JPS5210866A - Process for production of compound thin film - Google Patents

Process for production of compound thin film

Info

Publication number
JPS5210866A
JPS5210866A JP50086844A JP8684475A JPS5210866A JP S5210866 A JPS5210866 A JP S5210866A JP 50086844 A JP50086844 A JP 50086844A JP 8684475 A JP8684475 A JP 8684475A JP S5210866 A JPS5210866 A JP S5210866A
Authority
JP
Japan
Prior art keywords
thin film
compound thin
production
react
variations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50086844A
Other languages
Japanese (ja)
Inventor
Yasuhiro Shimizu
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50086844A priority Critical patent/JPS5210866A/en
Publication of JPS5210866A publication Critical patent/JPS5210866A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A process for forming a compound thin film without having variations in characteristics, by allowing reactive gas in an activating state to react with the evaporating substance from a vapor source in a vacuum vessel.
JP50086844A 1975-07-15 1975-07-15 Process for production of compound thin film Pending JPS5210866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50086844A JPS5210866A (en) 1975-07-15 1975-07-15 Process for production of compound thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50086844A JPS5210866A (en) 1975-07-15 1975-07-15 Process for production of compound thin film

Publications (1)

Publication Number Publication Date
JPS5210866A true JPS5210866A (en) 1977-01-27

Family

ID=13898108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50086844A Pending JPS5210866A (en) 1975-07-15 1975-07-15 Process for production of compound thin film

Country Status (1)

Country Link
JP (1) JPS5210866A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5663821A (en) * 1979-10-31 1981-05-30 Toko Inc Manufacture of zinc oxide film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5663821A (en) * 1979-10-31 1981-05-30 Toko Inc Manufacture of zinc oxide film

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