JPS51147177A - A treatment method of tantaum oxide - Google Patents

A treatment method of tantaum oxide

Info

Publication number
JPS51147177A
JPS51147177A JP7023275A JP7023275A JPS51147177A JP S51147177 A JPS51147177 A JP S51147177A JP 7023275 A JP7023275 A JP 7023275A JP 7023275 A JP7023275 A JP 7023275A JP S51147177 A JPS51147177 A JP S51147177A
Authority
JP
Japan
Prior art keywords
tantaum
oxide
treatment method
film
tantalum oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7023275A
Other languages
Japanese (ja)
Inventor
Hiroo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7023275A priority Critical patent/JPS51147177A/en
Publication of JPS51147177A publication Critical patent/JPS51147177A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To reform a film property of a Tantalum oxide film by radiating light in a plasma of oxydizing gas on the film surface of Tantalum oxide.
COPYRIGHT: (C)1976,JPO&Japio
JP7023275A 1975-06-12 1975-06-12 A treatment method of tantaum oxide Pending JPS51147177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7023275A JPS51147177A (en) 1975-06-12 1975-06-12 A treatment method of tantaum oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7023275A JPS51147177A (en) 1975-06-12 1975-06-12 A treatment method of tantaum oxide

Publications (1)

Publication Number Publication Date
JPS51147177A true JPS51147177A (en) 1976-12-17

Family

ID=13425600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7023275A Pending JPS51147177A (en) 1975-06-12 1975-06-12 A treatment method of tantaum oxide

Country Status (1)

Country Link
JP (1) JPS51147177A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199639A (en) * 1985-02-28 1986-09-04 Sony Corp Method for oxidation of semiconductor
JPS6471166A (en) * 1987-09-10 1989-03-16 Sharp Kk Manufacture of tantalum oxide thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199639A (en) * 1985-02-28 1986-09-04 Sony Corp Method for oxidation of semiconductor
JPS6471166A (en) * 1987-09-10 1989-03-16 Sharp Kk Manufacture of tantalum oxide thin film

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