JPS51132777A - Inspect on method of semiconductor apparatus - Google Patents

Inspect on method of semiconductor apparatus

Info

Publication number
JPS51132777A
JPS51132777A JP5608875A JP5608875A JPS51132777A JP S51132777 A JPS51132777 A JP S51132777A JP 5608875 A JP5608875 A JP 5608875A JP 5608875 A JP5608875 A JP 5608875A JP S51132777 A JPS51132777 A JP S51132777A
Authority
JP
Japan
Prior art keywords
inspect
semiconductor apparatus
alloy
semoconductor
bad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5608875A
Other languages
Japanese (ja)
Inventor
Atsu Kobayashi
Akira Tanaka
Norimasa Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5608875A priority Critical patent/JPS51132777A/en
Publication of JPS51132777A publication Critical patent/JPS51132777A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: Inspection method of semoconductor apparatus which can detect good or bad of the characteristics of the apparatus, by using alloy after electrode-alloy process.
COPYRIGHT: (C)1976,JPO&Japio
JP5608875A 1975-05-14 1975-05-14 Inspect on method of semiconductor apparatus Pending JPS51132777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5608875A JPS51132777A (en) 1975-05-14 1975-05-14 Inspect on method of semiconductor apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5608875A JPS51132777A (en) 1975-05-14 1975-05-14 Inspect on method of semiconductor apparatus

Publications (1)

Publication Number Publication Date
JPS51132777A true JPS51132777A (en) 1976-11-18

Family

ID=13017330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5608875A Pending JPS51132777A (en) 1975-05-14 1975-05-14 Inspect on method of semiconductor apparatus

Country Status (1)

Country Link
JP (1) JPS51132777A (en)

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