JPS533892B2 - - Google Patents
Info
- Publication number
- JPS533892B2 JPS533892B2 JP11052474A JP11052474A JPS533892B2 JP S533892 B2 JPS533892 B2 JP S533892B2 JP 11052474 A JP11052474 A JP 11052474A JP 11052474 A JP11052474 A JP 11052474A JP S533892 B2 JPS533892 B2 JP S533892B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11052474A JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11052474A JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5137565A JPS5137565A (ja) | 1976-03-29 |
| JPS533892B2 true JPS533892B2 (ja) | 1978-02-10 |
Family
ID=14537974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11052474A Granted JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5137565A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5871620A (ja) * | 1981-10-23 | 1983-04-28 | Nec Corp | 半導体拡散法 |
| JPS59128158A (ja) * | 1983-01-10 | 1984-07-24 | Shin Osaka Zoki Kk | 折丁結束前処理装置 |
| JPS6079715A (ja) * | 1983-10-06 | 1985-05-07 | Rohm Co Ltd | 拡散炉 |
-
1974
- 1974-09-27 JP JP11052474A patent/JPS5137565A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5137565A (ja) | 1976-03-29 |