JPS5120785A - Cvd makunokeiseihoho - Google Patents

Cvd makunokeiseihoho

Info

Publication number
JPS5120785A
JPS5120785A JP9235074A JP9235074A JPS5120785A JP S5120785 A JPS5120785 A JP S5120785A JP 9235074 A JP9235074 A JP 9235074A JP 9235074 A JP9235074 A JP 9235074A JP S5120785 A JPS5120785 A JP S5120785A
Authority
JP
Japan
Prior art keywords
makunokeiseihoho
cvd
cvd makunokeiseihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9235074A
Other languages
Japanese (ja)
Inventor
Yasuo Tsukuda
Yasuo Suganuma
Katsuyuki Imoto
Akikazu Toda
Masao Sumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9235074A priority Critical patent/JPS5120785A/en
Publication of JPS5120785A publication Critical patent/JPS5120785A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9235074A 1974-08-14 1974-08-14 Cvd makunokeiseihoho Pending JPS5120785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9235074A JPS5120785A (en) 1974-08-14 1974-08-14 Cvd makunokeiseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9235074A JPS5120785A (en) 1974-08-14 1974-08-14 Cvd makunokeiseihoho

Publications (1)

Publication Number Publication Date
JPS5120785A true JPS5120785A (en) 1976-02-19

Family

ID=14051943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9235074A Pending JPS5120785A (en) 1974-08-14 1974-08-14 Cvd makunokeiseihoho

Country Status (1)

Country Link
JP (1) JPS5120785A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010163663A (en) * 2009-01-16 2010-07-29 Nihon Ceratec Co Ltd Air-open-type cvd apparatus, and method for manufacturing metal oxide film
CN102337520A (en) * 2011-09-22 2012-02-01 中国航天科技集团公司第五研究院第五一○研究所 Method for plating thin film on inner wall of slender pipeline

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010163663A (en) * 2009-01-16 2010-07-29 Nihon Ceratec Co Ltd Air-open-type cvd apparatus, and method for manufacturing metal oxide film
CN102337520A (en) * 2011-09-22 2012-02-01 中国航天科技集团公司第五研究院第五一○研究所 Method for plating thin film on inner wall of slender pipeline

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