Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Fujitsu Ltd
Original Assignee
Fujitsu Ltd
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Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP7258975ApriorityCriticalpatent/JPS51148368A/en
Publication of JPS51148368ApublicationCriticalpatent/JPS51148368A/en
PURPOSE: To do selective etching of a pattern with certainty, good working and high accuracy by doing full face exposure from nearly the vertical direction.