JPS51145270A - Method of errosive-printing elaborate pattern on metal plate, semicond uctor, etc. - Google Patents
Method of errosive-printing elaborate pattern on metal plate, semicond uctor, etc.Info
- Publication number
- JPS51145270A JPS51145270A JP50069343A JP6934375A JPS51145270A JP S51145270 A JPS51145270 A JP S51145270A JP 50069343 A JP50069343 A JP 50069343A JP 6934375 A JP6934375 A JP 6934375A JP S51145270 A JPS51145270 A JP S51145270A
- Authority
- JP
- Japan
- Prior art keywords
- errosive
- printing
- metal plate
- elaborate pattern
- semicond uctor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Drying Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: Errosive-print on a substance in use of electro beam under radiation of ultraviolet brings elaborate pattern on it in saving process.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50069343A JPS5935319B2 (en) | 1975-06-09 | 1975-06-09 | A method of etching elaborate patterns on metal plates, semiconductors, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50069343A JPS5935319B2 (en) | 1975-06-09 | 1975-06-09 | A method of etching elaborate patterns on metal plates, semiconductors, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51145270A true JPS51145270A (en) | 1976-12-14 |
| JPS5935319B2 JPS5935319B2 (en) | 1984-08-28 |
Family
ID=13399794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50069343A Expired JPS5935319B2 (en) | 1975-06-09 | 1975-06-09 | A method of etching elaborate patterns on metal plates, semiconductors, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5935319B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05175176A (en) * | 1992-05-12 | 1993-07-13 | Agency Of Ind Science & Technol | Fine pattern formation method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61110518U (en) * | 1984-12-24 | 1986-07-12 | ||
| JPS6458664A (en) * | 1987-08-18 | 1989-03-06 | Dow Kako Kk | Welded box equipped with partition plate and manufacture thereof |
-
1975
- 1975-06-09 JP JP50069343A patent/JPS5935319B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05175176A (en) * | 1992-05-12 | 1993-07-13 | Agency Of Ind Science & Technol | Fine pattern formation method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5935319B2 (en) | 1984-08-28 |
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