JPS51114067A - Liquid phase epitaxial growth towards the top of alxga1-xas base - Google Patents

Liquid phase epitaxial growth towards the top of alxga1-xas base

Info

Publication number
JPS51114067A
JPS51114067A JP50039394A JP3939475A JPS51114067A JP S51114067 A JPS51114067 A JP S51114067A JP 50039394 A JP50039394 A JP 50039394A JP 3939475 A JP3939475 A JP 3939475A JP S51114067 A JPS51114067 A JP S51114067A
Authority
JP
Japan
Prior art keywords
base
liquid phase
epitaxial growth
alxga1
xas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50039394A
Other languages
Japanese (ja)
Other versions
JPS5441389B2 (en
Inventor
Yoshiharu Horikoshi
Yoshitaka Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50039394A priority Critical patent/JPS51114067A/en
Publication of JPS51114067A publication Critical patent/JPS51114067A/en
Publication of JPS5441389B2 publication Critical patent/JPS5441389B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:Liquid phase epitaxial growth conducted in an atmosphere containing halogen compounds to promote growth of ALyCa1-yAs(or GaAs) on an ALxGa1xAs base without meltback process.
JP50039394A 1975-04-01 1975-04-01 Liquid phase epitaxial growth towards the top of alxga1-xas base Granted JPS51114067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50039394A JPS51114067A (en) 1975-04-01 1975-04-01 Liquid phase epitaxial growth towards the top of alxga1-xas base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50039394A JPS51114067A (en) 1975-04-01 1975-04-01 Liquid phase epitaxial growth towards the top of alxga1-xas base

Publications (2)

Publication Number Publication Date
JPS51114067A true JPS51114067A (en) 1976-10-07
JPS5441389B2 JPS5441389B2 (en) 1979-12-07

Family

ID=12551771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50039394A Granted JPS51114067A (en) 1975-04-01 1975-04-01 Liquid phase epitaxial growth towards the top of alxga1-xas base

Country Status (1)

Country Link
JP (1) JPS51114067A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623740A (en) * 1979-08-06 1981-03-06 Fujitsu Ltd Multilayer liquid phase epitaxial growing method
JPS5946083A (en) * 1982-09-09 1984-03-15 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor laser having periodic structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877765A (en) * 1972-01-18 1973-10-19
JPS4877766A (en) * 1972-01-19 1973-10-19
JPS4880276A (en) * 1972-01-28 1973-10-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877765A (en) * 1972-01-18 1973-10-19
JPS4877766A (en) * 1972-01-19 1973-10-19
JPS4880276A (en) * 1972-01-28 1973-10-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623740A (en) * 1979-08-06 1981-03-06 Fujitsu Ltd Multilayer liquid phase epitaxial growing method
JPS5946083A (en) * 1982-09-09 1984-03-15 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor laser having periodic structure

Also Published As

Publication number Publication date
JPS5441389B2 (en) 1979-12-07

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