JPS51148355A - Single crystal semiconductor base plate - Google Patents

Single crystal semiconductor base plate

Info

Publication number
JPS51148355A
JPS51148355A JP7258275A JP7258275A JPS51148355A JP S51148355 A JPS51148355 A JP S51148355A JP 7258275 A JP7258275 A JP 7258275A JP 7258275 A JP7258275 A JP 7258275A JP S51148355 A JPS51148355 A JP S51148355A
Authority
JP
Japan
Prior art keywords
base plate
single crystal
crystal semiconductor
semiconductor base
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7258275A
Other languages
English (en)
Inventor
Osamu Takayama
Kazuo Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7258275A priority Critical patent/JPS51148355A/ja
Publication of JPS51148355A publication Critical patent/JPS51148355A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP7258275A 1975-06-14 1975-06-14 Single crystal semiconductor base plate Pending JPS51148355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7258275A JPS51148355A (en) 1975-06-14 1975-06-14 Single crystal semiconductor base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7258275A JPS51148355A (en) 1975-06-14 1975-06-14 Single crystal semiconductor base plate

Publications (1)

Publication Number Publication Date
JPS51148355A true JPS51148355A (en) 1976-12-20

Family

ID=13493503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7258275A Pending JPS51148355A (en) 1975-06-14 1975-06-14 Single crystal semiconductor base plate

Country Status (1)

Country Link
JP (1) JPS51148355A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPS5681934A (en) * 1979-12-10 1981-07-04 Hitachi Ltd Formation of semiconductor element
JPS586140A (ja) * 1981-07-03 1983-01-13 Nec Corp シリコンウエ−ハの製造方法
JPS6047427A (ja) * 1983-08-26 1985-03-14 Komatsu Denshi Kinzoku Kk Ｂｓｄを付与した半導体基板

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028753A (ja) * 1973-07-13 1975-03-24
JPS5051665A (ja) * 1973-09-07 1975-05-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028753A (ja) * 1973-07-13 1975-03-24
JPS5051665A (ja) * 1973-09-07 1975-05-08

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPS5681934A (en) * 1979-12-10 1981-07-04 Hitachi Ltd Formation of semiconductor element
JPS586140A (ja) * 1981-07-03 1983-01-13 Nec Corp シリコンウエ−ハの製造方法
JPS6047427A (ja) * 1983-08-26 1985-03-14 Komatsu Denshi Kinzoku Kk Ｂｓｄを付与した半導体基板

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