JPS5120784A - Kinitsuna cvd makuno keiseiho - Google Patents

Kinitsuna cvd makuno keiseiho

Info

Publication number
JPS5120784A
JPS5120784A JP9234974A JP9234974A JPS5120784A JP S5120784 A JPS5120784 A JP S5120784A JP 9234974 A JP9234974 A JP 9234974A JP 9234974 A JP9234974 A JP 9234974A JP S5120784 A JPS5120784 A JP S5120784A
Authority
JP
Japan
Prior art keywords
makuno
kinitsuna
keiseiho
cvd
makuno keiseiho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9234974A
Other languages
Japanese (ja)
Inventor
Yasuo Tsukuda
Katsuyuki Imoto
Yasuo Suganuma
Akikazu Toda
Masao Sumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9234974A priority Critical patent/JPS5120784A/en
Publication of JPS5120784A publication Critical patent/JPS5120784A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9234974A 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho Pending JPS5120784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9234974A JPS5120784A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9234974A JPS5120784A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Publications (1)

Publication Number Publication Date
JPS5120784A true JPS5120784A (en) 1976-02-19

Family

ID=14051914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9234974A Pending JPS5120784A (en) 1974-08-14 1974-08-14 Kinitsuna cvd makuno keiseiho

Country Status (1)

Country Link
JP (1) JPS5120784A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4649024A (en) * 1983-06-29 1987-03-10 Stauffer Chemical Company Method for forming evaporated pnictide and alkali metal polypnictide films

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4649024A (en) * 1983-06-29 1987-03-10 Stauffer Chemical Company Method for forming evaporated pnictide and alkali metal polypnictide films

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