JPS5120783A - Kinitsuna cvd makuno keiseiho - Google Patents

Kinitsuna cvd makuno keiseiho

Info

Publication number
JPS5120783A
JPS5120783A JP9234874A JP9234874A JPS5120783A JP S5120783 A JPS5120783 A JP S5120783A JP 9234874 A JP9234874 A JP 9234874A JP 9234874 A JP9234874 A JP 9234874A JP S5120783 A JPS5120783 A JP S5120783A
Authority
JP
Japan
Prior art keywords
makuno
kinitsuna
keiseiho
cvd
makuno keiseiho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9234874A
Other languages
Japanese (ja)
Inventor
Yasuo Tsukuda
Yasuo Suganuma
Katsuyuki Imoto
Akikazu Toda
Masao Sumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9234874A priority Critical patent/JPS5120783A/en
Publication of JPS5120783A publication Critical patent/JPS5120783A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9234874A 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho Pending JPS5120783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9234874A JPS5120783A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9234874A JPS5120783A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Publications (1)

Publication Number Publication Date
JPS5120783A true JPS5120783A (en) 1976-02-19

Family

ID=14051884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9234874A Pending JPS5120783A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Country Status (1)

Country Link
JP (1) JPS5120783A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221230A (en) * 1975-08-13 1977-02-17 Kogyo Gijutsuin Gaseous phase plating method onto inner surface of tubular body
CN104073779A (en) * 2014-06-20 2014-10-01 昆明学院 Organic vapour deposition device and organic vapour deposition method for preparing semiconductor nano material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221230A (en) * 1975-08-13 1977-02-17 Kogyo Gijutsuin Gaseous phase plating method onto inner surface of tubular body
CN104073779A (en) * 2014-06-20 2014-10-01 昆明学院 Organic vapour deposition device and organic vapour deposition method for preparing semiconductor nano material

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