JPS5137565A - Yokogatakakusanro - Google Patents

Yokogatakakusanro

Info

Publication number
JPS5137565A
JPS5137565A JP11052474A JP11052474A JPS5137565A JP S5137565 A JPS5137565 A JP S5137565A JP 11052474 A JP11052474 A JP 11052474A JP 11052474 A JP11052474 A JP 11052474A JP S5137565 A JPS5137565 A JP S5137565A
Authority
JP
Japan
Prior art keywords
gatakakusanro
yoko
yoko gatakakusanro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11052474A
Other languages
English (en)
Other versions
JPS533892B2 (ja
Inventor
Masami Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11052474A priority Critical patent/JPS5137565A/ja
Publication of JPS5137565A publication Critical patent/JPS5137565A/ja
Publication of JPS533892B2 publication Critical patent/JPS533892B2/ja
Granted legal-status Critical Current

Links

JP11052474A 1974-09-27 1974-09-27 Yokogatakakusanro Granted JPS5137565A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11052474A JPS5137565A (ja) 1974-09-27 1974-09-27 Yokogatakakusanro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11052474A JPS5137565A (ja) 1974-09-27 1974-09-27 Yokogatakakusanro

Publications (2)

Publication Number Publication Date
JPS5137565A true JPS5137565A (ja) 1976-03-29
JPS533892B2 JPS533892B2 (ja) 1978-02-10

Family

ID=14537974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11052474A Granted JPS5137565A (ja) 1974-09-27 1974-09-27 Yokogatakakusanro

Country Status (1)

Country Link
JP (1) JPS5137565A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871620A (ja) * 1981-10-23 1983-04-28 Nec Corp 半導体拡散法
JPS59128158A (ja) * 1983-01-10 1984-07-24 Shin Osaka Zoki Kk 折丁結束前処理装置
JPS6079715A (ja) * 1983-10-06 1985-05-07 Rohm Co Ltd 拡散炉

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871620A (ja) * 1981-10-23 1983-04-28 Nec Corp 半導体拡散法
JPS59128158A (ja) * 1983-01-10 1984-07-24 Shin Osaka Zoki Kk 折丁結束前処理装置
JPS6079715A (ja) * 1983-10-06 1985-05-07 Rohm Co Ltd 拡散炉

Also Published As

Publication number Publication date
JPS533892B2 (ja) 1978-02-10

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