JPS51140557A - Method of depositing impurities to semi-conductor - Google Patents

Method of depositing impurities to semi-conductor

Info

Publication number
JPS51140557A
JPS51140557A JP6430275A JP6430275A JPS51140557A JP S51140557 A JPS51140557 A JP S51140557A JP 6430275 A JP6430275 A JP 6430275A JP 6430275 A JP6430275 A JP 6430275A JP S51140557 A JPS51140557 A JP S51140557A
Authority
JP
Japan
Prior art keywords
semi
conductor
impurities
depositing impurities
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6430275A
Other languages
Japanese (ja)
Inventor
Sumio Nishida
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6430275A priority Critical patent/JPS51140557A/en
Publication of JPS51140557A publication Critical patent/JPS51140557A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To drop the density of impurities which are to be deposited, and to decrease the deviation of the density by depositing the impurities to a semi-conductor wafer with a plasmatic condition.
COPYRIGHT: (C)1976,JPO&Japio
JP6430275A 1975-05-30 1975-05-30 Method of depositing impurities to semi-conductor Pending JPS51140557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6430275A JPS51140557A (en) 1975-05-30 1975-05-30 Method of depositing impurities to semi-conductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6430275A JPS51140557A (en) 1975-05-30 1975-05-30 Method of depositing impurities to semi-conductor

Publications (1)

Publication Number Publication Date
JPS51140557A true JPS51140557A (en) 1976-12-03

Family

ID=13254308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6430275A Pending JPS51140557A (en) 1975-05-30 1975-05-30 Method of depositing impurities to semi-conductor

Country Status (1)

Country Link
JP (1) JPS51140557A (en)

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