JPS52101975A - Formation of included end face of thin-film layer - Google Patents

Formation of included end face of thin-film layer

Info

Publication number
JPS52101975A
JPS52101975A JP1868576A JP1868576A JPS52101975A JP S52101975 A JPS52101975 A JP S52101975A JP 1868576 A JP1868576 A JP 1868576A JP 1868576 A JP1868576 A JP 1868576A JP S52101975 A JPS52101975 A JP S52101975A
Authority
JP
Japan
Prior art keywords
film layer
thin
face
formation
included end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1868576A
Other languages
Japanese (ja)
Inventor
Tsutomu Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1868576A priority Critical patent/JPS52101975A/en
Publication of JPS52101975A publication Critical patent/JPS52101975A/en
Pending legal-status Critical Current

Links

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To form a required slope on the end face of a thin-film layer-in order to prevent the wiring on the thin film layer from being "step-cut".
COPYRIGHT: (C)1977,JPO&Japio
JP1868576A 1976-02-23 1976-02-23 Formation of included end face of thin-film layer Pending JPS52101975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1868576A JPS52101975A (en) 1976-02-23 1976-02-23 Formation of included end face of thin-film layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1868576A JPS52101975A (en) 1976-02-23 1976-02-23 Formation of included end face of thin-film layer

Publications (1)

Publication Number Publication Date
JPS52101975A true JPS52101975A (en) 1977-08-26

Family

ID=11978455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1868576A Pending JPS52101975A (en) 1976-02-23 1976-02-23 Formation of included end face of thin-film layer

Country Status (1)

Country Link
JP (1) JPS52101975A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497523A (en) * 1990-08-15 1992-03-30 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497523A (en) * 1990-08-15 1992-03-30 Nec Corp Manufacture of semiconductor device

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