 A JP S5074857A JP 49113971 A JP49113971 A JP 49113971A JP 11397174 A JP11397174 A JP 11397174A JP S5074857 A JPS5074857 A JP S5074857A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49113971A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5074857A publication Critical patent/JPS5074857A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0408—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/50—Ducting arrangements from the source of air or other gases to the materials or objects being dried

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
JP49113971A 1973-11-07 1974-10-04 Pending JPS5074857A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00413753A US3849906A (en) 1973-11-07 1973-11-07 Rotary fluid applicator

Publications (1)

Publication Number Publication Date
JPS5074857A true JPS5074857A (fr) 1975-06-19

Family

ID=23638474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49113971A Pending JPS5074857A (fr) 1973-11-07 1974-10-04

Country Status (7)

Country Link
US (1) US3849906A (fr)
JP (1) JPS5074857A (fr)
CA (1) CA1035574A (fr)
DE (1) DE2442309A1 (fr)
FR (1) FR2249717B1 (fr)
GB (1) GB1482106A (fr)
IT (1) IT1022104B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417640A (en) * 1977-07-08 1979-02-09 Mitsubishi Electric Corp Malfunction preventive device for integrated circuit

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429983A (en) 1982-03-22 1984-02-07 International Business Machines Corporation Developing apparatus for exposed photoresist coated wafers
DE3502648A1 (de) * 1985-01-26 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur mischung eines haupt-gasstroms mit mindestens einem neben-gasstrom
DE3503089A1 (de) * 1985-01-30 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur gleichmaessigen beaufschlagung einer planen flaeche mit einem gas
US11069521B2 (en) * 2017-02-06 2021-07-20 Planar Semiconductor, Inc. Subnanometer-level light-based substrate cleaning mechanism
TWI770115B (zh) * 2017-02-06 2022-07-11 新加坡商平面半導體公司 加工汙水之去除
WO2018144446A1 (fr) * 2017-02-06 2018-08-09 Planar Semiconductor, Inc. Mécanisme de nettoyage de substrat de niveau sous-nanométrique
JP2022541862A (ja) * 2020-06-30 2022-09-28 東莞宇宙電路板設備有限公司 表面処理機器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602003A (en) * 1946-10-30 1952-07-01 Willard Storage Battery Co Rotating apparatus for blowing loose foreign material from articles
US2532494A (en) * 1946-11-23 1950-12-05 Mcgraw Electric Co Method of making paper tubes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417640A (en) * 1977-07-08 1979-02-09 Mitsubishi Electric Corp Malfunction preventive device for integrated circuit

Also Published As

Publication number Publication date
DE2442309A1 (de) 1975-05-22
US3849906A (en) 1974-11-26
CA1035574A (fr) 1978-08-01
IT1022104B (it) 1978-03-20
GB1482106A (en) 1977-08-03
FR2249717B1 (fr) 1976-12-31
FR2249717A1 (fr) 1975-05-30

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