JPS5378168A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5378168A
JPS5378168A JP15335276A JP15335276A JPS5378168A JP S5378168 A JPS5378168 A JP S5378168A JP 15335276 A JP15335276 A JP 15335276A JP 15335276 A JP15335276 A JP 15335276A JP S5378168 A JPS5378168 A JP S5378168A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
acid
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15335276A
Other languages
Japanese (ja)
Inventor
Kenji Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15335276A priority Critical patent/JPS5378168A/en
Publication of JPS5378168A publication Critical patent/JPS5378168A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To prevent the crack at the edge of an acid-proof film by forming the substance layer to be oxidized onto the acid-proof insulating film at the time of forming a relatively-thick oxidized film.
COPYRIGHT: (C)1978,JPO&Japio
JP15335276A 1976-12-22 1976-12-22 Manufacture of semiconductor device Pending JPS5378168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15335276A JPS5378168A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15335276A JPS5378168A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5378168A true JPS5378168A (en) 1978-07-11

Family

ID=15560578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15335276A Pending JPS5378168A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5378168A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136123A (en) * 1991-11-15 1993-06-01 Sharp Corp Element isolation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136123A (en) * 1991-11-15 1993-06-01 Sharp Corp Element isolation method

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