JPS51148452A - Pattern defects detector - Google Patents

Pattern defects detector

Info

Publication number
JPS51148452A
JPS51148452A JP7222975A JP7222975A JPS51148452A JP S51148452 A JPS51148452 A JP S51148452A JP 7222975 A JP7222975 A JP 7222975A JP 7222975 A JP7222975 A JP 7222975A JP S51148452 A JPS51148452 A JP S51148452A
Authority
JP
Japan
Prior art keywords
pattern defects
defects detector
detector
leser
lpf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7222975A
Other languages
English (en)
Inventor
Masahito Nakajima
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7222975A priority Critical patent/JPS51148452A/ja
Publication of JPS51148452A publication Critical patent/JPS51148452A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7222975A 1975-06-14 1975-06-14 Pattern defects detector Pending JPS51148452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7222975A JPS51148452A (en) 1975-06-14 1975-06-14 Pattern defects detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7222975A JPS51148452A (en) 1975-06-14 1975-06-14 Pattern defects detector

Publications (1)

Publication Number Publication Date
JPS51148452A true JPS51148452A (en) 1976-12-20

Family

ID=13483217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7222975A Pending JPS51148452A (en) 1975-06-14 1975-06-14 Pattern defects detector

Country Status (1)

Country Link
JP (1) JPS51148452A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876707A (ja) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd ナイフマ−ク検出装置のナイフマ−ク検出回路

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876707A (ja) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd ナイフマ−ク検出装置のナイフマ−ク検出回路

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