JPS51135374A - Method of manufacturing semiconductor integrated circuit elements - Google Patents

Method of manufacturing semiconductor integrated circuit elements

Info

Publication number
JPS51135374A
JPS51135374A JP5946775A JP5946775A JPS51135374A JP S51135374 A JPS51135374 A JP S51135374A JP 5946775 A JP5946775 A JP 5946775A JP 5946775 A JP5946775 A JP 5946775A JP S51135374 A JPS51135374 A JP S51135374A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit elements
manufacturing semiconductor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5946775A
Other languages
Japanese (ja)
Inventor
Isao Okura
Shinobu Fukunaga
Yasokazu Sugioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5946775A priority Critical patent/JPS51135374A/en
Publication of JPS51135374A publication Critical patent/JPS51135374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To simplify the manufacturing process of CMOS.IC of SOS structure.
COPYRIGHT: (C)1976,JPO&Japio
JP5946775A 1975-05-19 1975-05-19 Method of manufacturing semiconductor integrated circuit elements Pending JPS51135374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5946775A JPS51135374A (en) 1975-05-19 1975-05-19 Method of manufacturing semiconductor integrated circuit elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5946775A JPS51135374A (en) 1975-05-19 1975-05-19 Method of manufacturing semiconductor integrated circuit elements

Publications (1)

Publication Number Publication Date
JPS51135374A true JPS51135374A (en) 1976-11-24

Family

ID=13114133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5946775A Pending JPS51135374A (en) 1975-05-19 1975-05-19 Method of manufacturing semiconductor integrated circuit elements

Country Status (1)

Country Link
JP (1) JPS51135374A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504989A (en) * 1973-05-16 1975-01-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504989A (en) * 1973-05-16 1975-01-20

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