JPS51111092A - Semiconductor manufacturing process - Google Patents
Semiconductor manufacturing processInfo
- Publication number
- JPS51111092A JPS51111092A JP3625275A JP3625275A JPS51111092A JP S51111092 A JPS51111092 A JP S51111092A JP 3625275 A JP3625275 A JP 3625275A JP 3625275 A JP3625275 A JP 3625275A JP S51111092 A JPS51111092 A JP S51111092A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing process
- semiconductor manufacturing
- wiring layers
- step difference
- prevent disconnection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50036252A JPS5910063B2 (ja) | 1975-03-26 | 1975-03-26 | ハンドウタイソウチノセイゾウホウホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50036252A JPS5910063B2 (ja) | 1975-03-26 | 1975-03-26 | ハンドウタイソウチノセイゾウホウホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51111092A true JPS51111092A (en) | 1976-10-01 |
| JPS5910063B2 JPS5910063B2 (ja) | 1984-03-06 |
Family
ID=12464570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50036252A Expired JPS5910063B2 (ja) | 1975-03-26 | 1975-03-26 | ハンドウタイソウチノセイゾウホウホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5910063B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58222542A (ja) * | 1982-06-18 | 1983-12-24 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
-
1975
- 1975-03-26 JP JP50036252A patent/JPS5910063B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58222542A (ja) * | 1982-06-18 | 1983-12-24 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5910063B2 (ja) | 1984-03-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5226182A (en) | Manufacturing method of semi-conductor unit | |
| JPS51111092A (en) | Semiconductor manufacturing process | |
| JPS5240968A (en) | Process for production of semiconductor device | |
| JPS5211525A (en) | Method of manufacturing headrests | |
| JPS51113478A (en) | The manufacturing method of semiconductor device | |
| JPS5227387A (en) | Forming system of multi-layer wiring | |
| JPS51134566A (en) | Semiconductor unit manufacturing process | |
| JPS51121272A (en) | Manufacturing method for semiconductor devices | |
| JPS5380183A (en) | Semiconductor device | |
| JPS51147286A (en) | Manufacturing process of semiconductor | |
| JPS5365663A (en) | Manufacture of semiconductor device | |
| JPS51111089A (en) | Semiconductor device manufucturing process | |
| JPS524780A (en) | Manufacturing method of semiconductor equipment | |
| JPS5282083A (en) | Production of semiconductor device | |
| JPS5219087A (en) | Production method of semiconductor device | |
| JPS51123582A (en) | Semiconductor device production system | |
| JPS5240061A (en) | Semiconductor device and process for production of same | |
| JPS5211773A (en) | Method of manufacturing semiconductor device | |
| JPS5329086A (en) | Production of semiconductor device | |
| JPS523388A (en) | Manufacturing method of mos integrated circuit | |
| JPS51134587A (en) | Production method of semiconductor integrated-circuit device | |
| JPS51126775A (en) | Semiconductor unit manufacturing process | |
| JPS51151089A (en) | Manufacturing method of a semiconductor | |
| JPS5349972A (en) | Manufacture of semiconductor device | |
| JPS51112266A (en) | Semiconductor device production method |