JPS51140559A - Impurities diffusing to iii-v group compound semi-conductor base plate - Google Patents

Impurities diffusing to iii-v group compound semi-conductor base plate

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Publication number
JPS51140559A
JPS51140559A JP6431575A JP6431575A JPS51140559A JP S51140559 A JPS51140559 A JP S51140559A JP 6431575 A JP6431575 A JP 6431575A JP 6431575 A JP6431575 A JP 6431575A JP S51140559 A JPS51140559 A JP S51140559A
Authority
JP
Japan
Prior art keywords
iii
base plate
group compound
conductor base
compound semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6431575A
Other languages
Japanese (ja)
Inventor
Hiroki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6431575A priority Critical patent/JPS51140559A/en
Publication of JPS51140559A publication Critical patent/JPS51140559A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To provide a method of obtaining low density of diffusion range by forming low density of phosphorous-glass layer in the diffusion range of III-V group compound semi-conductor base plate containing phosphorous, then diffusing impurities.
COPYRIGHT: (C)1976,JPO&Japio
JP6431575A 1975-05-30 1975-05-30 Impurities diffusing to iii-v group compound semi-conductor base plate Pending JPS51140559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6431575A JPS51140559A (en) 1975-05-30 1975-05-30 Impurities diffusing to iii-v group compound semi-conductor base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6431575A JPS51140559A (en) 1975-05-30 1975-05-30 Impurities diffusing to iii-v group compound semi-conductor base plate

Publications (1)

Publication Number Publication Date
JPS51140559A true JPS51140559A (en) 1976-12-03

Family

ID=13254668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6431575A Pending JPS51140559A (en) 1975-05-30 1975-05-30 Impurities diffusing to iii-v group compound semi-conductor base plate

Country Status (1)

Country Link
JP (1) JPS51140559A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274321A (en) * 1985-05-29 1986-12-04 Sanken Electric Co Ltd Method for diffusing impurity into compound semiconductor
JPH06232062A (en) * 1993-01-28 1994-08-19 Sanken Electric Co Ltd Method for diffusing zinc in compound semiconductor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274321A (en) * 1985-05-29 1986-12-04 Sanken Electric Co Ltd Method for diffusing impurity into compound semiconductor
JPH06232062A (en) * 1993-01-28 1994-08-19 Sanken Electric Co Ltd Method for diffusing zinc in compound semiconductor

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