JPS51135377A - Method of manufacturing field effect transistor - Google Patents

Method of manufacturing field effect transistor

Info

Publication number
JPS51135377A
JPS51135377A JP50060382A JP6038275A JPS51135377A JP S51135377 A JPS51135377 A JP S51135377A JP 50060382 A JP50060382 A JP 50060382A JP 6038275 A JP6038275 A JP 6038275A JP S51135377 A JPS51135377 A JP S51135377A
Authority
JP
Japan
Prior art keywords
field effect
effect transistor
manufacturing field
small
vfet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50060382A
Other languages
Japanese (ja)
Inventor
Kuni Ogawa
Kosei Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50060382A priority Critical patent/JPS51135377A/en
Publication of JPS51135377A publication Critical patent/JPS51135377A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To obtain a longitudinal type, multichannel VFET which has a small series resistance between the source and gate, a large mutual conductance and a small input capacitance.
COPYRIGHT: (C)1976,JPO&Japio
JP50060382A 1975-05-19 1975-05-19 Method of manufacturing field effect transistor Pending JPS51135377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50060382A JPS51135377A (en) 1975-05-19 1975-05-19 Method of manufacturing field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50060382A JPS51135377A (en) 1975-05-19 1975-05-19 Method of manufacturing field effect transistor

Publications (1)

Publication Number Publication Date
JPS51135377A true JPS51135377A (en) 1976-11-24

Family

ID=13140530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50060382A Pending JPS51135377A (en) 1975-05-19 1975-05-19 Method of manufacturing field effect transistor

Country Status (1)

Country Link
JP (1) JPS51135377A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128475A (en) * 1974-03-27 1975-10-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128475A (en) * 1974-03-27 1975-10-09

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