JPS5240968A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5240968A
JPS5240968A JP11635075A JP11635075A JPS5240968A JP S5240968 A JPS5240968 A JP S5240968A JP 11635075 A JP11635075 A JP 11635075A JP 11635075 A JP11635075 A JP 11635075A JP S5240968 A JPS5240968 A JP S5240968A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
punchingthrough
netire
anodizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11635075A
Other languages
Japanese (ja)
Inventor
Shohei Shima
Iwao Higashinakagaha
Suekichi Inomata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11635075A priority Critical patent/JPS5240968A/en
Publication of JPS5240968A publication Critical patent/JPS5240968A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain metal wirings free from step disconnection and punchingthrough, by selectively forming conductive layers on the contact surface where semiconductor elements are exposed, then depositing metal layers on the netire surface and anodizing the surface locally.
COPYRIGHT: (C)1977,JPO&Japio
JP11635075A 1975-09-29 1975-09-29 Process for production of semiconductor device Pending JPS5240968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11635075A JPS5240968A (en) 1975-09-29 1975-09-29 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11635075A JPS5240968A (en) 1975-09-29 1975-09-29 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5240968A true JPS5240968A (en) 1977-03-30

Family

ID=14684767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11635075A Pending JPS5240968A (en) 1975-09-29 1975-09-29 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5240968A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134971A (en) * 1981-02-16 1982-08-20 Nippon Telegr & Teleph Corp <Ntt> Mis type simiconductor device and manufacture of the same
JPS57210672A (en) * 1981-06-19 1982-12-24 Fujitsu Ltd Semiconductor device
JPS58139425A (en) * 1982-02-13 1983-08-18 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS595626A (en) * 1982-07-01 1984-01-12 Matsushita Electronics Corp Forming method of electrode wiring
JPS6113619A (en) * 1984-06-29 1986-01-21 Agency Of Ind Science & Technol Manufacture of semiconductor device
JPH04717A (en) * 1990-04-18 1992-01-06 Seikosha Co Ltd Semiconductor device and manufacture thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134971A (en) * 1981-02-16 1982-08-20 Nippon Telegr & Teleph Corp <Ntt> Mis type simiconductor device and manufacture of the same
JPS57210672A (en) * 1981-06-19 1982-12-24 Fujitsu Ltd Semiconductor device
JPS58139425A (en) * 1982-02-13 1983-08-18 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS595626A (en) * 1982-07-01 1984-01-12 Matsushita Electronics Corp Forming method of electrode wiring
JPS6113619A (en) * 1984-06-29 1986-01-21 Agency Of Ind Science & Technol Manufacture of semiconductor device
JPH04717A (en) * 1990-04-18 1992-01-06 Seikosha Co Ltd Semiconductor device and manufacture thereof

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