JPS51147281A - Manufacturing process for thin film switching element - Google Patents

Manufacturing process for thin film switching element

Info

Publication number
JPS51147281A
JPS51147281A JP50070856A JP7085675A JPS51147281A JP S51147281 A JPS51147281 A JP S51147281A JP 50070856 A JP50070856 A JP 50070856A JP 7085675 A JP7085675 A JP 7085675A JP S51147281 A JPS51147281 A JP S51147281A
Authority
JP
Japan
Prior art keywords
thin film
manufacturing process
switching element
film switching
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50070856A
Other languages
Japanese (ja)
Inventor
Michio Ogami
Satoru Ogiwara
Noboru Ebato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50070856A priority Critical patent/JPS51147281A/en
Publication of JPS51147281A publication Critical patent/JPS51147281A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A manufacturing process of a glass thin film mainly composed of vanadium pentaoxide which can be readily formed on a substrate of an inorganic material such as an IC substrate.
COPYRIGHT: (C)1976,JPO&Japio
JP50070856A 1975-06-13 1975-06-13 Manufacturing process for thin film switching element Pending JPS51147281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50070856A JPS51147281A (en) 1975-06-13 1975-06-13 Manufacturing process for thin film switching element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50070856A JPS51147281A (en) 1975-06-13 1975-06-13 Manufacturing process for thin film switching element

Publications (1)

Publication Number Publication Date
JPS51147281A true JPS51147281A (en) 1976-12-17

Family

ID=13443614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50070856A Pending JPS51147281A (en) 1975-06-13 1975-06-13 Manufacturing process for thin film switching element

Country Status (1)

Country Link
JP (1) JPS51147281A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291977A (en) * 1985-06-18 1986-12-22 Shinko Kagaku Kogyo Kk Production of thin film of lower vanadium oxide
KR100605289B1 (en) 2006-04-06 2006-07-28 송건화 Method for manufacturing vanadium dioxide membrane and constant temperature switch having the membrane

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291977A (en) * 1985-06-18 1986-12-22 Shinko Kagaku Kogyo Kk Production of thin film of lower vanadium oxide
KR100605289B1 (en) 2006-04-06 2006-07-28 송건화 Method for manufacturing vanadium dioxide membrane and constant temperature switch having the membrane

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