JPS51140485A - Wafer index detector - Google Patents

Wafer index detector

Info

Publication number
JPS51140485A
JPS51140485A JP50064192A JP6419275A JPS51140485A JP S51140485 A JPS51140485 A JP S51140485A JP 50064192 A JP50064192 A JP 50064192A JP 6419275 A JP6419275 A JP 6419275A JP S51140485 A JPS51140485 A JP S51140485A
Authority
JP
Japan
Prior art keywords
index detector
wafer index
wafer
detector
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064192A
Other languages
Japanese (ja)
Inventor
Susumu Komoriya
Jun Suzuki
Hiroto Nagatomo
Kiyoshi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50064192A priority Critical patent/JPS51140485A/en
Publication of JPS51140485A publication Critical patent/JPS51140485A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To provide a wafer index detector which can automatically detect in accuracy with simple method without defects.
JP50064192A 1975-05-30 1975-05-30 Wafer index detector Pending JPS51140485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064192A JPS51140485A (en) 1975-05-30 1975-05-30 Wafer index detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064192A JPS51140485A (en) 1975-05-30 1975-05-30 Wafer index detector

Publications (1)

Publication Number Publication Date
JPS51140485A true JPS51140485A (en) 1976-12-03

Family

ID=13250945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064192A Pending JPS51140485A (en) 1975-05-30 1975-05-30 Wafer index detector

Country Status (1)

Country Link
JP (1) JPS51140485A (en)

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